Abstract: A novel onium salt of formula (1) and a chemically amplified resist composition comprising the same as a PAG are provided. When processed by photolithography using KrF or ArF excimer laser, EB or EUV, the resist composition has a high sensitivity and reduced acid diffusion and is improved in exposure latitude, MEF, and LWR.

Abstract: A surface treatment composition and methods for improving adhesion of an organic layer on a titanium-containing hardmask includes forming a self-assembled monolayer on a surface of the titanium-containing hardmask prior to depositing the organic layer. The self-assembled monolayer is formed from a blend of alkyl phosphonic acids of formula (I): X(CH2)nPOOH2 (I), wherein n is 6 to 16 and X is either CH3 or COOH, wherein a ratio of the methyl terminated (CH3) alkyl phosphonic acid to the carboxyl terminated (COOH) alkyl phosphonic acid ranges from 25:75 to 75:25.

Abstract: Disclosed are a compound represented by formula (I), a resin including a structural unit derived from the compound, and a resist composition: wherein R1 represents an alkyl group which may have a halogen atom, a hydrogen atom or a halogen atom; A1 represents a single bond or *-A2-CO—O—; A2 and A3 represent an alkanediyl group; W represents a divalent monocyclic saturated alicyclic hydrocarbon group; R2 and R3 each represent a hydrogen atom or a hydrocarbon group which may have a fluorine atom, etc., R4 represents a hydrogen atom, —CH2— in the group may be replaced by —O—, —S—, etc., R2 and R3, or R2, R3 and R4 may be bonded each other to form a ring which may have a fluorine atom or an alkyl group.

Abstract: A sol of inorganic oxide particles is stably dispersed in a hydrophilic organic solvent containing a hydrocarbon such as a paraffinic hydrocarbon or a naphthenic hydrocarbon. The sol contains a dispersion medium containing an organic solvent containing a C6-18 paraffinic hydrocarbon, a C6-18 naphthenic hydrocarbon, or a mixture of these, a C4-8 alcohol having a carbon chain with a carbon-carbon bond in the molecule in an amount of 0.1 to 5% by mass in the entire dispersion medium, and inorganic oxide particles having an average particle diameter of 5 to 200 nm as measured by dynamic light scattering as a dispersoid, wherein the inorganic oxide particles contain a C1-3 alkyl group bonded to a silicon atom and a C4-18 alkyl group. The paraffinic hydrocarbon is a normal paraffinic hydrocarbon or an isoparaffinic hydrocarbon. The naphthenic hydrocarbon is a saturated aliphatic cyclic hydrocarbon substitutable with a C1-10 alkyl group.

Abstract: A film-forming powder containing a rare earth oxyfluoride has an average particle size D50 of 0.6-15 ?m, a total volume of ?10 ?m pores of 0.51-1.5 cm3/g as measured by mercury porosimetry, and a BET surface area of 3-50 m2/g is suitable for forming a dense film in high yields or deposition rates and high productivity. The film-forming powder having a greater pore volume can be prepared by forming a rare earth ammonium fluoride complex salt on surfaces of rare earth oxide particles to provide precursor particles, and heat treating the precursor particles at a temperature of 350 to 700° C.

Abstract: Methods and systems are provided for a rebalancing reactor of a flow battery system. In one example, a pH of a battery electrolyte may be maintained by the rebalancing reactor by applying a negative potential to a catalyst bed of the rebalancing reactor. A performance of the rebalancing reactor may further be maintained by treating the catalyst bed with deionized water.

Abstract: An all-solid-state battery, wherein on a first side surface of an all-solid-state battery laminate, a first electrode current collector layer includes a first electrode current collector protruding part, which protrudes in a surface direction, and a second electrode current collector layer includes a second electrode current collector protruding part, which protrudes in a surface direction, a surface direction area of a second electrode-solid electrolyte laminate is larger than a surface direction area of a first electrode laminate, the first electrode laminate is laminated on the inside of the second electrode-solid electrolyte laminate when viewed from the lamination direction, and on the first side surface, an edge of the second electrode-solid electrolyte laminate in the surface direction is at least partially covered with a resin layer so that the first electrode current collector protruding part does not directly contact the edge in the surface direction of the second electrode-solid electrolyte laminat

Abstract: A nonaqueous electrolyte battery includes: a positive electrode containing a positive electrode active material made of a compound represented by a compositional formula of LiMn1-x-yFexAyPO4 (wherein A is at least one selected from the group consisting of Mg, Ca, Al, Ti, Zn and Zr, 0?x?0.3, and 0?y?0.1); a negative electrode containing a negative electrode active material made from a titanium composite oxide; and a nonaqueous electrolyte, wherein a ratio (IP—F/IP—O) of a peak intensity (IP—F) of a P—F bond to a peak intensity (IP—O) of a P—O bond on the surface of the positive electrode, which are measured by X-ray photoelectron spectroscopic analysis, is 0.4 or more and 0.8 or less.

Abstract: An electrode including an electrode active material including lithium (Li) and a polymer layer coating at least a portion of the electrode active material is provided. The polymer layer includes a polymerization product of a monomer having Formula I: where R1 and R2 are independently an aryl or a branched or unbranched C1-C10 alkyl and X1 and X2 are independently chlorine (Cl), bromine (Br), or iodine (I).

Abstract: A fuel cell recovery control system and method are provided to supply hydrogen to the cathode of a fuel cell stack to remove an oxide film formed on a platinum surface of the cathode. The performance of the fuel cell stack is recovered in accordance with the oxide film removal. In addition, electric power generated during the performance recovery of the fuel cell stack is consumed in an inverter and, as such, overcharge of a battery is prevented.

Abstract: A fuel cell system includes a fuel cell, an anode gas supply system, an anode gas circulatory system, a cathode gas supply-discharge system, a gas-liquid discharge passage, a gas-liquid discharge valve configured to open and close the gas-liquid discharge passage, a flow-rate acquisition portion, and a controlling portion. After the controlling portion instructs the gas-liquid discharge valve to be opened, the controlling portion executes a normal-abnormality determination such that, when a discharge-gas flow rate of anode gas is a predetermined normal reference value or more, the controlling portion determines that the gas-liquid discharge valve is opened normally, and when the discharge-gas flow rate is lower than the normal reference value, the controlling portion determines that the gas-liquid discharge valve is not opened normally.

Abstract: A positive resist composition comprising a base polymer comprising recurring units (a) having the structure of an ammonium salt of N-carbonylsulfonamide having an iodized aromatic ring, and recurring units (b1) having an acid labile group-substituted carboxyl group and/or recurring units (b2) having an acid labile group-substituted phenolic hydroxyl group exhibits a high sensitivity, high resolution, low edge roughness and dimensional uniformity, and forms a pattern of good profile after exposure and development.

Abstract: A salt represented by formula (I): wherein R1 and R2 each independently represent a hydroxy group, —O—R10, —O—CO—O—R10 or —O-L1-CO—O—R10; L1 represents an alkanediyl group having 1 to 6 carbon atoms; R4, R5, R7 and R8 each independently represent a halogen atom, an alkyl fluoride group having 1 to 12 carbon atoms or a hydrocarbon group having 1 to 18 carbon atoms, the hydrocarbon group may have a substituent, and —CH2— included in the hydrocarbon group may be replaced by —O—, —CO—, —S— or —SO2—; R10 represents an acid-labile group; X1 and X2 each independently represent an oxygen atom or a sulfur atom; m1 represents an integer of 1 to 5, m2 and m8 represent an integer of 0 to 5, m4, m5 and m7 represent an integer of 0 to 4; and AI? represents an organic anion.

Abstract: Provided are a photosensitive resin composition including: a binder; a polymerizable monomer; a polymerization initiator; a pigment; and a solvent, in which the polymerizable monomer includes a difunctional polymerizable monomer having a molecular weight equal to or smaller than 500, and a content of the difunctional polymerizable monomer having a molecular weight equal to or smaller than 500 is equal to or greater than 50% by mass with respect to a total mass of the polymerizable monomer, a transfer film, a decorative pattern, and a touch panel.

Abstract: A positive resist composition comprising a base polymer comprising recurring units having a nitrogen-containing tertiary ester structure exhibits a high sensitivity, high resolution, low edge roughness (LER, LWR) and small size variation, and forms a pattern of good profile after exposure and development.

Abstract: Disclosed is a resin including a structural unit represented by formula (I) and a structural unit represented by formula (a2-A), and a resist composition: wherein R1 represents a hydrogen atom or a methyl group; L1 and L2 each represent —O— or —S—; s1 represents an integer of 1 to 3; s2 represents an integer of 0 to 3; Ra50 represents a hydrogen atom, a halogen atom, or an alkyl group which may have a halogen atom; Ra51 represents a halogen atom, a hydroxy group, an alkyl group, an alkoxy group, an alkylcarbonyl group or the like; Aa50 represents a single bond or *—Xa51-(Aa52-Xa52)nb—; Aa52 represents an alkanediyl group; Xa51 and Xa52 each represent —O—, —CO—O— or —O—CO—; nb represents 0 or 1; and mb represents an integer of 0 to 4.

Abstract: Provided is an anti-reflective hardmask composition including: (a) a polymer composed of an indolocarbazole represented by the following Chemical Formula 1 or a polymeric blend containing the same; and (b) an organic solvent.

Abstract: The present invention relates to a positive-type photosensitive resin composition and a cured film prepared therefrom. The positive-type photosensitive resin composition comprises an acrylic copolymer having a dissolution rate to a developer in a specific range and a compound containing a phenolic hydroxyl group, so that it is possible to attain a high contrast and a high sensitivity pattern when a cured film is formed. Further, it is possible to further enhance the adhesiveness of a pattern when a half-tone, as well as a full-tone, is formed.

Abstract: Provided herein are perfluoro copolymers of a perfluoro dioxole monomer, a perfluoro dioxane monomer, and an optional perhalo monomer. Methods of making the perfluoro copolymers and methods of using the perfluoro copolymers are also disclosed.

Abstract: An electrolyte solution containing a solvent. The solvent contains a compound (1) represented by the following formula (1), wherein Ra, Rb, Rc, and Rd are the same as or different from each other, and are each —H, —F, —CH3, or —CF3; at least one of Ra, Rb, Rc, or Rd is —F or —CF3; and at least one of Ra, Rb, Rc, or Rd is —CH3, and a compound (2) represented by the following formula (2), wherein Re is a C1-C5 linear or branched alkyl or alkoxy group optionally containing an ether bond; Rf is a C1-C5 linear or branched alkyl group optionally containing an ether bond; and at least one of Re or Rf contains a fluorine atom. Also disclosed is an electrochemical device including the electrolyte solution, a lithium-ion secondary battery including the electrolyte solution and a module including the electrochemical device.