Abstract: An optical semiconductor wafer inspection system and a method thereof are provided for classifying and inspecting defects such as scratches, voids and particles produced in a flattening process by a polishing or grinding technique used for semiconductor manufacturing. The present invention is an optical semiconductor wafer inspection system and a method thereof characterized by obliquely illuminating a scratch, void or particle produced on the surface of a polished or ground insulating film at substantially the same velocity of light, detecting scattered light at the time of oblique illumination from the surface of an inspection target at different angles and thereby classifying the scratch, void or particle.

Abstract: An apparatus for the electromagnetic spectrum or optical analysis of a material. The apparatus comprising a measuring probe having a housing with at least one radiation or light measuring element, a measuring window and with at least one detection element for the analysis. The measuring probe is formed and guided displaceably in the axial direction in such a way that at least part of the housing in which the measuring window is located enters through an opening in which the material to be analyzed is located for the analysis. The at least one measuring window is arranged in at least one subregion of the circumferential wall of the housing. A sealing cap is located between a front end face of the housing and the measuring window arranged in the circumferential wall and consequently covers the opening in a retracted position of the measuring probe.

Abstract: A diameter measuring instrument that comprises a straight-edge and two legs or jaws, wherewith the distance between the legs can be read-off. The invention is characterized in that the straightedge (2) is provided with a leg (3) which is fixed in relation to the straightedge and a leg (4) which is movable relative to the straightedge, or alternatively with two legs that are movable relative to the straightedge; in that each leg (3, 4) includes a laser (5, 6) which is designed to emit a visible laser beam (7, 8) in a direction that coincides with the length direction of respective legs (3, 4); and in that the laser beams (7, 8) are parallel to one another.

Abstract: Housing (1) for an optical measurement device, in particular for yarn monitoring, and a method for producing such housing, from a plastics material by prototyping and receiving components of the measurement device such as a light source, sensor or lens. According to the invention, a glass insert (3) is arranged on the housing (1) and is used for the protection of the components from environmental influences, and the glass insert (3) is fitted into the housing (1) by means of the shrinkage occurring during prototyping in such a way that the housing.

Abstract: Apparatus for detecting fuel in oil includes an excitation light source in optical communication with an oil sample for exposing the oil sample to excitation light in order to excite the oil sample from a non-excited state to an excited state and a spectrally selective device in optical communication with the oil sample for detecting light emitted from the oil sample as the oil sample returns from the excited state to a non-excited state to produce spectral indicia that can be analyzed to determine the presence of fuel in the oil sample. A method of detecting fuel in oil includes the steps of exposing a oil sample to excitation light in order to excite the oil sample from a non-excited state to an excited state, as the oil sample returns from the excited state to a non-excited state, detecting light emitted from the oil sample to produce spectral indicia; and analyzing the spectral indicia to determine the presence of fuel in the oil sample.

Abstract: A three dimensional (3D) measuring apparatus and method are provided. The 3D image measuring apparatus includes a stage, a projection portion, and an imaging portion. The projection portion includes first and second lights, first and second lattices, and first and second projection lenses. The imaging portion includes an imaging lens and a camera. The projection portion further includes a movement instrument which controls the first and the second lattices through a predetermined number of movement actions during operation of the measuring apparatus.

Abstract: In a spectrophotometer for measuring transmitted light of a trace liquid sample, four sample holders 12 are provided on a disk-like sample plate 11 while spaced apart by 90 degrees. The sample plate 11 is driven to rotate so that each of the sample holders 12 is sequentially moved to a sample supply position U1, a measuring position U2, a wiping position U3 and a waiting position U4. At the sample supply position U1, a trace amount of the liquid sample is dropped into a groove of the sample holder 12. Then at the measuring position U2, a window plate 22 is lowered onto the groove so as to determine the optical path length. Next, measurement of the transmitted light is performed. Further, while the sample holder 12 moves from the measuring position U2 to the waiting position U4, the liquid sample is absorbed and removed by contact with a cleaning pad 26. The liquid sample attached to the window plate 22 is wiped out by another pad.

Abstract: An apparatus for obtaining reflectance data of an object includes a diffuser having a surface. The apparatus includes a mapping portion that effects a mapping between a light field at the object's surface and a light field at the diffuser surface for BRDF capture of the object. A method for obtaining reflectance data usable to determine a plurality of values of the BRDF of an object. The method includes the steps of illuminating the object. There is the step of effecting a mapping between a light field at the object's surface and a light field at a diffuser surface for BRDF capture of the object with a mapping portion. An apparatus and a method for measuring an 8D reflectance field of an object or a 3D object.

Abstract: An inspection system can support operation in multiple states. For instance, when inspecting an article, such as a semiconductor wafer, the tool can switch between imaging multiple locations using respective detectors to another operating state wherein multiple detectors operating in multiple imaging modes inspect a single location. An inspection system may combine the use of multiple detectors for multiple locations and the use of multiple viewing angles or modes for the same locations and thereby achieve high throughput. The different imaging modes can comprise, for example, different collection angles, polarizations, different spectral bands, different attenuations, different focal positions relative to the wafer, and other different types of imaging.

Abstract: Disclosed is an aperture variable inspection optical system including a variable aperture unit 13 having a polygonal light transparent section and light collecting systems 12a, 12b for forming an irradiation spot U of light passing through the variable aperture unit 13 at the position of a sample S. The variable aperture unit 13 is capable of changing the shape/size of the polygon. The size of the irradiation spot U can be changed without rearranging the aperture unit.

Abstract: A method of inspecting a photomask, the method comprising, inspecting at least a portion of the photomask to provide a location of defects having with a first resolution, determining at least one defect region in the location of the defects, the defect region having a defect therein, and imaging the at least one defect region to provide a defect image having a second resolution that is finer than the first resolution.

Abstract: An optical cell and a method of operating an optical cell comprising employing a first mirror comprising a first hole therein at approximately a center of the first mirror and through which laser light enters the cell, employing a second mirror comprising a second hole therein at approximately a center of the second mirror and through which laser light exits the cell, and forming a Lissajous pattern of spots on the mirrors by repeated reflection of laser light entering the cell.

Abstract: A method for obtaining the area of a missing portion of an object under inspection with a borescope includes aligning the borescope with the object under inspection, extrapolating the missing edges of the missing portion and calculating the missing portion area using the extrapolated missing edges and a defined remaining edge of the missing portion.

Abstract: A fuel property sensor is provided with three bypass passages and a measure passage. The measure passage is located inside of a closed loop which is comprised of common tangential lines of adjacent bypass passages and a part of profile line of each bypass passage in a cross section perpendicular to the measure passage. Even if the fuel property sensor is rotated around the axis of a fuel pipe in assembling the fuel property sensor to the fuel pipe, at least one of two bypass passages is always located above the measure passage in a vertical direction. Hence, bubbles included in the fuel are restricted from flowing into the measure passage. The fuel property sensor can detect the concentration of ethanol contained in the fuel with high accuracy.

Abstract: There is provided a surface plasmon resonance imaging sensor capable of performing absolute calibration comprising: a transparent substrate; a first prism and a second prism formed at one surface of the substrate and symmetrically positioned with reference to the center axis of the substrate; an optical system for providing light to the first and second prisms; and a light receiving part for detecting the light reflected from the substrate, wherein a surface plasmon resonance (SPR) angle change of an object to be measured by the first prism is measured, and a refractive index change on each pixel of the object is obtained as a two-dimensional difference image by the second prism.

Abstract: Disclosed are an apparatus for inspecting defect of a rubbing cloth and a rubbing apparatus with the same. The apparatus for inspecting defect of the rubbing cloth includes a housing surrounding the periphery of the rubbing cloth, a transfer unit connected to the upper portion of the housing for transferring the housing along a length direction of a rubbing roll, an illumination unit installed at one side in the housing for illuminating the rubbing cloth, and a camera unit installed at the other side in the housing to correspond to the illumination unit on the basis of the rubbing roll. The apparatus for inspecting defect of the rubbing cloth can rapidly and precisely detect the defect of the rubbing cloth by using the illumination unit and the camera unit.

Abstract: The sample holder includes support having a thickness and an aperture through the thickness of the support. A tilt mechanism is connected to the support for controlled tilting of the support, and the aperture through the support is configured to have a diameter that increases in a direction through the thickness of the support. This arrangement enables a light beam to pass through the same given area of the sample, irrespective of whether the sample is held perpendicular to the beam or held at a tilted position relative to the beam. In one embodiment, the holder includes an efficient magnetic clamp mechanism for securing the sample to the holder. The holder compactly integrates with tilting mechanisms a sample rotation mechanism.

Abstract: Provided are a gas sensing apparatus and a gas sensing method using the apparatus. The gas sensing apparatus includes a detection chamber, a light source, a light sensor, a gas source, and a controller. The light source is disposed at one end of the detection chamber, and a light sensor is disposed at the other end of the detection chamber. The gas source provides gas to the detection chamber. The controller controls the light source and the light sensor. The light source includes a laser supplying laser light, and a light scanner reflecting and scanning the laser light in the detection chamber. The controller includes a phase sensitive detector electrically connected to the light sensor.

Abstract: The present invention relates to a method and system for measuring articles made of a material that is difficult to measure, such as glass. In the system, an elastic film (19) is arranged on top of an article (110). A number of measurement points have been arranged on the film that are imaged using a machine vision system. The location of the measurement points imaged are calculated with respect to one another, and based on this, the shape of the article can be measured.

Abstract: A method and a device for detecting object properties using electro-optically modulated surface plasmon resonance (SPR) based on phase detection is disclosed. In the case of a surface plasmon resonance sensing device according to the present invention, the voltage is applied on the sensing device made of an electro-optic material to modulate the surface plasmon resonance condition by varying the wavevector of the incident lightwave. The relation between the phase of output optical wave and the applied voltage is measured, and the solution concentration or the material property is obtained by using the slope of a regression straight line of this relations. The invention can be used in the experimental arrangements of the attenuated-total-reflection (ATR) structure and the optical waveguide structure, and has advantages of high sensitivity, high stability, small bulk, low equipment cost, etc.