Patents Examined by Christine Enad
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Patent number: 11600678Abstract: An organic light-emitting display device comprises a first thin-film transistor disposed on a substrate; and a second thin-film transistor disposed on the substrate and spaced apart from the first thin-film transistor. The first thin-film transistor comprises a first semiconductor layer, a first conductive layer disposed on the first semiconductor layer and that overlaps the first semiconductor layer, and a first insulating layer disposed between the first semiconductor layer and the first conductive layer. The second thin-film transistor comprises a second semiconductor layer, and a second conductive layer disposed on the second semiconductor layer and that overlaps the second semiconductor layer.Type: GrantFiled: May 4, 2021Date of Patent: March 7, 2023Assignee: SAMSUNG DISPLAY CO., LTD.Inventors: Woo Ho Jeong, Se Myung Kwon, Yoon Ho Kim, Seok Je Seong, Joon Hoo Choi
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Patent number: 11594446Abstract: A high resistivity single crystal semiconductor handle structure for use in the manufacture of SOI structure is provided. The handle structure comprises an intermediate semiconductor layer between the handle substrate and the buried oxide layer. The intermediate semiconductor layer comprises a polycrystalline, amorphous, nanocrystalline, or monocrystalline structure and comprises a material selected from the group consisting of Si1-xGex, Si1-xCx, Si1-x-yGexSny, Si1-x-y-zGexSnyCz, Ge1-xSnx, group IIIA-nitrides, semiconductor oxides, and any combination thereof.Type: GrantFiled: June 28, 2021Date of Patent: February 28, 2023Assignee: GlobalWafers Co., Ltd.Inventors: Igor Peidous, Srikanth Kommu, Gang Wang, Shawn George Thomas
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Patent number: 11588052Abstract: Sub-fin isolation schemes for gate-all-around (GAA) transistor devices are provided herein. In some cases, the sub-fin isolation schemes include forming one or more dielectric layers between each of the source/drain regions and the substrate. In some such cases, the one or more dielectric layers include material native to the gate sidewall spacers, for example, or other dielectric material. In other cases, the sub-fin isolation schemes include substrate modification that results in oppositely-type doped semiconductor material under each of the source/drain regions and in the sub-fin. The oppositely-type doped semiconductor material results in the interface between that material and each of the source/drain regions being a p-n or n-p junction to block the flow of carriers through the sub-fin. The various sub-fin isolation schemes described herein enable better short channel characteristics for GAA transistors (e.g.Type: GrantFiled: August 6, 2018Date of Patent: February 21, 2023Assignee: Intel CorporationInventors: Biswajeet Guha, William Hsu, Tahir Ghani
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Patent number: 11588041Abstract: A method for manufacturing a semiconductor device includes forming a gate trench over a semiconductor fin, the gate trench including an upper portion and a lower portion. The method includes sequentially forming one or more work function layers, a capping layer, and a glue layer over the gate trench. The glue layer includes a first sub-layer and a second sub-layer that have respective different etching rates with respect to an etching solution. The method includes removing the second sub-layer while leaving a first portion of the first sub-layer filled in the lower portion of the gate trench.Type: GrantFiled: October 14, 2020Date of Patent: February 21, 2023Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY LIMITEDInventors: Jian-Jou Lian, Tzu Ang Chiang, Ming-Hsi Yeh, Chun-Neng Lin, Po-Yuan Wang, Chieh-Wei Chen
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Patent number: 11581224Abstract: A method of forming a semiconductor transistor device. The method comprises forming a fin-shaped channel structure over a substrate and forming a first source/drain epitaxial structure and a second source/drain epitaxial structure on opposite endings of the fin structure. The method further comprises forming a metal gate structure surrounding the fin structure. The method further comprises flipping and partially removing the substrate to form a back-side capping trench while leaving a lower portion of the substrate along upper sidewalls of the first source/drain epitaxial structure and the second source/drain epitaxial structure as a protective spacer. The method further comprises forming a back-side dielectric cap in the back-side capping trench.Type: GrantFiled: October 12, 2020Date of Patent: February 14, 2023Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.Inventors: Huan-Chieh Su, Cheng-Chi Chuang, Chih-Hao Wang, Zhi-Chang Lin, Li-Zhen Yu
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Patent number: 11569365Abstract: A semiconductor device and a method for forming a semiconductor are provided. The semiconductor structure includes a gate structure. The gate structure includes a gate dielectric layer, a work function metal layer over the gate dielectric layer, and a plurality of barrier granules between the gate dielectric layer and the work function metal layer. At least two adjacent barrier granules of the plurality of barrier granules are separated from each other by a portion of the work function metal layer.Type: GrantFiled: February 24, 2021Date of Patent: January 31, 2023Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY LTD.Inventor: Chien-Hao Chen
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Patent number: 11563110Abstract: A method for forming a semiconductor structure is provided. The method includes forming a fin structure over a substrate and forming an isolation structure over the substrate. In addition, the fin structure is protruded from the isolation structure. The method further includes trimming the fin structure to a first width and forming a Ge-containing material covering the fin structure. The method further includes annealing the fin structure and the Ge-containing material to form a modified fin structure. The method also includes trimming the modified fin structure to a second width.Type: GrantFiled: January 19, 2021Date of Patent: January 24, 2023Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.Inventors: Yi-Yun Li, Tsai-Yu Huang, Huicheng Chang, Yee-Chia Yeo
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Patent number: 11562910Abstract: A semiconductor structure and a method for forming a semiconductor structure are provided. A sacrificial gate layer is removed to form a gate trench exposing a sacrificial dielectric layer. An ion implantation is performed to a portion of a substrate covered by the sacrificial dielectric layer in the gate trench. The sacrificial dielectric layer is removed to expose the substrate from the gate trench. An interfacial layer is formed over the substrate in the gate trench. A metal gate structure is formed over the interfacial layer in the gate trench.Type: GrantFiled: March 19, 2021Date of Patent: January 24, 2023Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY LTD.Inventors: I-Sheng Chen, Siao-Jing Li, Yi-Jing Li
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Patent number: 11557721Abstract: A device including a multi-layered structure that includes: a first layer that includes a first magnetic Heusler compound; a second layer that is non-magnetic at room temperature and includes both Ru and at least one other element E, wherein the composition of the second layer is represented by Ru1?xEx, with x being in the range from 0.45 to 0.55; and a third layer including a second magnetic Heusler compound. The multi-layered structure may overlay a substrate. The device may include a tunnel barrier overlying the multi-layered structure.Type: GrantFiled: February 12, 2021Date of Patent: January 17, 2023Assignees: International Business Machines CorporationInventors: Panagiotis Charilaos Filippou, Chirag Garg, Yari Ferrante, Stuart S. P. Parkin, Jaewoo Jeong, Mahesh G. Samant
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Patent number: 11557607Abstract: A semiconductor device includes a stacked structure including conductive layers and insulating layers alternately stacked with each other, and a channel layer passing through the stacked structure, wherein the channel layer is a single layer, the single layer including a first GIDL region, a cell region, and a second GIDL region, and the first GIDL region has a greater thickness than each of the cell region and the second GIDL region.Type: GrantFiled: July 30, 2021Date of Patent: January 17, 2023Assignee: SK hynix Inc.Inventor: Jin Ha Kim
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Patent number: 11552104Abstract: Disclosed herein are stacked transistors with dielectric between channel materials, as well as related methods and devices. In some embodiments, an integrated circuit structure may include stacked strata of transistors, wherein a dielectric material is between channel materials of adjacent strata, and the dielectric material is surrounded by a gate dielectric.Type: GrantFiled: February 19, 2019Date of Patent: January 10, 2023Assignee: Intel CorporationInventors: Aaron D. Lilak, Gilbert W. Dewey, Willy Rachmady, Rishabh Mehandru, Ehren Mannebach, Cheng-Ying Huang, Anh Phan, Patrick Morrow, Kimin Jun
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Patent number: 11538917Abstract: A semiconductor device includes a substrate and a gate structure. The gate structure is disposed on the substrate, and the gate structure includes a titanium nitride barrier layer and a titanium aluminide layer. The titanium aluminide layer is disposed on the titanium nitride barrier layer, and a thickness of the titanium aluminide layer ranges from twice a thickness of the titanium nitride barrier layer to three times the thickness of the titanium nitride barrier layer.Type: GrantFiled: June 22, 2021Date of Patent: December 27, 2022Assignee: UNITED MICROELECTRONICS CORP.Inventors: Hui-Hsin Hsu, Huan-Chi Ma, Chien-Wen Yu, Shih-Min Chou, Nien-Ting Ho, Ti-Bin Chen
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Patent number: 11538805Abstract: A structure includes a semiconductor substrate including a first semiconductor region and a second semiconductor region, a first transistor in the first semiconductor region, and a second transistor in the second semiconductor region. The first transistor includes a first gate dielectric over the first semiconductor region, a first work function layer over and contacting the first gate dielectric, and a first conductive region over the first work function layer. The second transistor includes a second gate dielectric over the second semiconductor region, a second work function layer over and contacting the second gate dielectric, wherein the first work function layer and the second work function layer have different work functions, and a second conductive region over the second work function layer.Type: GrantFiled: November 4, 2020Date of Patent: December 27, 2022Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.Inventors: Kuan-Chang Chiu, Chia-Ching Lee, Chien-Hao Chen, Hung-Chin Chung, Hsien-Ming Lee, Chi On Chui, Hsuan-Yu Tung, Chung-Chiang Wu
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Patent number: 11532666Abstract: A semiconductor device includes a substrate having a magnetic tunneling junction (MTJ) region and a logic region, a magnetic tunneling junction (MTJ) on the MTJ region, and a first metal interconnection on the MTJ. Preferably, a top view of the MTJ includes a circle, a top view of the first metal interconnection includes a flat oval overlapping the circle, and the MTJ includes a bottom electrode, a fixed layer, a free layer, a capping layer, and a top electrode.Type: GrantFiled: March 21, 2021Date of Patent: December 20, 2022Assignee: UNITED MICROELECTRONICS CORP.Inventors: Ting-Hsiang Huang, Yi-Chung Sheng, Sheng-Yuan Hsueh, Kuo-Hsing Lee, Chih-Kai Kang
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Patent number: 11532628Abstract: Improved methods for forming gate isolation structures between portions of gate electrodes and semiconductor devices formed by the same are disclosed. In an embodiment, a method includes forming a channel structure over a substrate; forming a first isolation structure extending in a direction parallel to the channel structure; forming a dummy gate structure over the channel structure and the first isolation structure; depositing a hard mask layer over the dummy gate structure; etching the hard mask layer to form a first opening through the hard mask layer over the first isolation structure; conformally depositing a first dielectric layer over the hard mask layer, in the first opening, and over the dummy gate structure; etching the first dielectric layer to extend the first opening and expose the dummy gate structure; and etching the dummy gate structure to extend the first opening and expose the first isolation structure.Type: GrantFiled: May 20, 2021Date of Patent: December 20, 2022Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.Inventors: Li-Fong Lin, Chung-Ting Ko, Wan Chen Hsieh, Tai-Chun Huang
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Metal oxide semiconductor field-effect transistor (MOSFET) devices and manufacturing methods thereof
Patent number: 11522064Abstract: Provided are metal oxide field-effect transistor (MOSFET) devices having a metal gate structure, in which a work function of the metal gate structure is uniform along a length direction of a channel, and manufacturing methods thereof. The MOSFET devices include a semiconductor substrate, an active area on the semiconductor substrate and extending in a first direction, and a gate structure on the semiconductor substrate. The gate structure extends across the active area in a second direction that traverses the first direction and comprises a high-k layer, a first metal layer, a work function control (WFC) layer, and a second metal layer, which are sequentially stacked on the active area. A lower surface of the WFC layer may be longer than a first interface between a lower surface of the first metal layer and an upper surface of the high-k layer in the first direction.Type: GrantFiled: March 19, 2021Date of Patent: December 6, 2022Assignee: Samsung Electronics Co., Ltd.Inventors: Sangjun Yun, Uihui Kwon, Seongnam Kim, Hyoshin Ahn -
Patent number: 11521969Abstract: A semiconductor device with an isolation structure and a method of fabricating the same are disclosed. The semiconductor device includes first and second fin structures disposed on a substrate and first and second pairs of gate structures disposed on the first and second fin structures. The first end surfaces of the first pair of gate structures face second end surfaces of the second pair of gate structure. The first and second end surfaces of the first and second pair of gate structures are in physical contact with first and second sidewalls of the isolation structure, respectively. The semiconductor device further includes an isolation structure interposed between the first and second pairs of gate structures. An aspect ratio of the isolation structure is smaller than a combined aspect ratio of the first pair of gate structures.Type: GrantFiled: July 23, 2020Date of Patent: December 6, 2022Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.Inventors: Chao-Shuo Chen, Chia-Der Chang, Yi-Jing Lee
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Patent number: 11522006Abstract: A light emitting stacked structure including a plurality of epitaxial sub-units disposed one over another, each of the epitaxial sub-units configured to emit different colored light, in which each epitaxial sub-unit has a light emitting area that overlaps one another, and at least one epitaxial sub-unit has an area different from the area of another epitaxial sub-unit.Type: GrantFiled: December 20, 2018Date of Patent: December 6, 2022Assignee: Seoul Viosys Co., Ltd.Inventors: Chung Hoon Lee, Jong Hyeon Chae, Seong Gyu Jang, Ho Joon Lee
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Patent number: 11521953Abstract: Described is a packaging technology to improve performance of an AI processing system. An IC package is provided which comprises: a substrate; a first die on the substrate, and a second die stacked over the first die. The first die includes memory and the second die includes computational logic. The first die comprises a ferroelectric RAM (FeRAM) having bit-cells. Each bit-cell comprises an access transistor and a capacitor including ferroelectric material. The access transistor is coupled to the ferroelectric material. The FeRAM can be FeDRAM or FeSRAM. The memory of the first die may store input data and weight factors. The computational logic of the second die is coupled to the memory of the first die. The second die is an inference die that applies fixed weights for a trained model to an input data to generate an output. In one example, the second die is a training die that enables learning of the weights.Type: GrantFiled: July 30, 2021Date of Patent: December 6, 2022Assignee: Kepler Computing Inc.Inventors: Sasikanth Manipatruni, Rajeev Kumar Dokania, Amrita Mathuriya, Ramamoorthy Ramesh
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Patent number: 11515423Abstract: A device includes a semiconductor substrate, a first fin arranged over the semiconductor substrate, and an isolation structure. The first fin includes an upper portion, a bottom portion, and an insulator layer between the upper portion and the bottom portion. A top surface of the insulator layer is wider than a bottom surface of the upper portion of the first fin. The isolation structure surrounds the bottom portion of the first fin.Type: GrantFiled: May 21, 2020Date of Patent: November 29, 2022Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.Inventors: Shu-Hao Kuo, Jung-Hao Chang, Chao-Hsien Huang, Li-Te Lin, Kuo-Cheng Ching