Patents Examined by Colleen E Snow
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Patent number: 11056342Abstract: A method of fabricating a semiconductor device includes forming a protective layer on a portion of the semiconductor body that is not to be silicided. The protective layer includes a silicon oxide layer and a silicon nitride layer over the silicon oxide layer. At least a portion of the silicon nitride layer of the protective layer is removed. A silicided portion of the semiconductor body is laterally spaced from the protective layer. The siliciding is performed by an ion sputtering in a plasma environment on both the silicided portion of the semiconductor body and the portion of the semiconductor body that is not to be silicided.Type: GrantFiled: July 18, 2019Date of Patent: July 6, 2021Assignee: STMICROELECTRONICS (CROLLES 2) SASInventors: Denis Monnier, Olivier Gonnard
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Patent number: 11050018Abstract: A memory device includes a bottom electrode, a resistance switching element, a top electrode, a first spacer, and a metal-containing compound layer. The resistance switching element is over the bottom electrode. The top electrode is over the resistance switching element. The first spacer is disposed along a sidewall of the resistance switching element. The metal-containing compound layer is disposed along a sidewall of the first spacer, in which the first spacer is between the metal-containing compound layer and the resistance switching element.Type: GrantFiled: October 26, 2019Date of Patent: June 29, 2021Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.Inventors: Chih-Wei Lu, Hsi-Wen Tien, Wei-Hao Liao, David Dai, Chung-Ju Lee
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Patent number: 11049774Abstract: A method includes forming an epitaxy semiconductor layer over a semiconductor substrate, and etching the epitaxy semiconductor layer and the semiconductor substrate to form a semiconductor strip, which includes an upper portion acting as a mandrel, and a lower portion under the mandrel. The upper portion is a remaining portion of the epitaxy semiconductor layer, and the lower portion is a remaining portion of the semiconductor substrate. The method further includes growing a first semiconductor fin starting from a first sidewall of the mandrel, growing a second semiconductor fin starting from a second sidewall of the mandrel. The first sidewall and the second sidewall are opposite sidewalls of the mandrel. A first transistor is formed based on the first semiconductor fin. A second transistor is formed based on the second semiconductor fin.Type: GrantFiled: July 18, 2019Date of Patent: June 29, 2021Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.Inventors: Pei-Hsun Wang, Shih-Cheng Chen, Chun-Hsiung Lin, Chih-Hao Wang
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Patent number: 11043553Abstract: An integrated circuit device includes a lower electrode, an upper electrode, and a dielectric layer structure between the lower electrode and the upper electrode, the dielectric layer structure including a first surface facing the lower electrode and a second surface facing the upper electrode. The dielectric layer structure includes a first dielectric layer including a first dielectric material and a plurality of grains extending from the first surface to the second surface and a second dielectric layer including a second dielectric material and surrounding a portion of a sidewall of each of the plurality of grains of the first dielectric layer in a level lower than the second surface. The second dielectric material includes a material having bandgap energy which is higher than bandgap energy of the first dielectric material.Type: GrantFiled: July 24, 2019Date of Patent: June 22, 2021Assignee: Samsung Electronics Co., Ltd.Inventors: Youn-soo Kim, Seung-min Ryu, Chang-su Woo, Hyung-suk Jung, Kyu-ho Cho, Youn-joung Cho
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Patent number: 11038067Abstract: A sensor for measuring mechanical stress in a layered metallization structure such as the back end of line portion of an integrated circuit die is provided. The sensor operates as a field effect transistor comprising a gate electrode, gate dielectric, channel and source and drain electrodes, wherein the gate electrode is a conductor of a first metallization level and the source and drain electrodes are two interconnect vias, connecting the channel to respective conductors in an adjacent level. At least one of the interconnect vias is formed of a material whereof the electrical resistance is sensitive to mechanical stress in the direction of the via. The sensitivity of the electrical resistance to the mechanical stress is sufficient to facilitate measurement of the stress by reading out the drain current of the transistor. The sensor thereby allows monitoring of stress in the BEOL prior to cracking.Type: GrantFiled: November 7, 2019Date of Patent: June 15, 2021Assignee: IMEC vzwInventors: Gaspard Hiblot, Luka Kljucar
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Patent number: 11031250Abstract: A semiconductor device and method of formation thereof. The semiconductor device includes a portion of a first material that abuts a portion of a second material and surrounds at least a portion of a semiconductor component. The first material has a first composition and a first index of refraction and is of a same type of material as the second material. The second material has a second composition and a second index of refraction. An opening in the first material exposes a portion of the semiconductor component.Type: GrantFiled: November 29, 2018Date of Patent: June 8, 2021Assignee: International Business Machines CorporationInventors: Mona A. Ebrish, Michael Rizzolo, Son Nguyen, Raghuveer R. Patlolla, Donald F. Canaperi
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Patent number: 11011412Abstract: A semiconductor structure and a method for forming same are provided.Type: GrantFiled: August 30, 2019Date of Patent: May 18, 2021Assignees: Semiconductor Manufacturing (Shanghai) International Corporation, Semiconductor Manufacturing (Beijing) International CorporationInventors: Wei Shi, Youcun Hu, Xiamei Tang
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Patent number: 11005014Abstract: Techniques related to optics formation using pick-up tools are disclosed. Optical elements are formed by pressing a pick-up tool (PUT) against elastomeric material deposited on a light-outputting side of light-emitting diode (LED) devices. Pressing the PUT against the elastomeric material causes a molded shape of the PUT to be transferred to the elastomeric material. This forms the optical elements in the elastomeric material.Type: GrantFiled: July 30, 2018Date of Patent: May 11, 2021Assignee: FACEBOOK TECHNOLOGIES, LLCInventors: Daniel Brodoceanu, Patrick Joseph Hughes, Pooya Saketi, Oscar Torrents Abad
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Patent number: 10991425Abstract: Methods, systems, and devices for access line grain modulation in a memory device are described. A memory cell stack in a cross-point memory array may be formed. In some examples, the memory cell stack may comprise a storage element. A barrier material may be formed above the memory cell stack. The barrier material may initially have an undulating top surface. In some cases, the top surface of the barrier material may be planarized. After the top surface of the barrier material is planarized, a metal layer for an access line may be formed on the top surface of the barrier material. Planarizing the top surface of the barrier material may impact the grain size of the metal layer. In some cases, planarizing the top surface of the barrier material may decrease the resistivity of access lines formed from the metal layer and thus increase current delivery throughout the memory device.Type: GrantFiled: August 13, 2018Date of Patent: April 27, 2021Assignee: Micron Technology, Inc.Inventors: David Ross Economy, Stephen W. Russell
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Patent number: 10985193Abstract: A display panel includes pixels and a first conductive element. Each pixel includes a first signal line, a second signal line, a third signal line, a first switch, a second switch, a third switch, a first pixel electrode, a second pixel electrode, a first capacitor, a second capacitor, a third capacitor, and an insulating layer. The first signal lines are arranged in a first direction. Orthogonal projections of a first electrode of a second capacitor of a first pixel, a first electrode of a third capacitor of the first pixel, and a first contact window of an insulating layer of the first pixel on a first substrate are arranged in the first direction. The first conductive element is electrically connected to a second electrode of the third capacitor of the first pixel and a second electrode of the second capacitor of the first pixel through the first contact window.Type: GrantFiled: November 3, 2019Date of Patent: April 20, 2021Assignee: Au Optronics CorporationInventors: Sheng-Yen Cheng, Min-Tse Lee, Yueh-Hung Chung, Ya-Ling Hsu
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Patent number: 10985298Abstract: A light emitting device including a light emitting element, a light transmissive member, a light guide member, and a light reflective member. The light transmissive member is disposed on an upper surface of the light emitting element, and has a lower surface including a first region facing the light emitting element and a second region positioned outside of the first region. The light guide member covers a lateral surface of the light emitting element and the second region of the lower surface of the light transmissive member. The light reflective member covers the light emitting element, an upper surface of the light transmissive member and the light guide member. One of lateral surfaces of the light transmissive member is exposed from the light reflective member.Type: GrantFiled: August 22, 2018Date of Patent: April 20, 2021Assignee: NICHSA CORPORATIONInventor: Tadao Hayashi
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Patent number: 10978394Abstract: In the semiconductor device, a first defect formation preventing film is formed on the first wiring side, and a second defect formation preventing film is formed on the second wiring side. when a ratio of an infrared absorption intensity corresponding to a bond between silicon and hydrogen to an infrared absorption intensity corresponding to a bond between silicon and oxygen is defined as an abundance ratio, the abundance ratio in the first defect formation preventing film is smaller than the abundance ratio in the second interlayer insulating film. The abundance ratio in the second defect formation preventing film is smaller than the abundance ratio in the second interlayer insulating film.Type: GrantFiled: July 24, 2019Date of Patent: April 13, 2021Assignee: RENESAS ELECTRONICS CORPORATIONInventors: Naohito Suzumura, Kazuyuki Omori
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Patent number: 10961411Abstract: Provided is an inkjet adhesive which is applied using an inkjet device, wherein the adhesive can suppress generation of voids in the adhesive layer and, after bonding, can enhance adhesiveness, moisture-resistant adhesion reliability, and cooling/heating cycle reliability. An inkjet adhesive according to the present invention comprises a photocurable compound, a photo-radical initiator, a thermosetting compound having one or more cyclic ether groups or cyclic thioether groups, and a compound capable of reacting with the thermosetting compound, and the compound capable of reacting with the thermosetting compound contains aromatic amine.Type: GrantFiled: November 30, 2018Date of Patent: March 30, 2021Assignee: SEKISUI CHEMICAL CO., LTD.Inventors: Mitsuru Tanikawa, Takashi Watanabe, Yusuke Fujita, Yoshito Fujita, Tasuku Yamada
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Patent number: 10957708Abstract: A semiconductor device includes a substrate including a memory cell region and a connection region, a plurality of gate electrodes in the memory cell region and the connection region, a plurality of channel structures passing through the plurality of gate electrodes and extending in a vertical direction in the memory cell region, and a plurality of pad layers extending in a first direction from each of the plurality of gate electrodes in the connection region. The plurality of pad layers is disposed in a stepped form in a second direction. The device further includes a plurality of dummy lines arranged in one row in the first direction between two pad layers adjacent to each other in the second direction and disposed apart from one another with a pad connection region therebetween in the first direction. The pad connection region overlaps two pad layers successively disposed in the first direction.Type: GrantFiled: July 24, 2019Date of Patent: March 23, 2021Assignee: SAMSUNG ELECTRONICS CO., LTD.Inventors: Young-Jin Jung, So-Ra Kim, Bong-Tae Park
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Patent number: 10950541Abstract: A semiconductor device includes a substrate, a first lower wiring line on the substrate, a first insulation layer on the first lower wiring line, a first dielectric barrier layer and a first etch stop layer sequentially stacked on the first insulation layer, a second insulation layer on the first etch stop layer, a first upper wiring line extending through the second insulation layer, the first etch stop layer, and the first dielectric barrier layer, and a first conductive via in the first insulation layer and electrically connecting the first lower wiring line and the first upper wiring line. An upper surface of the first conductive via protrudes above a lower surface of the first upper wiring line.Type: GrantFiled: June 14, 2019Date of Patent: March 16, 2021Assignee: SAMSUNG ELECTRONICS CO., LTD.Inventors: Soon Gyu Hwang, Kyoung Woo Lee, YoungWoo Cho, Il Sup Kim, Su Hyun Bark, Young-Ju Park, Jong Min Baek, Min Huh
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Patent number: 10921169Abstract: A flow sensor structure seals the surface of an electric control circuit and part of a semiconductor device via a manufacturing method that prevents occurrence of flash or chip crack when clamping the semiconductor device via a mold. The flow sensor structure includes a semiconductor device having an air flow sensing unit and a diaphragm, and a board or lead frame having an electric control circuit for controlling the semiconductor device, wherein a surface of the electric control circuit and part of a surface of the semiconductor device is covered with resin while having the air flow sensing unit portion exposed. The flow sensor structure may include surfaces of a resin mold, a board or a pre-mold component surrounding the semiconductor device that are continuously not in contact with three walls of the semiconductor device orthogonal to a side on which the air flow sensing unit portion is disposed.Type: GrantFiled: November 15, 2017Date of Patent: February 16, 2021Assignee: Hitachi Automotive Systems, Ltd.Inventors: Tsutomu Kono, Yuuki Okamoto, Takeshi Morino, Keiji Hanzawa
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Patent number: 10910361Abstract: Provided are a semiconductor element and a semiconductor device capable of reducing possibilities of malfunctions and breakdowns due to temperature rise. A semiconductor element (50) includes a first MOS transistor (Tr1), a second MOS transistor (Tr2), and a temperature detecting element (TD) that are provided on a semiconductor substrate (SB). The first MOS transistor (Tr1) includes an n-type source region (8), an n-type first semiconductor region (21) arranged away from the source region (8) and a p-type well region (31) arranged between the source region (8) and the first semiconductor region (21). The second MOS transistor (Tr2) includes an n-type source region (8) an n-type second semiconductor region (22) arranged away from the source region (8), and a p-type well region (31) arranged between the source region (8) and the second semiconductor region (22). The first semiconductor region (21) is connected to the second semiconductor region (22).Type: GrantFiled: July 24, 2019Date of Patent: February 2, 2021Assignee: FUJI ELECTRIC CO., LTD.Inventors: Takeyoshi Nishimura, Isamu Sugai
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Patent number: 10903154Abstract: A semiconductor device has a first semiconductor die with a base material. A covering layer is formed over a surface of the base material. The covering layer can be made of an insulating material or metal. A trench is formed in the surface of the base material. The covering layer extends into the trench to provide the cantilevered protrusion of the covering layer. A portion of the base material is removed by plasma etching to form a cantilevered protrusion extending beyond an edge of the base material. The cantilevered protrusion can be formed by removing the base material to the covering layer, or the cantilevered protrusion can be formed within the base material under the covering layer. A second semiconductor die is disposed partially under the cantilevered protrusion. An interconnect structure is formed between the cantilevered protrusion and second semiconductor die.Type: GrantFiled: August 20, 2019Date of Patent: January 26, 2021Assignee: SEMICONDUCTOR COMPONENTS INDUSTRIES, LLCInventors: Francis J. Carney, Michael J. Seddon
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Patent number: 10886215Abstract: Example embodiments relate to interconnect structures and related methods. One embodiment includes an interconnect structure. The interconnect structure includes a first interconnection level including a first dielectric layer and a first set of conductive paths. The interconnect structure also includes a second interconnection level arranged above the first interconnection level and including a second dielectric layer and a second set of conductive paths. Further, the interconnect structure includes a third interconnection level arranged above the second interconnection level and including a third dielectric layer and a third set of conductive paths. In addition, the interconnect structure includes a fourth interconnection level arranged above the third interconnection level and including a fourth dielectric layer and a fourth set of conductive paths. Still further, the interconnect structure includes a first multi-level via structure and a second multi-level via structure.Type: GrantFiled: July 24, 2019Date of Patent: January 5, 2021Assignee: IMEC VZWInventors: Houman Zahedmanesh, Victoria L. Calero Diaz Del Castillo, Christian Witt
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Patent number: 10872911Abstract: Provided is a display device including: a capacitor having a first electrode, a first insulating film over the first electrode, and a second electrode over the first insulating film; and a first transistor over the capacitor. The first transistor includes the second electrode, a second insulating film over the second electrode, an oxide semiconductor film over the second insulating film, and a first source electrode and a first drain electrode over the oxide semiconductor film. The first source electrode and the first drain electrode are electrically connected to the oxide semiconductor film.Type: GrantFiled: December 28, 2018Date of Patent: December 22, 2020Assignee: Japan Display Inc.Inventors: Tetsuo Morita, Hiroyuki Kimura, Makoto Shibusawa, Hiroshi Tabatake, Yasuhiro Ogawa