Patents Examined by Eduardo A. Rodela
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Patent number: 11640910Abstract: A method for cutting off a fin in a field effect transistor, comprising: step 1: forming fins and first spacing regions, there are two types of fins—the first type is configured to be cut off and a second type is configured to be reserved; and forming a first material layer to fill the first spacing regions; step 2: forming a first pattern structure comprising first strip structures aligning to one first type fin and second spacing regions; step 3: forming second sidewalls on two sides of each first strip structure; step 4: removing the first strip structures to form a second pattern structure by the second sidewalls; step 5: etching away the first material layer and the first type of fins by using the second sidewalls as a mask ; step 6: removing the second sidewalls and the remaining first material layer. The present application enables using less advanced lithography equipment.Type: GrantFiled: February 2, 2021Date of Patent: May 2, 2023Assignee: SHANGHAI HUALI INTEGRATED CIRCUIT CORPORATIONInventors: Yenchan Chiu, Yingju Chen, Liyao Liu, Chanyuan Hu
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Patent number: 11637151Abstract: A display apparatus includes a substrate including a first region and a second region spaced apart from each other in a first direction, and a plurality of display elements arranged in a display area in which the first region and the second region are disposed. The first region and the second region are circular, a diameter of the first region is about equal to a diameter of the second region.Type: GrantFiled: March 10, 2020Date of Patent: April 25, 2023Assignee: SAMSUNG DISPLAY CO., LTD.Inventors: Chanyoung Park, Jaekyung Go, Hyunmin Hwang
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Patent number: 11637017Abstract: Provided is a memory device including a substrate, a plurality of word-line structures, a plurality of cap structures, and a plurality of air gaps. The word-line structures are disposed on the substrate. The cap structures are respectively disposed on the word-line structures. A material of the cap structures includes a nitride. The nitride has a nitrogen concentration decreasing along a direction near to a corresponding word-line structure toward far away from the corresponding word-line structure. The air gaps are respectively disposed between the word-line structures. The air gaps are in direct contact with the word-line structures. A method of forming a memory device is also provided.Type: GrantFiled: July 1, 2022Date of Patent: April 25, 2023Assignee: Powerchip Semiconductor Manufacturing CorporationInventors: Wen Chung Yang, Shih Hsi Chen, Wei-Chang Lin
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Patent number: 11631707Abstract: An imaging device including: a photoelectric converter that generates a signal charge by photoelectric conversion of light; a semiconductor substrate; a charge accumulation region that is an impurity region of a first conductivity type in the semiconductor substrate, the charge accumulation region being configured to receive the signal charge; a first transistor that includes, as a source or a drain, a first impurity region of the first conductivity type in the semiconductor substrate; and a blocking structure that is located between the charge accumulation region and the first transistor. The blocking structure includes a second impurity region of a second conductivity type in the semiconductor substrate, the second conductivity type being different from the first conductivity type, and a first electrode that is located above the semiconductor substrate, the first electrode being configured to be applied with a first voltage.Type: GrantFiled: December 9, 2020Date of Patent: April 18, 2023Assignee: PANASONIC INTELLECTUAL PROPERTY MANAGEMENT CO., LTD.Inventors: Yoshihiro Sato, Junji Hirase
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Patent number: 11631662Abstract: The present invention discloses a System on Chip, which includes a power supply pin, a ground pin, an anti-static unit and an anti-reverse connection unit, wherein the anti-static unit is connected between the power supply pin and the ground pin through the anti-reverse connection unit, the power supply pin and the ground pin of the System on Chip are connected to an external power supply; wherein, when the System on Chip is in normal operation, the anti-static unit performs ESD protection of the power supply pin through the conducted anti-static unit; whereas when the external power supply is reversely connected between the power supply pin and the ground pin of the System on Chip, the anti-reverse connection unit is cut off to prevent the reversely connected external power supply from directly connecting anode with cathode of the external power supply through the anti-static unit.Type: GrantFiled: August 28, 2020Date of Patent: April 18, 2023Assignee: SHENZHEN WINSEMI MICROELECTRONICS CO., LTDInventors: Lijun Song, Pengliang Song, Yaya Mu, Xi Dang
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Patent number: 11631594Abstract: Methods of manufacturing a system are described. A method includes attaching a silicon backplane to a carrier and molding the silicon backplane on the carrier such that a molding material surrounds side surfaces of the silicon backplane to form a structure comprising a substrate with an embedded silicon backplane. The structure has a first surface opposite the carrier, a second surface adjacent the carrier, and side surfaces. At least one via is formed through the molding material and filled with a metal material. A metal layer is formed on a central region of the first surface of the structure. Redistribution layers are formed on the first surface of the structure adjacent the metal layer.Type: GrantFiled: January 23, 2020Date of Patent: April 18, 2023Assignee: Lumileds LLCInventors: Tze Yang Hin, Anantharaman Vaidyanathan, Srini Banna, Ronald Johannes Bonne
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Patent number: 11631620Abstract: Provided is a semiconductor device that allows reduction of a measurement time of a PCMTEG and improvement of productivity in an IC manufacturing process. A PCMTEG region 100 formed on a surface of a semiconductor substrate is divided into a main PCMTEG region 101 and a sub-PCMTEG region 102, and TEGs having specifications for their electrical characteristic values are all collectively arranged in the sub-PCMTEG region 102.Type: GrantFiled: July 8, 2020Date of Patent: April 18, 2023Assignee: ABLIC INC.Inventors: Hiroaki Takasu, Yoko Serizawa, Hiroya Suzuki, Sumitaka Goto
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Patent number: 11626429Abstract: A display device and method of fabricating the same are provided. The display device includes a substrate and a thin-film transistor formed on the substrate. The thin-film transistor includes a lower gate conductive layer disposed on the substrate, and a lower gate insulating film disposed on the lower gate conductive layer The lower gate insulating film includes an upper surface and sidewalls. The thin-film transistor includes an active layer disposed on the upper surface of the lower gate insulating film, the active layer including sidewalls. At least one of the sidewalls of the lower gate insulating film and at least one of the sidewalls of the active layer are aligned with each other.Type: GrantFiled: October 15, 2020Date of Patent: April 11, 2023Assignee: SAMSUNG DISPLAY CO., LTD.Inventors: Sang Sub Kim, Keun Woo Kim, Ji Yeong Shin, Yong Su Lee, Myoung Geun Cha, Ki Seok Choi, Sang Gun Choi
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Patent number: 11621190Abstract: A method for filling recessed features with a low-resistivity metal. The method includes providing a patterned substrate containing a recessed feature formed in a first layer and a second layer that is exposed in the recessed feature, and pre-treating the substrate with a surface modifier that increases metal deposition selectivity on the second layer relative to on the first layer, depositing a metal layer on the substrate by vapor phase deposition, where the metal layer is preferentially deposited on the second layer in the recessed feature, and removing metal nuclei deposited on the first layer, including on a field area and on sidewalls of the first layer in the recessed feature, to selectively form the metal layer on the second layer in the recessed feature. The steps of pre-treating, depositing and removing may be repeated at least once to increase a thickness of the metal layer in the recessed feature.Type: GrantFiled: May 28, 2021Date of Patent: April 4, 2023Assignee: Tokyo Electron LimitedInventors: Kai-Hung Yu, David O'Meara, Nicholas Joy, Gyanaranjan Pattanaik, Robert Clark, Kandabara Tapily, Takahiro Hakamata, Cory Wajda, Gerrit Leusink
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Patent number: 11615986Abstract: Methods and apparatuses for processing substrates, such as during metal silicide applications, are provided. In one or more embodiments, a method of processing a substrate includes depositing an epitaxial layer on the substrate, depositing a metal silicide seed layer on the epitaxial layer, and exposing the metal silicide seed layer to a nitridation process to produce a metal silicide nitride layer from at least a portion of the metal silicide seed layer. The method also includes depositing a metal silicide bulk layer on the metal silicide nitride layer and forming or depositing a nitride capping layer on the metal silicide bulk layer, where the nitride capping layer contains a metal nitride, a silicon nitride, a metal silicide nitride, or a combination thereof.Type: GrantFiled: September 17, 2021Date of Patent: March 28, 2023Assignee: APPLIED MATERIALS, INC.Inventors: Xuebin Li, Wei Liu, Gaurav Thareja, Shashank Sharma, Patricia M. Liu, Schubert Chu
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Patent number: 11600577Abstract: A semiconductor device includes a substrate and a semiconductor layer. The substrate includes a planar portion and a plurality of pillars on a periphery of the planar portion. The pillars are shaped as rectangular columns, and corners of two of the pillars at the same side of the planar portion are aligned in a horizontal direction or a direction perpendicular to the horizontal direction. The semiconductor layer is disposed over the planar portion and between the pillars.Type: GrantFiled: October 13, 2020Date of Patent: March 7, 2023Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.Inventors: Pei-Wei Lee, Pang-Yen Tsai, Tsung-Yu Hung
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Patent number: 11600544Abstract: A PCB having a first surface and a second surface includes a trench extending through the PCB, a plurality of conductive traces on one or more sidewalls of the trench. The plurality of conductive traces extends through the PCB and may be arranged in pairs across from one another along at least a portion of the length of the trench. A first set of conductive contacts are arranged in a first zig-zag pattern around a perimeter of the trench. A second set of conductive contacts are arranged in a second zig-zag pattern around the perimeter of the trench. In some cases, the first and second zig-zag patterns are arranged with respect to one another around the perimeter of the trench in an alternating fashion. A chip package is also disclosed having a pin arrangement that couples to the corresponding arrangement of conductive contacts on the PCB.Type: GrantFiled: February 27, 2019Date of Patent: March 7, 2023Assignee: Intel CorporationInventors: Yogasundaram Chandiran, Geejagaaru Krishnamurthy Sandesh, Pradeep Ramesh, Ranjul Balakrishnan
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Patent number: 11574854Abstract: A distributed inductance integrated field effect transistor (FET) structure, comprising a plurality of FETs. Each FET comprises a plurality of source regions, a gate region having a plurality of gate fingers extending from a gate bus bar, a drain region having a plurality of drain finger extending from a drain bus bar between the plurality of gate fingers, wherein the gate region controls current flow in a conductive channel between the drain region and source region. A first distributed inductor connects the gate regions of adjacent ones of the plurality of FETs; and a second distributed inductor connects the drain regions of adjacent ones of the plurality of FETs.Type: GrantFiled: April 7, 2021Date of Patent: February 7, 2023Assignee: NATIONAL RESEARCH COUNCIL OF CANADAInventor: Nianhua (Frank) Jiang
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Patent number: 11557488Abstract: A gettering property evaluation apparatus includes a gettering determination unit and a chuck table. The gettering determination unit has a laser beam applying unit for applying a laser beam to a wafer, and a transmission-reception unit for applying a microwave to the wafer and receiving the microwave reflected by the wafer. The gettering determination unit determines whether or not a gettering layer including a grinding strain generated by grinding the wafer has a gettering property. The chuck table holds the wafer on a holding surface. The chuck table has a conductive nonmetallic porous member constituting the holding surface and having a property of reflecting or absorbing the microwave, and a base member provided with a negative pressure transmission passage for transmitting a negative pressure to the nonmetallic porous member.Type: GrantFiled: November 20, 2020Date of Patent: January 17, 2023Assignee: DISCO CORPORATIONInventor: Yasushi Tanno
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Patent number: 11557612Abstract: To improve field-effect mobility and reliability of a transistor including an oxide semiconductor film. Provided is a semiconductor device including an oxide semiconductor film. The semiconductor device includes a first insulating film, the oxide semiconductor film over the first insulating film, a second insulating film and a third insulating film over the oxide semiconductor film, and a gate electrode over the second insulating film. The oxide semiconductor film includes a first oxide semiconductor film, a second oxide semiconductor film over the first oxide semiconductor film, and a third oxide semiconductor film over the second oxide semiconductor film. The first to third oxide semiconductor films contain the same element. The second oxide semiconductor film includes a region where the crystallinity is lower than the crystallinity of one or both of the first oxide semiconductor film and the third oxide semiconductor film.Type: GrantFiled: September 30, 2020Date of Patent: January 17, 2023Assignee: Semiconductor Energy Laboratory Co., Ltd.Inventors: Shunpei Yamazaki, Junichi Koezuka, Kenichi Okazaki, Masami Jintyou, Yukinori Shima
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Patent number: 11552006Abstract: In examples, a semiconductor device comprises a semiconductor die, an opaque mold compound housing covering the semiconductor die, a conductive terminal extending from the mold compound housing, and an insulative coat covering the mold compound housing and at least a portion of the conductive terminal.Type: GrantFiled: July 22, 2020Date of Patent: January 10, 2023Assignee: TEXAS INSTRUMENTS INCORPORATEDInventor: Sreenivasan Kalyani Koduri
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Patent number: 11538786Abstract: A transfer printing method and a transfer printing apparatus. The transfer method includes: transferring a plurality of devices formed on an original substrate to a transfer substrate; obtaining first position information of positions of the plurality of devices on the transfer substrate; obtaining second position information of corresponding positions, on a target substrate, of devices to be transferred; comparing the first position information with the second position information to obtain first target position information recording a first transfer position; and aligning the transfer substrate with the target substrate and performing a site-designated laser irradiation on at least part of devices on the transfer substrate corresponding to the first transfer position, simultaneously, according to the first target position information, so as to transfer the at least part of the devices from the transfer substrate to the target substrate.Type: GrantFiled: March 19, 2019Date of Patent: December 27, 2022Assignees: ORDOS YUANSHENG OPTOELECTRONICS CO., LTD., BEIJING BOE TECHNOLOGY DEVELOPMENT CO., LTD.Inventors: Xinglong Luan, Jing Feng, Fuqiang Li, Zhichong Wang, Peng Liu, Wusheng Li, Chunjing Liu
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Patent number: 11538741Abstract: A multi-chip module (MCM) package includes a leadframe including half-etched lead terminals including a full-thickness and half-etched portion, and second lead terminals including a thermal pad(s). A first die is attached by a dielectric die attach material to the half-etched lead terminals. The first die includes first bond pads coupled to first circuitry configured for receiving a control signal and for outputting a coded signal and a transmitter. The second die includes second bond pads coupled to second circuitry configured for a receiver with a gate driver. The second die is attached by a conductive die attach material to the thermal pad. Bond wires include die-to-die bond wires between a portion of the first and second bond pads. A high-voltage isolation device is between the transmitter and receiver. A mold compound encapsulates the first and the second die.Type: GrantFiled: February 17, 2021Date of Patent: December 27, 2022Assignee: TEXAS INSTRUMENTS INCORPORATEDInventors: Matthew David Romig, Wei Zhang, Mohammad Waseem Hussain, Peter Anthony Fundaro
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Patent number: 11532780Abstract: An ultrasonic sensor includes an element substrate having a first and a second surface at an opposite side of the first surface, including an opening section piercing through the element substrate in a Z direction from the first to second surface, a vibrating plate on the first surface of the element substrate to close the opening section, a plurality of vibration regions extending along an X direction orthogonal to the Z direction on the vibration plate in positions overlapping the opening section, and a plurality of piezoelectric elements to correspond to the plurality of vibration regions of the vibration plate. The opening section includes, on the first surface, a first and second side parallel to the X direction and a third and fourth side coupling end portions in the X direction of the first and second sides at an acute or obtuse angle to the first and the second side.Type: GrantFiled: November 21, 2019Date of Patent: December 20, 2022Assignee: SEIKO EPSON CORPORATIONInventors: Chikara Kojima, Koji Ohashi, Hironori Suzuki
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Patent number: 11527701Abstract: A piezoelectric device including a substrate, a metal-insulator-metal element, a hydrogen blocking layer, a passivation layer, a first contact terminal and a second contact terminal is provided. The metal-insulator-metal element is disposed on the substrate. The hydrogen blocking layer is disposed on the metal-insulator-metal element. The passivation layer covers the hydrogen blocking layer and the metal-insulator-metal element. The first contact terminal is electrically connected to the metal-insulator-metal element. The second contact terminal is electrically connected to the metal-insulator-metal element.Type: GrantFiled: October 28, 2019Date of Patent: December 13, 2022Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.Inventor: Chih-Ming Chen