Patents Examined by Herve-Louis Y Assouman
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Patent number: 11764078Abstract: A wafer level fan out package includes a semiconductor die having a first surface, a second surface, and a third surface. A stiffener is disposed on the third surface of the semiconductor die. A conductive via passes through the stiffener. First and second electrically conductive patterns electrically connected to the conductive via are disposed on the first and second surfaces of the semiconductor die and stiffener. Solder balls are electrically connected to the first or second electrically conductive patterns.Type: GrantFiled: August 27, 2021Date of Patent: September 19, 2023Assignee: Amkor Technology Singapore Holding Pte. Ltd.Inventors: Jin Young Kim, Doo Hyun Park, Seung Jae Lee
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Patent number: 11756888Abstract: A semiconductor device including a substrate having a NMOS region and a PMOS region; a metal gate extending continuously along a first direction from the NMOS region to the PMOS region on the substrate; a first source/drain region extending along a second direction adjacent to two sides of the metal gate on the NMOS region; a second source/drain region extending along the second direction adjacent to two sides of the metal gate on the PMOS region; a first contact plug landing on the second source/drain region adjacent to one side of the metal gate; a second contact plug landing on the second source/drain region adjacent to another side of the metal gate; and a third contact plug landing directly on a portion of the metal gate on the PMOS region and between the first contact plug and the second contact plug.Type: GrantFiled: October 5, 2021Date of Patent: September 12, 2023Assignee: UNITED MICROELECTRONICS CORP.Inventors: Shih-Cheng Chen, Li-Hsuan Ho, Tsuo-Wen Lu, Shih-Hao Liang, Tsung-Hsun Wu, Po-Jen Chuang, Chi-Mao Hsu
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Patent number: 11742346Abstract: Stacked transistor structures having a conductive interconnect between source/drain regions of upper and lower transistors. In some embodiments, the interconnect is provided, at least in part, by highly doped epitaxial material deposited in the upper transistor's source/drain region. In such cases, the epitaxial material seeds off of an exposed portion of semiconductor material of or adjacent to the upper transistor's channel region and extends downward into a recess that exposes the lower transistor's source/drain contact structure. The epitaxial source/drain material directly contacts the lower transistor's source/drain contact structure, to provide the interconnect. In other embodiments, the epitaxial material still seeds off the exposed semiconductor material of or proximate to the channel region and extends downward into the recess, but need not contact the lower contact structure.Type: GrantFiled: June 29, 2018Date of Patent: August 29, 2023Assignee: Intel CorporationInventors: Aaron D. Lilak, Gilbert Dewey, Cheng-Ying Huang, Christopher Jezewski, Ehren Mannebach, Rishabh Mehandru, Patrick Morrow, Anand S. Murthy, Anh Phan, Willy Rachmady
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Patent number: 11742292Abstract: The present disclosure relates to an integrated chip including a semiconductor device. The semiconductor device includes a gate structure overlying a front-side surface of a first substrate. The first substrate has a back-side surface opposite the front-side surface. A first source/drain structure overlies the first substrate and is laterally adjacent to the grate structure. A power rail is embedded in the first substrate and directly underlies the first source/drain structure. A first source/drain contact continuously extends from the first source/drain structure to the power rail. The first source/drain contact electrically couples the first source/drain structure to the power rail.Type: GrantFiled: January 29, 2021Date of Patent: August 29, 2023Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.Inventors: Marcus Johannes Henricus Van Dal, Gerben Doornbos
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Patent number: 11735498Abstract: A semiconductor includes a substrate having a first surface and a second surface opposite to each other, the substrate having a via hole extending in a thickness direction from the first surface, a circuit pattern in the first surface of the substrate, a through electrode structure in the via hole, a device isolation structure in a first trench extending in one direction in the first surface of the substrate, the device isolation structure between the via hole and the circuit pattern, the device isolation structure including a first oxide layer pattern and a first nitride layer pattern sequentially stacked on an inner surface of the first trench, the first nitride layer pattern filling the first trench, and an insulation interlayer on the first surface of the substrate and covering the circuit pattern.Type: GrantFiled: March 26, 2021Date of Patent: August 22, 2023Assignee: SAMSUNG ELECTRONICS CO., LTD.Inventors: Kwangwuk Park, Youngmin Lee, Sungdong Cho, Eunji Kim, Hyoungyol Mun, Seokhwan Jeong
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Patent number: 11728242Abstract: In some examples, a semiconductor package comprises a semiconductor die having a first surface and a second surface opposing the first surface. The package comprises an orifice extending through a thickness of the semiconductor die from the first surface to the second surface. The package comprises a set of metallic nanowires positioned within the orifice and extending through the thickness of the semiconductor die from the first surface to the second surface.Type: GrantFiled: April 8, 2020Date of Patent: August 15, 2023Assignee: TEXAS INSTRUMENTS INCORPORATEDInventors: Benjamin Stassen Cook, Ralf Jakobskrueger Muenster, Sreenivasan Kalyani Koduri
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Patent number: 11728365Abstract: A semiconductor device includes a semiconductor substrate, a radiation-sensing region, at least one isolation structure, and a doped passivation layer. The radiation-sensing region is present in the semiconductor substrate. The isolation structure is present in the semiconductor substrate and adjacent to the radiation-sensing region. The doped passivation layer at least partially surrounds the isolation structure in a substantially conformal manner.Type: GrantFiled: January 27, 2021Date of Patent: August 15, 2023Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.Inventors: Tsung-Han Tsai, Yun-Wei Cheng, Kuo-Cheng Lee, Chun-Hao Chou, Yung-Lung Hsu
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Patent number: 11729972Abstract: A semiconductor device is disclosed. The semiconductor device includes a channel structure on a substrate and extending in a first direction perpendicular to a top surface of the substrate; a plurality of gate electrodes on the substrate and spaced apart from one another in the first direction on a sidewall of the channel structure; and a gate insulating layer between each of the plurality of gate electrodes and the channel structure, wherein the channel structure includes a body gate layer extending in the first direction; a charge storage structure surrounding a sidewall of the body gate layer; and a channel layer surrounding sidewall of the charge storage structure.Type: GrantFiled: April 9, 2020Date of Patent: August 15, 2023Assignee: SAMSUNG ELECTRONICS CO., LTD.Inventors: Younghwan Son, Seogoo Kang, Jeehoon Han
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Patent number: 11721711Abstract: A disclosed photoelectric conversion device includes: a semiconductor layer in which a photoelectric converter is provided; a substrate arranged on one face side of the semiconductor layer; and an interconnection structure arranged between the semiconductor layer and the substrate. The interconnection structure includes a first insulating film made of a first insulating material and a second insulating film provided on the semiconductor layer side of the first insulating film and made of a second insulating material, the first insulating material permeates more hydrogen than the second insulating material, an insulating member made of the first insulating material is located between the first insulating film and the semiconductor layer, and the first insulating film and the insulating member are connected to each other via an opening provided in the second insulating film.Type: GrantFiled: May 20, 2020Date of Patent: August 8, 2023Assignee: CANON KABUSHIKI KAISHAInventors: Takayasu Kanesada, Koji Hara
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Patent number: 11721588Abstract: The first and second fins extend upwardly from a semiconductor substrate. The shallow trench isolation structure laterally surrounds lower portions of the first and second fins. The first gate structure extends across an upper portion of the first fin. The second gate structure extends across an upper portion of the second fin. The first source/drain epitaxial structures are on the first fin and on opposite sides of the first gate structure. The second source/drain epitaxial structures are on the second fin and on opposite sides of the second gate structure. The separation plug interposes the first and second gate structures and extends along a lengthwise direction of the first fin. The isolation material cups an underside of a portion of the separation plug between one of the first source/drain epitaxial structures and one of the second source/drain epitaxial structures.Type: GrantFiled: June 7, 2021Date of Patent: August 8, 2023Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.Inventors: Chih-Chang Hung, Shu-Yuan Ku, I-Wei Yang, Yi-Hsuan Hsiao, Ming-Ching Chang, Ryan Chia-Jen Chen
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Patent number: 11715705Abstract: An integrated circuit memory includes a state transistor having a floating gate which stores a respective data value. A device for protecting the data stored in the memory includes a capacitive structure having a first electrically-conducting body coupled to the floating gate of the state transistor, a dielectric body, and a second electrically-conducting body coupled to a ground terminal. The dielectric body is configured, if an aqueous solution is brought into contact with the dielectric body, to electrically couple the floating gate and the ground terminal so as to modify the charge on the floating gate and to lose the corresponding data. Otherwise, the dielectric body is configured to electrically isolate the floating gate and the ground terminal.Type: GrantFiled: July 17, 2020Date of Patent: August 1, 2023Assignee: STMicroelectronics (Rousset) SASInventors: Pascal Fornara, Fabrice Marinet
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Patent number: 11705454Abstract: A semiconductor device may include a substrate including an active pattern extending in a first direction, a gate electrode running across the active pattern and extending in a second direction intersecting the first direction, a source/drain pattern on the active pattern and adjacent to a side of the gate electrode, an active contact in a contact hole exposing the source/drain pattern, an insulating pattern filling a remaining space of the contact hole in which the active contact is provided, a first via on the active contact, and a second via on the gate electrode. The active contact may include a first segment that fills a lower portion of the contact hole and a second segment that vertically protrudes from the first segment. The first via is connected to the second segment. The insulating pattern is adjacent in the first direction to the second via.Type: GrantFiled: January 24, 2022Date of Patent: July 18, 2023Assignee: Samsung Electronics Co, Ltd.Inventors: Heonjong Shin, Sunghun Jung, Minchan Gwak, Yongsik Jeong, Sangwon Jee, Sora You, Doohyun Lee
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Patent number: 11707001Abstract: A phase change resistive memory includes an upper electrode; a lower electrode; a layer made of an active material, called an active layer; the memory passing from a highly resistive state to a weakly resistive state by application of a voltage or a current between the upper electrode and the lower electrode and wherein the material of the active layer is a ternary composed of germanium Ge, tellurium Te and antimony Sb, the ternary including between 60 and 66% of antimony Sb.Type: GrantFiled: January 27, 2020Date of Patent: July 18, 2023Assignee: COMMISSARIAT A L'ENERGIE ATOMIQUE ET AUX ENERGIES ALTERNATIVESInventor: Gabriele Navarro
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Patent number: 11705384Abstract: A semiconductor structure includes a semiconductor substrate and an interconnect structure on the semiconductor structure. The interconnect structure includes a first layer, a second layer over the first layer, a third layer over the second layer, and a fourth layer over the third layer. A first through via extends through the semiconductor substrate, the first layer, and the second layer. A second through via extends through the third layer and the fourth layer. A bottom surface of the second through via contacts a top surface of the first through via.Type: GrantFiled: June 30, 2021Date of Patent: July 18, 2023Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.Inventors: Yuan-Yang Hsiao, Dian-Hau Chen, Yen-Ming Chen
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Patent number: 11705458Abstract: Single gate and dual gate FinFET devices suitable for use in an SRAM memory array have respective fins, source regions, and drain regions that are formed from portions of a single, contiguous layer on the semiconductor substrate, so that STI is unnecessary. Pairs of FinFETs can be configured as dependent-gate devices wherein adjacent channels are controlled by a common gate, or as independent-gate devices wherein one channel is controlled by two gates. Metal interconnects coupling a plurality of the FinFET devices are made of a same material as the gate electrodes. Such structural and material commonalities help to reduce costs of manufacturing high-density memory arrays.Type: GrantFiled: January 26, 2021Date of Patent: July 18, 2023Assignee: STMICROELECTRONICS, INC.Inventor: John H. Zhang
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Patent number: 11699772Abstract: Disclosed are an array substrate and a preparation method thereof, and a digital microfluidic chip. The preparation method includes: forming a plurality of photoelectric detection devices on a silicon-based substrate; transferring the photoelectric detection devices to a base substrate by adopting a micro transfer printing process; and forming a plurality of transparent driving electrodes on the base substrate, wherein the transparent driving electrodes are insulated from the photoelectric detection devices.Type: GrantFiled: March 19, 2020Date of Patent: July 11, 2023Assignees: Beijing BOE Sensor Technology Co., Ltd., BOE Technology Group Co., Ltd.Inventors: Xue Dong, Yue Geng, Peizhi Cai
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Patent number: 11688780Abstract: Transistor structure including deep source and/or drain semiconductor that is contacted by metallization from both a front (e.g., top) side and a back (e.g., bottom) side of transistor structure. The deep source and/or drain semiconductor may be epitaxial, following crystallinity of a channel region that may be monocrystalline A first layer of the source and/or drain semiconductor may have lower impurity doping while a second layer of the source and/or drain semiconductor may have higher impurity doping. The deep source and/or drain semiconductor may extend below the channel region and be adjacent to a sidewall of a sub-channel region such that metallization in contact with the back side of the transistor structure may pass through a thickness of the first layer of the source and/or drain semiconductor to contact the second layer of the source and/or drain semiconductor.Type: GrantFiled: March 22, 2019Date of Patent: June 27, 2023Assignee: Intel CorporationInventors: Rishabh Mehandru, Tahir Ghani, Stephen Cea
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Patent number: 11688665Abstract: An integrated circuit assembly may be formed having a substrate, a first integrated circuit device electrically attached to the substrate, a second integrated circuit device electrically attached to the first integrated circuit device, and a heat dissipation device defining a fluid chamber, wherein at least a portion of the first integrated circuit device and at least a portion of the second integrated circuit device are exposed to the fluid chamber. In further embodiments, at least one channel may be formed in an underfill material between the first integrated circuit device and the second integrated circuit device, between the first integrated circuit device and the substrate, and/or between the second integrated circuit device and the substrate, wherein the at least one channel is open to the fluid chamber.Type: GrantFiled: June 13, 2018Date of Patent: June 27, 2023Assignee: Intel CorporationInventors: Feras Eid, Adel Elsherbini, Johanna Swan
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Patent number: 11688695Abstract: Aspects of the disclosure provide a semiconductor device. The semiconductor device includes a first die. The first die includes a semiconductor substrate with transistors formed on a first side of the semiconductor substrate. Further, the first die includes a connection structure extending through the semiconductor substrate and conductively connecting a first conductive layer disposed on the first side of the semiconductor substrate with a second conductive layer disposed on a second side of the semiconductor substrate that is opposite to the first side of the semiconductor substrate. Further, the first die includes a shielding structure disposed in the semiconductor substrate and between the connection structure and at least a transistor. The shielding structure includes a third conductive layer and can alleviate coupling between the connection structure and the transistor.Type: GrantFiled: December 7, 2020Date of Patent: June 27, 2023Assignee: Yangtze Memory Technologies Co., Ltd.Inventors: Wei Liu, Shiqi Huang, Liang Chen
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Patent number: 11688641Abstract: An element chip manufacturing method including: attaching a substrate via a die attach film (DAF) to a holding sheet; forming a protective film that covers the substrate; forming an opening in the protective film with a laser beam, to expose the substrate in the dicing region therefrom; exposing the substrate to a first plasma to etch the substrate exposed from the opening, so that a plurality of element chips are formed from the substrate and so that the DAF is exposed from the opening; exposing the substrate to a second plasma to etch the die attach film exposed from the opening, so that the DAF is split so as to correspond to the element chips; and detaching the element chips from the holding sheet, together with the split DAF. The DAF is larger than the substrate. The method includes irradiating the laser beam to the DAF protruding from the substrate.Type: GrantFiled: May 22, 2020Date of Patent: June 27, 2023Assignee: PANASONIC INTELLECTUAL PROPERTY MANAGEMENT CO., LTD.Inventors: Hidefumi Saeki, Hidehiko Karasaki, Shogo Okita, Atsushi Harikai, Akihiro Itou