Patents Examined by Hsien C Tsai
  • Patent number: 11437215
    Abstract: Provided herein are approaches for decreasing particle generation in an electrostatic lens. In some embodiments, an ion implantation system may include an electrostatic lens including an entrance for receiving an ion beam and an exit for delivering the ion beam towards a target, the electrostatic lens including a first terminal electrode, a first suppression electrode, and a first ground electrode disposed along a first side of an ion beamline, wherein the first ground electrode is grounded and positioned adjacent the exit. The electrostatic lens may further include a second terminal electrode, a second suppression electrode, and a second ground electrode disposed along a second side of the ion beamline, wherein the second ground electrode is grounded and positioned adjacent the exit. The implantation system may further include a power supply operable to supply a voltage and a current to the electrostatic lens for controlling the ion beam.
    Type: Grant
    Filed: December 13, 2019
    Date of Patent: September 6, 2022
    Assignee: APPLIED Materials, Inc.
    Inventors: Alexandre Likhanskii, Antonella Cucchetti, Eric D. Hermanson, Frank Sinclair, Jay T. Scheuer, Robert C. Lindberg
  • Patent number: 11438996
    Abstract: A method for protecting an X-ray source including: a liquid jet generator configured to form a liquid jet moving along a flow axis; an electron source configured to provide an electron beam interacting with the liquid jet to generate X-ray radiation; the method including: generating the liquid jet: monitoring a quality measure indicating a performance of the liquid jet; identifying, based on the quality measure, a malperformance of the liquid jet; and if said malperformance is identified, causing the X-ray source to enter a safe mode for protecting the X ray source. Further, to corresponding devices.
    Type: Grant
    Filed: February 8, 2019
    Date of Patent: September 6, 2022
    Assignee: EXCILLUM AB
    Inventors: Tomi Tuohimaa, Per Takman, Daniel Larsson
  • Patent number: 11428666
    Abstract: A device for performing field asymmetric waveform ion mobility spectrometry, “FAIMS” including first and second segmented planar electrodes, each electrode including three or more segments and extending in a direction parallel to an analytical axis of the device, the first and second segmented electrodes are separated from each other to provide an analytical gap therebetween; and propelling means for propelling ions through the analytical gap in a direction parallel to the analytical axis. The device is configured to operate in: a FAIMS mode in which a power supply applies voltage waveforms to the segments to produce an asymmetric time dependent electric field in the analytical gap for FAIMS analysis of ions propelled through the analytical gap; and a transparent mode in which the power supply applies voltage waveforms to the to produce a confining electric field in the analytical gap for focussing ions towards the longitudinal axis.
    Type: Grant
    Filed: July 31, 2020
    Date of Patent: August 30, 2022
    Assignee: SHIMADZU CORPORATION
    Inventors: Roger Giles, Roch Andrzejewski
  • Patent number: 11387072
    Abstract: Provided is a charged particle beam device using a detector that detects electromagnetic waves, in which a circumstance in a sample chamber can be checked, and a sample is observed with the detector at the same time.
    Type: Grant
    Filed: March 12, 2019
    Date of Patent: July 12, 2022
    Assignee: Hitachi High-Tech Corporation
    Inventors: Takahiro Usui, Tatsuya Hirato, Hiroyuki Chiba, Yuki Suda
  • Patent number: 11373849
    Abstract: A mass spectrometer is disclosed comprising: a first vacuum chamber having an inlet aperture; a second vacuum chamber; a differential pumping aperture separating the vacuum chambers; and an ion guide arranged in the first vacuum chamber for guiding ions from the inlet aperture to and through the differential pumping aperture. The ion guide has a construction for handling high gas loads such that the spectrometer is able to maintain the gas pressure in the first vacuum chamber such that when ions are accelerated therethrough the ions collide with gas and fragment.
    Type: Grant
    Filed: May 31, 2019
    Date of Patent: June 28, 2022
    Assignee: Micromass UK Limited
    Inventors: Henry Y. Shion, Robert Lewis, David Jonathan Pugh, Ying-Qing Yu
  • Patent number: 11369333
    Abstract: The present disclosure provides a method and apparatus for detecting a dose distribution of an article. The method includes performing a fluoroscopy scanning on the article to be detected, to obtain mass data per unit area or unit volume for each point of the article to be detected; obtaining corresponding dose distribution data based on the mass data per unit area or unit volume and a preset mapping model, wherein the preset mapping model includes a mapping relationship between mass per unit area or unit volume and the dose distribution of the article under irradiation of a preset amount of energy; and matching the dose distribution data with a fluoroscopy image of the article to be detected, to generate and display a radiation image.
    Type: Grant
    Filed: June 24, 2020
    Date of Patent: June 28, 2022
    Assignees: Nuctech Company Limited, Nucway Company Limited, Tsinghua University
    Inventors: Zhiqiang Chen, Yuanjing Li, Zhiwei Han, Guang Yang, Huaili Qin, Wenyuan Qi, Shan Kuang, Aifeng Liang, Yanqin Liu
  • Patent number: 11367606
    Abstract: A method is disclosed comprising providing a biological sample on a swab, directing a spray of charged droplets onto a surface of the swab in order to generate a plurality of analyte ions, and analysing the analyte ions.
    Type: Grant
    Filed: August 19, 2019
    Date of Patent: June 21, 2022
    Assignee: Micromass UK Limited
    Inventors: Zoltan Takats, Emrys Jones, James Ian Langridge, Michael Raymond Morris, Tamas Karancsi, Steven Derek Pringle, Julia Balog, Daniel Simon, Lajos Godorhazy, Daniel Szalay, Keith Richardson, Phillip Robert Bennett, David Alan MacIntyre, Pamela Pruski
  • Patent number: 11367609
    Abstract: A mass spectrometer adopting a configuration of a multi-stage differential evacuation system appropriately performs optimization of a direct-current voltage applied to a plurality of ion optical elements for transporting ions. An auto-tuning controller acquires intensity data of ions derived from a predetermined component while changing a direct-current voltage applied to ion guides and the like, and searches for a direct-current voltage at which the intensity is maximized. When the direct-current voltage applied to a certain ion optical element is changed at the time of automatic adjustment, the direct-current voltage applied to all the ion optical elements thereafter is also changed by the same amount. Since the direct-current voltage difference between two adjacent ion optical elements always changes at only one point, the direct-current potential difference can be determined so as to optimize the ion passage efficiency.
    Type: Grant
    Filed: September 13, 2018
    Date of Patent: June 21, 2022
    Assignee: SHIMADZU CORPORATION
    Inventor: Manabu Ueda
  • Patent number: 11361954
    Abstract: The invention generally relates to systems and methods for conducting reactions and screening for reaction products.
    Type: Grant
    Filed: March 22, 2018
    Date of Patent: June 14, 2022
    Assignee: Purdue Research Foundation
    Inventor: Robert Graham Cooks
  • Patent number: 11361957
    Abstract: A time-of-flight mass spectrometer includes a flight tube, an ion introduction unit that is connected to the flight tube, an ion detector that detects an ion flown in the flight tube, and a control unit that controls the ion introduction unit and the flight tube, wherein: the control unit sequentially changes an accumulation state of the ion to be introduced into the flight tube by the ion introduction unit, for a plurality of measurement processes performed repeatedly.
    Type: Grant
    Filed: August 6, 2019
    Date of Patent: June 14, 2022
    Assignee: SHIMADZU CORPORATION
    Inventor: Hideaki Izumi
  • Patent number: 11295929
    Abstract: A sample holder tip for use in transmission electron microscopy (TEM) or scanning electron microscopy (SEM) for performing in-situ experiments is described which facilitates in situ analysis of air-sensitive samples and allows physical manipulation of the sample. This includes, but is not limited to translation, rotation, electrical biasing, and heating/cooling for one or more individual cradles. The sample holder tip incorporates a compact design which eases sample loading and enables direct linkages between consecutive cradles, allowing a single tilt actuator to rotate each cradle around its respective eucentric position. Each of the connecting wires incorporates one or more bends or kinks which enable conductive access to the sample holder tip while also preserving the ability to also retract/extend the tip and tilt individual cradles with at least two degrees of freedom.
    Type: Grant
    Filed: July 31, 2020
    Date of Patent: April 5, 2022
    Inventor: Alpesh Khushalchand Shukla
  • Patent number: 11295945
    Abstract: A no-electric field region (246A) and an electric field region (246B) are formed in a flight tube (246). In the no-electric field region (246A), ions introduced from an ion emission unit fly. In the electric field region (246B), a reflectron (244) is provided and the ions having passed through the no-electric field region (246A) are reflected to the no-electric field region (246A) by an action of an electric field formed on an inner side of a plurality of electrodes (244A, 244B). A through-hole (246D) is formed in at least a part of the flight tube (246) to be closer to the electric field region (246B) than the no-electric field region (246A).
    Type: Grant
    Filed: May 16, 2018
    Date of Patent: April 5, 2022
    Assignee: SHIMADZU CORPORATION
    Inventor: Tomoya Kudo
  • Patent number: 11289319
    Abstract: The present invention relates to a system for analyzing particles, the system comprising: a NEMS device comprising at least one NEMS sensor for detecting particles impacting the at least one NEMS sensor, each NEMS sensor comprising a NEMS sensor area, a particle lens assembly, the particle lens assembly comprising at least one particle lens for focusing particles onto a NEMS sensor of the at least one NEMS sensor, wherein the particle lens assembly is spaced from the at least one NEMS sensor area by a separation distance, wherein the system is configured to sustain a space defined between the particle lens assembly and the NEMS device at a pressure where a mean free path for a reference particle is greater than the separation distance. The present invention also relates to a corresponding method.
    Type: Grant
    Filed: August 6, 2019
    Date of Patent: March 29, 2022
    Assignees: Thermo Fisher Scientific (Bremen) GmbH, California Institute of Technology
    Inventors: Alexander Makarov, Maria Reinhardt-Szyba, Michael Roukes
  • Patent number: 11282672
    Abstract: Disclosed are a charged particle beam apparatus and a sample processing observation method, the method including: a sample piece formation process in which a sample is irradiated with a focused ion beam such that a sample piece is cut out from the sample; a cross-section processing process in which the sample piece support holds the sample piece and a cross section thereof is irradiated with the ion beam to process the cross section; a sample piece approach movement process in which the sample piece support holds the sample piece and the sample piece is moved to a position that is closer to an electron beam column than an intersection point of beam optical axes of the ion beam and an electron beam is; and a SEM image acquisition process in which the cross section is irradiated with the electron beam to acquire the SEM image of the cross section.
    Type: Grant
    Filed: September 17, 2019
    Date of Patent: March 22, 2022
    Assignee: HITACHI HIGH-TECH SCIENCE CORPORATION
    Inventors: Hidekazu Suzuki, Tatsuya Asahata
  • Patent number: 11276544
    Abstract: An ion source can include a magnetic field generator configured to generate a magnetic field in a direction parallel to a direction of the electron beam and coincident with the electron beam. However, this magnetic field can also influence the path of ionized sample constituents as they pass through and exit the ion source. An ion source can include an electric field generator to compensate for this effect. As an example, the electric field generator can be configured to generate an electric field within the ion source chamber, such that an additional force is imparted on the ionized sample constituents, opposite in direction and substantially equal in magnitude to the force imparted on the ionized sample constituents by the magnetic field.
    Type: Grant
    Filed: December 28, 2020
    Date of Patent: March 15, 2022
    Assignee: PerkinElmer Health Sciences, Inc.
    Inventors: David G. Welkie, Tong Chen
  • Patent number: 11276557
    Abstract: A miller, a non-transitory computer readable medium, and a method. The miller may include an ion beam column that may be configured to form a vertical surface in an object by applying a milling process that may include forming a vertical surface by irradiating, for a certain period of time, an area of an upper surface of an object by a defocused ion beam that comprises multiple rays. During the certain period of time and at a plane of the upper surface of the object, a majority of the multiple rays are closer to an edge of the defocused ion beam than to a center of the defocused ion beam. The focal plane of the defocused ion beam is located below the upper surface of the object.
    Type: Grant
    Filed: September 17, 2019
    Date of Patent: March 15, 2022
    Assignee: Applied Materials Israel Ltd.
    Inventor: Yehuda Zur
  • Patent number: 11269220
    Abstract: The present invention provides a polarized light irradiation device capable of setting an alignment azimuth angle ? of liquid crystal molecules to be a desired angle even when the incident angle of polarized light on a substrate is not 0° in irradiation of a photo alignment film with polarized light, and a method for manufacturing a liquid crystal display device by using the polarized light irradiation device.
    Type: Grant
    Filed: June 7, 2017
    Date of Patent: March 8, 2022
    Assignee: SHARP KABUSHIKI KAISHA
    Inventors: Seiji Fujiwara, Takashi Sonoda, Nobufumi Tomimaru, Hitoshi Watanabe, Shinichi Terashita, Fumikazu Shimoshikiryoh
  • Patent number: 11264223
    Abstract: A method is disclosed comprising providing a biological sample on a swab, directing a spray of charged droplets onto a surface of the swab in order to generate a plurality of analyte ions, and analysing the analyte ions.
    Type: Grant
    Filed: July 12, 2018
    Date of Patent: March 1, 2022
    Assignee: Micromass UK Limited
    Inventors: Zoltan Takats, Emrys Jones, James Ian Langridge, Michael Raymond Morris, Tamas Karancsi, Steven Derek Pringle, Julia Balog, Daniel Simon, Lajos Godorhazy, Daniel Szalay, Keith Richardson, Phillip Robert Bennett, David Alan Macintyre, Pamela Pruski
  • Patent number: 11257658
    Abstract: An object of the invention is to correct an aberration or a defocus of an electron beam for irradiation, and control an influence on a deflector by a fluctuation in an electric field of an electrostatic lens. The invention provides a charged particle beam apparatus including a deflector that deflects a charged particle beam with which a specimen is irradiated, an objective lens that focuses the charged particle beam on the specimen, an electrostatic lens that includes a part of the objective lens and to which a voltage for correcting the aberration or the defocus of the charged particle beam is applied, and an constant electric field applying electrode that is provided between the deflector and the electrostatic lens and to which a constant voltage having a same sign with the voltage applied to the electrostatic lens is applied.
    Type: Grant
    Filed: September 17, 2019
    Date of Patent: February 22, 2022
    Assignee: HITACHI HIGH-TECH CORPORATION
    Inventors: Noritsugu Takahashi, Makoto Sakakibara, Makoto Suzuki, Minoru Yamazaki
  • Patent number: 11237186
    Abstract: The invention relates to the field of probe measurements of objects after micro- and nano-sectioning. The essence of the invention consists in that in a wide-field scanning probe microscope combined with an apparatus for modifying an object, said microscope comprising a base on which a piezo-scanner unit having a piezo scanner, a probe unit having a probe holder, and a punch unit having a punch are movably mounted, a punch actuator is configured as a three-axis actuator, allowing the punch to move along a first axis X, a second axis Y and a third axis Z; and the probe unit is mounted on the punch actuator. The invention is aimed at simplifying the structure of the device by combining into one unit means for measuring and means for modifying an object. The technical result of the invention consists in increasing measurement resolution.
    Type: Grant
    Filed: May 18, 2017
    Date of Patent: February 1, 2022
    Assignee: Chastnoe Uchrezhdenie Nazarbayev University Research and Innovation System
    Inventors: Alexander Mihaylovich Alekseev, Aleksey Dmitrievich Volkov, Dmitry Yurjevich Sokolov, Anton Evgenievich Efimov