Abstract: An aspect of the invention provides a defect inspection apparatus being able to accurately inspect a micro foreign matter or defect at a high speed for an inspection target substrate in which a repetitive pattern and a non-repetitive pattern are mixed. In a foreign matter anti-adhesive means 180, a transparent plate 187 is placed on a placement table 34 through a frame 185. In the foreign matter anti-adhesive means 180, a shaft 181 which is rotatably supported by two columnar supports 184 fixed onto a base 186 is coupled to a motor 182 by a coupling 183. The shaft 181 is inserted into a part of a frame 185 between the two columnar supports 184 such that the frame 185 and the transparent plate 187 are turnable about the shaft 181. Therefore, the whole of the frame 185 is opened and closed in a Z-direction about the shaft 181, and a wafer 1 on the placement table 34 can be covered with the frame 185 and the transparent plate 187.

Abstract: A unit for measuring a power of randomly polarized light beam is configured with spaced first and second beam splitters having respective reflective surfaces which face one another and configured to sequentially reflect a fraction of randomly polarized beam which is incident upon the first splitter. The beam splitters are dimensioned and shaped so that an output beam, reflected from the second beam splitter, has a power independent from the state of polarization of the randomly polarized beam.

Abstract: A device and a method for measuring at least one surface section of an object that is mounted on a carrier includes at least one reference object that can be fixed relative to the carrier, and a holder that can be moved relative to the reference object in at least one first direction and on which a reference body and a distance measuring device are arranged. The reference body and the distance measuring device are mounted in a rotatable manner relative to each other. The distance measuring device is designed to determine a first distance to a first point of the surface section of the object and a second distance to a second point of the reference body wherein the second point corresponds to the first point.

Abstract: A system and method for monitoring bending curvature of a flexible pipe structure, including at least one conduit configured to conform to a profile of a bend stiffener of a flexible pipe structure, and the at least one conduit including one or more sensors, wherein each sensor is configured for measuring a bending curvature of the bend stiffener.

Abstract: Disclosed is a method for reviewing defects in a large number of samples within a short period of time through the use of a defect review apparatus. To collect defect images steadily and at high throughput, a defect detection method is selected before imaging and set up for each of review target defects in the samples in accordance with the external characteristics of the samples that are calculated from the design information about the samples. The defect images are collected after an imaging sequence is set up for the defect images and reference images in such a manner as to reduce the time required for stage movement in accordance with the defect coordinates of the samples and the selected defect detection method.

Abstract: A method for forming a nanostructure penetrating a layer and the device made thereof is disclosed. In one aspect, the device has a substrate, a layer present thereon, and a nanostructure penetrating the layer. The nanostructure defines a nanoscale passageway through which a molecule to be analyzed can pass through. The nanostructure has, in cross-sectional view, a substantially triangular shape. This shape is particularly achieved by growth of an epitaxial layer having crystal facets defining tilted sidewalls of the nanostructure. It is highly suitably for use for optical characterization of molecular structure, particularly with surface plasmon enhanced transmission spectroscopy.

Abstract: A method for determining the rolling radius of a wheel, of a motor vehicle on a road surface, including: projecting a light pattern onto the wheel and road surface; recording a light pattern reflected by the wheel and road surface using an image recording device; determining 3D coordinates of points of the reflected light pattern; identifying points of the reflected light pattern of the wheel; identifying points of the reflected light pattern of the road surface; determining the position of the center of rotation of the wheel from the reflected light pattern points identified as belonging to the wheel; determining the position of the road surface from the reflected light pattern points identified as belonging to the road surface; determining the rolling radius on the contact surface of the wheel as the distance between the center of rotation of the wheel and the position of the road surface.

Abstract: A nano particle tracking device includes a channel structure. The channel structure of the nano particle tracking device includes a pair of microchannels in which a specimen including nano particles is accommodated and which face each other, at least one nano channel which is between the pair of microchannels, which connects the pair of microchannels to each other and through which the nano particles in the specimen are moved, and a nano grating below the nano channel and crossing the nano channel perpendicularly.

Abstract: Wafer inspection method to perform wafer inspection based on photo map information. The wafer inspection method may include: detecting a sample center location on a wafer; compensating the detected sample center location to a compensated center location based on photo map information; and detecting defective dies included in the wafer based on the compensated center location.

Abstract: An optical measurement device is adapted to measure characteristics of a measurement targeted fluid based on a transmitted inspection light. The device comprises a cell having an internal space for accommodating the measurement targeted fluid to flow therein and having a pair of opposing through holes for transmitting the inspection light, each of the through holes sealed with a transparent member. The device includes a projection optical system member having a port for projecting the inspection light and a light-receiving optical system member having a port for receiving the inspection light transmitted through the internal space. A base member is provided for supporting the cell, the projection optical system member, and the light-receiving optical system member in a configuration with gaps between the cell and the respective optical system members to accommodate movement in a predetermined range along a direction perpendicular to an optical axis of the inspection light.

Abstract: A system for monitoring thin-film fabrication processes is herein disclosed. Diffraction of incident light is measured and the results are compared to a predictive model based on at least one idealized or nominal structure. The model and/or the measurement of diffracted incident light may be modified using the output of one or more additional metrology systems.

Abstract: The present invention provides a distributed optical fiber sensor capable of measuring the strain and temperature of an object to be measured simultaneously and independently with high spatial resolution. A distributed optical fiber sensor FS is a distributed optical fiber sensor which uses an optical fiber 15 as a sensor, and a strain and temperature detector 14 measures a Brillouin frequency shift amount caused by a strain and a temperature generated in the optical fiber 15 by using a Brillouin scattering phenomenon, measures a Rayleigh frequency shift amount caused by the strain and temperature generated in the optical fiber 15 by using a Rayleigh scattering phenomenon, and calculates the strain and temperature generated in the optical fiber 15 from the measured Brillouin frequency shift amount and Rayleigh frequency shift amount.

Abstract: The invention provides a technique for increasing the illumination intensity of probe light in a diffusely scattering sample without increasing the power of the probe beam. Generally, an optical filter is used which permits a collimated probe beam of light to pass through to the sample, but which reflects back towards the sample much of the backscattered scattered probe light emerging at a wider range of angles. In particular embodiments a collimated laser beam is delivered to the sample through a multi-layer dielectric filter covering a portion of the sample. The filter is transmissive to the laser light at normal incidence, but reflective at shallower angles of incidence characteristic of the backscattered light.

Abstract: A method of monitoring progress of polishing of a substrate having at least two regions including a first region and a second region with different structures is provided. The method includes: applying light to plural measurement points on the substrate during polishing of the substrate; receiving reflected light from each measurement point; measuring intensity of the reflected light; producing a spectrum of the reflected light from the intensity; classifying the spectrum as spectrum of the reflected light from the first region or as spectrum of the reflected light from the second region based on a shape of the spectrum or the intensity of the reflected light; and monitoring progress of polishing of the substrate based on a temporal change in the spectrum of the reflected light from the first region.

Abstract: The present teachings provide for systems, and components thereof, for detecting and/or analyzing light. These systems can include, among others, optical reference standards utilizing luminophores, such as nanocrystals, for calibrating, validating, and/or monitoring light-detection systems, before, during, and/or after sample analysis.

Abstract: In an FBG (Fiber Bragg Grating) sensor, a stress direction converter includes a flat portion to which stresses are applied from the exterior, and stress transmitting sections that are bridged from the flat portion to an optical fiber cable. An inclined portion of the optical fiber cable, through which reflected light reflected by gratings is transmitted, is disposed along an inclined section that makes up one of the stress transmitting sections.

Abstract: In the inspection of a defect in a fine concave-convex pattern, a spectral waveform of a detection area of an inspection object is detected, area determination as to which area section determined by a pattern type of the inspection object the detection area belongs to is performed, a feature calculation equation and a determination index value which correspond to a determined area section and vary according to defect type is selected, feature calculation on the spectral waveform data in accordance with the selected feature calculation equation is performed, and a calculated feature value and the selected determination index value are compared to perform determination processing according to defect type.

Abstract: A method for authenticating an object, comprising determining a physical dispersion pattern of a set of elements, determining a physical characteristic of the set of elements which is distinct from a physical characteristic producible by a transfer printing technology, determining a digital code associated with the object defining the physical dispersion pattern, and authenticating the object by verifying a correspondence of the digital code with the physical dispersion pattern, and verifying the physical characteristic.

Abstract: A real-time monitoring of an equivalence ratio of a gas-fuel mixture of a gas turbine engine is provided. The system includes multiple optical probes arranged on a plurality of fuel nozzles for transmitting laser beams directly through a gas-fuel mixture or indirectly by reflecting the laser beams from a surface of a centerbody or burner tube of the fuel nozzle. The system also includes one or more detectors to measure the transmitted laser beams from the multiple optical probes. Further, the system includes a data acquisition subsystem for acquiring and processing signals from the one or more detectors to determine the equivalence ratio of the gas-fuel mixture of the nozzle.

Abstract: An instrument (1) for characterizing an optical system, includes: at least one primary source (3) for emitting an illumination light beam (FE); an optical device for directing the illumination beam (FE) onto the optical system (L) to be characterized; a wave front analyzer (4) adapted for receiving a beam from the optical system (L); and a unit for processing the measure signals from the wave front analyzer (4), adapted for providing characterization information of the optical system (L). The instrument further includes a scattering member (22) substantially provided in the focal plane of the optical system (L) so as to create a secondary source generating a secondary beam flowing through the optical system (L) and further directed towards the wave front analyzer.