Abstract: A measuring apparatus which applies light, emitted from a light source, to a sample contained in a container, and detects light emitted from the sample to measure physical or chemical properties of the sample, includes a measuring optical system which measures the sample, and a position detection optical system which detects the position of the bottom of the container.

Abstract: Systems and techniques for detecting the presence of foreign material in food utilizing optical backlighting and/or ultrasonic inspection are presented. In optical backlighting, a substantially monochromatic light source optically backlights a food stream with source light having a wavelength between about 500 and 600 nm. An image of the food stream is captured and the presence of foreign material is determined when a portion of the detected image exceeds a predetermined threshold. The technique is especially suitable for the detection of bone in chicken meat, and the light source can be a planar array of green LEDs. In ultrasonic inspection, a process stream is interrogated with pulses of ultrasound and the presence of foreign material is determined based on the detected off-angle ultrasound scattering response.

Abstract: An optical inspection system rapidly evaluates a substrate by illumination of an area of a substrate larger than a diffraction-limited spot using a coherent laser beam by breaking temporal or spatial coherence. Picosecond or femtosecond pulses from a modelocked laser source are split into a plurality of spatially separated beamlets that are temporally and/or frequency dispersed, and then focused onto a plurality of spots on the substrate. Adjacent spots, which can overlap by up to about 60-70 percent, are illuminated at different times, or at different frequencies, and do not produce mutually interfering coherence effects. Bright-field and dark-field detection schemes are used in various combinations in different embodiments of the system.

Abstract: A method of detecting the condition of a turf grass is described. According to one aspect of the invention, the method comprises steps of attaching an active sensor to a mower; traversing a section of turf grass; and processing the output of the sensor. A device for detecting the condition of turf grass is also disclosed. The device comprises an array of illuminating devices generating a pattern of illuminating light; a detecting device receiving a pattern of reflected light which is coincident with the pattern of illuminating light; a detecting device adapted to detect stray light from the array of illuminating devices; and a feedback loop controlling the array of illuminating devices. A system employing the device is also disclosed.

Abstract: An optical inspection system rapidly evaluates a substrate by illumination of an area of a substrate larger than a diffraction-limited spot using a coherent laser beam by breaking temporal or spatial coherence. Picosecond or femtosecond pulses from a modelocked laser source are split into a plurality of spatially separated beamlets that are temporally and/or frequency dispersed, and then focused onto a plurality of spots on the substrate. Adjacent spots, which can overlap by up to about 60-70 percent, are illuminated at different times, or at different frequencies, and do not produce mutually interfering coherence effects. Bright-field and dark-field detection schemes are used in various combinations in different embodiments of the system.

Abstract: An apparatus and method of measuring the thickness of a substrate. A first light is reflected from a standard sample having a known thickness. The light is concentrated through the light-focusing lens. The first light is converted into a first electrical signal by a detector responding to a light intensity of the concentrated first light. A second light is reflected from a substrate, and then is concentrated through the light-focusing lens. The second light is converted into a second electrical signal by the detector responding to a light intensity of the concentrated second light. An operating unit determines first and second peak values from the first and second electrical signals, respectively. The operating unit calculates the thickness of the substrate by using a standard distance corresponding to the first peak value, a moving distance of the substrate corresponding to the second peak value, and the known thickness of the standard sample.

Abstract: A measuring system for easily detecting Misjudged Detection (M/D). A camera for measurement attached to a robot is used to obtain an image for measurement of a workpiece so as to measure and detect a set point. Next, a camera for validation is used to obtain an image for validation of the workpiece so as to measure and detect the set point. One camera may capture both of the images for measurement and validation, by utilizing movement of the robot. It is judged whether the measured results obtained from the images represent the same point on the workpiece or not. If yes, the measured results are judged to be valid, otherwise, the measured results are judged to be invalid and an exception process, such as a retrial, is executed. The images by the camera may also be used for judging a moving path of the robot during measurement of a large object.

Abstract: An optical surface analysis system for scanning the surface of a (silicon) wafer and detect if any residual material is still on the wafer surface in order to determine an appropriate end-point in a polishing process. An Optical Surface Analyzer (OSA), of the present invention, is generally used to identify composition, measure surface area, and measure thickness variations of thin film layers of material. The difference in optical properties (index of refraction) of different materials on the surface allows the system of the present invention to separate different materials on the wafer surface using the histogram plots generated by the OSA. This method is used to detect and make a quantitative assessment regarding the amount of residual material to be removed by the polishing process and, therefore, when an appropriate end-point has been reached in the polishing process.

Abstract: A method for determining one or more process parameter settings of a photolithographic system is disclosed.

Abstract: An improved laser scanning apparatus (46) for determining frame or unibody alignment or misalignment of a vehicle (40) is provided, which includes a laser assembly (54), a pair of rotatable mirror assemblies (56,58) and laser detectors (114,116) located within an enclosed housing (50,52). The laser assembly (54) has an upper pair of lasers (122,126) located in known, spaced relationship above a lower pair of lasers (124,128); detector assemblies (114, 116) are also provided including substantially parabolic reflective surfaces (118a, 120a) with detectors (114a, 116a) disposed substantially at the focal point of the surfaces (118a, 120a). The apparatus (46) is used in conjunction with a plurality of individually coded reflective targets (44) which are suspended from known reference points on the vehicle (40).

Abstract: The present invention provides a method and system to correct for angular spread within an HDR used to determine IR optical constants. An algorithm simulates the transmission and polarized reflection actually observed. This is achieved by averaging power scattering over an angular spread corresponding to the size of the HDR mirror. Such an algorithm may incorporate corrections for angular spread that may be used to determine the thickness of a film (coating) as well as the optical constants of the film or coating on low loss ranges.

Abstract: An image-based method and corresponding apparatus for measuring, in scientifically basic terms, the complete fiber length distribution from a tapered beard. The method may be referred to as length by image analysis (Li).

Abstract: A measuring chamber for photo-acoustical sensors for the continuous measurement of radiation-absorbing substances, in particular of radiation-absorbing particles, in gaseous samples includes at least one entry and at least one exit for the samples, a tube section with microphone that allows for the flow-through of the sample in longitudinal direction, and at least one entry and exit point for a laser beam that is aligned with the tube section, and whereby these entry and exit points are both arranged at a distance from the measuring tube by at least one chamber with a cross-sectional area that is expanded relative to the tube section.

Abstract: An inspecting apparatus for detecting a foreign matter in a container having a recessed and protruding shape includes: illumination units arranged annularly on inner and outer sides of an annular carrier line and casting parallel lights onto the inspection subject from the outside thereof; image pickup units arranged on the outside of the annular carrier line and receiving lights from the inspection subject, simultaneously from two directions around the inspection subject, and picking up images of the inspection subject; wherein the image pickup units pick up images of the inspection subject in a state where an angle ?1 formed by light-receiving axes of the image pickup units is 30 to 90 degrees and an angle ?2 formed by the light-receiving axis of the image pickup unit and the light of the illumination unit next to the image pickup unit is 30 to 60 degrees.

Abstract: A method of inspecting a light-management film comprises reflecting light from an overhead light source off a first side of the light-management film and examining the light-management film for defects; directing transmission light from a backlight source through a second side of the light-management film to the first side and examining the light-management film for defects; reflecting light from the overhead light source off the second side of the light-management film and examining the light-management film for defects; directing transmission light from the backlight source through the first side of the light-management film to the second side and examining the light-management film for defects; and measuring a location of each of the examined defects in the light-management film.

Abstract: A microchemical system according to which measurement can be carried out with high sensitivity. The microchemical system 1 has a two-wavelength multiplexing device in which gradient index rod lenses 501 and 502 are connected together at an end face of each thereof and a dielectric multi-layer film filter 503 is formed between these end faces. Exciting light and detecting light is multiplexed by the two-wavelength multiplexing device, and then the exciting light and the detecting light are guided to an optical fiber unit 10 through an optical fiber 101 with a single mode. The optical fiber unit 10 has built therein a gradient index rod lens 102 at a leading end thereof, and the exciting light and the detecting light are irradiated onto a sample from the gradient index rod lens 102.

Abstract: An apparatus for stacking a predetermined number of X-ray films has a sheet member holding device disposed above a stacking position for temporarily holding at least a first X-ray film, and an actuating device for displacing the sheet member holding device from the stacking position to drop the X-ray film held by the sheet member holding device into the stacking position. The apparatus is capable of stacking a plurality of X-ray films highly accurately and efficiently in the stacking position while avoiding damage to the X-ray films.

Abstract: An object of the present invention is to provide an appearance inspection apparatus that can change the method of illumination, the shape of illumination light, and a spatial filter for the projection of an image of a sample dynamically during inspection, and also to provide a projection method for projecting the image of the sample. Illumination optics 12 and 13 and imaging optics 21 and 22 in the appearance inspection apparatus are respectively configured to form reflecting optical systems with mirror array devices 16 and 26 disposed at points conjugate to the pupil position 8 of an objective lens 3. The mirror array devices 16 and 26 are controlled in accordance with the field-of-view position of the objective lens 3 on the sample.

Abstract: The invention relates to a method and a device for optically measuring the surface shape and for the optical surface inspection of moving elongated bodies, according to which surface shape measurement and surface inspection are integrated. A projector applies a line pattern to the object to be measured. A camera registers the surface of the object to be measured and compares the image information with a reference pattern. Two high-resolution cameras additionally detect surface defects on the object to be measured. The inventive measuring technique is especially suitable for a combined planarity and surface measurement of metal strips in rolling installations.

Abstract: The invention provides methods and apparatus for defining a pattern on a substrate. An example apparatus includes: an emission source for directing an emission to the substrate, defining a working position between the emission source and the substrate, at least one shadow mask having one or more apertures and at least one inspection device for inspecting the properties of the substrate and/or the pattern, the inspection device having at least one inspection tool. The shadow mask and the inspection tool are separately provided on a movable portion, so that the shadow mask and the inspection tool are subsequently movable into the working position. The invention is further related to a method for defining a pattern on a substrate.