Patents Examined by Laura M Menz
  • Patent number: 11749598
    Abstract: The present application discloses a method for fabricating a semiconductor device. The method includes providing a substrate, forming a circuit layer on the substrate and including a functional block on the substrate, and a test pad on the substrate and distal from the functional block, forming a through semiconductor via physically and electrically coupled to the test pad, and forming a redistribution structure on the circuit layer and including a first conductive portion over the functional block and electrically coupled to the functional block, and a second conductive portion over the test pad and electrically coupled to the test pad through the through semiconductor via.
    Type: Grant
    Filed: May 24, 2022
    Date of Patent: September 5, 2023
    Assignee: NANYA TECHNOLOGY CORPORATION
    Inventor: Tse-Yao Huang
  • Patent number: 11749650
    Abstract: A method of manufacturing a semiconductor device includes: providing an element stack on a carrier substrate; forming an interconnection structure connecting the element stack laterally in an area on the carrier substrate adjacent to the element stack, wherein the interconnection structure includes an electrical isolation layer and a conductive structure in the electrical isolation layer; and controlling a height of the conductive structure in the interconnection structure, so that at least a part of components to be electrically connected in the element stack are in contact and therefore electrically connected to the conductive structure at the corresponding height. Forming the conductive structure includes: forming a conductive material layer in the area; forming a mask layer covering the conductive material layer; patterning the mask layer into a pattern corresponding to the conductive structure; and using the mask layer as an etching mask to selectively etch the conductive material layer.
    Type: Grant
    Filed: December 10, 2021
    Date of Patent: September 5, 2023
    Assignee: INSTITUTE OF MICROELECTRONICS, CHINESE ACADEMY OF SCIENCES
    Inventor: Huilong Zhu
  • Patent number: 11749663
    Abstract: Techniques and mechanisms for providing interconnected circuitry of an integrated circuit (IC) die stack. In an embodiment, first integrated circuitry of a first IC die is configured to couple, via a first interconnects of the first IC die, to second integrated circuitry of a second IC die. When the first IC die and the second IC die are coupled to one another, second interconnects of the first IC die are further coupled to the second integrated circuitry, wherein the second interconnects are coupled to each of two opposite sides of the first IC die. In another embodiment, the second integrated circuitry includes processor logic, and the first integrated circuitry is configured to cache data for access by the processor logic. In another embodiment, the first integrated circuitry includes a power delivery circuit and an on-package input-output interface to cache data for access by the processor logic at higher bandwidth with lower power consumption.
    Type: Grant
    Filed: May 11, 2022
    Date of Patent: September 5, 2023
    Assignee: Intel Corporation
    Inventors: Wilfred Gomes, Mark Bohr, Glenn J. Hinton, Rajesh Kumar
  • Patent number: 11742349
    Abstract: A method includes forming a first channel region, a second channel region, and a third channel region over a substrate, depositing a first interfacial layer over the first, second, and third channel regions, removing the first interfacial layer from the first and second channel regions, depositing a second interfacial layer over the first and second channel regions, thinning a thickness of the second interfacial layer over the first channel region, depositing a high-k dielectric layer over the first, second, and third channel regions, and forming a gate electrode layer over the first, second, and third channel regions.
    Type: Grant
    Filed: April 11, 2022
    Date of Patent: August 29, 2023
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD
    Inventors: Ta-Chun Lin, Kuo-Hua Pan, Jhon Jhy Liaw, Shien-Yang Wu
  • Patent number: 11742359
    Abstract: An electronic device of an embodiment of the disclosure includes a first substrate, a second substrate, and a driving layer. The first substrate and the second substrate are disposed opposite to each other, and the driving layer is disposed between the first substrate and the second substrate. The driving layer includes a scan line and a data line. The scan line is disposed on the first substrate and includes a first scan line segment. The first scan line segment has an opening and includes a first branch and a second branch. The first branch and the second branch are located on two opposite sides of the opening and are electrically connected in parallel with each other. The data line is disposed on the first substrate and intersects with the scan line. The electronic device of the embodiment of the disclosure may exhibit ideal display effect.
    Type: Grant
    Filed: April 14, 2022
    Date of Patent: August 29, 2023
    Assignee: Innolux Corporation
    Inventors: Hung-Kun Chen, Li-Wei Sung, Shuo-Ting Hong, Chung-Le Chen
  • Patent number: 11735523
    Abstract: Techniques are employed to mitigate the anchoring effects of cavity sidewall adhesion on an embedded conductive interconnect structure, and to allow a lower annealing temperature to be used to join opposing conductive interconnect structures. A vertical gap may be disposed between the conductive material of an embedded interconnect structure and the sidewall of the cavity to laterally unpin the conductive structure and allow uniaxial expansion of the conductive material. Additionally or alternatively, one or more vertical gaps may be disposed within the bonding layer, near the embedded interconnect structure to laterally unpin the conductive structure and allow uniaxial expansion of the conductive material.
    Type: Grant
    Filed: May 7, 2021
    Date of Patent: August 22, 2023
    Assignee: ADEIA SEMICONDUCTOR BONDING TECHNOLOGIES INC.
    Inventor: Cyprian Emeka Uzoh
  • Patent number: 11735673
    Abstract: In one embodiment, a semiconductor device includes a stacked film including electrode layers and insulating layers that are alternately stacked in a first direction. The device further includes a first insulator, a charge storage layer, a second insulator and a semiconductor layer that are provided in the stacked film. The device further includes a third insulator provided between an electrode layer and an insulating layer and between the electrode layer and the first insulator, and including aluminum oxide having an ? crystal phase.
    Type: Grant
    Filed: September 14, 2020
    Date of Patent: August 22, 2023
    Assignee: Kioxia Corporation
    Inventors: Masaki Noguchi, Akira Takashima
  • Patent number: 11728240
    Abstract: A circuit carrier arrangement includes: a cooling plate (1) which has spacer and fastening elements (3) for connection to a printed circuit board (2) in a spaced-apart manner; a printed circuit board (2) which has bores (4) for receiving spring element sleeves (9); at least one power semiconductor component (10) which is connected by a soldered connection to the printed circuit board (2) and fastening elements (3) in the state in which it is fitted with the cooling plate (1) by means of plug-in connections (11) of spring-action configuration; and at least one spring element (5) having at least two spring element sleeves (9) between which a web (6) that is connected to the spring element sleeves (9) extends, and supporting elements (7) arranged on either side of said web and at least one spring plate (8) being arranged on said web.
    Type: Grant
    Filed: August 3, 2021
    Date of Patent: August 15, 2023
    Assignee: VITESCO TECHNOLOGIES GmbH
    Inventors: Jens Reiter, Rico Hartmann, Christian Lammel
  • Patent number: 11729980
    Abstract: A method addresses low cost, low resistance metal interconnects and mechanical stability in a high aspect ratio structure. According to the various implementations disclosed herein, a replacement metal process, which defers the need for a metal etching step in the fabrication process until after all patterned photoresist is no longer present. Under this process, the conductive sublayers may be both thick and numerous. The present invention also provides for a strut structure which facilitates etching steps on high aspect ratio structures, which enhances mechanical stability in a high aspect ratio memory stack.
    Type: Grant
    Filed: March 9, 2022
    Date of Patent: August 15, 2023
    Assignee: SunRise Memory Corporation
    Inventors: Eli Harari, Scott Brad Herner, Wu-Yi Henry Chien
  • Patent number: 11728288
    Abstract: A die includes: a semiconductor substrate; an interconnect structure disposed on the semiconductor substrate and including: inter-metal dielectric (IMD) layers; metal features embedded in the IMD layers; and a guard ring structure including concentric first and second guard rings that extend through at least a subset of the IMD layers; and a through silicon via (TSV) structure extending through the semiconductor substrate and the subset of IMD layers to electrically contact one of the metal features. The first guard ring surrounds the TSV structure; and the second guard ring surrounds the first guard ring and is configured to reduce a parasitic capacitance between the guard ring structure and the TSV structure.
    Type: Grant
    Filed: August 27, 2021
    Date of Patent: August 15, 2023
    Assignee: Taiwan Semiconductor Manufacturing Company Limited
    Inventors: Jen-Yuan Chang, Chien-Chang Lee, Chia-Ping Lai
  • Patent number: 11723218
    Abstract: A device includes a substrate having a first side and a second side, a first transistor that includes a first gate over a first protrusion and a first source region and a first drain region interposing the first protrusion, a first buried contact disposed adjacent to the first protrusion and having at least a portion extending into the substrate, a first contact plug disposed over the first drain region, first conductive lines disposed over the first contact plug and electrically connecting to the first drain region by the first contact plug, first via penetrating through the substrate and connecting the first buried contact; and second conductive lines disposed over the second side of the substrate and electrically connecting to the first via. The first buried contact is electrically connecting to the first source region or the first gate.
    Type: Grant
    Filed: March 29, 2021
    Date of Patent: August 8, 2023
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
    Inventors: Shy-Jay Lin, Chien-Min Lee, Hiroki Noguchi, Mingyuan Song, Yen-Lin Huang, William Joseph Gallagher
  • Patent number: 11721623
    Abstract: A semiconductor nanostructure and an epitaxial semiconductor material portion are formed on a front surface of a substrate, and a planarization dielectric layer is formed thereabove. A first recess cavity is formed over a gate electrode, and a second recess cavity is formed over the epitaxial semiconductor material portion. The second recess cavity is vertically recessed to form a connector via cavity. A metallic cap structure is formed on the gate electrode in the first recess cavity, and a connector via structure is formed in the connector via cavity. Front-side metal interconnect structures are formed on the connector via structure and the metallic cap structure, and a backside via structure is formed through the substrate on the connector via structure.
    Type: Grant
    Filed: February 21, 2022
    Date of Patent: August 8, 2023
    Assignee: Taiwan Semiconductor Manufacturing Company Limited
    Inventors: Li-Zhen Yu, Chia-Hao Chang, Lin-Yu Huang, Cheng-Chi Chuang, Chih-Hao Wang
  • Patent number: 11715931
    Abstract: An optical device has a gallium and nitrogen containing substrate including a surface region and a strain control region, the strain control region being configured to maintain a quantum well region within a predetermined strain state. The device also has a plurality of quantum well regions overlying the strain control region.
    Type: Grant
    Filed: October 6, 2021
    Date of Patent: August 1, 2023
    Assignee: KYOCERA SLD Laser, Inc.
    Inventors: James W. Raring, Christiane Poblenz Elsass
  • Patent number: 11715499
    Abstract: A MRAM structure, which is provided with multiple source lines between active areas, each source line has multiple branches electrically connecting with the active areas at opposite sides in alternating arrangement. Multiple word lines traverse through the active areas to form transistors. Multiple storage units are disposed between the word lines on the active areas in staggered array arrangement, and multiple bit lines electrically connect with storage units on corresponding active areas, wherein each storage cell includes one of the storage unit, two of the transistors respectively at both sides of the storage unit, and two branches of the source line.
    Type: Grant
    Filed: April 7, 2021
    Date of Patent: August 1, 2023
    Assignee: UNITED MICROELECTRONICS CORP.
    Inventors: Po-Kai Hsu, Hung-Yueh Chen, Kun-I Chou, Jing-Yin Jhang, Hui-Lin Wang, Yu-Ping Wang
  • Patent number: 11710766
    Abstract: Provided is a semiconductor device comprising a semiconductor substrate containing oxygen. An oxygen concentration distribution in a depth direction of the semiconductor substrate has a high oxygen concentration part where an oxygen concentration is higher on a further upper surface-side than a center in the depth direction of the semiconductor substrate than in a lower surface of the semiconductor substrate. The high oxygen concentration part may have a concentration peak in the oxygen concentration distribution. A crystal defect density distribution in the depth direction of the semiconductor substrate has an upper surface-side density peak on the upper surface-side of the semiconductor substrate, and the upper surface-side density peak may be arranged within a depth range in which the oxygen concentration is equal to or greater than 50% of a peak value of the concentration peak.
    Type: Grant
    Filed: March 23, 2021
    Date of Patent: July 25, 2023
    Assignee: FUJI ELECTRIC CO., LTD.
    Inventor: Tomoyuki Obata
  • Patent number: 11705380
    Abstract: The present disclosure provides a method for fabricating a semiconductor device including performing a bonding process to bond a second die onto a first die, forming a first mask layer on the second die, forming a first opening along the first mask layer and the second die, and extending to the first die, forming isolation layers on sidewalls of the first opening, forming protection layers covering upper portions of the isolation layers, and forming a conductive filler layer in the first opening.
    Type: Grant
    Filed: May 24, 2022
    Date of Patent: July 18, 2023
    Assignee: NANYA TECHNOLOGY CORPORATION
    Inventors: Tse-Yao Huang, Shing-Yih Shih
  • Patent number: 11705420
    Abstract: A method includes forming a package component comprising forming a dielectric layer, patterning the dielectric layer to form an opening, and forming a redistribution line including a via in the opening, a conductive pad, and a bent trace. The via is vertically offset from the conductive pad. The conductive pad and the bent trace are over the dielectric layer. The bent trace connects the conductive pad to the via, and the bent trace includes a plurality of sections with lengthwise directions un-parallel to each other. A conductive bump is formed on the conductive pad.
    Type: Grant
    Filed: February 18, 2021
    Date of Patent: July 18, 2023
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
    Inventors: Tsung-Yen Lee, Chia-Kuei Hsu, Shang-Lun Tsai, Ming-Chih Yew, Po-Yao Lin
  • Patent number: 11699649
    Abstract: An electronic device (e.g., integrated circuit) and method of making the electronic device is provided that reduces a strength of an electric field generated outside a package of the electronic device proximate to the low voltage lead pins. The electronic device includes a low voltage side and a high voltage side. The low voltage side includes a low voltage die attached to a low voltage die attach pad. Similarly, the high voltage side includes a high voltage die attached to a high voltage die attach pad. Lead pins are attached to each of the low and high voltage attach pads and extend out from a package of the electronic device in an inverted direction.
    Type: Grant
    Filed: November 12, 2021
    Date of Patent: July 11, 2023
    Assignee: TEXAS INSTRUMENTS INCORPORATED
    Inventors: Chang-Yen Ko, J K Ho
  • Patent number: 11699695
    Abstract: A semiconductor device includes a first integrated circuit and a second integrated circuit disposed on a semiconductor substrate and spaced apart from each other. A wiring structure is disposed on the semiconductor substrate and electrically connects the first integrated circuit and the second integrated circuit. A first TSV area and a second TSV area are disposed between the first integrated circuit and the second integrated circuit The first and second TSV areas include a plurality of first and second TSV structures penetrating through the semiconductor substrate, respectively. The wiring structure passes between the first TSV area and the second TSV area.
    Type: Grant
    Filed: March 1, 2021
    Date of Patent: July 11, 2023
    Assignee: SAMSUNG ELECTRONICS CO., LTD.
    Inventor: Jungpil Lee
  • Patent number: 11696445
    Abstract: A method of forming a microelectronic device comprises forming a microelectronic device structure. The microelectronic device structure comprises a stack structure comprising insulative structures and additional insulative structures vertically alternating with the insulative structures, a dielectric structure vertically extending partially through the stack structure, and a dielectric material vertically overlying and horizontally extending across the stack structure and the dielectric structure. Portions of at least the dielectric material and the dielectric structure are removed to form a trench vertically overlying and at least partially horizontally overlapping a remaining portion of the dielectric structure. The trench is substantially filled with additional dielectric material. Microelectronic devices, memory devices, and electronic systems are also described.
    Type: Grant
    Filed: February 24, 2022
    Date of Patent: July 4, 2023
    Assignee: Micron Technology, Inc.
    Inventors: Shuangqiang Luo, Indra V. Chary, Justin B. Dorhout