Abstract: A silicon oxide film and a polysilicon film are formed on a silicon substrate and are selectively etched to form a contact hole in a region where an emitter is to be formed. A polysilicon film is laid on the substrate and two polysilicon films are patterned to form an emitter electrode and a gate electrode made of the two polysilicon films which are doped with arsenic. The arsenic is diffused from the polysilicon films of the emitter electrode into the silicon substrate to form an N.sup.+ emitter layer which has a high concentration and is shallow. Consequently, the contamination of a gate insulator film can be prevented from occurring and a bipolar transistor having high performance, for example, a high current amplification factor or the like can be formed.

Abstract: A floating gate type semiconductor memory and method of manufacture are described including an erasing gate electrode in which a tunneling region can be formed easily and high reliability can be kept. An active region isolated by element isolation insulating films is formed on a semiconductor substrate. A gate insulating film and a floating gate electrode are sequentially formed on the active region. A control gate electrode is formed above the floating gate electrode with a silicon oxide film disposed therebetween. A tunneling insulating firm is formed only on the side wall of the floating gate electrode. Then, an erasing gate electrode is formed so as to cover the tunneling insulating film.

Abstract: A multi-finger MOS transistor element is provided in which all of the base resistance values of parasitic bipolar transistors (NPN, if an NMOS, or PNP, if a PMOS transistor) in each finger MOS are equal to each other. Thus, each finger MOS transistor element in the multi-finger MOS transistor is turned on simultaneously to enhance ESD protection performance. In the multi-finger MOS transistor, the diffusion region for providing the well/substrate contact is distributed in the source region to make the base resistance value of the parasitic NPN (or PNP) transistor in each finger MOS equal to each other.The multi-finger MOS of the invention includes a plurality of drain regions, each having drain contacts, a plurality of source regions, each having source contacts, and a plurality of gate regions, wherein each gate region is between each drain region and the source region; a bias diffusion region formed in the source region along a middle line which is equally spaced between the pair of gate regions.

Abstract: A manufacturing method of high voltage MOSFET includes a process forming the first and second conductive wells in a semiconductor substrate; process forming drift areas in the first and second conductive wells; process growing an isolation membrane on the substrate surface between the first and second conductive wells; process forming a gate insulation film; process forming a gate on the gate insulation film above the first and second conductive wells; process forming low concentration n- and p-type dopant areas in the drift areas of the parts adjacent to the gate; process forming buried diffusion areas in the first and second conductive wells; process forming source/drain having a body contact on a side on the buried diffusion areas in the first and second conductive wells; process forming an insulation film having a contact formed in such way that is exposed the surface of source/drain on the entire surface of the substrate including the gate and isolation membrane; process forming a metal film on the insul

Abstract: A semiconductor memory device including memory cells with the stacked-capacitor structure that makes it possible to prevent a contact pad from being damaged. This device includes a memory cell area and a peripheral circuit area formed on a semiconductor substrate. An interlayer insulating layer having first and second penetrating holes is formed to cover the entire substrate. A capacitor has lower and upper electrode and a dielectric located between these electrodes. The lower electrode is electrically connected to the first element through the first penetrating hole. Each of the peripheral circuits has a second element, a contact pad electrically connected to the second element, a pad insulating layer formed to cover the contact pad, a pad protection layer formed on the pad insulating layer, and an interconnection conductor electrically connected to the contact pad through a contact hole penetrating the pad protection and pad insulating layers.

Abstract: In a semi-conductor integrated circuit device, electric charges which relate to latch-up phenomenon generation are absorbed effectively, and thereby generation of the latch-up phenomenon is prevented. Low-concentration impurity diffusion layers of I/O transistor within I/O transistor region are electrically connected to high-concentration impurity diffusion layers with different conductive characteristics each. Furthermore, low-concentration impurity diffusion layers of internal circuit transistors within internal circuit transistor region are electrically connected to high-concentration impurity diffusion layers with different conductive characteristics each, or are brought into directly contact therewith, thus electrically connecting thereto. For this reason, it causes an observed area of the low-concentration impurity diffusion layer of the transistors to enlarge, thus absorbing the electric charges causing the latch-up phenomenon generation.

Abstract: Disclosed is a MOS transistor having a polysilicon gate structure in which an overlying metal interconnect completely shorts the gate area. In one embodiment, the gate is formed from multiple fingers joined in a serpentine pattern and separated by oxide-filled spaces. Overlying the fingers and oxide-filled spaces is an interconnect comprising a first metal layer and a second metal layer. The first metal layer overlies the fingers and oxide-filled spaces and the second metal layer overlies the first metal layer. Both metal layers form a stack that simultaneously shorts the fingers. Also disclosed is a method of fabricating such a polysilicon gate structure in a MOS transistor using a series of masks. Once the gate and fingers are defined, a conformal oxide is deposited over the fingers and in the spaces between the fingers. The conformal oxide is anisotropically etched to produce a planarized profile of the fingers and oxide-filled spaces.

Abstract: Selected transistors in a charge pump circuit have their associated well regions tied to a capacitor electrode. As a result, the body effect in these devices is reduced, and, consequently, the threshold voltage is reduced as well. With a lower threshold voltage, these transistors allow the charge pump to quickly generate a voltage higher than the positive power supply voltage or a negative substrate bias voltage. In addition, the metal-insulator-semiconductor (MIS) capacitors in the charge pump preferably have their source/drain regions tied to an associated well region, thereby shorting the source/drain/well region junction. Thus, parasitic capacitances associated with these MIS capacitors is significantly reduced, further increasing the speed of the charge pump circuit.

Abstract: A dynamic random access memory array having an array of memory cells. Individual cells of the array are addressable by a plurality of word lines and a plurality of bit lines. The memory cells are disposed in active areas of the array. The array of memory cells includes a first strip of memory cells. The dynamic random access memory array includes a lower metal layer and an upper metal layer disposed above the lower metal layer. The dynamic random access memory array further includes a dielectric layer disposed between the lower metal layer and the upper metal layer. There is further included a first bit line of the plurality of bit lines which includes a lower metal first bit line portion implemented in the lower metal layer. The lower metal first bit line portion is coupled to a first plurality of memory cells of the first strip of memory cells. The first bit line also includes an upper metal first bit line portion implemented in the upper metal layer.

Abstract: CMOS vertically modulated wells are constructed by using a blanket implant to form a blanket buried layer and then using clustered MeV ion implantation to form a structure having a buried implanted layer for lateral isolation in addition to said blanket buried layer.

Abstract: A method of forming a polycide thin film. First, a silicon layer is formed. Next, a thin barrier layer is formed on the first silicon layer. A second silicon layer is then formed on the barrier layer. Next, a metal layer is formed on the second silicon layer. The metal layer and the second silicon layer are then reacted together to form a silicide.

Abstract: A ferroelectric capacitor comprising a lower electrode, a ceramic capacity film made of a ferroelectric substance and an upper electrode is provided on a substrate insulating film formed on a semiconductor substrate. A layer insulating film is formed on the semiconductor substrate so as to cover the ferroelectric capacitor. An electrode wiring is formed on the layer insulating film. A length L of the surface of the ceramic capacity film which is present between an intersection of the side of the upper electrode and the upper face of the ceramic capacity film and an intersection of the side of the ceramic capacity film and the upper face of the lower electrode and a thickness D of the ceramic capacity film have a relationship of L.gtoreq.2D.

Abstract: A semiconductor device having an integrated circuit with high density load elements in memory cells forming a memory array wherein the load elements are either of the active (e.g., TFTs) or passive (e.g., resistance) type and designed so that the connection path between these elements and active element domains is extended to be longer within the same or smaller scale of the memory cell configuration. For this purpose, the connection path may be made to meander to provide for greater length, i.e., extend in one direction and then another within a single memory cell configuration. This further creates additional space for extending the resistance value of the active or passive load element which, in turn, permits a reduction in drain current, i.e., current consumption, during operational conditions of the memory cells or other circuits.

Abstract: A thin film semiconductor device includes a thin film semiconductor, a gate insulating film, and a gate electrode. The thin film semiconductor includes a source region of a first conductivity type connected to a source electrode/wiring, a drain region of the first conductivity connected to a drain electrode/wiring, a base region being intrinsic or having a conductivity type opposite to the first conductivity and disposed between the source region and the drain region, and a floating island region having the first conductivity type and divided from the source region and the drain region by the base region. The gate electrode is provided upper or under the base region through the gate insulating film. According to such a structure, an ON/OFF ratio of the thin film semiconductor device can be increased.

Abstract: A semiconductor device includes a pair of transistors each having an active region defined on a surface of a semiconductor substrate, a gate insulation film formed on the active region, a gate electrode formed on the gate insulation film, and a diffusion layer formed in the active region of the semiconductor substrate, one of the transistors having an opening formed by removing part of the gate insulation film on the active region, through which opening the diffusion layer is directly connected to the gate electrode of the other transistor, an end portion of the gate electrode intersecting the outer periphery of the opening at at least one point on the diffusion layer.

Abstract: A semiconductor memory device includes a substrate, a transistor on the substrate, and a capacitor. The storage electrode of the capacitor includes upper and lower trunk-like conductive layers, and at least a first branch-like conductive layer. The branch-like conductive layer is L-shaped in cross section. The trunk-like conductive layer is connected to a source/drain region of the transistor.

Abstract: According to the preferred embodiment, an antifuse structure and method for personalizing a semiconductor device is provided that overcomes the limitations of the prior art. The preferred embodiment antifuse comprises a two layer transformable insulator core between two electrodes. The transformable core is normally non-conductive but can be transformed into a conductive material by supplying a sufficient voltage across the electrodes. The two layer core preferably comprises an injector layer and a dielectric layer. The injector layer preferably comprises a two phase material such as silicon rich nitride or silicon rich oxide. Initially, the injector layer and dielectric layer are non-conductive. When a sufficient voltage is applied the core fuses together and becomes conductive.

Abstract: A thin film transistor for a liquid crystal display includes a substrate; an active layer having source and drain regions over the substrate; a first insulating layer adjacent to the active layer and having first and second surfaces, the first surface being on an opposite side to the second surface, and the active layer being adjacent to the second surface of the first insulating layer; a gate electrode adjacent to the first surface of the first insulating layer; a first electrode in contact with the source region; a second electrode in contact with the drain region; a second insulating layer on the second electrode; and a third insulating layer over a resultant structure of the substrate.

Abstract: FS-isolated fields (10a, 10b), LOCOS-isolated fields (11c, 11d), FS-isolated fields (10e, 10f), LOCOS-isolated field (11g, 11h) and FS-isolated field (10i) are arranged in this order. Thus, a master layout can be provided, where SOI transistors having bodies to be supplied with fixed potential and those having bodies not to be supplied with fixed potential are mixed.

Abstract: A field effect transistor comprising source and drain regions, a channel region composed of a semiconductor layer formed between the source and drain regions and gate electrodes disposed to at least three surfaces surrounding the channel region. The structure can increase the number of carriers induced in the channel region and enhance the current driving performance and mutual conductance as compared with the single gate structure or double gate structure.