Patents by Inventor Allen L. D'Ambra

Allen L. D'Ambra has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Dual buffer chamber cluster tool for semiconductor wafer processing
    Patent number: 6440261
    Abstract: Apparatus for multi-chambered semiconductor wafer processing comprising a polygonal structure having at least two semiconductor process chambers disposed on one side. An area between the process chambers provides a maintenance access to the semiconductor processing equipment. Additionally, the apparatus may be clustered or daisy-chained together to enable a wafer to access additional processing chambers without leaving the controlled environment of the semiconductor wafer processing equipment.
    Type: Grant
    Filed: May 25, 1999
    Date of Patent: August 27, 2002
    Assignee: Applied Materials, Inc.
    Inventors: Avi Tepman, Donald J. K. Olgado, Allen L. D'Ambra