Abstract: Stacked static random-access memory (SRAM) circuits have doubled word length for a given SRAM cell area. An integrated circuit (IC) die includes stacked SRAM cells in vertically adjacent device layers with access transistors connected to a common wordline. The IC die with stacked SRAM cells having a common word line may be attached to a substrate and coupled to a power supply and, advantageously, to an active-cooling structure. SRAM cells may be formed in vertically adjacent layers of a substrate and electrically connected at their access transistor gate electrodes.

Abstract: Integrated circuit dies, systems, and techniques are described herein related to three-dimensional dynamic random access memory. A memory device includes vertically aligned semiconductor structures coupled to independent gate structures, corresponding vertically aligned capacitors each coupled to a corresponding one of the semiconductor structures, and a bit line contact extending vertically across a depth of the semiconductor structures and coupled to each of the semiconductor structures.

Abstract: Bits are stored in an array with multiple capacitors per access transistor. An array of multiple ferroelectric capacitors shares a nanowire or nanosheet as a common plate and stores information accessed by a single common select transistor, which uses the nanowire or nanosheet for its channel. In an integrated circuit (IC) system, a group of bitlines is connected to a capacitor array by arrays of nanowires or nanosheets and wordline-controlled non-planar transistors. An IC die with a capacitor array accessed by a single select transistor and sharing a nanowire or nanosheet is coupled to a power supply and a cooling structure.

Abstract: Bits are stored in an array with multiple storage elements sharing a single access transistor and a storage line coupled to the transistor. A single common select transistor accesses information stored in an array of storage elements. Other arrays of storage elements on parallel storage lines can be coupled into a crosspoint array by source lines orthogonal to the storage lines. The storage elements may be non-volatile. In an integrated circuit system, the array may be coupled to a power supply and a cooling structure.

Abstract: Integrated circuit dies, systems, and techniques are described herein related to three-dimensional dynamic random access memory. A memory device includes vertically aligned semiconductor structures coupled to independent gate structures, corresponding vertically aligned capacitors each coupled to a corresponding one of the semiconductor structures, and a bit line contact extending vertically across a depth of the semiconductor structures and coupled to each of the semiconductor structures.

Abstract: Bits are stored in cells having two transistors between two parallel bitlines. In a memory array, first and second transistor channels in a bit cell are parallel and offset and coupled to first and second bitlines, respectively, which are also parallel and offset. Adjacent bit cells share corresponding transistor channel structures. The transistor channels may be orthogonal to the bitlines. The memory array may be on an integrated circuit (IC) die, which may be coupled to a power supply in an IC system. In an IC system, the memory array may be coupled to a power supply and a cooling structure.

Abstract: Techniques and mechanisms for providing an integrated circuit (IC) which comprises an interconnect that extends between channel structures of two transistors. In an embodiment, a separation layer is provided between a first stack of channel structures and a second stack of channel structures, wherein an interior region of the separation layer comprises a sacrificial material which spans on overlap region between the stacks. Fabrication processes form a hole which exposes the interior region, and etching is performed to remove the sacrificial material from the separation layer. Subsequently, deposition processing forms in the interior region a trace portion of the interconnect. In another embodiment, the interconnect comprises a contiguous body of a conductor material, wherein the contiguous body extends to form respective regions of the trace portion, and a via portion of the interconnect.

Abstract: Techniques and mechanisms for providing epitaxial structures of an integrated circuit (IC). In an embodiment, an IC comprises a separation layer, and first and second channel stack structures at opposite surfaces of the separation layer. A first source or drain (SD) structure extends to the first channel stack structure, and a second SD structure extends to the second channel stack structure. A hole extends through the separation layer, wherein the first and second SD structures are formed concurrently by a deposition of an epitaxial (epi) material from one side of the hole. An insulator material of the separation layer facilitates separation of the first and second SD structures from each other during the epi deposition. In another embodiment, respective crystal orientations in the first and second SD structures each face the same direction along a vertical dimension which is orthogonal to the surfaces of the separation layer.

Abstract: Semiconductor devices on a substrate with an alternative crystallographic surface orientation. Example devices includes gate-all-around (e.g., nanoribbon and nanosheet) and forksheet transistors. In an example, a substrate having a (110) crystallographic surface orientation forms the basis for the growth of alternating silicon germanium (SiGe) or germanium tin (GeSn) and silicon (Si) semiconductor layers. P-channel transistors may be formed using SiGe or GeSn nanoribbons while n-channel transistors are formed from Si nanoribbons. The crystallographic surface orientation of the SiGe or GeSn nanoribbons will reflect the same crystallographic surface orientation of the substrate, which leads to a higher hole mobility across the SiGe or GeSn nanoribbons and improved device performance.

Abstract: Gate-all-around integrated circuit structures having nanowires with tight vertical spacing, and methods of fabricating gate-all-around integrated circuit structures having nanowires with tight vertical spacing, are described. For example, an integrated circuit structure includes a vertical arrangement of horizontal silicon nanowires. A vertical spacing between vertically adjacent silicon nanowires is less than 6 nanometers. A gate stack is around the vertical arrangement of horizontal silicon nanowires. A first source or drain structure is at a first end of the vertical arrangement of horizontal silicon nanowires, and a second epitaxial source or drain structure is at a second end of the vertical arrangement of horizontal silicon nanowires.

Abstract: Embodiments of the disclosure include integrated circuit structures having source or drain dopant diffusion blocking layers. In an example, an integrated circuit structure includes a fin including silicon. A gate structure is over a channel region of the fin, the gate structure having a first side opposite a second side. A first source or drain structure is at the first side of the gate structure. A second source or drain structure is at the second side of the gate structure. The first and second source or drain structures include a first semiconductor layer and a second semiconductor layer. The first semiconductor layer is in contact with the channel region of the fin, and the second semiconductor layer is on the first semiconductor layer. The first semiconductor layer has a greater concentration of germanium than the second semiconductor layer, and the second semiconductor layer includes boron dopant impurity atoms.

Abstract: Integrated circuit dies, systems, and techniques are described related to multiple transistor epitaxial layer source and drain transistor circuits operable at low temperatures. A system includes an integrated circuit die having a number of transistors each having a crystalline channel structure, a first layer epitaxial to the channel structure, and a second layer epitaxial to the first layer. The system further includes a cooling structure integral to the integrated circuit die, coupled to the integrated circuit die, or both. The cooling structure is operable to remove heat from the integrated circuit die to achieve an operating temperature at the desired low temperature.

Abstract: Integrated circuit dies, systems, and techniques, are described herein related to single conductivity type transistor circuits operable at low temperatures. A system includes a functional circuit block of an integrated circuit die having a number of non-planar transistors all of the same conductivity type. The system further includes cooling structure integral to the integrated circuit die, coupled to the integrated circuit die, or both. The cooling structure is operable to remove heat from the integrated circuit die to achieve an operating temperature at the desired low temperature.

Abstract: Gate-all-around integrated circuit structures having nanowires with tight vertical spacing, and methods of fabricating gate-all-around integrated circuit structures having nanowires with tight vertical spacing, are described. For example, an integrated circuit structure includes a vertical arrangement of horizontal silicon nanowires. A vertical spacing between vertically adjacent silicon nanowires is less than 6 nanometers. A gate stack is around the vertical arrangement of horizontal silicon nanowires. A first source or drain structure is at a first end of the vertical arrangement of horizontal silicon nanowires, and a second epitaxial source or drain structure is at a second end of the vertical arrangement of horizontal silicon nanowires.

Abstract: Embodiments herein describe techniques, systems, and method for a semiconductor device. Embodiments herein may present a semiconductor device having a channel area including a channel III-V material, and a source area including a first portion and a second portion of the source area. The first portion of the source area includes a first III-V material, and the second portion of the source area includes a second III-V material. The channel III-V material, the first III-V material and the second III-V material may have a same lattice constant. Moreover, the first III-V material has a first bandgap, and the second III-V material has a second bandgap, the channel III-V material has a channel III-V material bandgap, where the channel material bandgap, the second bandgap, and the first bandgap form a monotonic sequence of bandgaps. Other embodiments may be described and/or claimed.

Abstract: Embodiments of the disclosure include integrated circuit structures having source or drain dopant diffusion blocking layers. In an example, an integrated circuit structure includes a fin including silicon. A gate structure is over a channel region of the fin, the gate structure having a first side opposite a second side. A first source or drain structure is at the first side of the gate structure. A second source or drain structure is at the second side of the gate structure. The first and second source or drain structures include a first semiconductor layer and a second semiconductor layer. The first semiconductor layer is in contact with the channel region of the fin, and the second semiconductor layer is on the first semiconductor layer. The first semiconductor layer has a greater concentration of germanium than the second semiconductor layer, and the second semiconductor layer includes boron dopant impurity atoms.

Abstract: Embodiments herein describe techniques, systems, and method for a semiconductor device. A semiconductor device may include isolation areas above a substrate to form a trench between the isolation areas. A first buffer layer is over the substrate, in contact with the substrate, and within the trench. A second buffer layer is within the trench over the first buffer layer, and in contact with the first buffer layer. A channel area is above the first buffer layer, above a portion of the second buffer layer that are below a source area or a drain area, and without being vertically above a portion of the second buffer layer. In addition, the source area or the drain area is above the second buffer layer, in contact with the second buffer layer, and adjacent to the channel area. Other embodiments may be described and/or claimed.

Abstract: In one embodiment, an integrated circuit includes a substrate, a buffer layer, a source region, a drain region, a channel region, and a gate structure. The substrate includes silicon. The buffer layer is above the substrate and includes a semiconductor material having defects near an interface with the substrate. The buffer layer also includes ions implanted among the defects. The source region and drain region are above the buffer layer, and the channel region is above the buffer layer and between the source and drain regions. The gate structure above the channel region.

Abstract: Cap layers are formed on silicon germanium (SiGe) source/drain regions to provide etch resistance to processing steps that can occur in a semiconductor manufacturing process between formation of the SiGe source/drain regions and metal contact formation. The cap layers comprise boron and are thin (e.g., 2 nm or less) to provide for a low metal contact resistance. The atomic concentration of boron in the second layer is in a range of about 0.2-20%. In addition to providing etch resistance, the cap layer provides for a thermally stable contact resistance as the cap layer can prevent or limit the creation of voids in the SiGe layer by preventing or limiting the diffusion of germanium from the SiGe layer into the metal in subsequent annealing and other high-temperature processing steps.

Abstract: An integrated circuit (IC) structure, an IC device, an IC device assembly, and a method of forming the same. The IC structure includes a transistor device on a substrate comprising: a gate structure including a metal, the gate structure on a channel structure; a source structure in a first trench at a first side of the gate structure; a drain structure in a second trench at a second side of the gate structure; a capping layer on individual ones of the source structure and of the drain structure. The capping layer comprising a semiconductor material of a same group as a semiconductor material of a corresponding one of the source structure or of the drain structure, wherein an isotope of a p-type dopant in the capping layer represents an atomic percentage of at least about 95% of a p-type isotope content of the capping layer; and metal contact structures coupled to respective ones of the source structure and of the drain structure.