Patents by Inventor Anil Sharma

Anil Sharma has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20240006317
    Abstract: Structures having vertical keeper or power gate for backside power delivery are described. In an example, an integrated circuit structure includes a front-side structure including a device layer having a plurality of fin-based transistors, and a plurality of metallization layers above the fin-based transistors of the device layer. A backside structure is below the fin-based transistors of the device layer. The backside structure includes a ground metal line. One or more vertical gate all-around transistors is between the fin-based transistors of the device layer and the ground metal line of the backside structure.
    Type: Application
    Filed: June 30, 2022
    Publication date: January 4, 2024
    Inventors: Abhishek Anil SHARMA, Tahir GHANI, Anand S. MURTHY, Cory WEBER, Rishabh MEHANDRU, Wilfred GOMES, Sagar SUTHRAM
  • Publication number: 20240006416
    Abstract: Structures having ultra-high conductivity global routing are described. In an example, an integrated circuit structure includes a device layer having a plurality of transistors. A plurality of metallization layers is above the plurality of transistors of the device layer. One or more of the metal layers includes a material having a critical temperature greater than 10 Kelvin and less than 300 Kelvin.
    Type: Application
    Filed: June 30, 2022
    Publication date: January 4, 2024
    Inventors: Abhishek Anil SHARMA, Tahir GHANI, Anand S. MURTHY, Sagar SUTHRAM, Pushkar RANADE, Wilfred GOMES, Rishabh MEHANDRU, Cory WEBER
  • Publication number: 20240008244
    Abstract: Bits are stored in cells having two transistors between two parallel bitlines. In a memory array, first and second transistor channels in a bit cell are parallel and offset and coupled to first and second bitlines, respectively, which are also parallel and offset. Adjacent bit cells share corresponding transistor channel structures. The transistor channels may be orthogonal to the bitlines. The memory array may be on an integrated circuit (IC) die, which may be coupled to a power supply in an IC system. In an IC system, the memory array may be coupled to a power supply and a cooling structure.
    Type: Application
    Filed: July 1, 2022
    Publication date: January 4, 2024
    Applicant: Intel Corporation
    Inventors: Abhishek Anil Sharma, Sagar Suthram, Wilfred Gomes, Anand Murthy, Tahir Ghani
  • Publication number: 20240006531
    Abstract: Structures having vertical transistors are described. In an example, an integrated circuit structure includes a channel structure on a drain contact layer, the channel structure having an opening extending there through. A gate dielectric layer is on a bottom and along sides of the opening, the gate dielectric layer laterally surrounded by the channel structure. A gate electrode is on and laterally surrounded by the gate dielectric layer. A source contact layer is on sides of a portion of the gate dielectric layer extending above the channel structure.
    Type: Application
    Filed: June 30, 2022
    Publication date: January 4, 2024
    Inventors: Abhishek Anil SHARMA, Rishabh MEHANDRU, Sagar SUTHRAM, Cory WEBER, Tahir GHANI, Anand S. MURTHY, Pushkar RANADE, Wilfred GOMES
  • Publication number: 20230420533
    Abstract: Structures having AOI gates with routing across nanowires are described. In an example, an integrated circuit structure includes a stack of horizontal nanowires along a vertical direction. A gate stack is over the stack of horizontal nanowires and is surrounding a channel region of each of the horizontal nanowires, the gate stack having one or more cuts in the vertical direction.
    Type: Application
    Filed: June 28, 2022
    Publication date: December 28, 2023
    Inventors: Abhishek Anil SHARMA, Wilfred GOMES, Anand S. MURTHY, Tahir GHANI, Sagar SUTHRAM
  • Publication number: 20230418604
    Abstract: In one embodiment, a memory includes a die having: one or more memory layers having a plurality of banks to store data; and at least one other layer comprising at least one reconfigurable vector processor, the at least one reconfigurable vector processor to perform a vector computation on input vector data obtained from at least one bank of the plurality of banks and provide processed vector data to the at least one bank. Other embodiments are described and claimed.
    Type: Application
    Filed: June 27, 2022
    Publication date: December 28, 2023
    Inventors: Abhishek Anil Sharma, Pushkar Ranade, Wilfred Gomes, Sagar Suthram
  • Publication number: 20230420368
    Abstract: Structures having memory with backside power delivery are described. In an example, an integrated circuit structure includes a front-side structure including a device layer having a plurality of nanowire-based transistors, and a plurality of metallization layers above the nanowire-based transistors of the device layer. One of the metal layers includes an array of uninterrupted signal lines. A backside structure is below the nanowire-based transistors of the device layer. The backside structure includes a ground metal line.
    Type: Application
    Filed: June 28, 2022
    Publication date: December 28, 2023
    Inventors: Abhishek Anil SHARMA, Wilfred GOMES
  • Publication number: 20230418508
    Abstract: In one embodiment, an apparatus comprises: a plurality of banks to store data; and a plurality of interconnects, each of the plurality of interconnects to couple a pair of the plurality of banks. In response to a data movement command, a first bank of the plurality of banks is to send data directly to a second bank of the plurality of banks via a first interconnect of the plurality of interconnects. Other embodiments are described and claimed.
    Type: Application
    Filed: June 27, 2022
    Publication date: December 28, 2023
    Inventors: Abhishek Anil Sharma, Pushkar Ranade, Sagar Suthram, Wilfred Gomes, Rajabali Koduri
  • Publication number: 20230422485
    Abstract: Structures having memory with backside DRAM and power delivery are described. In an example, an integrated circuit structure includes a front-side structure including a device layer having a plurality of nanowire-based transistors, and a plurality of metallization layers above the nanowire-based transistors of the device layer. A backside structure is below the nanowire-based transistors of the device layer. The backside structure includes a plurality of dynamic random access memory (DRAM) devices.
    Type: Application
    Filed: June 28, 2022
    Publication date: December 28, 2023
    Inventors: Abhishek Anil SHARMA, Sagar SUTHRAM, Wilfred GOMES, Tahir GHANI, Rishabh MEHANDRU, Cory WEBER, Anand S. MURTHY
  • Publication number: 20230422462
    Abstract: Structures having inverters with contacts between nanowires are described. In an example, an integrated circuit structure includes a stack of horizontal nanowires along a vertical direction. A conductive contact is laterally adjacent to a source or drain region of the stack of horizontal nanowires, the conductive contact having a cut in the vertical direction. A gate stack is over the stack of horizontal nanowires and surrounding a channel region of each of the horizontal nanowires, the gate stack laterally spaced apart from the conductive contact.
    Type: Application
    Filed: June 28, 2022
    Publication date: December 28, 2023
    Inventors: Abhishek Anil SHARMA, Wilfred GOMES
  • Publication number: 20230394076
    Abstract: Computer-implemented processes and systems described herein are directed to reducing volumes of data sent from edge devices to a data center. Each edge device runs an agent that collects event information generated by event sources of the edge device in a runtime interval. Each agent reduces the event information to relevant event information at the edge device in accordance with instructions received from a controller server of the data center. The relevant event information contains less information than the event information. Each agent forwards the relevant event information over the internet to external services executed at the data center, where the relevant event information is stored in a data storage device of the data center.
    Type: Application
    Filed: June 7, 2022
    Publication date: December 7, 2023
    Applicant: VMware, Inc.
    Inventors: Anil Sharma, Darren Brown, Pedro Algarvio, Caleb Beard
  • Patent number: 11830788
    Abstract: An example relates to an integrated circuit including a semiconductor substrate, and a wiring layer stack located on the semiconductor substrate. The integrated circuit further includes a transistor embedded in the wiring layer stack. The transistor includes an embedded layer. The embedded layer has a thickness of less than 10 nm. The embedded layer includes at least one two-dimensional crystalline layer including more than 10% metal atoms. Further examples relate to methods for forming integrated circuits.
    Type: Grant
    Filed: May 25, 2021
    Date of Patent: November 28, 2023
    Assignee: Intel Corporation
    Inventors: Carl Naylor, Ashish Agrawal, Urusa Alaan, Christopher Jezewski, Mauro Kobrinsky, Kevin Lin, Abhishek Anil Sharma
  • Publication number: 20230369444
    Abstract: Techniques are provided herein for forming thin film transistor structures having a multilayer and/or concentration gradient gate dielectric. Such a gate dielectric can be used, to tune the performance and/or reliability of the transistor. According to some such embodiments, memory structures having thin film transistor (TFT) structures are arranged in a two-dimensional array within one or more interconnect layers and stacked in a vertical direction such that multiple tiers of memory structure arrays are formed within the interconnect region. Any of the given TFT structures may include a multilayer and/or graded gate dielectric that includes at least two or more different dielectric layers and/or a material concentration gradient through a thickness of the gate dielectric.
    Type: Application
    Filed: May 12, 2022
    Publication date: November 16, 2023
    Applicant: Intel Corporation
    Inventors: Abhishek Anil Sharma, Albert B. Chen, Mark Armstrong, Afrin Sultana, Van H. Le, Travis W. Lajoie, Shailesh Kumar Madisetti, Timothy Jen, Cheng Tan, Moshe Dolejsi, Vishak Venkatraman, Christopher Ryder, Deepyanti Taneja
  • Publication number: 20230369501
    Abstract: Techniques are provided herein for forming transistor devices with reduced parasitic capacitance, such as transistors used in a memory structure. In an example, a given memory structure includes memory cells, with a given memory cell having an access device and a storage device. The access device may include, for example, a thin film transistor (TFT), and the storage device may include a capacitor. Any of the given TFTs may include a dielectric liner extending along sidewalls of the TFT. The TFT includes a recess (e.g., a dimple) that extends laterally inwards toward a midpoint of a semiconductor region of the TFT. The dielectric liner thus also pinches or otherwise extends inward. This pinched-in dielectric liner may reduce parasitic capacitance between the contacts of the TFT and the gate electrode of the TFT. The pinched-in dielectric liner may also protect the contacts from forming too deep into the semiconductor region.
    Type: Application
    Filed: May 12, 2022
    Publication date: November 16, 2023
    Applicant: Intel Corporation
    Inventors: Cheng Tan, Yu-Wen Huang, Hui-Min Chuang, Xiaojun Weng, Nikhil J. Mehta, Allen B. Gardiner, Shu Zhou, Timothy Jen, Abhishek Anil Sharma, Van H. Le, Travis W. Lajoie, Bernhard Sell
  • Publication number: 20230369509
    Abstract: Techniques are provided herein for forming thin film transistor (TFT) structures having one or more doped contact regions. The addition of certain dopants can be used to increase conductivity and provide higher thermal stability in the contact regions of the TFT. Memory structures having TFT structures are arranged in a two-dimensional array within one or more interconnect layers and stacked in a vertical direction such that multiple tiers of memory structure arrays are formed within the interconnect region. Any of the TFT structures within the memory structures may include one or more contacts that are doped with additional elements. The doping profile of the contacts can be tuned to optimize performance, stability, and reliability of the TFT structure. Furthermore, additional doping may be performed within the area beneath the contacts and extending into the semiconductor region.
    Type: Application
    Filed: May 12, 2022
    Publication date: November 16, 2023
    Applicant: Intel Corporation
    Inventors: Jisoo Kim, Xiaoye Qin, Timothy Jen, Harish Ganapathy, Van H. Le, Huiying Liu, Prem Chanani, Cheng Tan, Shailesh Kumar Madisetti, Abhishek Anil Sharma, Brian Wadsworth, Vishak Venkatraman, Andre Baran
  • Publication number: 20230371233
    Abstract: Techniques are provided herein for forming multi-tier memory structures with graded characteristics across different tiers. A given memory structure includes memory cells, with a given memory cell having an access device and a storage device. The access device may include, for example, a thin film transistor (TFT) structure, and the storage device may include a capacitor. Certain geometric or material parameters of the memory structures can be altered in a graded fashion across any number of tiers to compensate for process effects that occur when fabricating a given tier, which also affect any lower tiers. This may be done to more closely match the performance of the memory arrays across each of the tiers.
    Type: Application
    Filed: May 12, 2022
    Publication date: November 16, 2023
    Applicant: Intel Corporation
    Inventors: Abhishek Anil Sharma, Travis W. Lajoie, Forough Mahmoudabadi, Shailesh Kumar Madisetti, Van H. Le, Timothy Jen, Cheng Tan, Jisoo Kim, Miriam R. Reshotko, Vishak Venkatraman, Eva Vo, Yue Zhong, Yu-Che Chiu, Moshe Dolejsi, Lorenzo Ferrari, Akash Kannegulla, Deepyanti Taneja, Mark Armstrong, Kamal H. Baloch, Afrin Sultana, Albert B. Chen, Vamsi Evani, Yang Yang, Juan G. Alzate-Vinasco, Fatih Hamzaoglu
  • Publication number: 20230369508
    Abstract: Techniques for forming thin film transistors (TFTs) having multilayer and/or concentration gradient semiconductor regions. An example integrated circuit includes a gate electrode, a gate dielectric on the gate electrode, and a semiconductor region on the gate dielectric. In some cases, the semiconductor region includes a plurality of compositionally different material layers, at least two layers of the different material layers each being a semiconductor layer. In some other cases, the semiconductor region includes a single layer having a material concentration gradient extending from a bottom surface of the single layer (adjacent to the gate dielectric) to a top surface of the single layer. The integrated circuit further includes first and second conductive contacts that each contact a respective portion of the semiconductor region.
    Type: Application
    Filed: May 12, 2022
    Publication date: November 16, 2023
    Applicant: Intel Corporation
    Inventors: Timothy Jen, Prem Chanani, Cheng Tan, Brian Wadsworth, Andre Baran, James Pellegren, Christopher J. Wiegand, Van H. Le, Abhishek Anil Sharma, Shailesh Kumar Madisetti, Xiaojun Weng
  • Publication number: 20230369506
    Abstract: Techniques are provided herein for forming thin film transistor structures having a laterally recessed gate electrode. The gate electrode may be recessed such that it does not extend under one or both conductive contacts of the transistor. Recessing the lateral dimensions of the gate electrode can reduce gate leakage current and parasitic capacitance. According to an example, a given memory structure generally includes memory cells, with each memory cell having an access device and a storage device. According to some such embodiments, the memory cells are arranged in a two-dimensional array within one or more interconnect layers and stacked in a vertical direction such that multiple tiers of memory cell arrays are formed within the interconnect region. Any of the given TFT structures may include a gate electrode that is laterally recessed such that one or more of the contacts are not directly over the gate electrode.
    Type: Application
    Filed: May 12, 2022
    Publication date: November 16, 2023
    Applicant: Intel Corporation
    Inventors: Abhishek Anil Sharma, Miriam R. Reshotko, Van H. Le, Travis W. Lajoie, Mark Armstrong, Cheng Tan, Timothy Jen, Moshe Dolejsi, Deepyanti Taneja
  • Publication number: 20230369340
    Abstract: Techniques are provided herein for forming thin film transistor structures having co-doped semiconductor regions. The addition of insulating dopants can be used to improve the performance, stability, and reliability of the TFT. A given TFT structure within an array of similar TFT structures formed in an interconnect region may include a semiconductor region that is co-doped with one or more additional elements. The doping profile can be tuned to optimize performance, stability, and reliability of the TFT structure. In some embodiments, the doping profile causes an overall reduction in the conductivity of the semiconductor region, leading to a higher threshold voltage. Designing access devices (in, for example, a DRAM architecture) with higher threshold voltages can be beneficial for improving reliability of the memory cell.
    Type: Application
    Filed: May 12, 2022
    Publication date: November 16, 2023
    Applicant: Intel Corporation
    Inventors: Van H. Le, Timothy Jen, Vishak Venkatraman, Shailesh Kumar Madisetti, Cheng Tan, Harish Ganapathy, James Pellegren, Kamal H. Baloch, Abhishek Anil Sharma
  • Publication number: 20230369503
    Abstract: Techniques are provided for making asymmetric contacts to improve the performance of thin film transistors (TFT) structures. The asymmetry may be with respect to the area of contact interface with the semiconductor region and/or the depth to which the contacts extend into the semiconductor region. According to some embodiments, the TFT structures are used in memory structures arranged in a two-dimensional array within one or more interconnect layers and stacked in a vertical direction such that multiple tiers of memory structure arrays are formed within the interconnect region. Any of the given TFT structures may include asymmetric contacts, such as two contacts that each have a different contact area to a semiconductor region, and/or that extend to different depths within the semiconductor region. The degree of asymmetry may be tuned during fabrication to modulate certain transistor parameters such as, for example, leakage, capacitance, gate control, channel length, or contact resistance.
    Type: Application
    Filed: May 12, 2022
    Publication date: November 16, 2023
    Applicant: Intel Corporation
    Inventors: Cheng Tan, Van H. Le, Akash Garg, Shokir A. Pardaev, Timothy Jen, Abhishek Anil Sharma, Thiruselvam Ponnusamy, Moira C. Vyner, Caleb Barrett, Forough Mahmoudabadi, Albert B. Chen, Travis W. Lajoie, Christopher M. Pelto