Abstract: A cogeneration fuel cell system and associated methods of operation are provided that accommodate a demand for heat as well as a demand for electric power. The system is operated among various modes to balance heat and power demand signals. In general, a fuel cell system is coupled to a power sink and a heat sink, and a controller is adapted to respond to data signals from the power sink and the heat sink. As examples, such data signals from the heat sink may include a temperature indication or a heat demand signal (such as from a thermostat), and such data signals from the power sink may include a voltage or current measurement, an electrical power demand signal, or an electrical load.

Abstract: A method and structure for changing an electrical resistance of a resistor. Initially, the resistor is provided, wherein the resistor has a length L and an electrical resistance R1. A portion of the resistor is exposed to a laser radiation, wherein the portion includes a fraction F of the length L of the resistor. Both F=1 and F<1 are within the scope of the present invention. After the resistor has been exposed to the laser radiation, the resistor has an electrical resistance R2, wherein R2 is unequal to R1. The change in resistance from R1 to R2 is due to a heating of the resistor by the laser radiation, which causes a chemical or structural change within the resistor. Either R2>R1 or R2<R1 depending on the material composition of the resistor.

Abstract: Methods of forming front-end-of the line (FEOL) capacitors such as polysilicon-polysilicon capacitors and metal-insulator-silicon capacitors are provided that are capable of incorporating a high-dielectric constant (k of greater than about 8) into the capacitor structure. The inventive methods provide high capacitance/area devices with low series resistance of the top and bottom electrodes for high frequency responses. The inventive methods provide a significant reduction in chip size, especially in analog and mixed-signal applications where large areas of capacitance are used.

Abstract: A method and structure for increasing an electrical resistance of a resistor that is within a semiconductor structure, by oxidizing or nitridizing a fraction of a surface layer of the resistor with oxygen/nitrogen (i.e., oxygen or nitrogen) particles, respectively. The semiconductor structure may include a semiconductor wafer, a semiconductor chip, and an integrated circuit. The method and structure comprises five embodiments. The first embodiment comprises heating an interior of a heating chamber that includes the oxygen/nitrogen particles as gaseous oxygen/nitrogen-comprising molecules (e.g., molecular oxygen/nitrogen). The second embodiment comprises heating the fraction of the surface layer by a beam of radiation (e.g., laser radiation), or a beam of particles, such that the semiconductor structure is within a chamber that includes the oxygen/particles as gaseous oxygen/nitrogen-comprising molecules (e.g., molecular oxygen/nitrogen).

Abstract: The invention generally relates to apparatuses and associated methods of operation whereby the operation of a fuel cell is coordinated with a fuel processing reactor and a hydrogen separation system. In one embodiment, a method is provided of coordinating operation of a combined fuel processor, fuel cell and hydrogen purification system, including the following steps: (1) operating a fuel processing reactor to convert a hydrocarbon into reformate; (2) flowing reformate through a first pressure regulator to reduce the pressure of the reformate; (3) supplying reformate from the first pressure regulator to a fuel cell to generate electrical power; (4) flowing a portion of the reformate from the fuel processor to a second pressure regulator to reduce the pressure of the reformate while generating the electrical power with the fuel cell; and (5) supplying reformate from the second pressure regulator to the hydrogen purification system while generating the electrical power with the fuel cell.

Abstract: A process for forming at least one interface region between two regions of semiconductor material. At least one region of dielectric material comprising nitrogen is formed in the vicinity of at least a portion of a boundary between the two regions of semiconductor material, thereby controlling electrical resistance at the interface.

Abstract: Fuel cell systems and associated methods of operation are provided whereby application of a fuel cell is coordinated with a fuel processor and a hydrogen separator.

Abstract: A process for forming at least one interface region between two regions of semiconductor material. At least one region of dielectric material comprising nitrogen is formed in the vicinity of at least a portion of a boundary between the two regions of semiconductor material, thereby controlling electrical resistance at the interface.

Abstract: A method of forming semiconductor device. treating a surface of a substrate to produce a discontinuous growth of a material on the surface through rapid thermal oxidation of the substrate surface at a temperature of less than about 700° C.

Abstract: In a process using a hot phosphoric acid etchant (12) to etch silicon nitride on a semiconductor wafer (15) submerged in a tank (11) of the etchant (12), a recirculating path is established for the etchant (12). A porous filter (35) is coated with silicon nitride and installed in the recirculating path. As the etchant (12) in the recirculating path flows through the porous filter (35), the silicon nitride on the porous filter (35) dissolves into the etchant (12). In the tank (11), the silicon nitride dissolved in the etchant (12) significantly suppresses the etch of silicon dioxide on the semiconductor wafer (15), thereby enhancing the etch selectivity of the process. Monitoring and maintaining the concentration of the silicon nitride in the etchant (12) stabilizes the etch selectivity of the process.

Abstract: The invention relates to fuel cell systems and associated methods of operation where an electrochemical cell such as a fuel cell is used as an electrochemical hydrogen separator to separate hydrogen from a process stream (e.g., reformate or synthesis gas), or as an electrochemical hydrogen expander to inject hydrogen into a process stream. In one aspect, the invention provides a method of operating a fuel cell system, including the following steps: flowing hydrogen from a hydrogen supply conduit through a fuel cell to provide an electric current to a load coupled to the fuel cell; actuating an electrochemical hydrogen separator in a first mode of operation of the system to transfer hydrogen from the hydrogen supply conduit to a hydrogen storage vessel; and actuating an electrochemical hydrogen expander in a second mode of operation of the system to transfer hydrogen from the hydrogen storage vessel to the fuel cell.

Abstract: A method and structure for changing an electrical resistance of a resistor. Initially, the resistor is provided, wherein the resistor has a length L and an electrical resistance R1. A portion of the resistor is exposed to a laser radiation, wherein the portion includes a fraction F of the length L of the resistor. Both F=1 and F<1 are within the scope of the present invention. After the resistor has been exposed to the laser radiation, the resistor has an electrical resistance R2, wherein R2 is unequal to R1. The change in resistance from R1 to R2 is due to a heating of the resistor by the laser radiation, which causes a chemical or structural change within the resistor. Either R2>R1 or R2<R1 depending on the material composition of the resistor.

Abstract: The invention relates to fuel cell systems and associated methods of operation where an electrochemical cell such as a fuel cell is used as an electrochemical hydrogen separator to separate hydrogen from a process stream (e.g., reformate or synthesis gas), or as an electrochemical hydrogen expander to inject hydrogen into a process stream. In one aspect, the invention provides a method of operating a fuel cell system, including the following steps: flowing hydrogen from a hydrogen supply conduit through a fuel cell to provide an electric current to a load coupled to the fuel cell; actuating an electrochemical hydrogen separator in a first mode of operation of the system to transfer hydrogen from the hydrogen supply conduit to a hydrogen storage vessel; and actuating an electrochemical hydrogen expander in a second mode of operation of the system to transfer hydrogen from the hydrogen storage vessel to the fuel cell.

Abstract: The invention relates to fuel cell systems and associated methods of operation where an electrochemical cell such as a fuel cell is used as an electrochemical hydrogen separator to separate hydrogen from a process stream (e.g., reformate or synthesis gas), or as an electrochemical hydrogen expander to inject hydrogen into a process stream. In one aspect, the invention provides a method of operating a fuel cell system, including the following steps: flowing hydrogen from a hydrogen supply conduit through a fuel cell to provide an electric current to a load coupled to the fuel cell; actuating an electrochemical hydrogen separator in a first mode of operation of the system to transfer hydrogen from the hydrogen supply conduit to a hydrogen storage vessel; and actuating an electrochemical hydrogen expander in a second mode of operation of the system to transfer hydrogen from the hydrogen storage vessel to the fuel cell.

Abstract: A method and structure that provides a battery within an integrated circuit for providing voltage to low-current electronic devices that exist within the integrated circuit. The method includes Front-End-Of-Line (FEOL) processing for generating a layer of electronic devices on a semiconductor wafer, followed by Back-End-Of-Line (BEOL) integration for wires the electronic devices together to form completed electrical circuits of the integrated circuit. The BEOL integration includes forming a multilayered structure of wiring levels on the layer of electronic devices. Each wiring level includes conductive metallization (e.g., metal-plated vias, conductive wiring lines, etc.) embedded in insulative material. The battery is formed during BEOL integration within one or more wiring levels, and the conductive metallization conductively couples positive and negative terminals of the battery to the electronic devices.

Abstract: Polysilicon electrical depletion in a polysilicon gate electrode is reduced by depositing the polysilicon under controlled conditions so as to vary the crystal grain size through the thickness of the polysilicon. The resulting structure may have two or more depth-wise contiguous regions of respective crystalline grain size, and the selection of grain size is directed to maximize dopant activation in the polysilicon near the gate dielectric, and to tailor the resistance of the polysilicon above that first region and more distant from the gate dielectric. This method, and the resulting structure, are advantageously employed in forming FETs, and doped polysilicon resistors.

Abstract: A fuel cell assembly includes a fuel cell stack, a first end plate associated with the fuel cell stack and a first heatable element adapted to heat the first end plate.

Abstract: Polysilicon electrical depletion in a polysilicon gate electrode is reduced by depositing the polysilicon under controlled conditions so as to vary the crystal grain size through the thickness of the polysilicon. The resulting structure may have two or more depth-wise contiguous regions of respective crystalline grain size, and the selection of grain size is directed to maximize dopant activation in the polysilicon near the gate dielectric, and to tailor the resistance of the polysilicon above that first region and more distant from the gate dielectric. This method, and the resulting structure, are advantageously employed in forming FETs, and doped polysilicon resistors.

Abstract: Methods of forming front-end-of the line (FEOL) capacitors such as polysilicon-polysilicon capacitors and metal-insulator-silicon capacitors are provided that are capable of incorporating a high-dielectric constant (k of greater than about 8) into the capacitor structure. The inventive methods provide high capacitance/area devices with low series resistance of the top and bottom electrodes for high frequency responses. The inventive methods provide a significant reduction in chip size, especially in analog and mixed-signal applications where large areas of capacitance are used.

Abstract: A process of forming a nitride film on a semiconductor substrate including exposing a surface of the substrate to a rapid thermal process to form the nitride film.