Patents by Inventor Billy W. Ward
Billy W. Ward has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Patent number: 9236225Abstract: Ion sources, systems and methods are disclosed.Type: GrantFiled: April 13, 2015Date of Patent: January 12, 2016Assignee: Carl Zeiss Microscopy, LLCInventors: Billy W. Ward, John A. Notte, IV, Louis S. Farkas, III, Randall G. Percival, Raymond Hill, Klaus Edinger, Lars Markwort, Dirk Aderhold, Ulrich Mantz
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Patent number: 9159527Abstract: In one aspect the invention provides a gas field ion source assembly that includes an ion source in connection with an optical column such that an ion beam generated at the ion source travels through the optical column. The ion source includes an emitter having a width that tapers to a tip comprising a few atoms. In other aspects, the methods provide for manufacturing, maintaining and enhancing the performance of a gas field ion source including sharpening the tip of the ion source in situ.Type: GrantFiled: April 10, 2008Date of Patent: October 13, 2015Assignee: Carl Zeiss Microscopy, LLCInventors: Billy W. Ward, Lou Farkas, John A. Notte, Randall Percival
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Patent number: 9123502Abstract: In general, in one aspect, the disclosure features a method and system for imaging of samples, for example, imaging samples with charged particles.Type: GrantFiled: September 20, 2011Date of Patent: September 1, 2015Assignee: Carl Zeiss Microscopy, LLCInventor: Billy W. Ward
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Publication number: 20150213997Abstract: Ion sources, systems and methods are disclosed.Type: ApplicationFiled: April 13, 2015Publication date: July 30, 2015Inventors: Billy W. Ward, John A. Notte, IV, Louis S. Farkas, III, Randall G. Percival, Raymond Hill, Klaus Edinger, Lars Markwort, Dirk Aderhold, Ulrich Mantz
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Patent number: 9029765Abstract: Ion sources, systems and methods are disclosed. In some embodiments, the ion sources, systems and methods can exhibit relatively little undesired vibration and/or can sufficiently dampen undesired vibration. This can enhance performance (e.g., increase reliability, stability and the like). In certain embodiments, the ion sources, systems and methods can enhance the ability to make tips having desired physical attributes (e.g., the number of atoms on the apex of the tip). This can enhance performance (e.g., increase reliability, stability and the like).Type: GrantFiled: May 13, 2013Date of Patent: May 12, 2015Assignee: Carl Zeiss Microscopy, LLCInventors: Richard Comunale, Alexander Groholski, John A. Notte, IV, Randall G. Percival, Billy W. Ward
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Patent number: 9012867Abstract: Ion sources, systems and methods are disclosed.Type: GrantFiled: May 23, 2014Date of Patent: April 21, 2015Assignee: Carl Zeiss Microscopy, LLCInventors: Billy W. Ward, John A. Notte, IV, Louis S. Farkas, Randall G. Percival, Raymond Hill, Klaus Edinger, Lars Markwort, Dirk Aderhold, Ulrich Mantz
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Publication number: 20140306121Abstract: Ion sources, systems and methods are disclosed.Type: ApplicationFiled: May 23, 2014Publication date: October 16, 2014Applicant: Carl Zeiss Microscopy, LLCInventors: Billy W. Ward, John A. Notte, IV, Louis S. Farkas, III, Randall G. Percival, Raymond Hill, Klaus Edinger, Lars Markwort, Dirk Aderhold, Ulrich Mantz
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Patent number: 8748845Abstract: Ion sources, systems and methods are disclosed.Type: GrantFiled: January 24, 2012Date of Patent: June 10, 2014Assignee: Carl Zeiss Microscopy, LLCInventors: Billy W. Ward, John A. Notte, Louis S. Farkas, Randall G. Percival, Raymond Hill, Klaus Edinger, Lars Markwort, Dirk Aderhold, Ulrich Mantz
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Patent number: 8633451Abstract: Ion sources, systems and methods are disclosed. In some embodiments, the ion sources, systems and methods can exhibit relatively little undesired vibration and/or can sufficiently dampen undesired vibration. This can enhance performance (e.g., increase reliability, stability and the like).Type: GrantFiled: June 20, 2008Date of Patent: January 21, 2014Assignee: Carl Zeiss Microscopy, LLCInventors: Billy W. Ward, Colin A. Sanford, John Notte, IV, Alexander Groholski, Mark D. DiManna
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Patent number: 8558192Abstract: Disclosed are systems and methods for applying a voltage gradient to a gas delivery system, delivering a gas through a length of the gas delivery system having the voltage gradient, the gas having a pressure-distance product of less than about 1×10?2 Torr-inches or greater than about 100 Torr-inches, and delivering the gas into a housing of an ion microscope, the housing including an emitter and an extractor.Type: GrantFiled: October 19, 2011Date of Patent: October 15, 2013Assignee: Carl Zeiss Microscopy, LLCInventors: Billy W. Ward, John Notte, IV, Randall G. Percival
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Publication number: 20130256532Abstract: Ion sources, systems and methods are disclosed. In some embodiments, the ion sources, systems and methods can exhibit relatively little undesired vibration and/or can sufficiently dampen undesired vibration. This can enhance performance (e.g., increase reliability, stability and the like). In certain embodiments, the ion sources, systems and methods can enhance the ability to make tips having desired physical attributes (e.g., the number of atoms on the apex of the tip). This can enhance performance (e.g., increase reliability, stability and the like).Type: ApplicationFiled: May 13, 2013Publication date: October 3, 2013Applicant: Carl Zeiss Microscopy, LLCInventors: Richard Comunale, Alexander Groholski, John A. Notte, IV, Randall G. Percival, Billy W. Ward
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Patent number: 8461557Abstract: Ion sources, systems and methods are disclosed. In some embodiments, the ion sources, systems and methods can exhibit relatively little undesired vibration and/or can sufficiently dampen undesired vibration. This can enhance performance (e.g., increase reliability, stability and the like). In certain embodiments, the ion sources, systems and methods can enhance the ability to make tips having desired physical attributes (e.g., the number of atoms on the apex of the tip). This can enhance performance (e.g., increase reliability, stability and the like).Type: GrantFiled: June 13, 2008Date of Patent: June 11, 2013Assignee: Carl Zeiss Microscopy, LLCInventors: Richard Comunale, Alexander Groholski, John A. Notte, IV, Randall Percival, Billy W. Ward
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Publication number: 20120241640Abstract: Ion sources, systems and methods are disclosed. In some embodiments, the ion sources, systems and methods can exhibit relatively little undesired vibration and/or can sufficiently dampen undesired vibration. This can enhance performance (e.g., increase reliability, stability and the like).Type: ApplicationFiled: June 20, 2008Publication date: September 27, 2012Applicant: CARL ZEISS NTS, LLC.Inventors: Billy W. Ward, Colin A. Sanford, John Notte, VI, Alexander Groholski, Mark D. DiManna
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Patent number: 8227753Abstract: Charged particle beams with different charged particle currents are disclosed. In some embodiments, a method includes exposing a sample to a first ion beam having a first ion current at the sample, and exposing the sample to a second ion beam having a second ion current at the sample, where the first ion current is at least two times greater than the second ion current. In certain embodiments, a method includes creating a first ion beam at a first pressure, exposing a sample to the first ion beam, creating a second ion beam at a second pressure, and exposing the sample to the second ion beam, where the first pressure is at least two times greater than the second pressure.Type: GrantFiled: June 29, 2009Date of Patent: July 24, 2012Assignee: Carl Zeiss NTS, LLCInventors: John A. Notte, IV, Billy W. Ward
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Publication number: 20120145896Abstract: Disclosed are systems and methods for applying a voltage gradient to a gas delivery system, delivering a gas through a length of the gas delivery system having the voltage gradient, the gas having a pressure-distance product of less than about 1×010?2 Torr-inches or greater than about 100 Torr-inches, and delivering the gas into a housing of an ion microscope, the housing including an emitter and an extractor.Type: ApplicationFiled: October 19, 2011Publication date: June 14, 2012Applicant: Carl Zeiss NTS, LLCInventors: Billy W. Ward, John Notte, IV, Randall G. Percival
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Publication number: 20120141693Abstract: Ion sources, systems and methods are disclosed.Type: ApplicationFiled: January 24, 2012Publication date: June 7, 2012Applicant: ALIS CORPORATIONInventors: Billy W. Ward, John A. Notte, IV, Louis S. Farkas, III, Randall G. Percival, Raymond Hill, Klaus Edinger, Lars Markwort, Dirk Aderhold, Ulrich Mantz
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Publication number: 20120057015Abstract: In general, in one aspect, the disclosure features a method and system for imaging of samples, for example, imaging samples with charged particles.Type: ApplicationFiled: September 20, 2011Publication date: March 8, 2012Applicant: CARL ZEISS NTS, LLCInventor: Billy W. Ward
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Patent number: 8110814Abstract: Ion sources, systems and methods are disclosed.Type: GrantFiled: February 2, 2009Date of Patent: February 7, 2012Assignee: ALIS CorporationInventors: Billy W. Ward, John A. Notte, IV, Louis S. Farkas, III, Randall G. Percival, Raymond Hill, Klaus Edinger, Lars Markwort, Dirk Aderhold, Ulrich Mantz
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Publication number: 20110240853Abstract: Ion sources, systems and methods are disclosed. In some embodiments, the ion sources, systems and methods can exhibit relatively little undesired vibration and/or can sufficiently dampen undesired vibration. This can enhance performance (e.g., increase reliability, stability and the like). In certain embodiments, the ion sources, systems and methods can enhance the ability to make tips having desired physical attributes (e.g., the number of atoms on the apex of the tip). This can enhance performance (e.g., increase reliability, stability and the like).Type: ApplicationFiled: June 13, 2008Publication date: October 6, 2011Applicant: CARL ZEISS NTS, LLCInventors: Richard Comunale, Alexander Groholski, John A. Notte, IV, Randall Percival, Billy W. Ward
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Patent number: 8013300Abstract: Disclosed herein are methods that include: (a) exposing a sample in a chamber to a first gas, where the first gas reacts with surface contaminants on the sample to form a second gas; (b) removing at least a portion of the second gas from the chamber; and (c) exposing the sample to a charged particle beam to cause a plurality of particles to leave the sample and detecting at least some of the plurality of particles. The charged particle beam can include particles having a molecular weight of 40 atomic mass units or less.Type: GrantFiled: May 21, 2009Date of Patent: September 6, 2011Assignee: Carl Zeiss NTS, LLCInventors: Lewis A. Stern, Louis S. Farkas, III, Billy W. Ward, William DiNatale, John A. Notte, IV, Lawrence Scipioni