Patents by Inventor Billy W. Ward

Billy W. Ward has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Ion sources, systems and methods
    Patent number: 7786451
    Abstract: Ion sources, systems and methods are disclosed.
    Type: Grant
    Filed: November 15, 2006
    Date of Patent: August 31, 2010
    Assignee: ALIS Corporation
    Inventors: Billy W. Ward, John A. Notte, IV, Louis S. Farkas, III, Randall G. Percival, Raymond Hill, Alexander Groholski, Richard Comunale
  • Ion sources, systems and methods
    Patent number: 7786452
    Abstract: Ion sources, systems and methods are disclosed.
    Type: Grant
    Filed: November 15, 2006
    Date of Patent: August 31, 2010
    Assignee: ALIS Corporation
    Inventors: Billy W. Ward, John A. Notte, IV, Louis S. Farkas, III, Randall G. Percival, Raymond Hill
  • Ion sources, systems and methods
    Patent number: 7745801
    Abstract: Ion sources, systems and methods are disclosed.
    Type: Grant
    Filed: November 15, 2006
    Date of Patent: June 29, 2010
    Assignee: ALIS Corporation
    Inventors: Billy W. Ward, John A. Notte, IV, Louis S. Farkas, III, Randall G. Percival, Raymond Hill, Alexander Groholski, Richard Comunale
  • ICE LAYERS IN CHARGED PARTICLE SYSTEMS AND METHODS
    Publication number: 20100136255
    Abstract: Charged particle sources, systems and methods are disclosed.
    Type: Application
    Filed: November 25, 2009
    Publication date: June 3, 2010
    Applicant: CARL ZEISS SMT INC.
    Inventors: John A. Notte, IV, Lawrence Scipioni, Billy W. Ward, William B. Thompson
  • MULTIPLE CURRENT CHARGED PARTICLE METHODS
    Publication number: 20100012837
    Abstract: Charged particle beams with different charged particle currents are disclosed. In some embodiments, a method includes exposing a sample to a first ion beam having a first ion current at the sample, and exposing the sample to a second ion beam having a second ion current at the sample, where the first ion current is at least two times greater than the second ion current. In certain embodiments, a method includes creating a first ion beam at a first pressure, exposing a sample to the first ion beam, creating a second ion beam at a second pressure, and exposing the sample to the second ion beam, where the first pressure is at least two times greater than the second pressure.
    Type: Application
    Filed: June 29, 2009
    Publication date: January 21, 2010
    Applicant: CARL ZEISS SMT INC.
    Inventors: John A. Notte, IV, Billy W. Ward
  • SAMPLE DECONTAMINATION
    Publication number: 20090314939
    Abstract: Disclosed herein are methods that include: (a) exposing a sample in a chamber to a first gas, where the first gas reacts with surface contaminants on the sample to form a second gas; (b) removing at least a portion of the second gas from the chamber; and (c) exposing the sample to a charged particle beam to cause a plurality of particles to leave the sample and detecting at least some of the plurality of particles. The charged particle beam can include particles having a molecular weight of 40 atomic mass units or less.
    Type: Application
    Filed: May 21, 2009
    Publication date: December 24, 2009
    Applicant: Carl Zeiss SMT Inc.
    Inventors: Lewis A. Stern, Louis S. Farkas, III, Billy W. Ward, William DiNatale, John A. Notte, IV, Lawrence Scipioni
  • Systems and methods for a gas field ion microscope
    Patent number: 7601953
    Abstract: In one aspect the invention provides a gas field ion microscope that includes an ion source in connection with an optical column, such that an ion beam generated at the ion source travels through the optical column and impinges on a sample. The ion source includes an emitter having a width that tapers to a tip comprising a few atoms. In other aspects, the invention provides methods for using the ion microscope to analyze samples and enhancing the performance of a gas field ion source.
    Type: Grant
    Filed: March 20, 2006
    Date of Patent: October 13, 2009
    Assignee: ALIS Corporation
    Inventors: Billy W. Ward, Louis S. Farkas, III, John A. Notte, IV, Randall G. Percival
  • ION SOURCES, SYSTEMS AND METHODS
    Publication number: 20090179161
    Abstract: Ion sources, systems and methods are disclosed.
    Type: Application
    Filed: February 2, 2009
    Publication date: July 16, 2009
    Inventors: BILLY W. WARD, JOHN A. NOTTE, IV, LOUIS S. FARKAS, III, RANDAL G. PERCIVAL, RAYMOND HILL, KLAUS EDINGER, LARS MARKWORT, DIRK ADERHOLD, ULRICH MANTZ
  • Ion sources, systems and methods
    Patent number: 7557361
    Abstract: Ion sources, systems and methods are disclosed.
    Type: Grant
    Filed: November 15, 2006
    Date of Patent: July 7, 2009
    Assignee: ALIS Corporation
    Inventors: Billy W. Ward, John A. Notte, IV, Louis S. Farkas, III, Randall G. Percival, Raymond Hill
  • Ion sources, systems and methods
    Patent number: 7557360
    Abstract: Ion sources, systems and methods are disclosed.
    Type: Grant
    Filed: November 15, 2006
    Date of Patent: July 7, 2009
    Assignee: ALIS Corporation
    Inventors: Billy W. Ward, John A. Notte, IV, Louis S. Farkas, III, Randall G. Percival, Raymond Hill, Lars Markwort, Dirk Aderhold
  • Ion sources, systems and methods
    Patent number: 7557359
    Abstract: Ion sources, systems and methods are disclosed.
    Type: Grant
    Filed: November 15, 2006
    Date of Patent: July 7, 2009
    Assignee: ALIS Corporation
    Inventors: Billy W. Ward, John A. Notte, IV, Louis S. Farkas, III, Randall G. Percival, Raymond Hill
  • Ion sources, systems and methods
    Patent number: 7557358
    Abstract: Ion sources, systems and methods are disclosed.
    Type: Grant
    Filed: November 15, 2006
    Date of Patent: July 7, 2009
    Assignee: ALIS Corporation
    Inventors: Billy W. Ward, John A. Notte, IV, Louis S. Farkas, III, Randall G. Percival, Raymond Hill
  • Ion sources, systems and methods
    Patent number: 7554096
    Abstract: Ion sources, systems and methods are disclosed.
    Type: Grant
    Filed: November 15, 2006
    Date of Patent: June 30, 2009
    Assignee: ALIS Corporation
    Inventors: Billy W. Ward, John A. Notte, IV, Louis S. Farkas, III, Randall G. Percival, Raymond Hill
  • Ion sources, systems and methods
    Patent number: 7554097
    Abstract: Ion sources, systems and methods are disclosed.
    Type: Grant
    Filed: November 15, 2006
    Date of Patent: June 30, 2009
    Assignee: ALIS Corporation
    Inventors: Billy W. Ward, John A. Notte, IV, Louis S. Farkas, III, Randall G. Percival, Raymond Hill
  • Ion sources, systems and methods
    Publication number: 20090114840
    Abstract: Ion sources, systems and methods are disclosed.
    Type: Application
    Filed: November 15, 2006
    Publication date: May 7, 2009
    Inventors: Billy W. Ward, John A. Notte, IV, Louis S. Farkas, III, Randall G. Percival, Raymond Hill
  • Ion sources, systems and methods
    Patent number: 7521693
    Abstract: Ion sources, systems and methods are disclosed.
    Type: Grant
    Filed: November 15, 2006
    Date of Patent: April 21, 2009
    Assignee: ALIS Corporation
    Inventors: Billy W. Ward, John A. Notte, IV, Louis S. Farkas, III, Randall G. Percival, Raymond Hill, Shawn McVey, Johannes Bihr
  • Ion sources, systems and methods
    Patent number: 7518122
    Abstract: Ion sources, systems and methods are disclosed.
    Type: Grant
    Filed: November 15, 2006
    Date of Patent: April 14, 2009
    Assignee: ALIS Corporation
    Inventors: Billy W. Ward, John A. Notte, IV, Louis S. Farkas, III, Randall G. Percival, Raymond Hill, Ulrich Mantz, Michael Steigerwald
  • Ion sources, systems and methods
    Patent number: 7511279
    Abstract: Ion sources, systems and methods are disclosed.
    Type: Grant
    Filed: November 15, 2006
    Date of Patent: March 31, 2009
    Assignee: ALIS Corporation
    Inventors: Billy W. Ward, John A. Notte, IV, Louis S. Farkas, III, Randall G. Percival, Raymond Hill
  • Ion sources, systems and methods
    Patent number: 7511280
    Abstract: Ion sources, systems and methods are disclosed.
    Type: Grant
    Filed: November 15, 2006
    Date of Patent: March 31, 2009
    Assignee: ALIS Corporation
    Inventors: Billy W. Ward, John A. Notte, IV, Louis S. Farkas, III, Randall G. Percival, Raymond Hill
  • Ion sources, systems and methods
    Patent number: 7504639
    Abstract: Ion sources, systems and methods are disclosed.
    Type: Grant
    Filed: November 15, 2006
    Date of Patent: March 17, 2009
    Assignee: ALIS Corporation
    Inventors: Billy W. Ward, John A. Notte, IV, Louis S. Farkas, III, Randall G. Percival, Raymond Hill