Patents by Inventor Chi-Ming Tsai

Chi-Ming Tsai has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 11079672
    Abstract: A method and a system of performing layout enhancement include: providing a first design layout comprising a plurality of cells; updating a first cell in the plurality of cells using optical proximity correction to provide a first updated cell and a data set; updating a second cell from remaining cells in the first design layout based on the data set to provide a second updated cell; and manufacturing a mask based on the first updated cell and the second updated cell in the first design layout.
    Type: Grant
    Filed: August 12, 2019
    Date of Patent: August 3, 2021
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY LTD.
    Inventors: Wei-Lin Chu, Hsin-Lun Tseng, Sheng-Wen Huang, Chih-Chung Huang, Chi-Ming Tsai
  • Publication number: 20210225723
    Abstract: In an embodiment, a device includes: an integrated circuit die; an encapsulant at least partially surrounding the integrated circuit die, the encapsulant including fillers having an average diameter; a through via extending through the encapsulant, the through via having a lower portion of a constant width and an upper portion of a continuously decreasing width, a thickness of the upper portion being greater than the average diameter of the fillers; and a redistribution structure including: a dielectric layer on the through via, the encapsulant, and the integrated circuit die; and a metallization pattern having a via portion extending through the dielectric layer and a line portion extending along the dielectric layer, the metallization pattern being electrically coupled to the through via and the integrated circuit die.
    Type: Application
    Filed: March 15, 2021
    Publication date: July 22, 2021
    Inventors: Tzu-Sung Huang, Ming Hung Tseng, Yen-Liang Lin, Hao-Yi Tsai, Chi-Ming Tsai, Chung-Shi Liu, Chih-Wei Lin, Ming-Che Ho
  • Publication number: 20210210654
    Abstract: A semiconductor light emitting device includes a multi-quantum-well structure, a first capping layer, a second capping layer, and an electron barrier layer stacked in order. The multi-quantum-well structure includes a plurality of alternately-stacked potential barrier layers and potential well layers. The first capping layer is a semiconductor layer, and the second capping layer is a p-doped semiconductor layer. Each of the first and second capping layers has an aluminum mole fraction larger than that of each of the potential barrier layers, and the aluminum mole fraction of the first capping layer is larger than that of at least a portion of the electron barrier layer. A method for preparing the semiconductor light emitting device is also provided.
    Type: Application
    Filed: March 23, 2021
    Publication date: July 8, 2021
    Inventors: Yung-Ling LAN, Chan-Chan LING, Chi-Ming TSAI, Chia-Hung CHANG
  • Patent number: 11055464
    Abstract: A method includes receiving a pattern layout for a mask, shrinking the pattern layout to form a shrunk pattern, determining centerlines for each of a plurality of features within the shrunk pattern, and snapping the centerline for each of the plurality of features to a grid. The grid represents a minimum resolution size of a mask fabrication tool. The method further includes, after snapping the centerline for each of the plurality of features to the grid, fabricating the mask with the shrunk pattern.
    Type: Grant
    Filed: October 30, 2018
    Date of Patent: July 6, 2021
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
    Inventors: Chi-Ta Lu, Chi-Ming Tsai
  • Publication number: 20210116804
    Abstract: A method for manufacturing a semiconductor device is provided. The method includes providing a first layout including a plurality of first features and a second layout including a plurality of second features; shifting the second layout to generate a plurality of virtual layouts; comparing a score of each of the plurality of virtual layouts and determining a modified second layout having a target score out of the plurality of virtual layouts; and outputting the modified second layout to a photomask.
    Type: Application
    Filed: December 8, 2020
    Publication date: April 22, 2021
    Inventors: WEI-CHUNG HU, CHI-TA LU, CHI-MING TSAI
  • Patent number: 10978612
    Abstract: A semiconductor light emitting device includes a multi-quantum-well structure, a first capping layer, a second capping layer, and an electron barrier layer stacked in order. The multi-quantum-well structure includes a plurality of alternately-stacked second potential barrier layers and potential well layers. The first capping layer is a semiconductor layer and the second capping layer is a p-doped semiconductor layer. Each of the first and second capping layers has a band gap larger than that of each of the second potential barrier layers and the band gap of the first capping layer is larger than that of the electron barrier layer. A method of preparing the semiconductor light emitting device is also provided.
    Type: Grant
    Filed: December 17, 2019
    Date of Patent: April 13, 2021
    Assignee: XIAMEN SAN'AN OPTOELECTRONICS CO., LTD
    Inventors: Yung-Ling Lan, Chan-Chan Ling, Chi-Ming Tsai, Chia-Hung Chang
  • Publication number: 20210089701
    Abstract: A method for forming a photomask is provided. The method includes: receiving an initial layout, the initial layout comprising a first pattern and a second pattern; decomposing the initial layout into a first layout including the first pattern and a second layout including the second pattern; inserting a third pattern into the first layout; overlapping the first layout including the first pattern and the third pattern to the second layout including the second pattern; increasing a width of the third pattern in the first layout overlapping the second pattern in the second layout to form a fourth pattern in the first layout; and outputting the first layout comprising the first pattern, the third pattern and the fourth pattern into a first photomask.
    Type: Application
    Filed: December 8, 2020
    Publication date: March 25, 2021
    Inventors: CHIN-MIN HUANG, CHING-HUNG LAI, JIA-GUEI JOU, YIN-CHUAN CHEN, CHI-MING TSAI
  • Patent number: 10957609
    Abstract: A method includes performing Chemical Mechanical Polish (CMP) on a wafer, placing the wafer on a chuck, performing a post-CMP cleaning on the wafer, and determining cleanness of the wafer when the wafer is located on the chuck.
    Type: Grant
    Filed: December 17, 2018
    Date of Patent: March 23, 2021
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
    Inventors: Yu-Ting Yen, Chi-Ming Tsai, Hui-Chi Huang
  • Publication number: 20210083147
    Abstract: A nitride-based light-emitting diode (LED) device includes an n-type nitride semiconductor layer, an active layer that is disposed on the n-type nitride semiconductor layer, a p-type nitride semiconductor layer disposed on the active layer, and a defect control unit disposed between the n-type nitride semiconductor layer and the active layer. The defect control unit includes first, second and third defect control layers that are sequentially disposed on the active layer in such order, and that have different doping concentrations. The third defect control layer includes one of Al-containing ternary nitride, Al-containing quaternary nitride, and a combination thereof.
    Type: Application
    Filed: November 9, 2020
    Publication date: March 18, 2021
    Inventors: YUNG-LING LAN, CHAN-CHAN LING, CHI-MING TSAI
  • Patent number: 10950519
    Abstract: In an embodiment, a device includes: an integrated circuit die; an encapsulant at least partially surrounding the integrated circuit die, the encapsulant including fillers having an average diameter; a through via extending through the encapsulant, the through via having a lower portion of a constant width and an upper portion of a continuously decreasing width, a thickness of the upper portion being greater than the average diameter of the fillers; and a redistribution structure including: a dielectric layer on the through via, the encapsulant, and the integrated circuit die; and a metallization pattern having a via portion extending through the dielectric layer and a line portion extending along the dielectric layer, the metallization pattern being electrically coupled to the through via and the integrated circuit die.
    Type: Grant
    Filed: May 31, 2019
    Date of Patent: March 16, 2021
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Tzu-Sung Huang, Ming Hung Tseng, Yen-Liang Lin, Hao-Yi Tsai, Chi-Ming Tsai, Chung-Shi Liu, Chih-Wei Lin, Ming-Che Ho
  • Publication number: 20210064808
    Abstract: A method, a non-transitory computer-readable storage medium and a system for adjusting a design layout are provided. The method includes: receiving a design layout including a feature in a peripheral region of the design layout; determining a first compensation value associated with the peripheral region according to an exposure distribution in an exposure field of a workpiece; and adjusting the design layout by modifying a shape of the feature according to the compensation value.
    Type: Application
    Filed: July 23, 2020
    Publication date: March 4, 2021
    Inventors: CHI-TA LU, CHIA-HUI LIAO, YIHUNG LIN, CHI-MING TSAI
  • Publication number: 20210005552
    Abstract: A semiconductor structure includes a substrate including a first surface; a dielectric layer disposed over the first surface of the substrate; a first conductive line surrounded by the dielectric layer and extended over the first surface of the substrate; a second conductive line disposed adjacent to the first conductive line, surrounded by the dielectric layer and extended parallel to the first conductive line; a conductive via disposed over the first conductive line and extended through the dielectric layer; and a cross section of the conductive via substantially parallel to the first surface of the substrate, wherein the cross section of the conductive via is at least partially protruded from the first conductive line towards the second conductive line. Further, a method of manufacturing the semiconductor structure is also disclosed.
    Type: Application
    Filed: September 20, 2020
    Publication date: January 7, 2021
    Inventors: CHI-TA LU, CHI-MING TSAI
  • Patent number: 10866508
    Abstract: A method for manufacturing a photomask is provided. The method includes generating a plurality of virtual layouts; calculating a score for each of the plurality of virtual layouts in accordance with a total overlay area; comparing the scores of the plurality of virtual layouts and determining a modified layout having a target score out of the plurality of virtual layouts; and outputting the modified layout to a photomask. Each of the virtual layouts includes a plurality of the shifted features. A semiconductor manufacturing method is also provided.
    Type: Grant
    Filed: November 7, 2018
    Date of Patent: December 15, 2020
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY LTD.
    Inventors: Wei-Chung Hu, Chi-Ta Lu, Chi-Ming Tsai
  • Patent number: 10867107
    Abstract: A method for forming a photomask is provided. The method includes: receiving an initial layout including a plurality of first patterns and a plurality of second patterns; decomposing the initial layout into a first layout including the plurality of first patterns and a second layout including the plurality of second patterns; inserting a plurality of third patterns into the first layout, wherein each of the plurality of third patterns is adjacent to at least one of the plurality of first patterns; comparing the first layout and the second layout; identifying a fourth pattern as an overlapping portion of the plurality of third patterns overlapping one of the plurality of second patterns; increasing a width of the fourth pattern; and outputting the first layout including the first patterns, the third patterns and the fourth patterns into a first photomask.
    Type: Grant
    Filed: September 25, 2018
    Date of Patent: December 15, 2020
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY LTD.
    Inventors: Chin-Min Huang, Ching-Hung Lai, Jia-Guei Jou, Yin-Chuan Chen, Chi-Ming Tsai
  • Patent number: 10861814
    Abstract: Integrated fan-out packages and methods of forming the same are disclosed. An integrated fan-out package includes a bump structure, a polymer layer and a metal layer. The bump structure includes a metal pad and a bump electrically connected to the metal pad. The polymer layer extends laterally from a sidewall of the bump. The metal layer is over the bump structure and in physical contact with a side surface of the metal pad.
    Type: Grant
    Filed: April 30, 2018
    Date of Patent: December 8, 2020
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Tzung-Hui Lee, Chen-Hua Yu, Chi-Ming Tsai, Hung-Jui Kuo, Ming-Che Ho
  • Publication number: 20200381325
    Abstract: In an embodiment, a device includes: an integrated circuit die; an encapsulant at least partially surrounding the integrated circuit die, the encapsulant including fillers having an average diameter; a through via extending through the encapsulant, the through via having a lower portion of a constant width and an upper portion of a continuously decreasing width, a thickness of the upper portion being greater than the average diameter of the fillers; and a redistribution structure including: a dielectric layer on the through via, the encapsulant, and the integrated circuit die; and a metallization pattern having a via portion extending through the dielectric layer and a line portion extending along the dielectric layer, the metallization pattern being electrically coupled to the through via and the integrated circuit die.
    Type: Application
    Filed: May 31, 2019
    Publication date: December 3, 2020
    Inventors: Tzu-Sung Huang, Ming Hung Tseng, Yen-Liang Lin, Hao-Yi Tsai, Chi-Ming Tsai, Chung-Shi Liu, Chih-Wei Lin, Ming-Che Ho
  • Patent number: 10784196
    Abstract: A semiconductor structure includes a substrate including a first surface; a dielectric layer disposed over the first surface of the substrate; a first conductive line surrounded by the dielectric layer and extended over the first surface of the substrate; a conductive via disposed over the first conductive line and extended through the dielectric layer; and a cross section of the conductive via parallel to the first surface of the substrate, wherein the first conductive line includes a second surface at least partially interfaced with the conductive via, the second surface of the first conductive line includes a first end, a second end opposite to the first end and a first central axis passing through the first end and the second end, the cross section of the conductive via includes a second central axis parallel to the first central axis and a third central axis orthogonal to the second central axis.
    Type: Grant
    Filed: December 6, 2018
    Date of Patent: September 22, 2020
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY LTD.
    Inventors: Chi-Ta Lu, Chi-Ming Tsai
  • Patent number: 10744655
    Abstract: A pneumatic claw-controlling apparatus includes a claw, an air supply, a high-pressure channel, a medium-pressure channel and a low-pressure channel. The claw is normally in an opened position and movable to a closed position by working air. The air supply releases the working gas according to an air-supply signal. The high-pressure channel is operable to adjust the working gas to a high pressure and communicate the air supply with the claw according to a high-pressure signal. The medium-pressure channel is operable to adjust the working gas to a medium pressure and communicate the air supply with the claw according to a medium-pressure signal. The low-pressure channel is operable to adjust the working gas to a low pressure and communicate the air supply with the claw according to a low-pressure signal. The releasing channel is operable to block the claw from the atmosphere according to a vent-stopping signal.
    Type: Grant
    Filed: January 2, 2019
    Date of Patent: August 18, 2020
    Assignee: Feiloli Electronic Co., Ltd.
    Inventors: Chi-Ming Tsai, I-Chiang Yang
  • Patent number: 10720008
    Abstract: A game machine is provided with a structural and lighting apparatus. The structural and lighting apparatus includes a plank, a bar and fins. The bar includes two strips extending on and along a front face of the plank. Each of the strips provides a space with the plank. The bar is located between two panels of two lockers of the game machine so that each of the spaces receives an edge of a corresponding one of the panels. The fins extend on and along a rear face of the plank, thereby providing at least one partition-containing groove for receiving a partition between two lockers and at least one light-containing groove for receiving at least one LED string in the corresponding locker.
    Type: Grant
    Filed: May 2, 2018
    Date of Patent: July 21, 2020
    Assignee: FEILOLI ELECTRONIC CO., LTD.
    Inventors: Chi-Ming Tsai, I-Chiang Yang
  • Patent number: D897439
    Type: Grant
    Filed: May 3, 2018
    Date of Patent: September 29, 2020
    Assignee: Feiloli Electronic Co., Ltd.
    Inventors: Chi-Ming Tsai, I-Chiang Yang