Patents by Inventor Chih-Hang Tung

Chih-Hang Tung has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20200365550
    Abstract: A method includes patterning a cavity through a first passivation layer of a first package component, the first package component comprising a first semiconductor substrate and bonding the first package component to a second package component. The second package component comprises a second semiconductor substrate and a second passivation layer. Bonding the first package component to the second package component comprises directly bonding the first passivation layer to the second passivation layer; and reflowing a solder region of a conductive connector disposed in the cavity to electrically connect the first package component to the second package component.
    Type: Application
    Filed: August 3, 2020
    Publication date: November 19, 2020
    Inventors: Chen-Hua Yu, Tung-Liang Shao, Chih-Hang Tung
  • Publication number: 20200343224
    Abstract: In an embodiment, a package includes a first package structure including a first die having a first active side and a first back-side, the first active side including a first bond pad and a first insulating layer a second die bonded to the first die, the second die having a second active side and a second back-side, the second active side including a second bond pad and a second insulating layer, the second active side of the second die facing the first active side of the first die, the second insulating layer being bonded to the first insulating layer through dielectric-to-dielectric bonds, and a conductive bonding material bonded to the first bond pad and the second bond pad, the conductive bonding material having a reflow temperature lower than reflow temperatures of the first and second bond pads.
    Type: Application
    Filed: July 13, 2020
    Publication date: October 29, 2020
    Inventors: Chen-Hua Yu, Chih-Hang Tung, Kuo-Chung Yee
  • Publication number: 20200295121
    Abstract: A package includes a first redistribution structure, a die, an encapsulant, a second redistribution structure, and an inductor. The die is disposed on the first redistribution structure. The encapsulant laterally encapsulates the die. The second redistribution structure is over the die and the encapsulant. The inductor includes a first portion, a second portion, and a third portion. The first portion is embedded in the first redistribution structure. The second portion is embedded in the encapsulant and is connected to the first and third portions of the inductor. The third portion is embedded in the second redistribution structure.
    Type: Application
    Filed: March 14, 2019
    Publication date: September 17, 2020
    Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.
    Inventors: Wen-Shiang Liao, Chih-Hang Tung
  • Patent number: 10734279
    Abstract: A method of manufacturing a semiconductor package includes: coupling a semiconductor die to a protection layer; forming a first redistribution layer over the semiconductor die, wherein the first redistribution layer includes a first conductive plate and a first dielectric material laterally surrounding the first conductive plate; forming a recess in the first redistribution layer, wherein the recess is over the first conductive plate and defined by the first dielectric material; depositing an insulating film in the recess with a second dielectric material of a dielectric constant greater than a dielectric constant of the first dielectric material; and forming a second redistribution layer including a second conductive plate over the insulating film. The insulating film electrically isolates the first conductive plate from the second conductive plate, and one of the first conductive plate and the second conductive plate is configured to radiate or receive electromagnetic wave.
    Type: Grant
    Filed: October 28, 2019
    Date of Patent: August 4, 2020
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY LTD.
    Inventors: Wen-Shiang Liao, Feng Wei Kuo, Chih-Hang Tung, Chen-Hua Yu
  • Patent number: 10734348
    Abstract: A method includes patterning a cavity through a first passivation layer of a first package component, the first package component comprising a first semiconductor substrate and bonding the first package component to a second package component. The second package component comprises a second semiconductor substrate and a second passivation layer. Bonding the first package component to the second package component comprises directly bonding the first passivation layer to the second passivation layer; and reflowing a solder region of a conductive connector disposed in the cavity to electrically connect the first package component to the second package component.
    Type: Grant
    Filed: September 21, 2018
    Date of Patent: August 4, 2020
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Chen-Hua Yu, Tung-Liang Shao, Chih-Hang Tung
  • Patent number: 10714457
    Abstract: In an embodiment, a package includes a first package structure including a first die having a first active side and a first back-side, the first active side including a first bond pad and a first insulating layer a second die bonded to the first die, the second die having a second active side and a second back-side, the second active side including a second bond pad and a second insulating layer, the second active side of the second die facing the first active side of the first die, the second insulating layer being bonded to the first insulating layer through dielectric-to-dielectric bonds, and a conductive bonding material bonded to the first bond pad and the second bond pad, the conductive bonding material having a reflow temperature lower than reflow temperatures of the first and second bond pads.
    Type: Grant
    Filed: May 13, 2019
    Date of Patent: July 14, 2020
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Chen-Hua Yu, Chih-Hang Tung, Kuo-Chung Yee
  • Publication number: 20200126937
    Abstract: A semiconductor device includes a solder bump overlying and electrically connected to a pad region, and a metal cap layer formed on at least a portion of the solder bump. The metal cap layer has a melting temperature greater than the melting temperature of the solder bump.
    Type: Application
    Filed: December 20, 2019
    Publication date: April 23, 2020
    Inventors: Yi-Li Hsiao, Chen-Hua Yu, Shin-Puu Jeng, Chih-Hang Tung, Cheng-Chang Wei
  • Publication number: 20200098720
    Abstract: A method includes patterning a cavity through a first passivation layer of a first package component, the first package component comprising a first semiconductor substrate and bonding the first package component to a second package component. The second package component comprises a second semiconductor substrate and a second passivation layer. Bonding the first package component to the second package component comprises directly bonding the first passivation layer to the second passivation layer; and reflowing a solder region of a conductive connector disposed in the cavity to electrically connect the first package component to the second package component.
    Type: Application
    Filed: September 21, 2018
    Publication date: March 26, 2020
    Inventors: Chen-Hua Yu, Tung-Liang Shao, Chih-Hang Tung
  • Publication number: 20200091034
    Abstract: A semiconductor package is provided. The semiconductor package includes a substrate and a semiconductor die over the substrate. A heat-dissipating feature covers the substrate and the semiconductor die, and a composite thermal interface material (TIM) structure is thermally bonded between the semiconductor die and the heat-dissipating feature. The composite TIM structure includes a metal-containing matrix material layer and polymer particles embedded in the metal-containing matrix material layer.
    Type: Application
    Filed: May 22, 2019
    Publication date: March 19, 2020
    Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.
    Inventors: Tung-Liang SHAO, Jen-Yu WANG, Chung-Jung WU, Chih-Hang TUNG, Chen-Hua YU
  • Publication number: 20200091039
    Abstract: A package structure and method for forming the same are provided. The package structure includes a first interconnect structure formed over a first substrate, and the first interconnect structure includes a first metal layer. The package structure further includes a second interconnect structure formed over a second substrate. The package structure includes a bonding structure between the first interconnect structure and the second interconnect structure. The bonding structure includes a first intermetallic compound (IMC) and a second intermetallic compound (IMC), a portion of the first IMC protrudes from the sidewall surfaces of the second IMC, and there could be a grain boundary between the first IMC and the second IMC.
    Type: Application
    Filed: April 3, 2019
    Publication date: March 19, 2020
    Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.
    Inventors: Tung-Liang SHAO, Wen-Lin SHIH, Su-Chun YANG, Chih-Hang TUNG, Chen-Hua YU
  • Publication number: 20200066582
    Abstract: A method of manufacturing a semiconductor package includes: coupling a semiconductor die to a protection layer; forming a first redistribution layer over the semiconductor die, wherein the first redistribution layer includes a first conductive plate and a first dielectric material laterally surrounding the first conductive plate; forming a recess in the first redistribution layer, wherein the recess is over the first conductive plate and defined by the first dielectric material; depositing an insulating film in the recess with a second dielectric material of a dielectric constant greater than a dielectric constant of the first dielectric material; and forming a second redistribution layer including a second conductive plate over the insulating film. The insulating film electrically isolates the first conductive plate from the second conductive plate, and one of the first conductive plate and the second conductive plate is configured to radiate or receive electromagnetic wave.
    Type: Application
    Filed: October 28, 2019
    Publication date: February 27, 2020
    Inventors: WEN-SHIANG LIAO, FENG WEI KUO, CHIH-HANG TUNG, CHEN-HUA YU
  • Publication number: 20200058614
    Abstract: A method for forming a chip package structure is provided. The method includes partially removing a first redistribution layer to form an alignment trench in the first redistribution layer. The alignment trench surrounds a bonding portion of the first redistribution layer. The method includes forming a liquid layer over the bonding portion. The method includes disposing a chip structure over the liquid layer, wherein a first width of the bonding portion is substantially equal to a second width of the chip structure. The method includes evaporating the liquid layer. The chip structure is in direct contact with the bonding portion after the liquid layer is evaporated.
    Type: Application
    Filed: April 3, 2019
    Publication date: February 20, 2020
    Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.
    Inventors: Chih-Hang TUNG, Tung-Liang SHAO, Su-Chun YANG, Geng-Ming CHANG, Chen-Hua YU
  • Patent number: 10522491
    Abstract: A semiconductor device includes a solder bump overlying and electrically connected to a pad region, and a metal cap layer formed on at least a portion of the solder bump. The metal cap layer has a melting temperature greater than the melting temperature of the solder bump.
    Type: Grant
    Filed: April 30, 2018
    Date of Patent: December 31, 2019
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Yi-Li Hsiao, Chen-Hua Yu, Shin-Puu Jeng, Chih-Hang Tung, Cheng-Chang Wei
  • Publication number: 20190393197
    Abstract: The present disclosure provides a semiconductor structure including a first chip having a first dielectric surface, a second chip having a second dielectric surface facing the first dielectric surface and maintaining a distance thereto, and an air gap between the second dielectric surface and the first dielectric surface. The first chip includes a plurality of first conductive lines in proximity to the first dielectric surface and parallel to each other, two adjacent first conductive lines each having a sidewall partially exposed from the first dielectric surface. The present disclosure further provides a method for manufacturing the semiconductor structure described herein.
    Type: Application
    Filed: September 9, 2019
    Publication date: December 26, 2019
    Inventors: WEI-HENG LIN, TUNG-LIANG SHAO, CHIH-HANG TUNG, CHEN-HUA YU
  • Patent number: 10468385
    Abstract: The present disclosure provides a semiconductor structure including a first chip having a first dielectric surface, a second chip having a second dielectric surface facing the first dielectric surface and maintaining a distance thereto, and an air gap between the second dielectric surface and the first dielectric surface. The first chip includes a plurality of first conductive lines in proximity to the first dielectric surface and parallel to each other, two adjacent first conductive lines each having a sidewall partially exposed from the first dielectric surface. The present disclosure further provides a method for manufacturing the semiconductor structure described herein.
    Type: Grant
    Filed: November 29, 2017
    Date of Patent: November 5, 2019
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY LTD.
    Inventors: Wei-Heng Lin, Tung-Liang Shao, Chih-Hang Tung, Chen-Hua Yu
  • Patent number: 10460987
    Abstract: The present disclosure provides a semiconductor package device, which includes a semiconductor die and a redistribution layer disposed over and electrically coupled to the semiconductor die. The redistribution layer includes a first conductive plate, a second conductive plate disposed over the first conductive plate, an insulating film between the first conductive plate and the second conductive plate, and a first dielectric material encapsulating the first conductive plate, the second conductive plate and the insulating film. The first conductive plate and the second conductive plate are configured as an antenna plane and a ground plane, respectively.
    Type: Grant
    Filed: May 9, 2017
    Date of Patent: October 29, 2019
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY LTD.
    Inventors: Wen-Shiang Liao, Feng Wei Kuo, Chih-Hang Tung, Chen-Hua Yu
  • Publication number: 20190326251
    Abstract: A method includes picking up a first package component, removing an oxide layer on an electrical connector of the first package component, placing the first package component on a second package component after the oxide layer is removed, and bonding the first package component to the second package component.
    Type: Application
    Filed: February 1, 2019
    Publication date: October 24, 2019
    Inventors: Chen-Hua Yu, Ying-Jui Huang, Chih-Hang Tung, Tung-Liang Shao, Ching-Hua Hsieh, Chien Ling Hwang, Yi-Li Hsiao, Su-Chun Yang
  • Publication number: 20190267354
    Abstract: In an embodiment, a package includes a first package structure including a first die having a first active side and a first back-side, the first active side including a first bond pad and a first insulating layer a second die bonded to the first die, the second die having a second active side and a second back-side, the second active side including a second bond pad and a second insulating layer, the second active side of the second die facing the first active side of the first die, the second insulating layer being bonded to the first insulating layer through dielectric-to-dielectric bonds, and a conductive bonding material bonded to the first bond pad and the second bond pad, the conductive bonding material having a reflow temperature lower than reflow temperatures of the first and second bond pads.
    Type: Application
    Filed: May 13, 2019
    Publication date: August 29, 2019
    Inventors: Chen-Hua Yu, Chih-Hang Tung, Kuo-Chung Yee
  • Patent number: 10319690
    Abstract: A semiconductor structure includes a substrate; an interconnect structure formed over the substrate and including a dielectric layer over the substrate, a first conductive member formed within the dielectric layer and a second conductive member formed within the dielectric layer; a waveguide formed between the first conductive member and the second conductive member; a first die disposed over the interconnect structure and electrically connected to the first conductive member; and a second die disposed over the interconnect structure and electrically connected to the second conductive member, wherein the waveguide is coupled with the first conductive member and the second conductive member.
    Type: Grant
    Filed: April 28, 2017
    Date of Patent: June 11, 2019
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY LTD.
    Inventors: Wen-Shiang Liao, Chewn-Pu Jou, Chih-Hang Tung, Chen-Hua Yu
  • Publication number: 20190164937
    Abstract: The present disclosure provides a semiconductor structure including a first chip having a first dielectric surface, a second chip having a second dielectric surface facing the first dielectric surface and maintaining a distance thereto, and an air gap between the second dielectric surface and the first dielectric surface. The first chip includes a plurality of first conductive lines in proximity to the first dielectric surface and parallel to each other, two adjacent first conductive lines each having a sidewall partially exposed from the first dielectric surface. The present disclosure further provides a method for manufacturing the semiconductor structure described herein.
    Type: Application
    Filed: November 29, 2017
    Publication date: May 30, 2019
    Inventors: WEI-HENG LIN, TUNG-LIANG SHAO, CHIH-HANG TUNG, CHEN-HUA YU