Patents by Inventor Chih-Hang Tung

Chih-Hang Tung has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 10290611
    Abstract: In an embodiment, a package includes a first package structure including a first die having a first active side and a first back-side, the first active side including a first bond pad and a first insulating layer a second die bonded to the first die, the second die having a second active side and a second back-side, the second active side including a second bond pad and a second insulating layer, the second active side of the second die facing the first active side of the first die, the second insulating layer being bonded to the first insulating layer through dielectric-to-dielectric bonds, and a conductive bonding material bonded to the first bond pad and the second bond pad, the conductive bonding material having a reflow temperature lower than reflow temperatures of the first and second bond pads.
    Type: Grant
    Filed: May 15, 2018
    Date of Patent: May 14, 2019
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Chen-Hua Yu, Chih-Hang Tung, Kuo-Chung Yee
  • Patent number: 10229901
    Abstract: Semiconductor devices and methods of manufacture thereof are disclosed. In some embodiments, a method of manufacturing a device includes coupling a first semiconductor device to a second semiconductor device by spacers. The first semiconductor device has first contact pads disposed thereon, and the second semiconductor device has second contact pads disposed thereon. The method includes forming an immersion interconnection between the first contact pads of the first semiconductor device and the second contact pads of the second semiconductor device.
    Type: Grant
    Filed: June 27, 2016
    Date of Patent: March 12, 2019
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Tung-Liang Shao, Yi-Li Hsiao, Hsiao-Yun Chen, Chih-Hang Tung, Chen-Hua Yu
  • Publication number: 20190035767
    Abstract: In an embodiment, a package includes a first package structure including a first die having a first active side and a first back-side, the first active side including a first bond pad and a first insulating layer a second die bonded to the first die, the second die having a second active side and a second back-side, the second active side including a second bond pad and a second insulating layer, the second active side of the second die facing the first active side of the first die, the second insulating layer being bonded to the first insulating layer through dielectric-to-dielectric bonds, and a conductive bonding material bonded to the first bond pad and the second bond pad, the conductive bonding material having a reflow temperature lower than reflow temperatures of the first and second bond pads.
    Type: Application
    Filed: May 15, 2018
    Publication date: January 31, 2019
    Inventors: Chen-Hua Yu, Chih-Hang Tung, Kuo-Chung Yee
  • Patent number: 10163835
    Abstract: A wafer-level pulling method includes securing a top holder to a plurality of chips. The method further includes securing a bottom holder to a wafer, wherein the plurality of chips are bonded to the wafer by a plurality of solder bumps. The method further includes softening the plurality of solder bumps. The method further includes stretching the plurality of softened solder bumps, wherein stretching the plurality of softened solder bumps comprises leveling the plurality of chips using a plurality of levelling devices separated from the plurality of chips, and a first levelling device of the plurality of levelling devices has a different structure from a second levelling device of the plurality of levelling devices.
    Type: Grant
    Filed: December 11, 2017
    Date of Patent: December 25, 2018
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
    Inventors: Su-Chun Yang, Yi-Li Hsiao, Chih-Hang Tung, Chen-Hua Yu
  • Patent number: 10153218
    Abstract: A semiconductor structure includes a die including a surface, a lid disposed over the surface of the die, and a thermally conductive material disposed between the die and the lid, wherein the lid includes a protrusion protruded towards the surface of the die and the thermally conductive material surrounds the protrusion. Also, a method of manufacturing a semiconductor structure includes providing a die including a surface, providing a lid, removing a portion of the lid to form a protrusion, disposing a thermally conductive material between the surface of the die and the lid, wherein the protrusion of the lid is surrounded by the thermally conductive material. Further, an apparatus for manufacturing a semiconductor structure and a method of manufacturing a semiconductor structure by the apparatus are disclosed.
    Type: Grant
    Filed: February 16, 2017
    Date of Patent: December 11, 2018
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY LTD.
    Inventors: Tsung-Yu Chen, Wensen Hung, Hung-Chi Li, Cheng-Chieh Hsieh, Tung-Liang Shao, Chih-Hang Tung
  • Patent number: 10141291
    Abstract: The present disclosure relates to a semiconductor device and method of manufacturing the same. The method for manufacturing a semiconductor device includes: attaching a carrier wafer to a front side of a top die wafer; thinning a back side of the top die wafer, the back side of the top die wafer being opposite to the front side the top die wafer; singulating the carrier wafer and the top die wafer whereby singulated dies attached to singulated carrier dies are formed; and bonding back side of each of the singulated dies to a front side of a bottom die wafer.
    Type: Grant
    Filed: November 30, 2015
    Date of Patent: November 27, 2018
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY LTD.
    Inventors: Tung-Liang Shao, Chih-Hang Tung, Chen-Hua Yu
  • Publication number: 20180331041
    Abstract: The present disclosure provides a semiconductor package device, which includes a semiconductor die and a redistribution layer disposed over and electrically coupled to the semiconductor die. The redistribution layer includes a first conductive plate, a second conductive plate disposed over the first conductive plate, an insulating film between the first conductive plate and the second conductive plate, and a first dielectric material encapsulating the first conductive plate, the second conductive plate and the insulating film. The first conductive plate and the second conductive plate are configured as an antenna plane and a ground plane, respectively.
    Type: Application
    Filed: May 9, 2017
    Publication date: November 15, 2018
    Inventors: WEN-SHIANG LIAO, FENG WEI KUO, CHIH-HANG TUNG, CHEN-HUA YU
  • Publication number: 20180315720
    Abstract: A semiconductor structure includes a substrate; an interconnect structure formed over the substrate and including a dielectric layer over the substrate, a first conductive member formed within the dielectric layer and a second conductive member formed within the dielectric layer; a waveguide formed between the first conductive member and the second conductive member; a first die disposed over the interconnect structure and electrically connected to the first conductive member; and a second die disposed over the interconnect structure and electrically connected to the second conductive member, wherein the waveguide is coupled with the first conductive member and the second conductive member.
    Type: Application
    Filed: April 28, 2017
    Publication date: November 1, 2018
    Inventors: WEN-SHIANG LIAO, CHEWN-PU JOU, CHIH-HANG TUNG, CHEN-HUA YU
  • Publication number: 20180315706
    Abstract: Among other things, a method of fabricating an integrated electronic device package is described. First trace portions of an electrically conductive trace are formed on an electrically insulating layer of a package structure, and vias of the conductive trace are formed in a sacrificial layer disposed on the electrically insulating layer. The sacrificial layer is removed, and a die is placed above the electrically insulating layer. Molding material is formed around exposed surfaces of the die and exposed surfaces of the vias, and a magnetic structure is formed within the layer of molding material. Second trace portions of the electrically conductive trace are formed above the molding material and the magnetic structure. The electrically conductive trace and the magnetic structure form an inductor. The electrically conductive trace may have a coil shape surrounding the magnetic structure. The die may be positioned between portions of the inductor.
    Type: Application
    Filed: February 15, 2018
    Publication date: November 1, 2018
    Inventors: Wen-Shiang Liao, Chih-Hang Tung, Chen-Hua Yu, Chewn-Pu Jou, Feng Wei Kuo
  • Patent number: 10068868
    Abstract: A method includes performing a first strike process to strike a metal bump of a first package component against a metal pad of a second package component. A first one of the metal bump and the metal pad includes copper. A second one of the metal bump and the metal pad includes aluminum. The method further includes performing a second strike process to strike the metal bump against the metal pad. An annealing is performed to bond the metal bump on the metal pad.
    Type: Grant
    Filed: February 15, 2017
    Date of Patent: September 4, 2018
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Tung-Liang Shao, Chih-Hang Tung, Wen-Lin Shih, Hsiao-Yun Chen, Chen-Hua Yu
  • Publication number: 20180247907
    Abstract: A semiconductor device includes a solder bump overlying and electrically connected to a pad region, and a metal cap layer formed on at least a portion of the solder bump. The metal cap layer has a melting temperature greater than the melting temperature of the solder bump.
    Type: Application
    Filed: April 30, 2018
    Publication date: August 30, 2018
    Inventors: Yi-Li Hsiao, Chen-Hua Yu, Shin-Puu Jeng, Chih-Hang Tung, Cheng-Chang Wei
  • Patent number: 10034390
    Abstract: A method includes forming a plurality of metal posts. The plurality of metal posts is interconnected to form a metal-post row by weak portions between neighboring ones of the plurality of metal posts. The weak portions include a same metal as the plurality of metal posts. A majority of each of the plurality of metal posts is separated from respective neighboring ones of the plurality of metal posts. An end portion of each of the plurality of metal posts is plated with a metal. The plurality of metal posts is disposed into a metal post-storage. The method further includes retrieving one of the metal posts from a metal-post storage, and bonding the one of the metal posts on a metal pad.
    Type: Grant
    Filed: January 22, 2016
    Date of Patent: July 24, 2018
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Yi-Li Hsiao, Su-Chun Yang, Chih-Hang Tung, Da-Yuan Shih, Chen-Hua Yu
  • Patent number: 9997467
    Abstract: Semiconductor packages and methods of forming the same are disclosed. Embodiments include forming a first recess in a first substrate, wherein a first area of an opening of the first recess is larger than a second area of a bottom of the first recess. The embodiments also include forming a first device, wherein a third area of a top end of the first device is larger than a fourth area of a bottom end of the first device. The embodiments also include placing the first device into the first recess, wherein the bottom end of the first device faces the bottom of the first recess, and bonding a sidewall of the first device to a sidewall of the first recess.
    Type: Grant
    Filed: January 17, 2017
    Date of Patent: June 12, 2018
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Tung-Liang Shao, Chih-Hang Tung, Chen-Hua Yu
  • Publication number: 20180151523
    Abstract: A conductive interconnect structure includes a contact pad; a conductive body connected to the contact pad at a first end; and a conductive layer positioned on a second end of the conductive body. The conductive body has a longitudinal direction perpendicular to a surface of the contact pad. The conductive body has an average grain size (a) on a cross sectional plane (Plane A) whose normal is perpendicular to the longitudinal direction of the conductive body. The conductive layer has an average grain size (b) on Plane A. The conductive body and the conductive layer are composed of same material, and the average grain size (a) is greater than the average grain size (b).
    Type: Application
    Filed: January 23, 2018
    Publication date: May 31, 2018
    Inventors: MENG-TSE CHEN, HSIU-JEN LIN, CHIH-WEI LIN, MING-DA CHENG, CHIH-HANG TUNG, CHUNG-SHI LIU
  • Publication number: 20180151472
    Abstract: A semiconductor structure includes a die including a surface, a lid disposed over the surface of the die, and a thermally conductive material disposed between the die and the lid, wherein the lid includes a protrusion protruded towards the surface of the die and the thermally conductive material surrounds the protrusion. Also, a method of manufacturing a semiconductor structure includes providing a die including a surface, providing a lid, removing a portion of the lid to form a protrusion, disposing a thermally conductive material between the surface of the die and the lid, wherein the protrusion of the lid is surrounded by the thermally conductive material. Further, an apparatus for manufacturing a semiconductor structure and a method of manufacturing a semiconductor structure by the apparatus are disclosed.
    Type: Application
    Filed: February 16, 2017
    Publication date: May 31, 2018
    Inventors: TSUNG-YU CHEN, WENSEN HUNG, HUNG-CHI LI, CHENG-CHIEH HSIEH, TUNG-LIANG SHAO, CHIH-HANG TUNG
  • Patent number: 9978709
    Abstract: A method of producing a solder bump joint includes heating a solder bump comprising tin above a melting temperature of the solder bump, wherein the solder bumps comprises eutectic Sn—Bi compound, and the eutectic Sn—Bi compound is free of Ag. The method further includes stretching the solder bump to increase a height of the solder bump, wherein stretching the solder bump forms lamellar structures having a contact angle of less than 90°. The method further includes cooling down the solder bump.
    Type: Grant
    Filed: September 26, 2016
    Date of Patent: May 22, 2018
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
    Inventors: Su-Chun Yang, Chung-Jung Wu, Hsiao-Yun Chen, Yi-Li Hsiao, Chih-Hang Tung, Da-Yuan Shih, Chen-Hua Yu
  • Patent number: 9960134
    Abstract: A semiconductor device includes a solder bump overlying and electrically connected to a pad region, and a metal cap layer formed on at least a portion of the solder bump. The metal cap layer has a melting temperature greater than the melting temperature of the solder bump.
    Type: Grant
    Filed: September 19, 2016
    Date of Patent: May 1, 2018
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Yi-Li Hsiao, Chen-Hua Yu, Shin-Puu Jeng, Chih-Hang Tung, Cheng-Chang Wei
  • Publication number: 20180108632
    Abstract: A wafer-level pulling method includes securing a top holder to a plurality of chips. The method further includes securing a bottom holder to a wafer, wherein the plurality of chips are bonded to the wafer by a plurality of solder bumps. The method further includes softening the plurality of solder bumps. The method further includes stretching the plurality of softened solder bumps, wherein stretching the plurality of softened solder bumps comprises leveling the plurality of chips using a plurality of levelling devices separated from the plurality of chips, and a first levelling device of the plurality of levelling devices has a different structure from a second levelling device of the plurality of levelling devices.
    Type: Application
    Filed: December 11, 2017
    Publication date: April 19, 2018
    Inventors: Su-Chun YANG, Yi-Li HSIAO, Chih-Hang TUNG, Chen-Hua YU
  • Publication number: 20180053730
    Abstract: Semiconductor packages and methods of forming the same are disclosed. Embodiments include forming a first recess in a first substrate, wherein a first area of an opening of the first recess is larger than a second area of a bottom of the first recess. The embodiments also include forming a first device, wherein a third area of a top end of the first device is larger than a fourth area of a bottom end of the first device. The embodiments also include placing the first device into the first recess, wherein the bottom end of the first device faces the bottom of the first recess, and bonding a sidewall of the first device to a sidewall of the first recess.
    Type: Application
    Filed: January 17, 2017
    Publication date: February 22, 2018
    Inventors: Tung-Liang Shao, Chih-Hang Tung, Chen-Hua Yu
  • Patent number: 9893046
    Abstract: Methods for forming a chip package are provided. The method includes providing at least one carrier substrate including first semiconductor dies mounted thereon. The method also includes forming a first noble metal layer including nanopores irregularly distributed therein to cover each one of the first semiconductor dies. The method further includes immersing the carrier substrate with the first semiconductor dies into an etchant solution including a fluoride etchant and an oxidizing agent, so that each one of the first semiconductor dies covered by the first noble metal layer is thinned.
    Type: Grant
    Filed: July 8, 2016
    Date of Patent: February 13, 2018
    Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
    Inventors: Su-Chun Yang, Yi-Li Hsiao, Tung-Liang Shao, Chih-Hang Tung, Chen-Hua Yu