Patents by Inventor Chih-Sheng Chang

Chih-Sheng Chang has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 11855187
    Abstract: A semiconductor device comprises a fin structure disposed over a substrate; a gate structure disposed over part of the fin structure; a source/drain structure, which includes part of the fin structure not covered by the gate structure; an interlayer dielectric layer formed over the fin structure, the gate structure, and the source/drain structure; a contact hole formed in the interlayer dielectric layer; and a contact material disposed in the contact hole. The fin structure extends in a first direction and includes an upper layer, wherein a part of the upper layer is exposed from an isolation insulating layer. The gate structure extends in a second direction perpendicular to the first direction. The contact material includes a silicon phosphide layer and a metal layer.
    Type: Grant
    Filed: October 11, 2021
    Date of Patent: December 26, 2023
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
    Inventors: Cheng-Yi Peng, Chih Chieh Yeh, Chih-Sheng Chang, Hung-Li Chiang, Hung-Ming Chen, Yee-Chia Yeo
  • Patent number: 11856784
    Abstract: A semiconductor device includes a ferroelectric field-effect transistor (FeFET), wherein the FeFET includes a substrate; a source region in the substrate; a drain region in the substrate; and a gate structure over the substrate and between the source region and the drain region. The gate structure includes a gate dielectric layer over the substrate; a ferroelectric film over the gate dielectric layer; and a gate electrode over the ferroelectric film.
    Type: Grant
    Filed: June 29, 2022
    Date of Patent: December 26, 2023
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventor: Chih-Sheng Chang
  • Publication number: 20230408740
    Abstract: A diffractive optical element and method for fabricating the diffractive optical element are provided. The diffractive optical element includes a substrate, a first diffractive structure layer and a second diffractive structure layer. The substrate has a first surface and a second surface opposite to the first surface. The first diffractive structure layer is disposed on the first surface of the substrate. The second diffractive structure layer is disposed on the second surface of the substrate. In the method for fabricating the diffractive optical element, at first, the substrate is provided. Then, a first glue material layer/first semiconductor layer is formed and patterned on the first surface of the substrate. Thereafter, a second glue material layer/second semiconductor layer is formed and patterned on the second surface of the substrate.
    Type: Application
    Filed: September 1, 2023
    Publication date: December 21, 2023
    Inventors: Chih-Sheng CHANG, Meng-Ko TSAI, Chung-Kai SHENG
  • Publication number: 20230387004
    Abstract: An integrated circuit die forming method, for forming a plurality of integrated circuit dies on a semiconductor wafer, comprising: forming a first device, a second device in a first die in a first area; forming a metal layer connected to the first device and the second device; forming a third device, a fourth device in a second die in a second area; forming the metal layer connected to the third device and the fourth device, wherein a scribe area exists between the first area and the second area is separated by; wherein the first device and the third device are used for synchronization and are components of a class D amplifier; wherein the second device is used for preventing leakage currents of the first die and the fourth device is used for preventing leakage currents of the second die.
    Type: Application
    Filed: May 26, 2022
    Publication date: November 30, 2023
    Applicant: Elite Semiconductor Microelectronics Technology Inc.
    Inventors: Chih-Sheng Chang, Isaac Y. Chen
  • Publication number: 20230369409
    Abstract: The present disclosure provides a semiconductor structure. The semiconductor structure includes a fin active region formed on a semiconductor substrate and spanning between a first sidewall of a first shallow trench isolation (STI) feature and a second sidewall of a second STI feature; an anti-punch through (APT) feature of a first type conductivity; and a channel material layer of the first type conductivity, disposed on the APT feature and having a second doping concentration less than the first doping concentration. The APT feature is formed on the fin active region, spans between the first sidewall and the second sidewall, and has a first doping concentration.
    Type: Application
    Filed: July 27, 2023
    Publication date: November 16, 2023
    Inventors: Cheng-Yi Peng, Ling-Yen Yeh, Chi-Wen Liu, Chih-Sheng Chang, Yee-Chia Yeo
  • Publication number: 20230363177
    Abstract: Manufacture of a ferroelectric random-access memory device includes forming a first electrode and an intermetal dielectric (IMD) layer over the first electrode. The IMD layer has a first surface on a first side of the IMD layer distal from the first electrode and a second surface on a second side of the IMD layer proximate to the first electrode. A via is created through the IMD layer, which is aligned with the first electrode underneath and has a side wall extending from the first surface of the IMD layer to the second surface of the IMD layer. A ferroelectric layer is deposited over the IMD layer. The ferroelectric layer includes a first part within the via and a second part extending laterally out from the via over the first surface of the IMD layer, the second part thereafter being removed by chemical mechanical polishing.
    Type: Application
    Filed: May 5, 2022
    Publication date: November 9, 2023
    Inventors: Yu Chao Lin, Jung-Piao Chiu, Chih-Sheng Chang, Yuan-Tien Tu
  • Patent number: 11811215
    Abstract: A compound control circuit comprises an input end, a light-load signal processing circuit, a slow response circuit and a fast response circuit. The compound control circuit is mainly used as an additional circuit of a work control chip, so that although the work control chip only has a single overcurrent protection level, a compound function control of fast and slow speed, high and low level current protection and light-load signal stabilization can be generated through the compound control circuit, so as to meet the complex application environment and compatible requirements of the current power supply.
    Type: Grant
    Filed: August 16, 2021
    Date of Patent: November 7, 2023
    Assignee: SEA SONIC ELECTRONICS CO., LTD.
    Inventors: Sheng-Chien Chou, Chih-Sheng Chang
  • Patent number: 11808959
    Abstract: An optical element including a first substrate, a second substrate, a first optical film, a second optical film, and a spacer is provided. The first optical film is disposed on the first substrate and has a first surface and a plurality of first optical microstructures. The first optical microstructures are disposed on the first surface. The second optical film is disposed on the second substrate and has a second surface and a plurality of second optical microstructures. The second surface is opposite to the first surface. The second optical microstructures are disposed on the second surface. The orthogonal projection of the first optical microstructures on the first substrate does not overlap with the orthogonal projection of the second optical microstructures on the first substrate. The spacer is disposed between the first substrate and the second substrate. A wafer level optical module adopting the optical element is also provided.
    Type: Grant
    Filed: August 11, 2020
    Date of Patent: November 7, 2023
    Assignee: HIMAX TECHNOLOGIES LIMITED
    Inventors: Chih-Sheng Chang, Meng-Ko Tsai, Teng Te Huang
  • Patent number: 11803218
    Abstract: The invention provides an output structure for a power supply, comprising a working circuit board, an output circuit board, a plurality of output connectors, a plurality of heat dissipation plates and a plurality of thermistors. The output circuit board is electrically connected with the working circuit board and is provided with at least one temperature sensing circuit, the plurality of output connectors is arranged on the output circuit board, the plurality of heat dissipation plates is arranged on the output circuit board and close to the output connectors, the plurality of heat dissipation plates senses heat of the output circuit board and at least one of the output connectors at the same time, the plurality of thermistors is arranged corresponding to the plurality of heat dissipation plates one to one and is connected with the at least one temperature sensing circuit.
    Type: Grant
    Filed: January 28, 2022
    Date of Patent: October 31, 2023
    Assignee: SEA SONIC ELECTRONICS CO., LTD.
    Inventors: Hung-Wei Yang, Chih-Sheng Chang
  • Publication number: 20230343781
    Abstract: A semiconductor device includes a first channel region disposed over a substrate, and a first gate structure disposed over the first channel region. The first gate structure includes a gate dielectric layer disposed over the channel region, a lower conductive gate layer disposed over the gate dielectric layer, a ferroelectric material layer disposed over the lower conductive gate layer, and an upper conductive gate layer disposed over the ferroelectric material layer. The ferroelectric material layer is in direct contact with the gate dielectric layer and the lower gate conductive layer, and has a U-shape cross section.
    Type: Application
    Filed: June 27, 2023
    Publication date: October 26, 2023
    Inventors: Chia-Wen CHANG, Hong-Nien LIN, Chien-Hsing LEE, Chih-Sheng CHANG, Ling_Yen YEH, Wilman TSAI, Yee-Chia YEO
  • Patent number: 11791203
    Abstract: A method for fabricating semiconductor device includes the steps of: forming a first inter-metal dielectric (IMD) layer on a substrate; forming a first metal interconnection in the first IMD layer; removing part of the first IMD layer; forming a spacer adjacent to the first metal interconnection; forming a second IMD layer on the spacer and the first metal interconnection; and forming a second metal interconnection in the second IMD layer and on the spacer and the first metal interconnection.
    Type: Grant
    Filed: August 16, 2022
    Date of Patent: October 17, 2023
    Assignee: UNITED MICROELECTRONICS CORP.
    Inventors: Ching-Chih Chang, Yuan-Fu Ko, Chih-Sheng Chang
  • Publication number: 20230327020
    Abstract: An MFMIS-FET includes a MOSFET having a three-dimensional structure that allows the MOSFET to have an effective area that is greater than the footprint of the MFM or the MOSFET. In some embodiment, the gate electrode of the MOSFET and the bottom electrode of the MFM are united. In some, they have equal areas. In some embodiments, the MFM and the MOSFET have nearly equal footprints. In some embodiments, the effective area of the MOSFET is much greater than the effective area of the MFM. These structures reduce the capacitance ratio between the MFM structure and the MOSFET without reducing the area of the MFM structure in a way that would decrease drain current.
    Type: Application
    Filed: June 8, 2023
    Publication date: October 12, 2023
    Inventors: Hung-Li Chiang, Chih-Sheng Chang, Tzu-Chiang Chen
  • Publication number: 20230326882
    Abstract: A semiconductor structure and its manufacturing method are provided. The semiconductor structure includes a substrate, a first dielectric layer on the substrate, a second dielectric layer on the first dielectric layer, a seal ring structure including first and second interconnect structures, and a passivation layer on the seal ring structure and the second dielectric layer. The first interconnect structure is located in the first dielectric layer. The second interconnect structure is located in the second dielectric layer and connected to the first interconnect structure. The passivation layer has a spacer portion covering a sidewall of the second dielectric layer and a portion of the first dielectric layer. A ditch exists in the passivation layer and the first dielectric layer. The spacer portion is located between the ditch and the seal ring structure. The semiconductor structure is able to reduce time and power of an etching process for forming the ditch.
    Type: Application
    Filed: May 2, 2022
    Publication date: October 12, 2023
    Applicant: United Microelectronics Corp.
    Inventors: Hui-Lung Chou, Ching-Li Yang, Chih-Sheng Chang, Chien-Ting Lin
  • Patent number: 11782195
    Abstract: A diffractive optical element and method for fabricating the diffractive optical element are provided. The diffractive optical element includes a substrate, a first diffractive structure layer and a second diffractive structure layer. The substrate has a first surface and a second surface opposite to the first surface. The first diffractive structure layer is disposed on the first surface of the substrate. The second diffractive structure layer is disposed on the second surface of the substrate. In the method for fabricating the diffractive optical element, at first, the substrate is provided. Then, a first glue material layer/first semiconductor layer is formed and patterned on the first surface of the substrate. Thereafter, a second glue material layer/second semiconductor layer is formed and patterned on the second surface of the substrate.
    Type: Grant
    Filed: September 30, 2019
    Date of Patent: October 10, 2023
    Assignee: HIMAX TECHNOLOGIES LIMITED
    Inventors: Chih-Sheng Chang, Meng-Ko Tsai, Chung-Kai Sheng
  • Patent number: 11784214
    Abstract: A method for fabricating a metal-insulator-metal (MIM) capacitor is provided. The MIM capacitor includes a substrate, a first metal layer, a deposition structure, a dielectric layer and a second metal layer. The first metal layer is disposed on the substate and has a planarized surface. The deposition structure is disposed on the first metal layer, and at least a portion of the deposition structure extends into the planarized surface, wherein the first metal layer and the deposition structure have the same material. The dielectric layer is disposed on the deposition structure. The second metal layer is disposed on the dielectric layer.
    Type: Grant
    Filed: August 31, 2022
    Date of Patent: October 10, 2023
    Assignee: UNITED MICROELECTRONICS CORP.
    Inventors: Bo-Wei Huang, Chun-Wei Kang, Ho-Yu Lai, Chih-Sheng Chang
  • Patent number: 11764267
    Abstract: A semiconductor device includes a fin structure, a two-dimensional (2D) material channel layer, a ferroelectric layer, and a metal layer. The fin structure extends from a substrate. The 2D material channel layer wraps around at least three sides of the fin structure. The ferroelectric layer wraps around at least three sides of the 2D material channel layer. The metal layer wraps around at least three sides of the ferroelectric layer.
    Type: Grant
    Filed: October 30, 2020
    Date of Patent: September 19, 2023
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
    Inventors: Chun-Chieh Lu, Meng-Hsuan Hsiao, Tung-Ying Lee, Ling-Yen Yeh, Chih-Sheng Chang, Carlos H. Diaz
  • Patent number: 11749720
    Abstract: The present disclosure provides a semiconductor structure. The semiconductor structure includes a fin active region formed on a semiconductor substrate and spanning between a first sidewall of a first shallow trench isolation (STI) feature and a second sidewall of a second STI feature; an anti-punch through (APT) feature of a first type conductivity; and a channel material layer of the first type conductivity, disposed on the APT feature and having a second doping concentration less than the first doping concentration. The APT feature is formed on the fin active region, spans between the first sidewall and the second sidewall, and has a first doping concentration.
    Type: Grant
    Filed: December 7, 2020
    Date of Patent: September 5, 2023
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
    Inventors: Cheng-Yi Peng, Ling-Yen Yeh, Chi-Wen Liu, Chih-Sheng Chang, Yee-Chia Yeo
  • Patent number: 11728332
    Abstract: A semiconductor device includes a first channel region disposed over a substrate, and a first gate structure disposed over the first channel region. The first gate structure includes a gate dielectric layer disposed over the channel region, a lower conductive gate layer disposed over the gate dielectric layer, a ferroelectric material layer disposed over the lower conductive gate layer, and an upper conductive gate layer disposed over the ferroelectric material layer. The ferroelectric material layer is in direct contact with the gate dielectric layer and the lower gate conductive layer, and has a U-shape cross section.
    Type: Grant
    Filed: June 21, 2021
    Date of Patent: August 15, 2023
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
    Inventors: Chia-Wen Chang, Hong-Nien Lin, Chien-Hsing Lee, Chih-Sheng Chang, Ling-Yen Yeh, Wilman Tsai, Yee-Chia Yeo
  • Publication number: 20230244286
    Abstract: The invention provides an output structure for a power supply, comprising a working circuit board, an output circuit board, a plurality of output connectors, a plurality of heat dissipation plates and a plurality of thermistors. The output circuit board is electrically connected with the working circuit board and is provided with at least one temperature sensing circuit, the plurality of output connectors is arranged on the output circuit board, the plurality of heat dissipation plates is arranged on the output circuit board and close to the output connectors, the plurality of heat dissipation plates senses heat of the output circuit board and at least one of the output connectors at the same time, the plurality of thermistors is arranged corresponding to the plurality of heat dissipation plates one to one and is connected with the at least one temperature sensing circuit.
    Type: Application
    Filed: January 28, 2022
    Publication date: August 3, 2023
    Inventors: Hung-Wei YANG, Chih-Sheng CHANG
  • Patent number: 11715798
    Abstract: An MFMIS-FET includes a MOSFET having a three-dimensional structure that allows the MOSFET to have an effective area that is greater than the footprint of the MFM or the MOSFET. In some embodiment, the gate electrode of the MOSFET and the bottom electrode of the MFM are united. In some, they have equal areas. In some embodiments, the MFM and the MOSFET have nearly equal footprints. In some embodiments, the effective area of the MOSFET is much greater than the effective area of the MFM. These structures reduce the capacitance ratio between the MFM structure and the MOSFET without reducing the area of the MFM structure in a way that would decrease drain current.
    Type: Grant
    Filed: February 17, 2022
    Date of Patent: August 1, 2023
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Hung-Li Chiang, Chih-Sheng Chang, Tzu-Chiang Chen