Patents by Inventor Chih-Wei Kuo

Chih-Wei Kuo has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20180269112
    Abstract: A device includes a semiconductor substrate, isolation regions in the semiconductor substrate, and a Fin Field-Effect Transistor (FinFET). The FinFET includes a channel region over the semiconductor substrate, a gate dielectric on a top surface and sidewalls of the channel region, a gate electrode over the gate dielectric, a source/drain region, and an additional semiconductor region between the source/drain region and the channel region. The channel region and the additional semiconductor region are formed of different semiconductor materials, and are at substantially level with each other.
    Type: Application
    Filed: May 22, 2018
    Publication date: September 20, 2018
    Inventors: Chih-Wei Kuo, Yuan-Shun Chao, Hou-Yu Chen, Shyh-Horng Yang
  • Patent number: 10014223
    Abstract: A device includes a semiconductor substrate, isolation regions in the semiconductor substrate, and a Fin Field-Effect Transistor (FinFET). The FinFET includes a channel region over the semiconductor substrate, a gate dielectric on a top surface and sidewalls of the channel region, a gate electrode over the gate dielectric, a source/drain region, and an additional semiconductor region between the source/drain region and the channel region. The channel region and the additional semiconductor region are formed of different semiconductor materials, and are at substantially level with each other.
    Type: Grant
    Filed: October 19, 2015
    Date of Patent: July 3, 2018
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Chih-Wei Kuo, Yuan-Shun Chao, Hou-Yu Chen, Shyh-Horng Yang
  • Publication number: 20180154029
    Abstract: A sterilizing device comprises a light guiding member and an ultraviolet (UV) light source. The light guiding member has a surface. The UV light source emits UV light rays such that the UV light rays are guided into the guiding member based on a total internal reflection. When an object contacts or comes close to the surface, an evanescent wave from the UV light rays irradiates on the object.
    Type: Application
    Filed: February 2, 2018
    Publication date: June 7, 2018
    Applicant: Industrial Technology Research Institute
    Inventors: Ren-Chin Shr, Teng-Chun Wu, Wei-Yun Liang, Chih-Wei Kuo
  • Publication number: 20180057925
    Abstract: A device for growing large-sized monocrystalline crystals, including a crucible adapted to grow crystals from a material source and with a seed crystal and including therein a seed crystal region, a growth chamber, and a material source region; a thermally insulating material disposed outside the crucible and below a heat dissipation component; and a plurality of heating components disposed outside the thermally insulating material to provide heat sources, wherein the heat dissipation component is of a heat dissipation inner diameter and a heat dissipation height which exceeds a thickness of the thermally insulating material.
    Type: Application
    Filed: November 16, 2016
    Publication date: March 1, 2018
    Inventors: DAI-LIANG MA, HSUEH-I CHEN, BO-CHENG LIN, CHENG-JUNG KO, YING-CONG ZHAO, CHIH-WEI KUO, SHU-YU YEH
  • Patent number: 9779942
    Abstract: A method of forming a patterned mask layer includes the following steps. A plurality of support features is formed on a mask layer. A plurality of spacers is formed on side walls of the support features. A patterned protection layer is formed on the support features and top surfaces of the spacers. At least a part of side surfaces of the spacers are not covered by the patterned protection layer, and the patterned protection layer is formed in a process environment containing methane (CH4). A trimming process is then performed to remove a part of each of the spacers. Tapered parts of the spacers may be removed by the trimming process before the step of etching the mask layer with the spacers as a mask, and the critical dimension uniformity of the patterned mask layer may be improved accordingly.
    Type: Grant
    Filed: July 26, 2016
    Date of Patent: October 3, 2017
    Assignee: UNITED MICROELECTRONICS CORP.
    Inventors: Chih-Wei Kuo, Yu-Tsung Lai, Jiunn-Hsiung Liao
  • Patent number: 9754543
    Abstract: The present invention provides an image self-calibration method and device for LCD displays, comprising a front optical sensor and a calibration reference device. The front optical sensor is employed to calibrate the gray scale level and color temperature of the display. The calibration reference device is employed to pre-calibrate the front optical sensor. The present invention has the following advantages. Image pre-calibration is performed on the installed optical sensor before it leaves a factory, and the calibrated optical sensor directly performs gray scale level and color temperature calibration on the display. The present invention is easy to implement, can effectively inspect and calibrate images on the display, and can save human resources and reduce manufacture and maintenance time.
    Type: Grant
    Filed: April 16, 2015
    Date of Patent: September 5, 2017
    Assignee: Panoramic Imaging Solutions Ltd.
    Inventors: Chih-Hung Ma, Tsung-Lung Yang, Chih-Wei Kuo, Shih-Pang Wang, Meng-Han Tsai
  • Publication number: 20170243760
    Abstract: In a method of manufacturing a semiconductor device, a first layer containing a Si1-xGex layer doped with phosphorous is formed over an n-type semiconductor layer, a metal layer containing a metal material is formed over the first layer, and a thermal process is performed to form an alloy layer including Si, Ge and the metal material.
    Type: Application
    Filed: December 19, 2016
    Publication date: August 24, 2017
    Inventors: Yuan-Shun CHAO, Chih-Wei KUO
  • Patent number: 9741614
    Abstract: A method of forming trenches and a via by self-aligned double patterning includes providing a dielectric layer covered by an SiOC layer, a TiN layer and a SiON layer from top to bottom. At least two mandrels are formed on the SiOC layer. Later, two spacers are formed respectively at two sidewalls of each mandrel. Subsequently, the mandrels are removed. The SiOC layer and the TiN layer are patterned by using the spacers to form numerous recesses. The spacers are then removed. A mask layer with a via pattern is formed to cover the SiOC layer. A via is formed in the dielectric layer by taking the mask layer as a mask. After that, the mask layer is removed. Finally, numerous trenches are formed in the dielectric layer by taking the SiOC layer and the TiN layer as a mask.
    Type: Grant
    Filed: July 11, 2016
    Date of Patent: August 22, 2017
    Assignee: UNITED MICROELECTRONICS CORP.
    Inventors: Chih-Wei Kuo, Yu-Tsung Lai, Jiunn-Hsiung Liao
  • Patent number: 9704755
    Abstract: A structure and method for implementation of high voltage devices within multi-gate device structures includes a substrate having a fin extending therefrom and a fin-embedded isolation region. In some examples, the fin-embedded isolation region includes an STI region. In some embodiments, the fin-embedded isolation separates a first portion of the fin from a second portion of the fin. Also, in some examples, the first portion of the fin includes a channel region. In various embodiments, a source region is formed in the first portion of the fin, a drain region is formed in the second portion of the fin, and an active gate is formed over the channel region. In some examples, the active gate is disposed adjacent to the source region. In addition, a plurality of dummy gates may be formed over the fin, to provide a uniform growth environment and growth profile for source and drain region formation.
    Type: Grant
    Filed: July 18, 2016
    Date of Patent: July 11, 2017
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Chih-Wei Kuo, Hou-Yu Chen
  • Patent number: 9514991
    Abstract: A FinFET device and a method for fabricating a FinFET device are disclosed. An exemplary method of fabricating a FINFET device includes providing a substrate including a fin structure including a plurality of fins and shallow trench isolation (STI) features between each fin of the fin structure. A first gate structure is formed over the fin structure. First gate spacers are formed on sidewalls of the first gate structure. The first gate spacers are removed while leaving portions of the first gate spacers within corners where the fin structure and the first gate structure meet. Second gate spacers are formed on sidewalls of the first gate structure. A dielectric layer is formed over the fin structure, the first gate structure, and the second gate spacers. The first gate structure and the portions of the first gate spacers are removed, thereby exposing sidewalls of the second gate spacers.
    Type: Grant
    Filed: October 13, 2015
    Date of Patent: December 6, 2016
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
    Inventors: Chih-Wei Kuo, Yuan-Shun Chao, Hou-Yu Chen, Shyh-Horng Yang
  • Publication number: 20160329252
    Abstract: A structure and method for implementation of high voltage devices within multi-gate device structures includes a substrate having a fin extending therefrom and a fin-embedded isolation region. In some examples, the fin-embedded isolation region includes an STI region. In some embodiments, the fin-embedded isolation separates a first portion of the fin from a second portion of the fin. Also, in some examples, the first portion of the fin includes a channel region. In various embodiments, a source region is formed in the first portion of the fin, a drain region is formed in the second portion of the fin, and an active gate is formed over the channel region. In some examples, the active gate is disposed adjacent to the source region. In addition, a plurality of dummy gates may be formed over the fin, to provide a uniform growth environment and growth profile for source and drain region formation.
    Type: Application
    Filed: July 18, 2016
    Publication date: November 10, 2016
    Inventors: Chih-Wei Kuo, Hou-Yu Chen
  • Publication number: 20160307485
    Abstract: The present invention provides an image self-calibration method and device for LCD displays, comprising a front optical sensor and a calibration reference device. The front optical sensor is employed to calibrate the gray scale level and color temperature of the display. The calibration reference device is employed to pre-calibrate the front optical sensor. The present invention has the following advantages. Image pre-calibration is performed on the installed optical sensor before it leaves a factory, and the calibrated optical sensor directly performs gray scale level and color temperature calibration on the display. The present invention is easy to implement, can effectively inspect and calibrate images on the display, and can save human resources and reduce manufacture and maintenance time.
    Type: Application
    Filed: April 16, 2015
    Publication date: October 20, 2016
    Inventors: Chih-Hung MA, Tsung-Lung YANG, Chih-Wei KUO, Shih-Pang WANG, Meng-Han TSAI
  • Patent number: 9431397
    Abstract: A device includes a wafer substrate including an isolation feature, at least two fin structures embedded in the isolation feature, and at least two gate stacks disposed around the two fin structures respectively. A first inter-layer dielectric (ILD) layer is disposed between the two gate stacks, with a dish-shaped recess formed therebetween, such that a bottom surface of the recess is below the top surface of the adjacent two gate stacks. A second ILD layer is disposed over the first ILD layer, including in the dish-shaped recess. The second ILD includes nitride material; the first ILD includes oxide material.
    Type: Grant
    Filed: February 16, 2015
    Date of Patent: August 30, 2016
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
    Inventors: Chih-Wei Kuo, Yuan-Shun Chao, Hou-Yu Chen, Shyh-Horng Yang
  • Patent number: 9397157
    Abstract: A structure and method for implementation of high voltage devices within multi-gate device structures includes a substrate having a fin extending therefrom and a fin-embedded isolation region. In some examples, the fin-embedded isolation region includes an STI region. In some embodiments, the fin-embedded isolation separates a first portion of the fin from a second portion of the fin. Also, in some examples, the first portion of the fin includes a channel region. In various embodiments, a source region is formed in the first portion of the fin, a drain region is formed in the second portion of the fin, and an active gate is formed over the channel region. In some examples, the active gate is disposed adjacent to the source region. In addition, a plurality of dummy gates may be formed over the fin, to provide a uniform growth environment and growth profile for source and drain region formation.
    Type: Grant
    Filed: August 20, 2014
    Date of Patent: July 19, 2016
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Chih-Wei Kuo, Hou-Yu Chen
  • Publication number: 20160056232
    Abstract: A structure and method for implementation of high voltage devices within multi-gate device structures includes a substrate having a fin extending therefrom and a fin-embedded isolation region. In some examples, the fin-embedded isolation region includes an STI region. In some embodiments, the fin-embedded isolation separates a first portion of the fin from a second portion of the fin. Also, in some examples, the first portion of the fin includes a channel region. In various embodiments, a source region is formed in the first portion of the fin, a drain region is formed in the second portion of the fin, and an active gate is formed over the channel region. In some examples, the active gate is disposed adjacent to the source region. In addition, a plurality of dummy gates may be formed over the fin, to provide a uniform growth environment and growth profile for source and drain region formation.
    Type: Application
    Filed: August 20, 2014
    Publication date: February 25, 2016
    Inventors: Chih-Wei Kuo, Hou-Yu Chen
  • Publication number: 20160043002
    Abstract: A device includes a semiconductor substrate, isolation regions in the semiconductor substrate, and a Fin Field-Effect Transistor (FinFET). The FinFET includes a channel region over the semiconductor substrate, a gate dielectric on a top surface and sidewalls of the channel region, a gate electrode over the gate dielectric, a source/drain region, and an additional semiconductor region between the source/drain region and the channel region. The channel region and the additional semiconductor region are formed of different semiconductor materials, and are at substantially level with each other.
    Type: Application
    Filed: October 19, 2015
    Publication date: February 11, 2016
    Inventors: Chih-Wei Kuo, Yuan-Shun Chao, Hou-Yu Chen, Shyh-Horng Yang
  • Publication number: 20160035625
    Abstract: A FinFET device and a method for fabricating a FinFET device are disclosed. An exemplary method of fabricating a FINFET device includes providing a substrate including a fin structure including a plurality of fins and shallow trench isolation (STI) features between each fin of the fin structure. A first gate structure is formed over the fin structure. First gate spacers are formed on sidewalls of the first gate structure. The first gate spacers are removed while leaving portions of the first gate spacers within corners where the fin structure and the first gate structure meet. Second gate spacers are formed on sidewalls of the first gate structure. A dielectric layer is formed over the fin structure, the first gate structure, and the second gate spacers. The first gate structure and the portions of the first gate spacers are removed, thereby exposing sidewalls of the second gate spacers.
    Type: Application
    Filed: October 13, 2015
    Publication date: February 4, 2016
    Inventors: Chih-Wei Kuo, Yuan-Shun Chao, Hou-Yu Chen, Shyh-Horng Yang
  • Patent number: 9171925
    Abstract: A device includes a semiconductor substrate, isolation regions in the semiconductor substrate, and a Fin Field-Effect Transistor (FinFET). The FinFET includes a channel region over the semiconductor substrate, a gate dielectric on a top surface and sidewalls of the channel region, a gate electrode over the gate dielectric, a source/drain region, and an additional semiconductor region between the source/drain region and the channel region. The channel region and the additional semiconductor region are formed of different semiconductor materials, and are at substantially level with each other.
    Type: Grant
    Filed: April 26, 2012
    Date of Patent: October 27, 2015
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Chih-Wei Kuo, Yuan-Shun Chao, Hou-Yu Chen, Shyh-Horng Yang
  • Patent number: 9166053
    Abstract: A FinFET device and a method for fabricating a FinFET device is disclosed. An exemplary FinFET device includes a substrate including a fin structure, the fin structure including a first and a second fin. The FinFET device further includes a shallow trench isolation (STI) feature disposed on the substrate and between the first and the second fins. The FinFET device further includes a gate dielectric disposed on the first and the second fins. The FinFET device further includes a gate structure disposed on the gate dielectric. The gate structure traverses the first fin, the second fin, and the STI feature between the first fin and the second fin and has a longitudinal stepped profile.
    Type: Grant
    Filed: February 22, 2013
    Date of Patent: October 20, 2015
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Chih-Wei Kuo, Yuan-Shun Chao, Hou-Yu Chen, Shyh-Horng Yang
  • Publication number: 20150162333
    Abstract: A device includes a wafer substrate including an isolation feature, at least two fin structures embedded in the isolation feature, and at least two gate stacks disposed around the two fin structures respectively. A first inter-layer dielectric (ILD) layer is disposed between the two gate stacks, with a dish-shaped recess formed therebetween, such that a bottom surface of the recess is below the top surface of the adjacent two gate stacks. A second ILD layer is disposed over the first ILD layer, including in the dish-shaped recess. The second ILD includes nitride material; the first ILD includes oxide material.
    Type: Application
    Filed: February 16, 2015
    Publication date: June 11, 2015
    Inventors: Chih-Wei Kuo, Yuaan-Shun Chao, Hou-Yu Chen, Shyh-Horng Yang