Patents by Inventor Chih-Yu Chang

Chih-Yu Chang has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 11923386
    Abstract: Various embodiments of the present disclosure are directed towards an integrated chip. The integrated chip includes a first photodetector disposed in a first pixel region of a semiconductor substrate and a second photodetector disposed in a second pixel region of the semiconductor substrate. The second photodetector is laterally separated from the first photodetector. A first diffuser is disposed along a back-side of the semiconductor substrate and over the first photodetector. A second diffuser is disposed along the back-side of the semiconductor substrate and over the second photodetector. A first midline of the first pixel region and a second midline of the second pixel region are both disposed laterally between the first diffuser and the second diffuser.
    Type: Grant
    Filed: April 24, 2023
    Date of Patent: March 5, 2024
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Keng-Yu Chou, Chun-Hao Chuang, Kazuaki Hashimoto, Wei-Chieh Chiang, Cheng Yu Huang, Wen-Hau Wu, Chih-Kung Chang
  • Publication number: 20240071758
    Abstract: A method for fabricating a high electron mobility transistor (HEMT) includes the steps of forming a buffer layer on a substrate, forming a barrier layer on the buffer layer, forming a p-type semiconductor layer on the barrier layer, forming a gate electrode layer on the p-type semiconductor layer, and patterning the gate electrode layer to form a gate electrode. Preferably, the gate electrode includes an inclined sidewall.
    Type: Application
    Filed: September 23, 2022
    Publication date: February 29, 2024
    Applicant: UNITED MICROELECTRONICS CORP.
    Inventors: Chih-Tung Yeh, You-Jia Chang, Bo-Yu Chen, Yun-Chun Wang, Ruey-Chyr Lee, Wen-Jung Liao
  • Patent number: 11915994
    Abstract: A package structure is provided. The package structure includes a semiconductor die and a thermoelectric structure disposed on the semiconductor die. The thermoelectric structure includes P-type semiconductor blocks, N-type semiconductor blocks and metal pads. The P-type semiconductor blocks and the N-type semiconductor blocks are arranged in alternation with the metal pads connecting the P-type semiconductor blocks and the N-type semiconductor blocks. When a current flowing through one of the N-type semiconductor block, one of the metal pad, and one of the P-type semiconductor block in order, the metal pad between the N-type semiconductor block and the P-type semiconductor block forms a cold junction which absorbs heat generated by the semiconductor die.
    Type: Grant
    Filed: August 12, 2021
    Date of Patent: February 27, 2024
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Cheng-Yen Hsieh, Chih-Horng Chang, Chung-Yu Lu
  • Patent number: 11916282
    Abstract: An antenna apparatus includes a feeding antenna inside an electronic device and one or more antenna elements, such as a floating metal antenna, disposed on a rear cover of the electronic device. The floating metal antenna and a feeding antenna inside the electronic device may form a coupling antenna structure. The feeding antenna may be an antenna fastened on an antenna support (which may be referred to as a support antenna). The feeding antenna may alternatively be a slot antenna formed by slitting on a metal middle frame of the electronic device. The antenna apparatus may be implemented in limited design space, thereby effectively saving antenna design space inside the electronic device. The antenna apparatus may generate excitation of a plurality of resonance modes, so that antenna bandwidth and radiation characteristics can be improved.
    Type: Grant
    Filed: November 5, 2019
    Date of Patent: February 27, 2024
    Assignee: HUAWEI TECHNOLOGIES CO., LTD.
    Inventors: Pengfei Wu, Chien-Ming Lee, Dong Yu, Chih Yu Tsai, Chih-Hua Chang, Arun Sowpati
  • Patent number: 11901450
    Abstract: The present disclosure relates to a semiconductor device includes a substrate and first and second spacers on the substrate. The semiconductor device includes a gate stack between the first and second spacers. The gate stack includes a gate dielectric layer having a first portion formed on the substrate and a second portion formed on the first and second spacers. The first portion includes a crystalline material and the second portion comprises an amorphous material. The gate stack further includes a gate electrode on the first and second portions of the gate dielectric layer.
    Type: Grant
    Filed: June 29, 2021
    Date of Patent: February 13, 2024
    Assignee: Taiwan Semicondutor Manufacturing Co., Ltd.
    Inventors: Cheng-Ming Lin, Sai-Hooi Yeong, Ziwei Fang, Bo-Feng Young, Chi On Chui, Chih-Yu Chang, Huang-Lin Chao
  • Patent number: 11903189
    Abstract: Three-dimensional memories are provided. A three-dimensional memory includes a plurality of memory cells, a plurality of word lines, a plurality of bit lines and a plurality of source lines. The memory cells are divided into a plurality of groups, and the groups of memory cells are formed in respective levels stacked along a first direction. The word lines extend along a second direction, and the second direction is perpendicular to the first direction. Each of the bit lines includes a plurality of sub-bit lines formed in the respective levels. Each of the source lines includes a plurality of sub-source lines formed in respective levels. In each of the levels, the memory cells of the corresponding group are arranged in a plurality of columns, and the sub-bit lines and the sub-source lines are alternately arranged between two adjacent columns.
    Type: Grant
    Filed: July 9, 2020
    Date of Patent: February 13, 2024
    Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
    Inventors: Bo-Feng Young, Sai-Hooi Yeong, Chih-Yu Chang, Han-Jong Chia, Chenchen Jacob Wang, Yu-Ming Lin
  • Publication number: 20240015985
    Abstract: A semiconductor chip including a semiconductor substrate, an interconnect structure and a memory cell array is provided. The semiconductor substrate includes a logic circuit. The interconnect structure is disposed on the semiconductor substrate and electrically connected to the logic circuit, and the interconnect structure includes stacked interlayer dielectric layers and interconnect wirings embedded in the stacked interlayer dielectric layers. The memory cell array is embedded in the stacked interlayer dielectric layers. The memory cell array includes driving transistors and memory devices, and the memory devices are electrically connected the driving transistors through the interconnect wirings.
    Type: Application
    Filed: September 21, 2023
    Publication date: January 11, 2024
    Applicant: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Bo-Feng Young, Sai-Hooi Yeong, Yu-Ming Lin, Chih-Yu Chang, Han-Jong Chia
  • Patent number: 11862219
    Abstract: A memory cell includes a write bit line, a read word line, a write transistor, and a read transistor. The write transistor is coupled between the write bit line and a first node. The read transistor is coupled to the write transistor by the first node. The read transistor includes a ferroelectric layer, a drain terminal of the read transistor is coupled to the read word line, and a source terminal of the read transistor is coupled to a second node. The write transistor is configured to set a stored data value of the memory cell by a write bit line signal that adjusts a polarization state of the read transistor. The polarization state corresponds to the stored data value.
    Type: Grant
    Filed: January 19, 2023
    Date of Patent: January 2, 2024
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
    Inventors: Bo-Feng Young, Sai-Hooi Yeong, Chao-I Wu, Chih-Yu Chang, Yu-Ming Lin
  • Publication number: 20230422513
    Abstract: Various embodiments of the present disclosure provide a memory device and methods of forming the same. In one embodiment, a memory device is provided. The memory device includes a gate electrode disposed in an insulating material layer, a ferroelectric dielectric layer disposed over the gate electrode, a metal oxide semiconductor layer disposed over the ferroelectric dielectric layer, a source feature disposed over the metal oxide semiconductor layer, wherein the source feature has a first dimension, and a source extension. The source extension includes a first portion disposed over the source feature, wherein the first portion has a second dimension that is greater than the first dimension. The source extension also includes a second portion extending downwardly from the first portion to an elevation that is lower than a top surface of the source feature.
    Type: Application
    Filed: June 25, 2022
    Publication date: December 28, 2023
    Inventors: Hung-Wei LI, Sai-Hooi YEONG, Chia-Ta YU, Chih-Yu CHANG, Wen-Ling LU, Yu-Chien CHIU, Ya-Yun CHENG, Mauricio MANFRINI, Yu-Ming LIN
  • Patent number: 11855128
    Abstract: A MIM structure and manufacturing method thereof are provided. The MIM structure includes a substrate and a metallization structure over the substrate. The metallization structure includes a bottom electrode layer, a dielectric layer on the bottom electrode layer, a ferroelectric layer on the dielectric layer, a top electrode layer on the ferroelectric layer, a first contact electrically coupled to the top electrode layer, and a second contact penetrating the dielectric layer and the ferroelectric layer, electrically coupled to a base portion of the bottom electrode layer. The bottom electrode layer includes the base portion and a plurality of protrusions, each of the protrusions is protruding from the base portion and leveled with a lower surface of the dielectric layer, each portion of the dielectric layer over the bottom electrode layer substantially have identical thicknesses.
    Type: Grant
    Filed: January 18, 2023
    Date of Patent: December 26, 2023
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY LTD.
    Inventors: Sai-Hooi Yeong, Chih-Yu Chang, Chun-Yen Peng, Chi On Chui
  • Patent number: 11855205
    Abstract: A semiconductor device structure is provided. The semiconductor device structure includes a substrate having a fin structure that includes a first negative capacitance material, and an isolation structure formed over the substrate. The semiconductor device structure includes a gate structure formed over the fin structure, and a source feature and a drain feature formed over the fin structure. An interface between the fin structure and the source feature is lower than a top surface of the isolation structure.
    Type: Grant
    Filed: July 26, 2022
    Date of Patent: December 26, 2023
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Bo-Feng Young, Chih-Yu Chang, Sai-Hooi Yeong, Chi-On Chui, Chih-Hao Wang
  • Publication number: 20230413571
    Abstract: Various embodiments of the present disclosure provide a memory device and methods of forming the same. In one embodiment, a memory device is provided. The memory device includes a first oxide material having a first sidewall and a second sidewall, a first spacer layer in contact with the first sidewall of the first oxide material, the first spacer layer having a first conductivity type, a second spacer layer in contact with the second sidewall of the first oxide material, wherein the second spacer layer has the first conductivity type. The memory device also includes a channel layer having a second conductivity type that is opposite to the first conductivity type, wherein the channel layer is in contact with the first oxide material, the first spacer layer, and the second spacer layer. The memory device further includes a ferroelectric layer in contact with the channel layer.
    Type: Application
    Filed: June 15, 2022
    Publication date: December 21, 2023
    Inventors: Wen-Ling LU, Yu-Chien CHIU, Chih-Yu CHANG, Hung-Wei LI, Ya-Yun CHENG, Zhiqiang WU, Yu-Ming LIN, Mauricio MANFRINI
  • Patent number: 11848370
    Abstract: The present disclosure provides a semiconductor device and a method for forming a semiconductor device. The semiconductor device includes a substrate, and a first gate dielectric stack over the substrate, wherein the first gate dielectric stack includes a first ferroelectric layer, and a first dielectric layer coupled to the first ferroelectric layer, wherein the first ferroelectric layer includes a first portion made of a ferroelectric material in orthorhombic phase, a second portion made of the ferroelectric material in monoclinic phase, and a third portion made of the ferroelectric material in tetragonal phase, wherein a total volume of the second portion is greater than a total volume of the first portion and the total volume of the first portion is greater than a total volume of the third portion.
    Type: Grant
    Filed: March 30, 2022
    Date of Patent: December 19, 2023
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY LTD.
    Inventors: Chun-Yen Peng, Te-Yang Lai, Bo-Feng Young, Chih-Yu Chang, Sai-Hooi Yeong, Chi On Chui
  • Publication number: 20230403860
    Abstract: Various embodiments of the present disclosure are directed towards a method of forming a ferroelectric memory device. In the method, a pair of source/drain regions is formed in a substrate. A gate dielectric and a gate electrode are formed over the substrate and between the pair of source/drain regions. A polarization switching structure is formed directly on a top surface of the gate electrode. By arranging the polarization switching structure directly on the gate electrode, smaller pad size can be realized, and more flexible area ratio tuning can be achieved compared to arranging the polarization switching structure under the gate electrode with the aligned sidewall and same lateral dimensions. In addition, since the process of forming gate electrode can endure higher annealing temperatures, such that quality of the ferroelectric structure is better controlled.
    Type: Application
    Filed: August 3, 2023
    Publication date: December 14, 2023
    Inventors: Bo-Feng Young, Chung-Te Lin, Sai-Hooi Yeong, Yu-Ming Lin, Sheng-Chih Lai, Chih-Yu Chang, Han-Jong Chia
  • Publication number: 20230387186
    Abstract: Embodiments include structures and methods for fabricating an MFM capacitor having a plurality of metal contacts. An embodiment may include a first metal strip, disposed on a substrate and extending in a first direction, a ferroelectric blanket layer, disposed on the first metal strip, a second metal strip, disposed on the ferroelectric blanket layer and extending in a second direction different from the first direction, and a plurality of metal contacts disposed between the first metal strip and the second metal strip and located within an intersection region of the first metal strip and the second metal strip.
    Type: Application
    Filed: August 1, 2023
    Publication date: November 30, 2023
    Inventors: Chun-Chieh LU, Mauricio MANFRINI, Marcus Johannes Hendricus VAN DAL, Chih-Yu CHANG, Sai-Hooi YEONG, Yu-Ming LIN, Georgios VALLIANITIS
  • Publication number: 20230387298
    Abstract: The present disclosure provides a semiconductor device and a method for fabricating a semiconductor device. The semiconductor device includes a substrate, a metal gate layer over the substrate, a channel between a source region and a drain region in the substrate, and a ferroelectric layer, at least a portion of the ferroelectric layer is between the metal gate layer and the substrate, wherein the ferroelectric layer includes hafnium oxide-based material, the hafnium oxide-based material includes a first portion of hafnium oxide with orthorhombic phase, a second portion of hafnium oxide with monoclinic phase, and a third portion of the hafnium oxide with tetragonal phase, wherein a first volume of the first portion is greater than a second volume of the second portion, and the second volume of the second portion is greater than a third volume the third portion.
    Type: Application
    Filed: July 28, 2023
    Publication date: November 30, 2023
    Inventors: CHUN-YEN PENG, CHIH-YU CHANG, BO-FENG YOUNG, TE-YANG LAI, SAI-HOOI YEONG, CHI ON CHUI
  • Patent number: 11832450
    Abstract: Various embodiments of the present disclosure are directed towards a method of forming a ferroelectric memory device. In the method, a pair of source/drain regions is formed in a substrate. A gate dielectric and a gate electrode are formed over the substrate and between the pair of source/drain regions. A polarization switching structure is formed directly on a top surface of the gate electrode. By arranging the polarization switching structure directly on the gate electrode, smaller pad size can be realized, and more flexible area ratio tuning can be achieved compared to arranging the polarization switching structure under the gate electrode with the aligned sidewall and same lateral dimensions. In addition, since the process of forming gate electrode can endure higher annealing temperatures, such that quality of the ferroelectric structure is better controlled.
    Type: Grant
    Filed: July 19, 2022
    Date of Patent: November 28, 2023
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Bo-Feng Young, Chung-Te Lin, Sai-Hooi Yeong, Yu-Ming Lin, Sheng-Chih Lai, Chih-Yu Chang, Han-Jong Chia
  • Publication number: 20230378310
    Abstract: Negative capacitance field-effect transistor (NCFET) and ferroelectric field-effect transistor (FE-FET) devices and methods of forming are provided. The gate dielectric stack includes a ferroelectric gate dielectric layer. An amorphous high-k dielectric layer and a dopant-source layer are deposited sequentially followed by a post-deposition anneal (PDA). The PDA converts the amorphous high-k layer to a polycrystalline high-k film with crystalline grains stabilized by the dopants in a crystal phase in which the high-k dielectric is a ferroelectric high-k dielectric. After the PDA, the remnant dopant-source layer may be removed. A gate electrode is formed over remnant dopant-source layer (if present) and the polycrystalline high-k film.
    Type: Application
    Filed: July 31, 2023
    Publication date: November 23, 2023
    Inventors: Te-Yang Lai, Chun-Yen Peng, Chih-Yu Chang, Bo-Feng Young, Sai-Hooi Yeong, Chi On Chui
  • Publication number: 20230378350
    Abstract: A semiconductor device and a method for manufacturing the semiconductor device are provided. The semiconductor device comprises a gate, a ferroelectric layer disposed on the gate; a first channel layer disposed on the ferroelectric layer, a second channel layer disposed on the ferroelectric layer, and source and drain regions disposed on the first channel layer. The first channel layer includes a first thickness and the second channel layer includes a second thickness. A ratio of the first thickness and the second thickness is less than 3/5.
    Type: Application
    Filed: May 19, 2022
    Publication date: November 23, 2023
    Inventors: CHIH-YU CHANG, CHUN-CHIEH LU, YU-CHIEN CHIU, YA-YUN CHENG, YU-MING LIN, SAI-HOOI YEONG, HUNG-WEI LI
  • Publication number: 20230369471
    Abstract: Circuit devices and methods of forming the same are provided. In one embodiment, a method includes receiving a workpiece that includes a substrate and a fin extending from the substrate, forming a first ferroelectric layer on the fin, forming a dummy gate structure over a channel region of the fin, forming a gate spacer over sidewalls of the dummy gate structure, forming an inter-level dielectric layer over the workpiece, removing the dummy gate structure to expose the first ferroelectric layer over the channel region of the fin, and forming a gate electrode over the exposed first ferroelectric layer over the channel region of the fin.
    Type: Application
    Filed: July 25, 2023
    Publication date: November 16, 2023
    Inventors: Bo-Feng Young, Chih-Yu Chang, Sai-Hooi Yeong, Chi On Chui, Chih-Hao Wang