Patents by Inventor Chuang Wu

Chuang Wu has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 10475828
    Abstract: An image sensor device structure is provided. The image sensor device structure includes a substrate, and the substrate is doped with a first conductivity type. The image sensor device structure includes a light-sensing region formed in the substrate, and the light-sensing region is doped with a second conductivity type that is different from the first conductivity type. The image sensor device structure further includes a doping region extended into the light-sensing region, and the doping region is doped with the first conductivity type. The image sensor device structure also includes a plurality of color filters formed on the doping region.
    Type: Grant
    Filed: January 11, 2018
    Date of Patent: November 12, 2019
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
    Inventors: Yen-Ting Chiang, Chun-Yuan Chen, Hsiao-Hui Tseng, Yu-Jen Wang, Shyh-Fann Ting, Wei-Chuang Wu, Jen-Cheng Liu, Dun-Nian Yaung
  • Patent number: 10461109
    Abstract: The present disclosure relates to a CMOS image sensor having a multiple deep trench isolation (MDTI) structure, and an associated method of formation. In some embodiments, a plurality of pixel regions is disposed within a substrate and respectively comprising a photodiode. A boundary deep trench isolation (BDTI) structure is disposed between adjacent pixel regions, extending from a back-side of the substrate to a first depth within the substrate, and surrounding the photodiode. A multiple deep trench isolation (MDTI) structure is disposed within the individual pixel region, extending from the back-side of the substrate to a second depth within the substrate, and overlying the photodiode. A dielectric layer fills in a BDTI trench of the BDTI structure and a MDTI trench of the MDTI structure.
    Type: Grant
    Filed: November 27, 2017
    Date of Patent: October 29, 2019
    Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
    Inventors: Wei Chuang Wu, Ching-Chun Wang, Dun-Nian Yaung, Feng-Chi Hung, Jen-Cheng Liu, Yen-Ting Chiang, Chun-Yuan Chen, Shen-Hui Hong
  • Publication number: 20190252451
    Abstract: Various structures of image sensors are disclosed, as well as methods of forming the image sensors. According to an embodiment, a structure comprises a substrate comprising photo diodes, an oxide layer on the substrate, recesses in the oxide layer and corresponding to the photo diodes, a reflective guide material on a sidewall of each of the recesses, and color filters each being disposed in a respective one of the recesses. The oxide layer and the reflective guide material form a grid among the color filters, and at least a portion of the oxide layer and a portion of the reflective guide material are disposed between neighboring color filters.
    Type: Application
    Filed: April 22, 2019
    Publication date: August 15, 2019
    Inventors: Wei Chuang Wu, Jhy-Jyi Sze, Yu-Jen Wang, Yen-Chang Chu, Shyh-Fann Ting, Ching-Chun Wang
  • Publication number: 20190165009
    Abstract: The present disclosure relates to a CMOS image sensor having a multiple deep trench isolation (MDTI) structure, and an associated method of formation. In some embodiments, a plurality of pixel regions is disposed within a substrate and respectively comprising a photodiode. A boundary deep trench isolation (BDTI) structure is disposed between adjacent pixel regions, extending from a back-side of the substrate to a first depth within the substrate, and surrounding the photodiode. A multiple deep trench isolation (MDTI) structure is disposed within the individual pixel region, extending from the back-side of the substrate to a second depth within the substrate, and overlying the photodiode. A dielectric layer fills in a BDTI trench of the BDTI structure and a MDTI trench of the MDTI structure.
    Type: Application
    Filed: November 27, 2017
    Publication date: May 30, 2019
    Inventors: Wei Chuang Wu, Ching-Chun Wang, Dun-Nian Yaung, Feng-Chi Hung, Jen-Cheng Liu, Yen-Ting Chiang, Chun-Yuan Chen, Shen-Hui Hong
  • Patent number: 10304889
    Abstract: The present disclosure provides a method of manufacturing an image sensor device. The method comprises forming a first semiconductor chip including a matrix of image sensing cells and bonding a second semiconductor chip with the first semiconductor chip. A plurality of conductive vias are formed in the second semiconductor chip, where each of the plurality of conductive vias includes a first end substantially coplanar with a first surface of the first semiconductor chip and a second end in contact with a conductive trace in the second semiconductor chip. A first dielectric layer is formed over the plurality of conductive vias and a first conductive material is formed over the first dielectric layer. The first conductive material is etched to form a plurality of conductors coupled to ground and the plurality of conductors are electrically isolated from one another.
    Type: Grant
    Filed: June 8, 2017
    Date of Patent: May 28, 2019
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY LTD.
    Inventors: Wei Chuang Wu, Ming-Tsong Wang, Feng-Chi Hung, Jen-Cheng Liu, Ching-Chun Wang
  • Publication number: 20190157319
    Abstract: An image sensor device structure is provided. The image sensor device structure includes a substrate, and the substrate is doped with a first conductivity type. The image sensor device structure includes a light-sensing region formed in the substrate, and the light-sensing region is doped with a second conductivity type that is different from the first conductivity type. The image sensor device structure further includes a doping region extended into the light-sensing region, and the doping region is doped with the first conductivity type. The image sensor device structure also includes a plurality of color filters formed on the doping region.
    Type: Application
    Filed: January 11, 2018
    Publication date: May 23, 2019
    Inventors: Yen-Ting CHIANG, Chun-Yuan CHEN, Hsiao-Hui TSENG, Yu-Jen WANG, Shyh-Fann TING, Wei-Chuang WU, Jen-Cheng LIU, Dun-Nian YAUNG
  • Publication number: 20190139997
    Abstract: A semiconductor image sensor device includes a semiconductor substrate, a radiation-sensing region, and a first isolation structure. The radiation-sensing region is in the semiconductor substrate. The first isolation structure is in the semiconductor substrate and adjacent to the radiation-sensing region. The first isolation structure includes a bottom isolation portion in the semiconductor substrate, an upper isolation portion in the semiconductor substrate, and a diffusion barrier layer surrounding a sidewall of the upper isolation portion.
    Type: Application
    Filed: March 27, 2018
    Publication date: May 9, 2019
    Inventors: YEN-TING CHIANG, CHUN-YUAN CHEN, HSIAO-HUI TSENG, SHENG-CHAN LI, YU-JEN WANG, WEI CHUANG WU, SHYH-FANN TING, JEN-CHENG LIU, DUN-NIAN YAUNG
  • Patent number: 10269857
    Abstract: Various structures of image sensors are disclosed, as well as methods of forming the image sensors. According to an embodiment, a structure comprises a substrate comprising photo diodes, an oxide layer on the substrate, recesses in the oxide layer and corresponding to the photo diodes, a reflective guide material on a sidewall of each of the recesses, and color filters each being disposed in a respective one of the recesses. The oxide layer and the reflective guide material form a grid among the color filters, and at least a portion of the oxide layer and a portion of the reflective guide material are disposed between neighboring color filters.
    Type: Grant
    Filed: July 3, 2017
    Date of Patent: April 23, 2019
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Wei Chuang Wu, Jhy-Jyi Sze, Yu-Jen Wang, Yen-Chang Chu, Shyh-Fann Ting, Ching-Chun Wang
  • Patent number: 10269858
    Abstract: Among other things, one or more image sensors and techniques for forming image sensors are provided. An image sensor comprises a photodiode array configured to detect light. The image sensor comprises an oxide grid comprising a first oxide grid portion and a second oxide grid portion. A metal grid is formed between the first oxide grid portion and the second oxide grid portion. The oxide grid and the metal grid define a filler grid. The filler grid comprises a filler grid portion, such as a color filter, that allows light to propagate through the filler grid portion to an underlying photodiode. The oxide grid and the metal grid confine or channel the light within the filler grid portion. The oxide grid and the metal grid are formed such that the filler grid provides a relatively shorter propagation path for the light, which improves light detection performance of the image sensor.
    Type: Grant
    Filed: March 8, 2018
    Date of Patent: April 23, 2019
    Assignee: Taiwan Semiconductor Manufacturing Company Limited
    Inventors: Shyh-Fann Ting, Ching-Chun Wang, Chen-Jong Wang, Jhy-Jyi Sze, Chun-Ming Su, Wei Chuang Wu, Yu-Jen Wang
  • Patent number: 10164156
    Abstract: Structures and formation methods of an image sensor structure are provided. The image sensor structure is provided. The image sensor structure includes a substrate, a photodiode component in the substrate, and a grid structure over the substrate. The grid structure includes a bottom dielectric element over the substrate, a reflective element over the bottom dielectric element, and an upper dielectric element over the reflective element. The reflective element has a sidewall which is anti-corrosive in a basic condition and an acidic condition. The image sensor structure also includes a color filter element over the substrate and surrounded by the grid structure. The color filter element is aligned with the photodiode component.
    Type: Grant
    Filed: March 31, 2017
    Date of Patent: December 25, 2018
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
    Inventors: Ching-Chung Su, Hung-Wen Hsu, Wei-Chuang Wu, Wei-Lin Chen, Jiech-Fun Lu
  • Patent number: 10147752
    Abstract: In some embodiments, the present disclosure relates to a method of forming a back-side image (BSI) sensor. The method may be performed by forming an image sensing element within a substrate and forming a pixel-level memory node at a position within the substrate that is laterally offset from the image sensing element. A back-side of the substrate is etched to form one or more trenches that are laterally separated from the image sensing element by the substrate and that vertically overlie the pixel-level memory node. A reflective material is formed within the one or more trenches.
    Type: Grant
    Filed: September 20, 2017
    Date of Patent: December 4, 2018
    Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
    Inventors: Chun-Yuan Chen, Ching-Chun Wang, Dun-Nian Yaung, Shyh-Fann Ting, Wei Chuang Wu, Yen-Ting Chiang, Kuan-Tsun Chen
  • Publication number: 20180286907
    Abstract: Structures and formation methods of an image sensor structure are provided. The image sensor structure is provided. The image sensor structure includes a substrate, a photodiode component in the substrate, and a grid structure over the substrate. The grid structure includes a bottom dielectric element over the substrate, a reflective element over the bottom dielectric element, and an upper dielectric element over the reflective element. The reflective element has a sidewall which is anti-corrosive in a basic condition and an acidic condition. The image sensor structure also includes a color filter element over the substrate and surrounded by the grid structure. The color filter element is aligned with the photodiode component.
    Type: Application
    Filed: March 31, 2017
    Publication date: October 4, 2018
    Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.
    Inventors: Ching-Chung SU, Hung-Wen HSU, Wei-Chuang WU, Wei-Lin CHEN, Jiech-Fun LU
  • Publication number: 20180240835
    Abstract: The present disclosure provides a method of manufacturing an image sensor device. The method comprises forming a first semiconductor chip including a matrix of image sensing cells and bonding a second semiconductor chip with the first semiconductor chip. A plurality of conductive vias are formed in the second semiconductor chip, where each of the plurality of conductive vias includes a first end substantially coplanar with a first surface of the first semiconductor chip and a second end in contact with a conductive trace in the second semiconductor chip. A first dielectric layer is formed over the plurality of conductive vias and a first conductive material is formed over the first dielectric layer. The first conductive material is etched to form a plurality of conductors coupled to ground and the plurality of conductors are electrically isolated from one another.
    Type: Application
    Filed: June 8, 2017
    Publication date: August 23, 2018
    Inventors: WEI CHUANG WU, MING-TSONG WANG, FENG-CHI HUNG, JEN-CHENG LIU, CHING-CHUN WANG
  • Publication number: 20180197911
    Abstract: Among other things, one or more image sensors and techniques for forming image sensors are provided. An image sensor comprises a photodiode array configured to detect light. The image sensor comprises an oxide grid comprising a first oxide grid portion and a second oxide grid portion. A metal grid is formed between the first oxide grid portion and the second oxide grid portion. The oxide grid and the metal grid define a filler grid. The filler grid comprises a filler grid portion, such as a color filter, that allows light to propagate through the filler grid portion to an underlying photodiode. The oxide grid and the metal grid confine or channel the light within the filler grid portion. The oxide grid and the metal grid are formed such that the filler grid provides a relatively shorter propagation path for the light, which improves light detection performance of the image sensor.
    Type: Application
    Filed: March 8, 2018
    Publication date: July 12, 2018
    Inventors: Shyh-Fann TING, Ching-Chun WANG, Chen-Jong WANG, Jhy-Jyi SZE, Chun-Ming SU, Wei Chuang WU, Yu-Jen WANG
  • Publication number: 20180158850
    Abstract: The image sensing device includes a semiconductor substrate, an interconnection layer, a radiation-sensing region and an isolation structure. The semiconductor substrate has a front surface and a back surface. The interconnection layer is disposed over the front surface of the semiconductor substrate. The radiation-sensing region is disposed in the semiconductor substrate. The isolation structure is disposed on the back surface of the semiconductor substrate. The isolation structure includes a trench and an etch stop layer. The trench extends from the back surface of the semiconductor substrate. The etch stop layer is disposed along the trench. An etch selectivity of a silicon oxide film to the etch stop layer is greater than a predetermined value.
    Type: Application
    Filed: May 10, 2017
    Publication date: June 7, 2018
    Inventors: Wei-Chuang WU, Ming-Tsong WANG, Feng-Chi HUNG, Ching-Chun WANG, Jen-Cheng LIU, Dun-Nian YAUNG
  • Patent number: 9917130
    Abstract: Among other things, one or more image sensors and techniques for forming image sensors are provided. An image sensor comprises a photodiode array configured to detect light. The image sensor comprises an oxide grid comprising a first oxide grid portion and a second oxide grid portion. A metal grid is formed between the first oxide grid portion and the second oxide grid portion. The oxide grid and the metal grid define a filler grid. The filler grid comprises a filler grid portion, such as a color filter, that allows light to propagate through the filler grid portion to an underlying photodiode. The oxide grid and the metal grid confine or channel the light within the filler grid portion. The oxide grid and the metal grid are formed such that the filler grid provides a relatively shorter propagation path for the light, which improves light detection performance of the image sensor.
    Type: Grant
    Filed: August 23, 2016
    Date of Patent: March 13, 2018
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY LIMITED
    Inventors: Shyh-Fann Ting, Ching-Chun Wang, Chen-Jong Wang, Jhy-Jyi Sze, Chun-Ming Su, Wei Chuang Wu, Yu-Jen Wang
  • Publication number: 20180048616
    Abstract: A social networking system selects a set of contacts for presentation to a user of the social networking system. A contact is an additional user or a group of users maintained by the social networking system. To select the set of contacts, the social networking system generates scores associated with additional users of the social networking system and groups of users based on interactions between the user and various additional users and between the user and groups of users. Based on the scores associated with additional users and with groups of users, the social networking system selects a set of contacts from the additional users and the groups of users. Information identifying the set of contacts is communicated from the social networking system to a client device for presentation to the user.
    Type: Application
    Filed: October 23, 2017
    Publication date: February 15, 2018
    Inventors: Aleksandar Ilic, Chuang Wu, Peter Henry Martinazzi, Ziqing Mao
  • Publication number: 20180026066
    Abstract: In some embodiments, the present disclosure relates to a method of forming a back-side image (BSI) sensor. The method may be performed by forming an image sensing element within a substrate and forming a pixel-level memory node at a position within the substrate that is laterally offset from the image sensing element. A back-side of the substrate is etched to form one or more trenches that are laterally separated from the image sensing element by the substrate and that vertically overlie the pixel-level memory node. A reflective material is formed within the one or more trenches.
    Type: Application
    Filed: September 20, 2017
    Publication date: January 25, 2018
    Inventors: Chun-Yuan Chen, Ching-Chun Wang, Dun-Nian Yaung, Shyh-Fann Ting, Wei Chuang Wu, Yen-Ting Chiang, Kuan-Tsun Chen
  • Patent number: 9812483
    Abstract: In some embodiments, the present disclosure relates to a back-side image (BSI) sensor having a global shutter pixel with a reflective material that prevents contamination of a pixel-level memory node. In some embodiments, the BSI image sensor has an image sensing element arranged within a semiconductor substrate and a pixel-level memory node arranged within the semiconductor substrate at a location laterally offset from the image sensing element. A reflective material is also arranged within the semiconductor substrate at a location between the pixel-level memory node and a back-side of the semiconductor substrate. The reflective material has an aperture that overlies the image sensing element. The reflective material allows incident radiation to reach the image sensing element while preventing the incident radiation from reaching the pixel-level memory node, thereby preventing contamination of the pixel-level memory node.
    Type: Grant
    Filed: May 9, 2016
    Date of Patent: November 7, 2017
    Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
    Inventors: Chun-Yuan Chen, Ching-Chun Wang, Dun-Nian Yaung, Shyh-Fann Ting, Wei Chuang Wu, Yen-Ting Chiang, Kuan-Tsun Chen
  • Publication number: 20170309673
    Abstract: Various structures of image sensors are disclosed, as well as methods of forming the image sensors. According to an embodiment, a structure comprises a substrate comprising photo diodes, an oxide layer on the substrate, recesses in the oxide layer and corresponding to the photo diodes, a reflective guide material on a sidewall of each of the recesses, and color filters each being disposed in a respective one of the recesses. The oxide layer and the reflective guide material form a grid among the color filters, and at least a portion of the oxide layer and a portion of the reflective guide material are disposed between neighboring color filters.
    Type: Application
    Filed: July 3, 2017
    Publication date: October 26, 2017
    Inventors: Wei Chuang Wu, Jhy-Jyi Sze, Yu-Jen Wang, Yen-Chang Chu, Shyh-Fann Ting, Ching-Chun Wang