Patents by Inventor Chung-Ho Huang
Chung-Ho Huang has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Patent number: 8000827Abstract: A plasma-processing tool for processing a substrate using at least a first process recipe and a second process recipe is provided. The plasma-processing tool includes transducers configured to collect process data streams, each process data stream pertaining to a process parameter being monitored during recipe execution. The tool also includes a logic circuitry configured for receiving a set of meta-data wherein each meta-data includes identification data about the substrate and the process recipe being executed. The logic circuitry is also configured for receiving a set of process data streams, each of which being associated with a specific process recipe. The logic circuitry further includes storing the meta-data and the process data streams associated with the first process recipe as a first file and the meta-data and the process data streams associated with the second process recipe as a second file.Type: GrantFiled: February 23, 2010Date of Patent: August 16, 2011Assignee: Lam Research CorporationInventors: Chad R. Weetman, Chung-Ho Huang, Jacqueline Seto, John Jensen
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Patent number: 7899627Abstract: In a plasma processing system, a method for dynamically establishing a baseline is provided. The method includes processing a first substrate. The method also includes collecting a first signal data for the first substrate. The method further includes comparing the first signal data against the baseline. The method moreover includes including the first signal data in a recalculation of the baseline if the first signal data is within a confidence level range, which is in between a top level above the baseline and a bottom level below the baseline.Type: GrantFiled: September 28, 2006Date of Patent: March 1, 2011Assignee: Lam Research CorporationInventors: Chung-Ho Huang, Jackie Seto, Nicolas Bright
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Patent number: 7882076Abstract: An arrangement for performing at least one of collecting and analyzing data from a tool cluster configured to process a set of substrates is provided. The arrangement includes a plurality of tools from which at least one tool of the plurality of tools has a chamber for processing at least one of the set of substrates. The arrangement also includes a plurality of secondary servers configured to collect sensor data from the plurality of tools. The arrangement further includes a primary server communicably coupled with the plurality of secondary servers and configured to execute a database management system. The sensor data is indexed using a plurality of indexing applications on the plurality of secondary servers prior to being forwarded to the primary server for use by the database management system. Indexing includes associating a sensor data item with an identity of a server where the sensor data item is stored.Type: GrantFiled: December 14, 2006Date of Patent: February 1, 2011Assignee: Lam Research CorporationInventors: Chad R. Weetman, Chung-Ho Huang
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Publication number: 20100332012Abstract: A process-level troubleshooting architecture (PLTA) configured to facilitate substrate processing in a plasma processing system is provided. The architecture includes a process module controller. The architecture also includes a plurality of sensors, wherein each sensor of the plurality of sensors communicates with the process module controller to collect sensed data about one or more process parameters. The architecture further includes a process-module-level analysis server, wherein the process-module-level analysis server communicates directly with the plurality of sensors and the process module controller. The process-module-level analysis server is configured for receiving data, wherein the data include at least one of the sensed data from the plurality of sensors and process module and chamber data from the process module controller.Type: ApplicationFiled: September 8, 2009Publication date: December 30, 2010Inventors: Chung-Ho Huang, Vijayakumar C. Venugopal, Connie Lam, Dragan Podlesnik
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Publication number: 20100325084Abstract: A system for facilitating plasma processing tool component management across plurality of tools is provided. The system includes means for receiving first component data for first plurality of components, including identification and usage history for a first plurality of components, at first database associated with first tool. The system also includes means for receiving second component data for second plurality of components at second database associated with second tool, which is different from first tool. The system further includes means for synchronizing first and second component data with third database. The synchronizing includes synchronizing between third database and at least one of first and second database rules that govern usage of at least one component of first and second plurality of components. The third database is coupled to exchange data with plurality of tools.Type: ApplicationFiled: August 26, 2010Publication date: December 23, 2010Inventors: Chung-Ho Huang, Hae-Pyng Jea, Tung Hsu, Jackie Seto
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Patent number: 7814046Abstract: A computer-implemented method for facilitating plasma processing tool component management across plurality of tools is provided. The method includes receiving first component data for first plurality of components, including identification and usage history, at first database associated with first tool. The method also includes receiving second component data for second plurality of components at second database associated with second tool, which is different from first tool. The method further includes synchronizing first and second component data with third database. The synchronizing includes synchronizing between third database and at least one of first and second database rules that govern usage of at least one component of first and second plurality of components. The third database is coupled to exchange data with plurality of tools.Type: GrantFiled: September 29, 2006Date of Patent: October 12, 2010Assignee: Lam Research CorporationInventors: Chung-Ho Huang, Hae-Pyng Jea, Tung Hsu, Jackie Seto
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Publication number: 20100152879Abstract: A plasma-processing tool for processing a substrate using at least a first process recipe and a second process recipe is provided. The plasma-processing tool includes transducers configured to collect process data streams, each process data stream pertaining to a process parameter being monitored during recipe execution. The tool also includes a logic circuitry configured for receiving a set of meta-data wherein each meta-data includes identification data about the substrate and the process recipe being executed. The logic circuitry is also configured for receiving a set of process data streams, each of which being associated with a specific process recipe. The logic circuitry further includes storing the meta-data and the process data streams associated with the first process recipe as a first file and the meta-data and the process data streams associated with the second process recipe as a second file.Type: ApplicationFiled: February 23, 2010Publication date: June 17, 2010Inventors: Chad R. Weetman, Chung-Ho Huang, Jacqueline Seto, John Jensen
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Publication number: 20100125360Abstract: A computer-implemented method for performing data management in a plasma processing system is provided. The method includes providing a recipe-and component control module (RACCM). The RACCM is a server that includes a plurality of intelligent agents, which are configured to interact with the plurality of components. The RACCM also includes a coordinating agent, which is configured to receive processed data from the plurality of intelligent agents. The RACCM further includes a set of provisional agents, which is configured to perform recipe management by distributing at least part of a recipe to at least one of the plurality of intelligent agents and the coordinating agent.Type: ApplicationFiled: January 25, 2010Publication date: May 20, 2010Inventors: Chung-Ho Huang, Andrew Lui
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Patent number: 7672747Abstract: A recipe-and component control module (RACCM) is provided. The RACCM is a server for performing data management in a plasma processing system with a plurality of components. The RACCM includes a plurality of intelligent agents. Each intelligent agent of the intelligent agents is configured to interact with each component of the plurality of components. The RACCM also includes a coordinating agent, which is configured to receive processed data from the plurality of intelligent agents.Type: GrantFiled: March 29, 2007Date of Patent: March 2, 2010Assignee: Lam Research CorporationInventors: Chung-Ho Huang, Andrew Lui
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Publication number: 20090279989Abstract: Methods and systems to optimize wafer placement repeatability in semiconductor manufacturing equipment using a controlled series of wafer movements are provided. In one embodiment, a preliminary station calibration is performed to teach a robot position for each station interfaced to facets of a vacuum transfer module used in semiconductor manufacturing. The method also calibrates the system to obtain compensation parameters that take into account the station where the wafer is to be placed, position of sensors in each facet, and offsets derived from performing extend and retract operations of a robot arm. In another embodiment where the robot includes two arms, the method calibrates the system to compensate for differences derived from using one arm or the other. During manufacturing, the wafers are placed in the different stations using the compensation parameters.Type: ApplicationFiled: May 7, 2008Publication date: November 12, 2009Applicant: Lam Research CorporationInventors: Scott Wong, Jeffrey Lin, Andrew D. Bailey, III, Jack Chen, Benjamin W. Mooring, Chung Ho Huang
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Patent number: 7565220Abstract: A targeted data collection system configured to collect processing data in a plasma processing system is provided. The system includes a data collection host and a plurality of plasma processing components having a plurality of sensors such that each of the plurality of plasma processing components having at least one sensor. Each of the sensors implements at least one intelligent targeted data agent that governs sensor data collection behavior. The system further includes a communication network coupling data collection host and plurality of sensors for bi-directional communication such that a given sensor of plurality of sensors receive information from data collection host pertaining to plasma processing system conditions occurring elsewhere from given sensor.Type: GrantFiled: September 28, 2006Date of Patent: July 21, 2009Assignee: Lam Research CorporationInventors: Chung-Ho Huang, Shih-Jeun Fan
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Patent number: 7558641Abstract: A computer-implemented method for performing recipe evaluation is provided. The computer-implemented method includes integrating a plurality of data sources into a single recipe report card framework. The recipe report card framework includes an editor for interacting with the plurality of data sources. The computer-implemented method also includes displaying a plurality of graphical displays. Each graphical display of the plurality of graphical displays is configured to present a signal parameter of a set of signal parameters for at least a substrate. The computer-implemented method further includes providing a plurality of criteria for each of the set of signal parameters. The computer-implemented method yet also includes providing a plurality of ranges for the each of the set of signal parameters. The computer-implemented method yet further includes providing an expert guide, which is configured to provide guidance in analyzing a recipe.Type: GrantFiled: March 29, 2007Date of Patent: July 7, 2009Assignee: Lam Research CorporationInventors: Chung-Ho Huang, Robert Hefty, Andrew Lui, Dave Humbird, Charles Potter
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Patent number: 7542820Abstract: A method for affecting a creation of a recipe for processing a substrate in a processing system. The method includes providing a best-known method driven recipe editor. The best-known method driven recipe editor incorporates best-known methods (BKMs), which are best practice specifications for the recipe. The method also includes creating a plurality of BKM modules based on the BKMs for the recipe. The method further includes defining rules for parameters in the plurality of BKM modules. The rules are propagated by the BKMs. The methods moreover includes creating a BKM driven recipe by employing the best-known method driven recipe editor to enter values for the parameters within the guidelines of BKM rules.Type: GrantFiled: September 28, 2006Date of Patent: June 2, 2009Assignee: Lam Research CorporationInventors: Chung-Ho Huang, Shih-Jeun Fan, Chin Chuan Chang, Nicolas Bright
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Patent number: 7536538Abstract: A method for configuring a plasma cluster tool is disclosed. The method includes generating a key file from option specifications, the key file encapsulating configuration restrictions specifically imposed on the plasma cluster tool. The method also includes generating at least one system-wide configuration file and at least one component-level configuration file using the key file. The method additionally includes generating run-time executable objects from a database of option definition files, the at least one system-wide configuration file and the at least one component-level configuration file. Furthermore, the method includes employing the run-time executable objects to configure the plasma cluster tool.Type: GrantFiled: February 11, 2008Date of Patent: May 19, 2009Assignee: Lam Research CorporationInventors: Chung-Ho Huang, Shih-Jeun Fan, Chin-Chuan Chang
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Publication number: 20090089024Abstract: An arrangement for creating a model for gathering measurement data about a processed substrate by a user of a plasma processing system is provided. The arrangement includes a generic model builder, which is configured for at least creating the model. The model is a relationship between a set of input data and a set of output data. The arrangement also includes an input module, which includes the set of input data from a plurality of input sources. The arrangement includes an input conditioning and validation module, which is configured for at least determining the integrity of the set or input data. The arrangement further includes a relationship module, which is configured for at least creating a set of mathematical relationships. The arrangement yet also includes an output conditioning and validation module, which is configured for at least determining the integrity of the set of output data.Type: ApplicationFiled: September 22, 2008Publication date: April 2, 2009Inventors: Chung-Ho Huang, Chang L. Koh
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Patent number: 7469195Abstract: An automated process control system for controlling a plasma processing system having a chamber, for processing a substrate is disclosed. The automatic process control system includes a first sensor disposed within the chamber, for making a first plurality of measurements pertaining to a first parameter associated with a structure disposed at least partially within the chamber. The automatic process control system further includes first logic coupled to receive the first plurality of measurements from the first sensor. The first logic is configured for analyzing the first plurality of measurements during a test step. There is also included second logic coupled to receive a first signal from the first logic, the second logic being configured to stop the test step if the first signal indicates a fault.Type: GrantFiled: October 25, 2004Date of Patent: December 23, 2008Assignee: Lam Research CorporationInventors: Chung-Ho Huang, John A. Jensen
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Publication number: 20080244400Abstract: A computer-implemented method for performing recipe evaluation is provided. The computer-implemented method includes integrating a plurality of data sources into a single recipe report card framework. The recipe report card framework includes an editor for interacting with the plurality of data sources. The computer-implemented method also includes displaying a plurality of graphical displays. Each graphical display of the plurality of graphical displays is configured to present a signal parameter of a set of signal parameters for at least a substrate. The computer-implemented method further includes providing a plurality of criteria for each of the set of signal parameters. The computer-implemented method yet also includes providing a plurality of ranges for the each of the set of signal parameters. The computer-implemented method yet further includes providing an expert guide, which is configured to provide guidance in analyzing a recipe.Type: ApplicationFiled: March 29, 2007Publication date: October 2, 2008Inventors: Chung-Ho Huang, Robert Hefty, Andrew Lui, Dave Humbird, Charles Potter
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Publication number: 20080243988Abstract: A recipe-and component control module (RACCM) is provided. The RACCM is a server for performing data management in a plasma processing system with a plurality of components. The RACCM includes a plurality of intelligent agents. Each intelligent agent of the intelligent agents is configured to interact with each component of the plurality of components. The RACCM also includes a coordinating agent, which is configured to receive processed data from the plurality of intelligent agents.Type: ApplicationFiled: March 29, 2007Publication date: October 2, 2008Inventors: Chung-Ho Huang, Andrew Lui
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Publication number: 20080188970Abstract: A method for affecting a creation of a recipe for processing a substrate in a processing system is provided. The method includes providing a best-know method driven recipe editor. The best-known method driven recipe editor incorporates best-known methods (BKMs), which are best practice specifications for the recipe. The method also includes creating a plurality of BKM modules based on the BKMs for the recipe. The method further includes defining rules for parameters in the plurality of BKM modules. The rules are propagated by the BKMs. The methods moreover includes creating a BKM driven recipe by employing the best-known method driven recipe editor to enter values for the parameters within the guidelines of BKM rules.Type: ApplicationFiled: September 28, 2006Publication date: August 7, 2008Inventors: Chung-Ho Huang, Shih-Jeun Fan, Chin Chuan Chang, Nicolas Bright
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Publication number: 20080147668Abstract: An arrangement for performing at least one of collecting and analyzing data from a tool cluster configured to process a set of substrates is provided. The arrangement includes a plurality of tools from which at least one tool of the plurality of tools has a chamber for processing at least one of the set of substrates. The arrangement also includes a plurality of secondary servers configured to collect sensor data from the plurality of tools. The arrangement further includes a primary server communicably coupled with the plurality of secondary servers and configured to execute a database management system. The sensor data is indexed using a plurality of indexing applications on the plurality of secondary servers prior to being forwarded to the primary server for use by the database management system. Indexing includes associating a sensor data item with an identity of a server where the sensor data item is stored.Type: ApplicationFiled: December 14, 2006Publication date: June 19, 2008Inventors: Chad R. Weetman, Chung-Ho Huang