Patents by Inventor Chung-Hui Chen

Chung-Hui Chen has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 10879172
    Abstract: Semiconductor structures are provided. A semiconductor structure includes a substrate, a conductive plate of a first metal layer over the substrate, a first resistor material of a resistor layer over the conductive plate, a high-K material formed between the first resistor material and the conductive plate, a first conductive line of a second metal layer over the resistor layer, and a first via formed between the first conductive line and the first resistor material. The conductive plate, the first resistor material and the high-K material form a capacitor between the first and second metal layers. The first distance between the first resistor material and the conductive plate is less than the second distance between the first resistor material and the first conductive line.
    Type: Grant
    Filed: January 3, 2019
    Date of Patent: December 29, 2020
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
    Inventors: Jiefeng Jeff Lin, Hsiao-Lan Yang, Chih-Yung Lin, Chung-Hui Chen, Hao-Chieh Chan
  • Publication number: 20200373290
    Abstract: Methods and semiconductor devices are described herein which eliminate the use of additional masks. A first interconnect layer is formed. A first resistive layer is formed on top of the first interconnect layer. A dielectric layer is formed on top of the first resistive layer. A second resistive layer is formed on top of the dielectric layer.
    Type: Application
    Filed: January 16, 2020
    Publication date: November 26, 2020
    Inventors: Chung-Hui Chen, Wan-Te Chen, Cheng-Hsiang Hsieh, Chia-Tien Wu
  • Publication number: 20200242294
    Abstract: A semiconductor device includes: an active area in a transistor layer; contact-source/drain (CSD) conductors in the transistor layer; gate conductors in the transistor layer, and interleaved with the CSD conductors; VG structures in the transistor layer, and over the active area; and a first gate-signal-carrying (GSC) conductor in an M_1st layer that is over the transistor layer, and that is over the active area; and wherein long axes correspondingly of the active area and the first GSC conductor extend substantially in a first direction; and long axes correspondingly of the CSD conductors and the gate conductors extend substantially in a second direction, the second direction being substantially perpendicular to the first direction.
    Type: Application
    Filed: January 13, 2020
    Publication date: July 30, 2020
    Inventors: Chung-Hui CHEN, Tzu Ching CHANG, Wan-Te CHEN
  • Patent number: 10720361
    Abstract: Methods and apparatus for polysilicon MOS capacitors in a replacement gate process. A method includes disposing a gate dielectric layer over a semiconductor substrate; disposing a polysilicon gate layer over the dielectric layer; patterning the gate dielectric layer and the polysilicon gate layer to form a plurality of polysilicon gates spaced by at least a minimum polysilicon to polysilicon pitch; defining a polysilicon resistor region containing at least one of the polysilicon gates and not containing at least one other of the polysilicon gates, which form dummy gates; depositing a mask layer over an inter-level dielectric layer; patterning the mask layer to expose the dummy gates; removing the dummy gates and the gate dielectric layer underneath the dummy gates to leave trenches in the inter-level dielectric layer; and forming high-k metal gate devices in the trenches in the inter-level dielectric layer. An apparatus produced by the method is disclosed.
    Type: Grant
    Filed: July 15, 2019
    Date of Patent: July 21, 2020
    Assignee: Taiwan Semiconductor Manufacturing Company
    Inventors: Pai-Chieh Wang, Tung-Heng Hsieh, Yimin Huang, Chung-Hui Chen
  • Publication number: 20200126972
    Abstract: A device includes a plurality of active areas, a plurality of gates, and a plurality of conductors. The active areas are elongated in a first direction. The gates are elongated in a second direction. The conductors are disposed between the active areas and elongated in the second direction. Each one of the conductors has an overlap with at least one corresponding gate of the gates to form at least one capacitor.
    Type: Application
    Filed: December 20, 2019
    Publication date: April 23, 2020
    Applicant: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
    Inventors: Chung-Hui CHEN, Hao-Chieh CHAN, Wei-Chih CHEN
  • Publication number: 20200126901
    Abstract: An integrated circuit includes two parallel active zones extending in a first direction, an n-type pick-up region, and a p-type pick-up region. The two parallel active zones includes a p-type active zone located in an n-type well and an n-type active zone located in a p-type well. The n-type pick-up region is located in the n-type well and configured to have a first supply voltage. The p-type pick-up region is located in the p-type well and configured to have a second supply voltage, wherein the second supply voltage is lower than the first supply voltage. The n-type pick-up region and the p-type pick-up region are separated from each other along a direction that is different from the first direction.
    Type: Application
    Filed: October 22, 2019
    Publication date: April 23, 2020
    Inventors: Chung-Hui CHEN, Hao-Chieh CHAN
  • Publication number: 20200119135
    Abstract: A device includes a first capacitor and a second capacitor connected to the first capacitor in parallel. The first capacitor includes a semiconductor region and a first plurality of gate stacks. The first plurality of gate stacks comprise a plurality of gate dielectrics over and contacting the semiconductor region, and a plurality of gate electrodes over the plurality of gate dielectrics. The second capacitor includes an isolation region, a second plurality of gate stacks over the isolation region, and a plurality of conductive strips over the isolation region and parallel to the second plurality of gate stacks. The second plurality of gate stacks and the plurality of conductive strips are laid out alternatingly.
    Type: Application
    Filed: December 10, 2019
    Publication date: April 16, 2020
    Inventors: Hao-Chieh Chan, Chung-Hui Chen
  • Publication number: 20200058580
    Abstract: Semiconductor structures are provided. A semiconductor structure includes a substrate, a conductive plate of a first metal layer over the substrate, a first resistor material of a resistor layer over the conductive plate, a high-K material formed between the first resistor material and the conductive plate, a first conductive line of a second metal layer over the resistor layer, and a first via formed between the first conductive line and the first resistor material. The conductive plate, the first resistor material and the high-K material form a capacitor between the first and second metal layers. The first distance between the first resistor material and the conductive plate is less than the second distance between the first resistor material and the first conductive line.
    Type: Application
    Filed: January 3, 2019
    Publication date: February 20, 2020
    Inventors: Jiefeng Jeff LIN, Hsiao-Lan YANG, Chih-Yung LIN, Chung-Hui CHEN, Hao-Chieh CHAN
  • Patent number: 10522637
    Abstract: A semiconductor structure includes a first GAA transistor and a second GAA transistor. The first GAA transistor includes: a first diffusion region, a second diffusion region, and a first nanowire. The second GAA transistor includes: a third diffusion region, a fourth diffusion region, and a second nanowire. The first diffusion region, the second diffusion region, and the first nanowire are symmetrical with the third diffusion region, the fourth diffusion region, and the second nanowire respectively, the first GAA transistor is arranged to provide a first current to flow through the first nanowire, and the second GAA transistor is arranged to provide a second current to flow through the second nanowire.
    Type: Grant
    Filed: May 2, 2019
    Date of Patent: December 31, 2019
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY LTD.
    Inventor: Chung-Hui Chen
  • Patent number: 10515947
    Abstract: A device includes a plurality of active areas, a plurality of gates, and a plurality of conductors. The active areas are elongated in a first direction. The gates are elongated in a second direction. The conductors are disposed between the active areas and elongated in the second direction. Each one of the conductors has an overlap with at least one corresponding gate of the gates to form at least one capacitor.
    Type: Grant
    Filed: September 21, 2018
    Date of Patent: December 24, 2019
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
    Inventors: Chung-Hui Chen, Hao-Chieh Chan, Wei-Chih Chen
  • Publication number: 20190386155
    Abstract: A semiconductor device including field-effect transistors (finFETs) and fin capacitors are formed on a silicon substrate. The fin capacitors include silicon fins, one or more electrical conductors between the silicon fins, and insulating material between the silicon fins and the one or more electrical conductors. The fin capacitors may also include insulating material between the one or more electrical conductors and underlying semiconductor material.
    Type: Application
    Filed: August 21, 2019
    Publication date: December 19, 2019
    Inventor: Chung-Hui CHEN
  • Patent number: 10510826
    Abstract: A device includes a first capacitor and a second capacitor connected to the first capacitor in parallel. The first capacitor includes a semiconductor region and a first plurality of gate stacks. The first plurality of gate stacks comprise a plurality of gate dielectrics over and contacting the semiconductor region, and a plurality of gate electrodes over the plurality of gate dielectrics. The second capacitor includes an isolation region, a second plurality of gate stacks over the isolation region, and a plurality of conductive strips over the isolation region and parallel to the second plurality of gate stacks. The second plurality of gate stacks and the plurality of conductive strips are laid out alternatingly.
    Type: Grant
    Filed: April 30, 2018
    Date of Patent: December 17, 2019
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Hao-Chieh Chan, Chung-Hui Chen
  • Publication number: 20190340309
    Abstract: A method of manufacturing conductive lines in a circuit is disclosed. The method includes grouping signal traces into a first set of signal traces and a second set of signal traces, fabricating, using a first mask, at least a first conductive line of a first signal trace of the first set of signal traces, and fabricating, using a second mask, at least a second conductive line of a second signal trace of the second set of signal traces. Each signal trace of the first set of signal traces has a first width. Each signal trace of the second set of signal traces has a second width different from the first width. The grouping is based on at least a current of at least a signal trace of the signal traces.
    Type: Application
    Filed: July 22, 2019
    Publication date: November 7, 2019
    Inventor: Chung-Hui CHEN
  • Publication number: 20190341310
    Abstract: Methods and apparatus for polysilicon MOS capacitors in a replacement gate process. A method includes disposing a gate dielectric layer over a semiconductor substrate; disposing a polysilicon gate layer over the dielectric layer; patterning the gate dielectric layer and the polysilicon gate layer to form a plurality of polysilicon gates spaced by at least a minimum polysilicon to polysilicon pitch; defining a polysilicon resistor region containing at least one of the polysilicon gates and not containing at least one other of the polysilicon gates, which form dummy gates; depositing a mask layer over an inter-level dielectric layer; patterning the mask layer to expose the dummy gates; removing the dummy gates and the gate dielectric layer underneath the dummy gates to leave trenches in the inter-level dielectric layer; and forming high-k metal gate devices in the trenches in the inter-level dielectric layer. An apparatus produced by the method is disclosed.
    Type: Application
    Filed: July 15, 2019
    Publication date: November 7, 2019
    Inventors: Pai-Chieh Wang, Tung-Heng Hsieh, Yimin Huang, Chung-Hui Chen
  • Patent number: 10444081
    Abstract: A circuit includes a first current source that provides a current and a resistive branch in series with the first current source that provides a first voltage value and a second voltage value. A capacitive device is coupled with a voltage node having a voltage value, and a switching network alternates between charging the capacitive device to have the voltage value increase to the first voltage value, and discharging the capacitive device to have the voltage value decrease to the second voltage value.
    Type: Grant
    Filed: June 30, 2017
    Date of Patent: October 15, 2019
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
    Inventors: Jaw-Juinn Horng, Szu-Lin Liu, Chung-Hui Chen
  • Publication number: 20190279933
    Abstract: A semiconductor device structure is provided. The semiconductor device structure includes a semiconductor substrate, a gate stack, and an interconnect structure over the gate stack and the semiconductor substrate. The semiconductor device structure also includes a resistive element over the interconnect structure, and the resistive element is directly above the gate stack. The semiconductor device structure further includes a thermal conductive element over the interconnect structure. The thermal conductive element at least partially overlaps the resistive element. In addition, the semiconductor device structure includes a dielectric layer separating the thermal conductive element from the resistive element.
    Type: Application
    Filed: May 24, 2019
    Publication date: September 12, 2019
    Applicant: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
    Inventors: Wan-Te CHEN, Chung-Hui CHEN, Wei-Chih CHEN, Chii-Ping CHEN, Wen-Sheh HUANG, Bi-Ling LIN, Sheng-Feng LIU
  • Patent number: 10396217
    Abstract: A semiconductor device including field-effect transistors (finFETs) and fin capacitors are formed on a silicon substrate. The fin capacitors include silicon fins, one or more electrical conductors between the silicon fins, and insulating material between the silicon fins and the one or more electrical conductors. The fin capacitors may also include insulating material between the one or more electrical conductors and underlying semiconductor material.
    Type: Grant
    Filed: December 22, 2016
    Date of Patent: August 27, 2019
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventor: Chung-Hui Chen
  • Publication number: 20190259851
    Abstract: A semiconductor structure includes a first GAA transistor and a second GAA transistor. The first GAA transistor includes: a first diffusion region, a second diffusion region, and a first nanowire. The second GAA transistor includes: a third diffusion region, a fourth diffusion region, and a second nanowire. The first diffusion region, the second diffusion region, and the first nanowire are symmetrical with the third diffusion region, the fourth diffusion region, and the second nanowire respectively, the first GAA transistor is arranged to provide a first current to flow through the first nanowire, and the second GAA transistor is arranged to provide a second current to flow through the second nanowire.
    Type: Application
    Filed: May 2, 2019
    Publication date: August 22, 2019
    Inventor: CHUNG-HUI CHEN
  • Patent number: 10360314
    Abstract: A method of forming conductive lines in a circuit is disclosed. The method includes arranging a plurality of signal traces in a first set of signal traces and a second set of signal traces, fabricating, using a first mask, a first conductive line for a first signal trace of the first set of signal traces and fabricating, using a second mask, a second conductive line for a second signal trace of the second set of signal traces. Each signal trace of the first set of signal traces has a first width. Each signal trace of the second set of signal traces has a second width different from the first width. The arranging is based on at least a length of a signal trace of the plurality of signal traces.
    Type: Grant
    Filed: September 25, 2017
    Date of Patent: July 23, 2019
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
    Inventor: Chung-Hui Chen
  • Patent number: D883927
    Type: Grant
    Filed: March 8, 2018
    Date of Patent: May 12, 2020
    Assignee: SCHNEIDER ELECTRIC IT CORPORATION
    Inventors: Ming Che Chan, Hsin-Hsiao Lin, Chung-Hui Chen