Patents by Inventor Chung-Wen Wu

Chung-Wen Wu has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 9312222
    Abstract: The present disclosure is directed to a semiconductor structure and a method of manufacturing a semiconductor structure in which a spacer element is formed adjacent to a metal body embedded in a first dielectric layer of a first interconnect layer. A via which is misaligned relative to an edge of the metal body is formed in a second dielectric material in second interconnect layer disposed over the first interconnect layer and filled with a conductive material which is electrically coupled to the metal body. The method allows for formation of an interconnect structure without encountering the various problems presented by via substructure defects in the dielectric material of the first interconnect layer, as well as eliminating conventional gap-fill metallization issues.
    Type: Grant
    Filed: March 12, 2013
    Date of Patent: April 12, 2016
    Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
    Inventors: Chih-Yuan Ting, Chung-Wen Wu
  • Patent number: 9287212
    Abstract: A semiconductor device is disclosed. The device includes a substrate, a first dielectric layer disposed over the substrate and a metal structure disposed in the first dielectric layer and below a surface of the first dielectric layer. The metal structure has a such shape that having an upper portion with a first width and a lower portion with a second width. The second width is substantially larger than the first width. The semiconductor device also includes a sub-structure of a second dielectric positioned between the upper portion of the metal structure and the first dielectric layer.
    Type: Grant
    Filed: July 7, 2015
    Date of Patent: March 15, 2016
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Chih-Yuan Ting, Chung-Wen Wu
  • Patent number: 9257298
    Abstract: Methods of patterning a target material layer are provided herein. The method includes steps of positioning a semiconductor wafer having the target material layer thereon in an etch chamber and of providing a flow of etch gases into the etch chamber, the flow of etch gases etchant gas comprising a plurality of gases. The semiconductor wafer has a patterned hardmask feature formed from a compound on the target material layer. The method also includes steps of etching the target material layer using the patterned hardmask feature as a mask feature, wherein one of the gases chemically alters the patterned hardmask feature and at least one of the gases chemically repairs the patterned hardmask feature so that the patterned hardmask feature retains its dimensions during the etching. Associated semiconductor wafer are also provided herein.
    Type: Grant
    Filed: March 28, 2014
    Date of Patent: February 9, 2016
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Chih-Yuan Ting, Chung-Wen Wu
  • Publication number: 20160027688
    Abstract: A device includes a substrate and at least three conducting features embedded into the substrate. Each conducting feature includes a top width x and a bottom width y, such that a top and bottom width (x1, y1) of a first conducting feature has a dimension of (x1<y1), a top and bottom width (x2, y2) of a second conducting feature has a dimension of (x2<y2; x2=y2; or x2>y2), and a top and bottom width (x3, y3) of a third conducting feature has a dimension of (x3>y3). The device also includes a gap structure isolating the first and second conducting features. The gap structure can include such things as air or dielectric.
    Type: Application
    Filed: October 2, 2015
    Publication date: January 28, 2016
    Inventors: Chih-Yuan Ting, Chung-Wen Wu, Jeng-Shiou Chen, Jang-Shiang Tsai, Jyu-Horng Shieh
  • Patent number: 9201483
    Abstract: An image processing unit including an always on circuit block and a non-always on circuit block is provided. When operating under a first operation mode, the non-always on circuit block receives a bias voltage from a power supply unit, so as to perform an image processing operation on an image input signal. When operating under a second operation mode, the non-always on circuit block stops receiving the bias voltage from the power supply unit, so as to stop the image processing operation, and at least a microcontroller of the non-always on circuit block is powered down. One of the always on circuit block and the non-always on circuit block controls the power supply unit to stop supplying the bias voltage to the non-always on circuit block according an event trigger signal, such that the non-always on circuit block enters the second operation mode from the first operation mode.
    Type: Grant
    Filed: June 4, 2013
    Date of Patent: December 1, 2015
    Assignee: Novatek Microelectronics Corp.
    Inventors: Wen-Chi Lin, Kuo-Chi Chen, Sih-Ting Wang, Wen-Hsuan Lin, Chung-Wen Wu
  • Publication number: 20150311152
    Abstract: A semiconductor device is disclosed. The device includes a substrate, a first dielectric layer disposed over the substrate and a metal structure disposed in the first dielectric layer and below a surface of the first dielectric layer. The metal structure has a such shape that having an upper portion with a first width and a lower portion with a second width. The second width is substantially larger than the first width. The semiconductor device also includes a sub-structure of a second dielectric positioned between the upper portion of the metal structure and the first dielectric layer.
    Type: Application
    Filed: July 7, 2015
    Publication date: October 29, 2015
    Inventors: Chih-Yuan Ting, Chung-Wen Wu
  • Patent number: 9153479
    Abstract: A device includes a substrate and at least three conducting features embedded into the substrate. Each conducting feature includes a top width x and a bottom width y, such that a top and bottom width (x1, y1) of a first conducting feature has a dimension of (x1<y1), a top and bottom width (x2, y2) of a second conducting feature has a dimension of (x2<y2; x2=y2; or x2>y2), and a top and bottom width (x3, y3) of a third conducting feature has a dimension of (x3>y3). The device also includes a gap structure isolating the first and second conducting features. The gap structure can include such things as air or dielectric.
    Type: Grant
    Filed: June 6, 2013
    Date of Patent: October 6, 2015
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Chih-Yuan Ting, Chung-Wen Wu, Jeng-Shiou Chen, Jang-Shiang Tsai, Jyu-Horng Shieh
  • Publication number: 20150279685
    Abstract: Methods of patterning a target material layer are provided herein. The method includes steps of positioning a semiconductor wafer having the target material layer thereon in an etch chamber and of providing a flow of etch gases into the etch chamber, the flow of etch gases etchant gas comprising a plurality of gases. The semiconductor wafer has a patterned hardmask feature formed from a compound on the target material layer. The method also includes steps of etching the target material layer using the patterned hardmask feature as a mask feature, wherein one of the gases chemically alters the patterned hardmask feature and at least one of the gases chemically repairs the patterned hardmask feature so that the patterned hardmask feature retains its dimensions during the etching. Associated semiconductor wafer are also provided herein.
    Type: Application
    Filed: March 28, 2014
    Publication date: October 1, 2015
    Applicant: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Chih-Yuan Ting, Chung-Wen Wu
  • Publication number: 20150262934
    Abstract: A method for patterning vias in a chip comprises forming a photomask layer including a gap on a patterned hardmask layer including a plurality of trenches and in contact with a uniform layer on a substrate, wherein the gap overlaps with two or more of the trenches. The method further comprises exposing a portion of the uniform layer under the gap using a photo exposure process, etching the exposed portion of the uniform layer with the photomask layer to obtain a plurality of vias extended partially through the substrate, and further etching the vias to obtain corresponding through-substrate vias. Another method comprises patterning a plurality of vias in a plurality of trenches of a hardmask layer on a substrate using a single photo exposure step and a photomask comprising a single gap that overlaps with the trenches.
    Type: Application
    Filed: May 28, 2015
    Publication date: September 17, 2015
    Inventors: Chih-Yuan Ting, Chung-Wen Wu
  • Patent number: 9076729
    Abstract: A semiconductor device is disclosed. The device includes a substrate, a first dielectric layer disposed over the substrate and a metal structure disposed in the first dielectric layer and below a surface of the first dielectric layer. The metal structure has a such shape that having an upper portion with a first width and a lower portion with a second width. The second width is substantially larger than the first width. The semiconductor device also includes a sub-structure of a second dielectric positioned between the upper portion of the metal structure and the first dielectric layer.
    Type: Grant
    Filed: July 8, 2013
    Date of Patent: July 7, 2015
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Chih-Yuan Ting, Chung-Wen Wu
  • Patent number: 9048299
    Abstract: A method for patterning vias in a chip comprises forming a photomask layer including a gap on a patterned hardmask layer including a plurality of trenches and in contact with a uniform layer on a substrate, wherein the gap overlaps with two or more of the trenches. The method further comprises exposing a portion of the uniform layer under the gap using a photo exposure process, etching the exposed portion of the uniform layer with the photomask layer to obtain a plurality of vias extended partially through the substrate, and further etching the vias to obtain corresponding through-substrate vias. Another method comprises patterning a plurality of vias in a plurality of trenches of a hardmask layer on a substrate using a single photo exposure step and a photomask comprising a single gap that overlaps with the trenches.
    Type: Grant
    Filed: August 27, 2013
    Date of Patent: June 2, 2015
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Chih-Yuan Ting, Chung-Wen Wu
  • Publication number: 20150109542
    Abstract: A touch panel is provided, which includes a poly(vinylidene fluoride) (PVDF) substrate and a touch electrode structure. The PVDF substrate has two opposite surfaces. The touch electrode structure is at least disposed on one of the surfaces.
    Type: Application
    Filed: February 27, 2014
    Publication date: April 23, 2015
    Applicant: Industrial Technology Research Institute
    Inventors: Chung-Wen Wu, Wei-Yi Lin, Chyi-Ming Leu, Chun-Wei Su
  • Patent number: 8922220
    Abstract: A short detection circuit includes a voltage divider circuit, for generating, according to a bottom voltage of one or more light-emitting diode strings, a divided voltage less than the bottom voltage. Additionally, the short detection circuit includes a voltage clamp circuit, coupled to the voltage divider circuit, for clamping the divided voltage, and a comparator, coupled to the voltage divider circuit, for comparing the divided voltage and a reference voltage, to decide whether a short circuit occurs in the one or more light-emitting diode strings according to a result of the comparison.
    Type: Grant
    Filed: January 21, 2011
    Date of Patent: December 30, 2014
    Assignee: NOVATEK Microelectronics Corp.
    Inventors: Sih-Ting Wang, Chung-Wen Wu, Chien-Cheng Tu, Chia-Chun Liu
  • Publication number: 20140354623
    Abstract: A light-emitting diode driving device includes a light-emitting diode driving chip, for driving the one or more light-emitting diode strings according to a feedback voltage associated with the one or more light-emitting diode strings, and a voltage limiter, having a terminal coupled to the light-emitting diode driving chip and another terminal coupleable to the one or more light-emitting diode strings, for generating the feedback voltage for provision to the light-emitting diode driving chip according to a bottom voltage of the one or more light-emitting diode strings, and limiting the feedback voltage not to exceed a preset level; wherein the voltage limiter starts limiting the feedback voltage to substantially the preset level when the bottom voltage rises to the preset level.
    Type: Application
    Filed: August 14, 2014
    Publication date: December 4, 2014
    Inventors: Sih-Ting Wang, Chung-Wen Wu, Chien-Cheng Tu, Chia-Chun Liu
  • Patent number: 8896517
    Abstract: An integrated backlight driving chip for driving a light-emitting diode backlight module includes a scaler circuit and a backlight driving circuit. The scaler circuit includes a digital control unit for generating a digital control signal, and a variable reference voltage generation unit for generating a reference voltage. The backlight driving circuit is coupled to the digital control unit, the variable reference voltage generation unit, and the LED backlight module, for generating a backlight driving signal according to the digital control signal and the reference voltage so as to drive the LED backlight module.
    Type: Grant
    Filed: May 30, 2011
    Date of Patent: November 25, 2014
    Assignee: NOVATEK Microelectronics Corp.
    Inventors: Chia-Chun Liu, Chung-Wen Wu, Chien-Cheng Tu, Sih-Ting Wang
  • Patent number: 8890438
    Abstract: A light-emitting diode driving device includes a light-emitting diode driving chip, for driving the one or more light-emitting diode strings according to a feedback voltage associated with the one or more light-emitting diode strings, and a voltage limiter, having a terminal coupled to the light-emitting diode driving chip and another terminal coupleable to the one or more light-emitting diode strings, for generating the feedback voltage for provision to the light-emitting diode driving chip according to a bottom voltage of the one or more light-emitting diode strings, and limiting the feedback voltage not to exceed a preset level.
    Type: Grant
    Filed: March 15, 2011
    Date of Patent: November 18, 2014
    Assignee: NOVATEK Microelectronics Corp.
    Inventors: Sih-Ting Wang, Chung-Wen Wu, Chien-Cheng Tu, Chia-Chun Liu
  • Publication number: 20140264902
    Abstract: The present disclosure is directed to a semiconductor structure and a method of manufacturing a semiconductor structure in which a spacer element is formed adjacent to a metal body embedded in a first dielectric layer of a first interconnect layer. A via which is misaligned relative to an edge of the metal body is formed in a second dielectric material in second interconnect layer disposed over the first interconnect layer and filled with a conductive material which is electrically coupled to the metal body. The method allows for formation of an interconnect structure without encountering the various problems presented by via substructure defects in the dielectric material of the first interconnect layer, as well as eliminating conventional gap-fill metallization issues.
    Type: Application
    Filed: March 12, 2013
    Publication date: September 18, 2014
    Applicant: Taiwan Semiconductor Manufacturing Co. Ltd.
    Inventors: Chih-Yuan Ting, Chung-Wen Wu
  • Publication number: 20140264932
    Abstract: A method for patterning vias in a chip comprises forming a photomask layer including a gap on a patterned hardmask layer including a plurality of trenches and in contact with a uniform layer on a substrate, wherein the gap overlaps with two or more of the trenches. The method further comprises exposing a portion of the uniform layer under the gap using a photo exposure process, etching the exposed portion of the uniform layer with the photomask layer to obtain a plurality of vias extended partially through the substrate, and further etching the vias to obtain corresponding through-substrate vias. Another method comprises patterning a plurality of vias in a plurality of trenches of a hardmask layer on a substrate using a single photo exposure step and a photomask comprising a single gap that overlaps with the trenches.
    Type: Application
    Filed: August 27, 2013
    Publication date: September 18, 2014
    Applicant: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Chih-Yuan Ting, Chung-Wen Wu
  • Publication number: 20140264873
    Abstract: A semiconductor device is disclosed. The device includes a substrate, a first dielectric layer disposed over the substrate and a metal structure disposed in the first dielectric layer and below a surface of the first dielectric layer. The metal structure has a such shape that having an upper portion with a first width and a lower portion with a second width. The second width is substantially larger than the first width. The semiconductor device also includes a sub-structure of a second dielectric positioned between the upper portion of the metal structure and the first dielectric layer.
    Type: Application
    Filed: July 8, 2013
    Publication date: September 18, 2014
    Inventors: Chih-Yuan Ting, Chung-Wen Wu
  • Publication number: 20140252625
    Abstract: A device includes a substrate and at least three conducting features embedded into the substrate. Each conducting feature includes a top width x and a bottom width y, such that a top and bottom width (x1, y1) of a first conducting feature has a dimension of (x1<y1), a top and bottom width (x2, y2) of a second conducting feature has a dimension of (x2<y2; x2=y2; or x2>y2), and a top and bottom width (x3, y3) of a third conducting feature has a dimension of (x3>y3). The device also includes a gap structure isolating the first and second conducting features. The gap structure can include such things as air or dielectric.
    Type: Application
    Filed: June 6, 2013
    Publication date: September 11, 2014
    Inventors: Chih-Yuan Ting, Chung-Wen Wu, Jeng-Shiou Chen, Jang-Shiang Tsai, Jyu-Horng Shieh