Abstract: A representative embodiment of the invention provides a sound-direction detector having a miniature sensor coupled to a signal-processing block. The sensor has (i) a microphone responsive to a sound wave and (ii) a differential pressure sensor (DPS) responsive to a pressure difference induced by the sound wave between two inlet ports located in proximity to the microphone. The signal-processing block applies phase-sensitive detection to the output signal generated by the DPS, while using the output signal generated by the microphone as a reference for the phase-sensitive detection, to measure the pressure difference. The signal-processing block then determines direction to the sound-wave source based on the amplitude of the sound wave at the microphone and the measured pressure difference.

Abstract: In one embodiment, an infrared (IR) sensor has a flexible beam connected between two anchors supported on a substrate. The beam is mechanically coupled to a plate that has an IR-absorbing layer and is adapted to transfer the IR-induced heat to the beam. The heat transfer causes the beam to deform and move the plate with respect to the substrate. The motion of the plate is detected electrically or optically to quantify the amount of IR radiation received by the plate. The beam, anchors, and plate are formed from a planar layer of material that is supported at a specified offset distance from the substrate. During fabrication, certain portions of the planar layer are removed to define the beam, anchors, and plate.

Abstract: A representative embodiment of the invention provides a MEMS-based safety and arming (S&A) device having a shuttle movably connected to a frame by one or more bowed springs. The device has an electrical path adapted to electrically connect the frame and a contact pad. In the initial state, the electrical path has an electrical break. If the inertial force acting upon the shuttle (e.g., during launch) reaches or exceeds a first threshold value, then displacement of the shuttle with respect to the frame causes the electrical break to close. If the inertial force reaches or exceeds a second threshold value greater than the first threshold value, then a latching mechanism employed in the S&A device latches to keep the electrical break irreversibly closed thereafter.

Abstract: A representative embodiment of the invention provides a MEMS-based safety and arming (S&A) device having a shuttle movably connected to a frame by one or more bowed springs. The device has an electrical path adapted to electrically connect the frame and a contact pad. In the initial state, the electrical path has an electrical break. If the inertial force acting upon the shuttle (e.g., during launch) reaches or exceeds a first threshold value, then displacement of the shuttle with respect to the frame causes the electrical break to close. If the inertial force reaches or exceeds a second threshold value greater than the first threshold value, then a latching mechanism employed in the S&A device latches to keep the electrical break irreversibly closed thereafter.

Abstract: In one embodiment, an infrared (IR) sensor has a flexible beam connected between two anchors supported on a substrate. The beam is mechanically coupled to a plate that has an IR-absorbing layer and is adapted to transfer the IR-induced heat to the beam. The heat transfer causes the beam to deform and move the plate with respect to the substrate. The motion of the plate is detected electrically or optically to quantify the amount of IR radiation received by the plate. The beam, anchors, and plate are formed from a planar layer of material that is supported at a specified offset distance from the substrate. During fabrication, certain portions of the planar layer are removed to define the beam, anchors, and plate.

Abstract: Carbon particles, such as, carbon fibrils and carbon nanotube molecules, are assembled into aligned fibers using processes derived from the processes used to manufacture optical fiber. More particularly, the carbon particles are embedded in glass, which is then drawn to align them. By aligned it is meant the axis along the longest dimension of each of the various particles in a local vicinity are substantially parallel.

Abstract: An infrared (IR) radiation detector adapted to detect IR radiation by measuring pneumatic expansion of a sense chamber that is caused by a temperature increase within that chamber due to the absorbed energy of the IR radiation. A reference chamber mechanically coupled to the sense chamber controls the pneumatic expansion of the sense-chamber. The expansion is detected either electrically or optically.

Abstract: A representative embodiment of the invention provides a sound-direction detector having a miniature sensor coupled to a signal-processing block. The sensor has (i) a microphone responsive to a sound wave and (ii) a differential pressure sensor (DPS) responsive to a pressure difference induced by the sound wave between two inlet ports located in proximity to the microphone. The signal-processing block applies phase-sensitive detection to the output signal generated by the DPS, while using the output signal generated by the microphone as a reference for the phase-sensitive detection, to measure the pressure difference. The signal-processing block then determines direction to the sound-wave source based on the amplitude of the sound wave at the microphone and the measured pressure difference.

Abstract: An optical system having a spatial light modulator (SLM), in which each pixel has an optical cavity and is adapted to: (i) change the intensity of a reflected beam by changing the size of the cavity and (ii) change the phase of the reflected beam by changing the position of the cavity with respect to a reference plane. In one embodiment, the optical system has optics configured to image the apertures of an optical input mask onto the pixels of the SLM and to form an optical spot array by imaging the light reflected by the pixels onto a plane orthogonal to the plane of the mask. Each aperture can be configured to have a transmission pattern to spatially modulate the light imaged onto the corresponding pixel, thereby enabling control of the spatial mode at the corresponding spot in the optical spot array.

Abstract: A device fabricated using a multi-layered wafer that has an embedded etch mask adapted to map a desired device structure onto an adjacent (poly)silicon layer. Due to the presence of the embedded mask, it becomes possible to delay the etching that forms the mapped structure in the (poly)silicon layer until a relatively late fabrication stage. As a result, flatness of the (poly)silicon layer is preserved for the deposition of any necessary over-layers, which substantially obviates the need for filling the voids created by the structure formation with silicon oxide.

Abstract: An infrared (IR) radiation detector adapted to detect IR radiation by measuring pneumatic expansion of a sense chamber that is caused by a temperature increase within that chamber due to the absorbed energy of the IR radiation. A reference chamber mechanically coupled to the sense chamber controls the pneumatic expansion of the sense-chamber. The expansion is detected either electrically or optically.

Abstract: In one embodiment, an integrated magnetometer has a deformable, electrically conducting beam that is mounted on a substrate and adapted to oscillate with respect to the substrate. When the oscillating beam is exposed to a magnetic field, the magnetic field induces an oscillating electromotive force that generates an oscillating electrical signal along the beam. The magnetometer has a detection circuit that detects this oscillating electrical signal and, based on the results of this detection, determines the magnetic-field strength and/or the magnetic-field gradient.

Abstract: A method of fabricating a device using a multi-layered wafer that has an embedded etch mask adapted to map a desired device structure onto an adjacent (poly)silicon layer. Due to the presence of the embedded mask, it becomes possible to delay the etching that forms the mapped structure in the (poly)silicon layer until a relatively late fabrication stage. As a result, flatness of the (poly)silicon layer is preserved for the deposition of any necessary over-layers, which substantially obviates the need for filling the voids created by the structure formation with silicon oxide.

Abstract: A reluctance motor having a movable part that does not need a fixed mounting shaft in the motor's stationary part. In one embodiment, a motor of the invention has a stationary part that defines a cylindrical cavity into which a rotor is inserted, with an interior wall of the cavity covered by nonmagnetic lining. The stationary part has a plurality of stator poles, each defined by an electric coil having a magnetic core. The rotor has a spacer and a plurality of bearings, with each bearing at least partially confined between the spacer and the lining. The rotor is adapted to spin within the cavity in response to the excitation of one or more of the stator poles such that the bearings roll between the lining and the spacer. The motor can be implemented as a MEMS device, with the motor's stator being a substantially monolithic structure formed using a single substrate, which structure has a size on the order of 1 mm.

Abstract: A MEMS device that enables an optical subsystem (e.g., an optical switch) having an optical component optically coupled to the MEMS device via free space to achieve optical alignment between the optical component and the MEMS device without moving the optical component with respect to the stationary part of the MEMS device. In one embodiment, a MEMS device of the invention has a stationary part and a movable part movably connected to the stationary part. The movable part has a platform and a plurality of mirrors mounted on the platform, wherein (i) each mirror is adapted to move with respect to the platform independent of other mirrors and (ii) the platform is adapted to move with respect to the stationary part together with the mirrors.

Abstract: Carbon particles, such as, carbon fibrils and carbon nanotube molecules, may be assembled into substantially pure aligned fibers by a) dispersing the carbon particles within a curable liquid, b) aligning the carbon particles by flowing the mixture of curable liquid and carbon particles down a tapering tube, and c) curing the flowing mixture of curable liquid and carbon particles in the general vicinity of the end of the tapering tube to form a fiber. The curable liquid may be cured using ultraviolet light. The solidified mixture may be further processed by d) heating the fiber so as to cause the volatile elements of the solidified curable liquid portion to substantially dissipate from the fiber, e) twisting the fiber to increase its density, f) heating the fiber to sinter the carbon particles within the fiber, and g) cladding the fiber. The resulting fiber may then be spooled onto a take-up drum.

Abstract: A device, a Micro-Electrical-Mechanical-Switch (MEMS) safety and arming (S&A) device and a method of manufacturing the MEMS S&A. In one embodiment, the device includes a body and a MEMS shuttle movably coupled to the body. In this embodiment, the shuttle is configured to close a switch in response to being accelerated in two directions that are substantially orthogonal.

Abstract: An optical system having a spatial light modulator (SLM), in which each pixel has an optical cavity and is adapted to: (i) change the intensity of a reflected beam by changing the size of the cavity and (ii) change the phase of the reflected beam by changing the position of the cavity with respect to a reference plane. In one embodiment, the optical system has optics configured to image the apertures of an optical input mask onto the pixels of the SLM and to form an optical spot array by imaging the light reflected by the pixels onto a plane orthogonal to the plane of the mask. Each aperture can be configured to have a transmission pattern to spatially modulate the light imaged onto the corresponding pixel, thereby enabling control of the spatial mode at the corresponding spot in the optical spot array.

Abstract: A device, a Micro-Electrical-Mechanical-Switch (MEMS) safety and arming (S&A) device and a method of manufacturing the MEMS S&A. In one embodiment, the device includes a body and a MEMS shuttle movably coupled to the body. In this embodiment, the shuttle is configured to close a switch in response to being accelerated in two directions that are substantially orthogonal.

Abstract: A MEMS device having a movable plate supported on a substrate by a support structure that is hidden under the plate and yet which can be implemented to enable rotation of the plate with respect to the substrate about a rotation axis lying at the plate surface. As a result, the support structure does not take up any area within the plane of the plate, while enabling rotation of the plate, during which the plate does not substantially move sideways. The latter property reduces potential physical interference between neighboring plates in an arrayed MEMS device and enables implementation of a segmented mirror having relatively narrow gaps between adjacent segments and, thus, a relatively large fill factor, e.g., at least 98%.