Abstract: An array of high fill factor mirrors has each mirror be coupled across two deformable spring bars that are deformed using a drive. The two deformable springs are parallel to each other, and coupled together, e.g., by a cross bar. A support is coupled at one end to the cross bar and at its opposite end to the mirror. Coupled across the deformable spring bars on the opposite side thereof from the mirror support, is at least one moveable drive plate. Motion by the moveable drive plate causes the deformable spring bars to torque, e.g., in the local vicinity of the connection of the drive plate to the deformable spring bars. The torque causes the deformable spring bars to move downward, e.g., near their centers. As a result, cross bar, and hence the mirror, move downward.

Abstract: In one embodiment, an inertial switch of the invention includes a MEMS device manufactured using a layered wafer. The MEMS device has a movable electrode supported on a substrate layer of the wafer and a stationary electrode attached to that substrate layer. The movable electrode is adapted to move with respect to the substrate layer in response to an inertial force such that, when the inertial force per unit mass reaches or exceeds a contact threshold value, the movable electrode is brought into contact with the stationary electrode, thereby changing the state of the inertial switch from open to closed. In one embodiment, the MEMS device is a substantially planar device, designed such that, when the inertial force is parallel to the device plane, the displacement amplitude of the movable electrode from an initial position is substantially the same for all force directions. Advantageously, inertial switches of the invention can be designed to have a relatively small size, e.g.

Abstract: A MEMS device fabricated from a single multi-layered wafer, which alleviates the alignment problem associated with a two-piece prior-art design. In one embodiment, the MEMS device has a stationary part and a movable part rotatably coupled to the stationary part. The stationary part has an electrode and a first conducting structure electrically isolated from the electrode. The movable part has a rotatable plate and a second conducting structure located on the plate and electrically connected to the plate. The mass and location of the second conducting structure are selected such as to compensate for the plate's imbalance with respect to the rotation axis. In addition, at the rest position, the first and second conducting structures form, around the electrode, a substantially continuous barrier adapted to provide electrical shielding for the electrode.

Abstract: The specification describes an improved Moving Anti-Reflection Switch (MARS) device structure that largely eliminates charge build up on the movable membrane, and reduces stresses that cause curling of the membrane. The improved device uses a movable membrane made of single crystal silicon.

Abstract: A micro-electrical-mechanical-switch (MEMS) device comprises a semiconductor wafer, a first semiconductor layer formed on the semiconductor wafer, and a second semiconductor layer formed on the first layer. A first latching movable shuttle is formed in the second layer and has the first layer removed under the first movable shuttle, the first movable shuttle being moved in a first direction relative to the wafer in response to a predetermined acceleration of the MEMS device in a direction opposite to the first direction thereby changing an operating condition of the MEMS device from a first switch state to an intermediate switch state. A second latching moveable shuttle is formed within the first shuttle, the second shuttle being moved in a second direction relative to the first shuttle in response to a thermally activated force so as to change the operating state of the MEMS device from the intermediate switch state to a second switch state.

Abstract: In one embodiment, a rotatable element includes a plate, a plate support, a cradle, and a cradle support. The plate is coupled to the cradle via the plate support. The cradle is coupled to a surrounding frame by the cradle support. The plate and cradle are suspended over a cavity so that, in conjunction with the plate support and the cradle support, both the plate and cradle are capable of freely rotating about different axes of rotation when suitably actuated. Since the plate is capable of rotating independently of the cradle, yet also rotates when the cradle is rotated, the plate is rotatable about two axes of rotation. In some cases, the axis of rotation of the plate is perpendicular to the axis of rotation of the cradle. Since the cradle does not surround the plate, the plates of adjacent rotatable elements can be placed very close to one another (i.e., as close as about 1 micron) to provide, for example, an array of very-closely-spaced mirrors.

Abstract: A MEMS device having a movable mirror pixel supported on a substrate and coupled to a motion actuator so as to enable rotation of the mirror pixel about an axis lying within the mirror plane. In one embodiment, the motion actuator has a movable electrode, on which the mirror pixel is mounted. The movable electrode is supported on the substrate by a pair of upright springs, each having two parallel segments joined at one end and disjoint at the other end. One disjoint segment end is coupled to the substrate, while the other disjoint segment end is coupled to the movable electrode. The end of the upright spring corresponding to the joined segment ends points away from the substrate such that (i) the spring body protrudes through a narrow slot in the mirror pixel and (ii) the mirror plane lies at about the mid-point of the spring.

Abstract: In one embodiment, a magnetometer includes an electromechanical resonator coupled to a drive-and-detect (DD) circuit. The resonator has a deformable beam that is a part of a closed current path. By applying a periodic drive signal to a drive electrode located in proximity to the deformable beam, the DD circuit induces an oscillation of the beam. In the presence of a magnetic field, this oscillation changes the magnetic flux through the closed current path, thereby generating an oscillating electrical current in the path. Dissipation of this current due to resistive losses in the closed current path then dampens the oscillation of the deformable beam with a damping coefficient that depends on the magnetic-field strength. Using a sense electrode located in proximity to the deformable beam, the DD circuit detects the oscillation amplitude. Based on the detected amplitude, the DD circuit changes the frequency of the drive signal to find the resonant frequency.

Abstract: Two or more independent voltages are applied between stationary and movable parts of a MEMS device via a multipart spring having at least two cooperating parts that are not in direct electrical contact with each other. In one embodiment, the at least two cooperating parts include a first cooperating part and one or more other cooperating parts that are physically separated from the first cooperating part, wherein first and second independent voltages are applied via the first cooperating part and the one or more other cooperating parts, respectively.

Abstract: A MEMS device having a spring structure formed by two flexible beams attached between a substrate and a movable bar. When non-end sections of the beams are pulled in opposite directions, the beam ends attached to the movable bar pull that bar toward the substrate, thereby transforming in-plane motion of the non-end sections into out-of-plane motion of the movable bar. When the non-end sections are displaced symmetrically, the movable bar translates toward the substrate. Alternatively, when the non-end sections are displaced non-symmetrically, the movable bar rotates with respect to the substrate. In one embodiment, each flexible beam is attached to a comb-shaped portion of a motion actuator, which has two such portions, each portion interleaved with the other portion and adapted to move with respect to the substrate and that other portion.

Abstract: A waveguide/MEMS switch adapted to redirect optical signals between output ports based on a phase shift change generated by motion of one or more movable MEMS mirrors incorporated therein. Advantageously, such a switch has a relatively high switching speed and low power consumption. A switch according to one embodiment of the invention includes a planar waveguide device and a planar MEMS device. The MEMS device implements in-plane (i.e., parallel to the plane of that device) translation of the mirrors. As a result, in certain embodiments of the switch, the waveguide and MEMS devices are connected into a compact planar assembly.

Abstract: A rotatable element includes a plate, a plate support, a cradle and a cradle support. The plate is coupled to the cradle via the plate support. The cradle is coupled to a surrounding frame by the cradle support. The plate and cradle are suspended over a cavity so that, in conjunction with the plate support and the cradle support, both the plate and cradle are capable of freely rotating about different axes of rotation when suitably actuated. Since the plate is capable of rotating independently of the cradle, yet also rotates when the cradle is rotated, the plate is rotatable about two axes of rotation. In some cases, the axis of rotation of the plate is perpendicular to the axis of rotation of the cradle. Since the cradle does not surround the plate, the plates of adjacent rotatable elements can be placed very close to one another (i.e., as close as about 1 micron) to provide, for example, an array of very-closely-spaced mirrors.

Abstract: A MEMS device having a deformable mirror. In representative embodiments, the MEMS device includes (1) a deformable plate having a reflective surface and movably connected to a substrate and (2) a deformation actuator mounted on the plate such that, when the plate moves with respect to the substrate, the actuator moves together with the plate without any changes in the relative position of the plate and the actuator. In one embodiment, the actuator has (i) a first electrode, one end of which is attached to an edge of the plate and (ii) a second electrode attached to an interior portion of the plate. When a voltage differential is applied between the first and second electrodes, an unattached end of the first electrode moves with respect to the second electrode, thereby applying a deformation force to the plate. Advantageously, motion and deformation of the deformable plate in such MEMS device are decoupled.

Abstract: An integrated device has a spring having at least two split parts that are not in direct electrical contact with each other. The integrated device also has a substrate and a movable part, where both parts of the spring are configured between the substrate and the movable part to support the movable part on the substrate. The two or more split parts of the spring enable two or more independent voltages to be applied to the movable part. The split spring of the invention may be used in MEMS devices for optical switches in order to provide independent voltages to the movable part(s) in those devices.

Abstract: A MEMS device having a deformable segmented mirror. The mirror includes a plurality of movable segments supported on a substrate using spring vertices, each vertex having a fixed plate and one or more springs. In a representative embodiment, three springs support each movable segment, where each spring connects the movable segment to a different spring vertex. The MEMS device also has a plurality of electrodes, each of which can be individually biased. A movable segment moves in response to a voltage applied to an electrode located beneath that segment while the deformed springs attached to the segment provide a restoring force. Due to the fixed plates, motion of each movable segment is substantially decoupled from that of the adjacent segments, which makes the shape of the segmented mirror relatively easy to control.

Abstract: A portable spectrophotometric system for detecting one or more target substances. In a representative embodiment, a system of the invention has an optical grating, an array of photo-detectors, and a MEMS device having a movable plate positioned between the grating and the array. Light transmitted through a gaseous sample is dispersed by the grating and is imaged onto the movable plate, which has a plurality of openings corresponding to selected infrared absorption lines of the target substance. A small-amplitude oscillation is imparted onto the plate such that the openings periodically move in and out of alignment with the corresponding intensity features in the image, which modulates electrical signals generated by the corresponding photo-detectors. A lock-in signal processor analyzes the modulation pattern by comparing it to the pattern expected in the presence of the target substance.

Abstract: A two-axis MEMS device for an optical switch may be fabricated using a single wafer. The device has a movable mirror rotatably coupled to a plate, which is itself rotatably coupled to a stationary substrate to enable mirror rotation about two axes. The mirror rotates with respect to the plate in response to a first voltage applied between the mirror and a movable electrode rigidly connected to the plate. The plate rotates with respect to the substrate in response to a second voltage applied between the plate and a stationary electrode rigidly connected to the substrate. Additional movable and/or stationary electrodes may be implemented to enable bidirectional rotation of the plate and/or the mirror. A spring supporting the plate on the substrate may have two or more split parts to provide two or more independent voltages from the substrate. The electrodes may be arranged with respect to each other and/or the mirror to form a fringe-field (FF) actuator, which may alleviate any snap-down problem.

Abstract: A MEMS device for an optical switch may be fabricated using a single wafer, which alleviates the alignment problem associated with a two-piece prior art design. The device has a movable plate, which may act as a mirror, supported on a stationary substrate. The plate rotates with respect to the substrate in response to a voltage applied to a stationary electrode rigidly connected to the substrate. Additional movable and/or stationary electrodes may be implemented to enable bidirectional rotation of the plate. Electrodes may be arranged with respect to each other and/or the plate to form a fringe-field (FF) actuator, which may alleviate the snap-down problem associated with the prior art design. Multiple MEMS devices of the invention may be arrayed in a single integrated structure to form a linear, radial, or two-dimensional array of mirrors.

Abstract: A rotatable element includes a plate, a plate support, a cradle and a cradle support. The plate is coupled to the cradle via the plate support. The cradle is coupled to a surrounding frame by the cradle support. The plate and cradle are suspended over a cavity so that, in conjunction with the plate support and the cradle support, both the plate and cradle are capable of freely rotating about different axes of rotation when suitably actuated. Since the plate is capable of rotating independently of the cradle, yet also rotates when the cradle is rotated, the plate is rotatable about two axes of rotation. In some cases, the axis of rotation of the plate is perpendicular to the axis of rotation of the cradle. Since the cradle does not surround the plate, the plates of adjacent rotatable elements can be placed very close to one another (i.e., as close as about 1 micron) to provide, for example, an array of very-closely-spaced mirrors.

Abstract: A MEMS device having a deformable segmented mirror. The mirror includes a plurality of movable segments supported on a substrate using spring vertices, each vertex having a fixed plate and one or more springs. In a representative embodiment, three springs support each movable segment, where each spring connects the movable segment to a different spring vertex. The MEMS device also has a plurality of electrodes, each of which can be individually biased. A movable segment moves in response to a voltage applied to an electrode located beneath that segment while the deformed springs attached to the segment provide a restoring force. Due to the fixed plates, motion of each movable segment is substantially decoupled from that of the adjacent segments, which makes the shape of the segmented mirror relatively easy to control.