Abstract: A waveguide/MEMS switch adapted to redirect optical signals between output ports based on a phase shift change generated by motion of one or more movable MEMS mirrors incorporated therein. Advantageously, such a switch has a relatively high switching speed and low power consumption. A switch according to one embodiment of the invention includes a planar waveguide device and a planar MEMS device. The MEMS device implements in-plane (i.e., parallel to the plane of that device) translation of the mirrors. As a result, in certain embodiments of the switch, the waveguide and MEMS devices are connected into a compact planar assembly.

Abstract: An article comprising a support portion that is coupled to an element portion, both of which portions are formed from some of the layers of a multi-layer substrate. In one embodiment, the support portion comprises a torsional member, an actuating plate and a beam, wherein the beam mechanically links the actuating plate and the element portion. At least one torsional member attaches the support portion to the multi-layer substrate and allows the element portion to move independently of the substrate, such as when actuated by an underlying electrode. When actuated, the actuating plate of the support portion is drawn toward the underlying electrode while the element portion rises from a first (unactuated) position within the substrate toward a second (actuated) position outside of the substrate, in see-saw like fashion. The present article is useful in a variety of applications, such as, for example, optical applications where it can be used to form improved chopper switches and optical cross connects.

Abstract: A two-axis MEMS device for an optical switch may be fabricated using a single wafer. The device has a movable mirror rotatably coupled to a plate, which is itself rotatably coupled to a stationary substrate to enable mirror rotation about two axes. The mirror rotates with respect to the plate in response to a first voltage applied between the mirror and a movable electrode rigidly connected to the plate. The plate rotates with respect to the substrate in response to a second voltage applied between the plate and a stationary electrode rigidly connected to the substrate. Additional movable and/or stationary electrodes may be implemented to enable bidirectional rotation of the plate and/or the mirror. A spring supporting the plate on the substrate may have two or more split parts to provide two or more independent voltages from the substrate. The electrodes may be arranged with respect to each other and/or the mirror to form a fringe-field (FF) actuator, which may alleviate any snap-down problem.

Abstract: A MEMS device for an optical switch may be fabricated using a single wafer, which alleviates the alignment problem associated with a two-piece prior art design. The device has a movable plate, which may act as a mirror, supported on a stationary substrate. The plate rotates with respect to the substrate in response to a voltage applied to a stationary electrode rigidly connected to the substrate. Additional movable and/or stationary electrodes may be implemented to enable bidirectional rotation of the plate. Electrodes may be arranged with respect to each other and/or the plate to form a fringe-field (FF) actuator, which may alleviate the snap-down problem associated with the prior art design. Multiple MEMS devices of the invention may be arrayed in a single integrated structure to form a linear, radial, or two-dimensional array of mirrors.

Abstract: An integrated device has a spring having at least two split parts that are not in direct electrical contact with each other. The integrated device also has a substrate and a movable part, where both parts of the spring are configured between the substrate and the movable part to support the movable part on the substrate. The two or more split parts of the spring enable two or more independent voltages to be applied to the movable part. The split spring of the invention may be used in MEMS devices for optical switches in order to provide independent voltages to the movable part(s) in those devices.

Abstract: An arrow rest for an archery bow includes a shuttle, a cradle and a bow-connecting member. The shuttle, which supports an arrow, is mechanically and magnetically coupled to the cradle. The mechanical coupling enables the shuttle to move through a substantially planar region. The magnetic coupling imparts resilience to the shuttle. The arrow rest is advantageously compliant and resilient in vertical and horizontal directions (i.e., in any direction that is “in-plane” with respect to the substantially planar region in which the shuttle moves). Since resilience is provided by magnetic interaction, wherein the force of attraction decreases with increasing distance, arrow rests in accordance with the illustrative embodiment are advantageously configured to exhibit “fall-away” motion.

Abstract: An array of movable reflective elements provides wavelength independent performance in spectral equalizers and other optical devices. Each movable reflective element comprises a reflective plate that is suspended by rod-like supports that have a width of less than 2 microns and as small as about 0.25 to 0.35 microns. Semiconductor processing techniques are used to form the rod-like supports. An improved spectral equalizer incorporates the array of movable reflective elements, a controller, collimating/focusing optics and a diffraction element that optically communicate in a free-space optics arrangement.

Abstract: A shutter switch that may be fabricated using a single wafer, which alleviates the alignment problem associated with a two-piece prior art design. The switch has a movable mirror that is designed for in-plane motion. The mirror is connected to a drive shaft that can be moved, e.g., using one or more serpentine springs and a comb drive actuator. During operation, the mirror is in either one of two terminal positions. The mirror moves between the terminal positions in response to a voltage applied to the actuator. The springs and actuator are designed such that small voltage variations around the voltage values corresponding to the terminal positions do not substantially displace the mirror from those positions. As a result, any electrostatic charge accumulation will not result in significant drifting of the mirror. Multiple shutter switches may be arrayed in a single integrated structure.

Abstract: A shutter switch that may be fabricated using a single wafer, which alleviates the alignment problem associated with a two-piece prior art design. The switch has a movable mirror that is designed for in-plane motion. The mirror is connected to a drive shaft that can be moved, e.g., using one or more serpentine springs and a comb drive actuator. During operation, the mirror is in either one of two terminal positions. The mirror moves between the terminal positions in response to a voltage applied to the actuator. The springs and actuator are designed such that small voltage variations around the voltage values corresponding to the terminal positions do not substantially displace the mirror from those positions. As a result, any electrostatic charge accumulation will not result in significant drifting of the mirror. Multiple shutter switches may be arrayed in a single integrated structure.

Abstract: An adaptive optics system whereby at least one mirror in the system is manipulated using electrostatic force to attract and/or a restoring force to repel a portion of the mirror to a particular electrode. The attraction force is created by placing a voltage across an electrode in an array of electrodes positioned near that mirror. The restoring force is created by attaching or mechanically coupling a fluid-filled cavity to a mirror. It is thus possible to attract portions of the mirror in one instant by passing a voltage over individual electrodes associated with those portions of mirror and then, by reducing the voltage placed across those electrodes, to repel those same portions in the next instant. The spatial frequency of the deformation of a membrane mirror is thus increased, which allows the correction of more complex wave front distortion.

Abstract: A free-standing hollow micro-tube that provides, in some embodiments, a flexible support for a movable platform. The hollow micro-tube is actuated to flex at substantially lower voltages than solid supports. Consequently, articles incorporating the micro-tubes that may be actuated by electrostatic forces, such as an XY translation stage and an array of pedestal mirrors, operate at reduced voltages.

Abstract: A MEMs device comprises a component layer including a frame structure and at least one component movably coupled to the frame and an actuator layer including at least one conductive path and at least one actuator for moving the component. The component layer and the actuator layer are bonded together with solder or other materials in lateral alignment. Advantageously the layers are provided with metallization pads and are bonded together in lateral alignment with predetermined vertical gap spacing by solder bonds between the pads. In a preferred embodiment the MEMs device, however bonded, comprises a component layer, an actuator layer and an intervening spacer. The spacer provides the walls of a cavity between the component and the pertinent actuators to permit movement of the component. The walls cover the bulk of the peripheral boundary of the cavity to provide aerodynamic isolation. Advantageously the walls are conductive to provide electrostatic isolation.

Abstract: An electrode for use in actuating MEMS elements. The electrode declines in height along its length from a first end thereof to second end thereof. In use, the first end of the electrode is disposed proximal to an axis of rotation or axis of bending of an overlying MEMS element. In one embodiment, the decline in height of the electrode along its length is linear such that the electrode has a wedge-shaped profile. In another embodiment, the height of the electrode declines in discrete steps such that the electrode has a stepped profile.

Abstract: The specification describes an improved Moving Anti-Reflection Switch (MARS) device structure that largely eliminates charge build up on the movable membrane, and reduces stresses that cause curling of the membrane. The improved device uses a movable membrane made of single crystal silicon.

Abstract: In accordance with the invention, a MEMs mirror device comprises a mirror layer including a frame structure and at least one mirror movably coupled to the frame and an actuator layer including at least one conductive path and at least one electrode for moving the mirror. The mirror layer and the actuator layer are provided with metallization pads and are bonded together in lateral alignment and with predetermined vertical gap spacing by solder bonds between the pads. The device has utility in optical cross connection, variable attenuation and power gain equalization.

Abstract: An electrode for use in actuating MEMS elements. The electrode declines in height along its length from a first end thereof to second end thereof. In use, the first end of the electrode is disposed proximal to an axis of rotation or axis of bending of an overlying MEMS element. In one embodiment, the decline in height of the electrode along its length is linear such that the electrode has a wedge-shaped profile. In another embodiment, the height of the electrode declines in discrete steps such that the electrode has a stepped profile.

Abstract: A MEMs device comprises a component layer including a frame structure and at least one component movably coupled to the frame and an actuator layer including at least one conductive path and at least one actuator for moving the component. The component layer and the actuator layer are bonded together with solder or other materials in lateral alignment. Advantageously the layers are provided with metallization pads and are bonded together in lateral alignment with predetermined vertical gap spacing by solder bonds between the pads. In a preferred embodiment the MEMs device, however bonded, comprises a component layer, an actuator layer and an intervening spacer. The spacer provides the walls of a cavity between the component and the pertinent actuators to permit movement of the component. The walls cover the bulk of the peripheral boundary of the cavity to provide aerodynamic isolation. Advantageously the walls are conductive to provide electrostatic isolation.

Abstract: A filter constructed of a plurality of micro-mechanical resonators that are weakly coupled together. Micro-machining techniques enable the fabrication of a plurality of resonators having nearly identical frequency performance characteristics, with the difference in resonant frequency between and among the plurality of resonators being no more than approximately 1%. Any number of resonators may be coupled in virtually any configuration (e.g., circular, square, triangular, straight, etc.) to form a filter in accordance with the present invention. One of the resonators of the filter is driven into motion by an electrical signal, and the resonating movement (i.e., physical response) is detectable using optical interference techniques and systems directed at a resonator other than the resonator driven into motion.

Abstract: An article and method including an optical fiber coupled to a microstructure which is easily manufactured. The microstructure is comprised of a plurality of layers including a receptacle layer and a movable layer. The optical fiber has a high reflectivity terminal end forming the non-movable layer. The receptacle layer has an opening aligned with the movable layer for receiving the terminal end of the optical fiber. The optical fiber is inserted into the opening and the receptacle layer and fixed in relation to the microstructure, so as to form cavity between the terminal end of the fiber and the movable layer of the microstructure. The movable layer is physically adapted for moving relative to the non-movable layer under the influence of an actuating force.

Abstract: An article comprising a micro-machined filter advantageously comprises a micro-machined resonator, a drive circuit and a detection circuit, at least a portion of which are circuits are disposed on the resonator within a magnetic field. In operation, an input signal is delivered to the drive circuit. The resonator is excited to movement by the Lorentz force that is generated as signal current varies. Due to the resonator's movement, a voltage is induced in the detection circuit, which moves with the resonator. Using well-known micro-machining techniques, a resonator can be made that has mechanical resonance frequencies extending into the GHz regime. Under proper conditions, such resonances advantageously exhibit very high Q-values, so that the resonator shows a significant physical response (e.g., movement) over a very narrow range of excitation frequency. When the frequency of the input signal matches such a frequency (i.e., the resonant frequency), the device generates a voltage having such a frequency.