Patents by Inventor Dirk Juergens

Dirk Juergens has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • PROJECTION EXPOSURE METHOD, SYSTEM AND OBJECTIVE
    Publication number: 20150049320
    Abstract: A projection exposure method is disclosed which includes exposing an exposure area of a radiation-sensitive substrate, arranged in an image surface of a projection objective, with at least one image of a pattern of a mask arranged in an object surface of the projection objective in a scanning operation. The scanning operation includes moving the mask relative to an effective object field of the projection objective and simultaneously moving the substrate relative to an effective image field of the projection objective in respective scanning directions. The projection exposure method also includes changing imaging properties of the projection objective actively during the scanning operation according to a given time profile to change dynamically at least one aberration of the projection objective between a beginning and an end of the scanning operation.
    Type: Application
    Filed: September 25, 2014
    Publication date: February 19, 2015
    Inventor: Dirk Juergens
  • Projection exposure method, system and objective
    Patent number: 8873022
    Abstract: A projection exposure method is disclosed which includes exposing an exposure area of a radiation-sensitive substrate, arranged in an image surface of a projection objective, with at least one image of a pattern of a mask arranged in an object surface of the projection objective in a scanning operation. The scanning operation includes moving the mask relative to an effective object field of the projection objective and simultaneously moving the substrate relative to an effective image field of the projection objective in respective scanning directions. The projection exposure method also includes changing imaging properties of the projection objective actively during the scanning operation according to a given time profile to change dynamically at least one aberration of the projection objective between a beginning and an end of the scanning operation.
    Type: Grant
    Filed: February 3, 2010
    Date of Patent: October 28, 2014
    Assignee: Carl Zeiss SMT GmbH
    Inventor: Dirk Juergens
  • METHOD OF OPERATING A PROJECTION EXPOSURE TOOL FOR MICROLITHOGRAPHY
    Publication number: 20130301024
    Abstract: A method of operating a projection exposure tool for microlithography is provided. The projection exposure tool has a projection objective for imaging object structures on a mask into an image plane using electromagnetic radiation, during which imaging the electromagnetic radiation causes a change in optical properties of the projection objective.
    Type: Application
    Filed: July 11, 2013
    Publication date: November 14, 2013
    Inventors: Olaf Conradi, Michael Totzeck, Ulrich Loering, Dirk Juergens, Ralf Mueller, Christian Wald
  • Wheel or wheel cover
    Patent number: D670636
    Type: Grant
    Filed: April 6, 2012
    Date of Patent: November 13, 2012
    Assignee: Bayerische Motoren Werke Aktiengesellschaft
    Inventors: Dirk Juergens, Rainer Mueller
  • Wheel or wheel cover
    Patent number: D671474
    Type: Grant
    Filed: April 6, 2012
    Date of Patent: November 27, 2012
    Assignee: Bayerische Motoren Werke Aktiengesellschaft
    Inventors: Dirk Juergens, Rainer Mueller
  • Wheel or wheel cover
    Patent number: D671475
    Type: Grant
    Filed: April 6, 2012
    Date of Patent: November 27, 2012
    Assignee: Bayerische Motoren Werke Aktiengesellschaft
    Inventors: Dirk Juergens, Rainer Mueller
  • Wheel or wheel cover
    Patent number: D671477
    Type: Grant
    Filed: April 6, 2012
    Date of Patent: November 27, 2012
    Assignee: Bayerische Motoren Werke Aktiengesellschaft
    Inventors: Dirk Juergens, Rainer Mueller
  • Clamp for stick
    Patent number: D672544
    Type: Grant
    Filed: January 6, 2010
    Date of Patent: December 18, 2012
    Assignee: Lekisport AG
    Inventors: Rainer Müller, Dirk Jürgens
  • Wheel or wheel cover
    Patent number: D683297
    Type: Grant
    Filed: April 6, 2012
    Date of Patent: May 28, 2013
    Assignee: Bayerische Motoren Werke Aktiengesellschaft
    Inventors: Dirk Juergens, Rainer Mueller
  • Wheel or wheel cover
    Patent number: D683681
    Type: Grant
    Filed: April 5, 2012
    Date of Patent: June 4, 2013
    Assignee: Bayerische Motoren Werke Aktiengesellschaft
    Inventors: Dirk Juergens, Rainer Mueller
  • Wheel or wheel cover
    Patent number: D686129
    Type: Grant
    Filed: December 19, 2012
    Date of Patent: July 16, 2013
    Assignee: Bayerische Motoren Werke Aktiengesellschaft
    Inventors: Dirk Juergens, Rainer Mueller
  • Wheel or wheel cover
    Patent number: D686133
    Type: Grant
    Filed: December 19, 2012
    Date of Patent: July 16, 2013
    Assignee: Bayerische Motoren Werke Aktiengesellschaft
    Inventors: Dirk Juergens, Rainer Mueller
  • Vehicle wheel
    Patent number: D695185
    Type: Grant
    Filed: March 18, 2013
    Date of Patent: December 10, 2013
    Assignee: Bayerische Motoren Werke Aktiengesellschaft
    Inventors: Dirk Juergens, Rainer Mueller
  • Vehicle wheel
    Patent number: D695198
    Type: Grant
    Filed: March 18, 2013
    Date of Patent: December 10, 2013
    Assignee: Bayerische Motoren Werke Aktiengesellschaft
    Inventors: Dirk Juergens, Rainer Mueller
  • Vehicle wheel
    Patent number: D695668
    Type: Grant
    Filed: March 18, 2013
    Date of Patent: December 17, 2013
    Assignee: Bayerische Motoren Werke Aktiengesellschaft
    Inventors: Dirk Juergens, Rainer Mueller
  • Vehicle wheel
    Patent number: D696177
    Type: Grant
    Filed: March 18, 2013
    Date of Patent: December 24, 2013
    Assignee: Bayerische Motoren Werke Aktiengesellschaft
    Inventors: Dirk Juergens, Rainer Mueller, Stephan Baum
  • Vehicle wheel
    Patent number: D697003
    Type: Grant
    Filed: March 18, 2013
    Date of Patent: January 7, 2014
    Assignee: Bayerische Motoren Werke Aktiengesellschaft
    Inventors: Stephan Baum, Dirk Juergens, Rainer Mueller
  • Vehicle wheel
    Patent number: D697005
    Type: Grant
    Filed: March 18, 2013
    Date of Patent: January 7, 2014
    Assignee: Bayersiche Motoren Werke Aktiengesellschaft
    Inventors: Dirk Juergens, Rainer Mueller
  • Vehicle wheel
    Patent number: D697008
    Type: Grant
    Filed: March 18, 2013
    Date of Patent: January 7, 2014
    Assignee: Bayerische Motoren Werke Aktiengesellschaft
    Inventors: Dirk Juergens, Rainer Mueller
  • Vehicle wheel
    Patent number: D713315
    Type: Grant
    Filed: January 8, 2014
    Date of Patent: September 16, 2014
    Assignee: Bayerische Motoren Werke Aktiengesellschaft
    Inventors: Dirk Juergens, Rainer Mueller