Abstract: A device is disclosed, in particular a power quality meter and power quality device, for determining and recording data relating to an electrical power supply system on the basis of analog electrical signals, in particular voltage, current and frequency, which are output and/or derived from the electrical power supply system and are passed to the inputs of the device. In at least one embodiment, the device includes a measurement channel, which is connected downstream from the inputs, for measuring the electrical signals, and a software-controlled processor, which is connected downstream from the measurement channel, for determining the data. In order to determine the quality of power supply systems with little effort, in at least one embodiment a communication channel is provided which has a communication interface which is likewise connected to the inputs and via which the device can communicate by cable via the electrical lines of the power supply system with correspondingly equipped other devices.

Abstract: A projection exposure method is disclosed which includes exposing an exposure area of a radiation-sensitive substrate, arranged in an image surface of a projection objective, with at least one image of a pattern of a mask arranged in an object surface of the projection objective in a scanning operation. The scanning operation includes moving the mask relative to an effective object field of the projection objective and simultaneously moving the substrate relative to an effective image field of the projection objective in respective scanning directions. The projection exposure method also includes changing imaging properties of the projection objective actively during the scanning operation according to a given time profile to change dynamically at least one aberration of the projection objective between a beginning and an end of the scanning operation.