Patents by Inventor Douglas A. Keszler

Douglas A. Keszler has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 8822978
    Abstract: An electronic structure comprising: (a) a first metal layer; (b) a second metal layer; (c) and at least one insulator layer located between the first metal layer and the second metal layer, wherein at least one of the metal layers comprises an amorphous multi-component metallic film. In certain embodiments, the construct is a metal-insulator-metal (MIM) diode.
    Type: Grant
    Filed: April 23, 2013
    Date of Patent: September 2, 2014
    Assignee: The State of Oregon Acting by and through...
    Inventors: E. William Cowell, III, John F. Wager, Brady J. Gibbons, Douglas A. Keszler
  • Patent number: 8669553
    Abstract: A thin-film transistor includes a gate electrode, a gate dielectric disposed on the gate electrode, a channel layer, and a passivation layer. The channel layer has a first surface and an opposed second surface, where the first surface is disposed over at least a portion of the gate dielectric. The channel layer also has a first oxide composition including at least one predetermined cation. The passivation layer is disposed adjacent to at least a portion of the opposed second surface of the channel layer. The passivation layer has a second oxide composition including the at least one predetermined cation of the first oxide composition and at least one additional cation that increases a bandgap of the passivation layer relative to the channel layer.
    Type: Grant
    Filed: July 2, 2010
    Date of Patent: March 11, 2014
    Assignees: Hewlett-Packard Development Company, L.P., Oregon State University
    Inventors: Chris Knutson, Rick Presley, John F. Wager, Douglas Keszler, Randy Hoffman
  • Publication number: 20130295507
    Abstract: Embodiments of a method for synthesizing aqueous precursors comprising Hf4+ or Zr4+ cations, peroxide, and a monoprotic acid are disclosed. The aqueous precursors are suitable for making HfO2 and ZrO2 thin films, which subsequently can be patterned. The disclosed thin films are dense and continuous, with a surface roughness of ?0.5 nm and a refractive index of 1.85-2.0 at ?=550 nm. Some embodiments of the disclosed thin films have a leakage-current density ?20 nA/cm2 at 1 MV/cm, with a dielectric breakdown ?3 MV/cm. The thin films can be patterned with radiation to form dense lines and space patterns.
    Type: Application
    Filed: December 23, 2011
    Publication date: November 7, 2013
    Applicants: EDUCATION ON BEHALF OF OREGON STATE UNIVERSITY
    Inventors: Douglas A. Keszler, Kai Jiang, Jeremy Anderson
  • Patent number: 8436337
    Abstract: An electronic structure comprising: (a) a first metal layer; (b) a second metal layer; (c) and at least one insulator layer located between the first metal layer and the second metal layer, wherein at least one of the metal layers comprises an amorphous multi-component metallic film. In certain embodiments, the construct is a metal-insulator-metal (MIM) diode.
    Type: Grant
    Filed: May 10, 2010
    Date of Patent: May 7, 2013
    Assignee: The State of Oregon Acting By and Through The State Board of Higher Education on Behalf of Oregon State Unitiversity
    Inventors: E. William Cowell, III, John F. Wager, Brady J. Gibbons, Douglas A. Keszler
  • Publication number: 20130092931
    Abstract: A thin-film transistor includes a gate electrode, a gate dielectric disposed on the gate electrode, a channel layer, and a passivation layer. The channel layer has a first surface and an opposed second surface, where the first surface is disposed over at least a portion of the gate dielectric. The channel layer also has a first oxide composition including at least one predetermined cation. The passivation layer is disposed adjacent to at least a portion of the opposed second surface of the channel layer. The passivation layer has a second oxide composition including the at least one predetermined cation of the first oxide composition and at least one additional cation that increases a bandgap of the passivation layer relative to the channel layer.
    Type: Application
    Filed: July 2, 2010
    Publication date: April 18, 2013
    Applicants: OREGON STATE UNIVERSITY, HEWLETT-PACKARD DEVELOPMENT COMPANY, L.P.
    Inventors: Chris Knutson, Rick Presley, John F. Wager, Douglas Keszler, Randy Hoffman
  • Patent number: 8415000
    Abstract: Stabilized precursor solutions can be used to form radiation inorganic coating materials. The precursor solutions generally comprise metal suboxide cations, peroxide-based ligands and polyatomic anions. Design of the precursor solutions can be performed to achieve a high level of stability of the precursor solutions. The resulting coating materials can be designed for patterning with a selected radiation, such as ultraviolet light, x-ray radiation or electron beam radiation. The radiation patterned coating material can have a high contrast with respect to material properties, such that development of a latent image can be successful to form lines with very low line-width roughness and adjacent structures with a very small pitch.
    Type: Grant
    Filed: October 28, 2011
    Date of Patent: April 9, 2013
    Assignee: Inpria Corporation
    Inventors: Jason K. Stowers, Alan J. Telecky, Douglas A. Keszler, Andrew Grenville
  • Publication number: 20130084672
    Abstract: One disclosed embodiment concerns an aqueous inorganic coating precursor solution comprising a mixture of water, polynuclear aluminum hydroxide cations, and polyatomic ligands selected from nitrate (NO3?), nitrite (NO2?), or combinations thereof. In certain embodiments, the composition has a molar concentration ratio of polyatomic ligands to aluminum of less than 3; an aluminum cation concentration of from about 0.01 M to about 3.5 M; and/or a polyatomic anion concentration of from about 0.1 to about 2.5 times the aluminum cation concentration. Embodiments of a method for forming the precursor solution also are disclosed. For example, certain embodiments comprise adding a metal having a sufficient reduction potential to reduce nitric acid to an aqueous solution comprising aluminum nitrate (Al(NO3)3).
    Type: Application
    Filed: June 14, 2011
    Publication date: April 4, 2013
    Applicant: State of Oregon Acting By and Throught the State Board of Higher Education on Behalf of Oregon Stat
    Inventors: Douglas A. Keszler, Wei Wang
  • Patent number: 8366967
    Abstract: Metal chalcogenide precursor solutions are described that comprise an aqueous solvent, dissolved metal formate salts and a chalcogenide source composition. The chalcogenide source compositions can be organic compounds lacking a carbon-carbon bond. The precursors are designed to form a desired metal chalcogenide upon thermal processing into films with very low levels of contamination. Potentially contaminating elements in the precursors form gaseous or vapor by-products that escape from the vicinity of the product metal chalcogenide films.
    Type: Grant
    Filed: February 22, 2010
    Date of Patent: February 5, 2013
    Assignee: Inpria Corporation
    Inventors: Douglas A. Keszler, Bejamin L. Clark
  • Patent number: 8318407
    Abstract: Devices having a thin film or laminate structure comprising hafnium and/or zirconium oxy hydroxy compounds, and methods for making such devices, are disclosed. The hafnium and zirconium compounds can be doped, typically with other metals, such as lanthanum. Examples of electronic devices or components that can be made include, without limitation, insulators, transistors and capacitors. A method for patterning a device using the materials as positive or negative resists or as functional device components also is described. For example, a master plate for imprint lithography can be made. An embodiment of a method for making a device having a corrosion barrier also is described. Embodiments of an optical device comprising an optical substrate and coating also are described. Embodiments of a physical ruler also are disclosed, such as for accurately measuring dimensions using an electron microscope.
    Type: Grant
    Filed: September 30, 2008
    Date of Patent: November 27, 2012
    Assignee: State of Oregon acting by and through the State Board of Higher Education on behalf of Oregon State University
    Inventors: Douglas A. Keszler, Jeremy Anderson, Peter A. Hersh, Jason K. Stowers
  • Publication number: 20120223418
    Abstract: Solution processible hardmasks are described that can be formed from aqueous precursor solutions comprising polyoxometal clusters and anions, such as polyatomic anions. The solution processible metal oxide layers are generally placed under relatively thin etch resist layers to provide desired etch contrast with underlying substrates and/or antireflective properties. In some embodiments, the metal oxide hardmasks can be used along with an additional hardmask and/or antireflective layers. The metal oxide hardmasks can be etched with wet or dry etching. Desirable processing improvements can be obtained with the solution processible hardmasks.
    Type: Application
    Filed: February 28, 2012
    Publication date: September 6, 2012
    Inventors: Jason K. Stowers, Stephen T. Meyers, Michael Kocsis, Douglas A. Keszler, Andrew Grenville
  • Patent number: 8206892
    Abstract: Devices having a thin film or laminate structure comprising hafnium and/or zirconium oxy hydroxy compounds, and methods for making such devices, are disclosed. The hafnium and zirconium compounds can be doped, typically with other metals, such as lanthanum. Examples of electronic devices or components that can be made include, without limitation, insulators, transistors and capacitors. A method for patterning a device using the materials as positive or negative resists or as functional device components also is described. For example, a master plate for imprint lithography can be made. An embodiment of a method for making a device having a corrosion barrier also is described. Embodiments of an optical device comprising an optical substrate and coating also are described. Embodiments of a physical ruler also are disclosed, such as for accurately measuring dimensions using an electron microscope.
    Type: Grant
    Filed: July 14, 2010
    Date of Patent: June 26, 2012
    Assignee: State of Oregon
    Inventors: Douglas A. Keszler, Jeremy Anderson, Jason K. Stowers
  • Publication number: 20120119202
    Abstract: Devices having a thin film or laminate structure comprising hafnium and/or zirconium oxy hydroxy compounds, and methods for making such devices, are disclosed. The hafnium and zirconium compounds can be doped, typically with other metals, such as lanthanum. Examples of electronic devices or components that can be made include, without limitation, insulators, transistors and capacitors. A method for patterning a device using the materials as positive or negative resists or as functional device components also is described. For example, a master plate for imprint lithography can be made. An embodiment of a method for making a device having a corrosion barrier also is described. Embodiments of an optical device comprising an optical substrate and coating also are described. Embodiments of a physical ruler also are disclosed, such as for accurately measuring dimensions using an electron microscope.
    Type: Application
    Filed: September 30, 2008
    Publication date: May 17, 2012
    Inventors: Douglas A. Keszler, Jeremy Anderson, Peter A. Hersh, Jason K. Stowers, Stephen T. Meyers
  • Publication number: 20120070613
    Abstract: Stabilized precursor solutions can be used to form radiation inorganic coating materials. The precursor solutions generally comprise metal suboxide cations, peroxide-based ligands and polyatomic anions. Design of the precursor solutions can be performed to achieve a high level of stability of the precursor solutions. The resulting coating materials can be designed for patterning with a selected radiation, such as ultraviolet light, x-ray radiation or electron beam radiation. The radiation patterned coating material can have a high contrast with respect to material properties, such that development of a latent image can be successful to form lines with very low line-width roughness and adjacent structures with a very small pitch.
    Type: Application
    Filed: October 28, 2011
    Publication date: March 22, 2012
    Inventors: Jason K. Stowers, Alan J. Telecky, Douglas A. Keszler, Andrew Grenville
  • Publication number: 20120063475
    Abstract: Described are nonlinear optical (NLO) crystals, including aluminum-borate NLO crystals, that have low concentrations of contaminants that adversely affect the NLO crystal's optical properties, such as compounds that contain transition-metal elements and/or lanthanides, other than yttrium, lanthanum, and lutetium. Some NLO crystals with low concentrations of these contaminants are capable of second harmonic generation at very short wavelengths. Also described are embodiments of a method for making these NLO crystals. Some embodiments involve growing a single NLO crystal, such as an aluminum-borate NLO crystal, from a mixture containing a solvent that is substantially free of harmful contaminants. The described NLO crystals can be used, for example, in laser devices.
    Type: Application
    Filed: November 21, 2011
    Publication date: March 15, 2012
    Inventors: Douglas A. Keszler, Ning Ye
  • Publication number: 20110293888
    Abstract: Stabilized precursor solutions can be used to form radiation inorganic coating materials. The precursor solutions generally comprise metal suboxide cations, peroxide-based ligands and polyatomic anions. Design of the precursor solutions can be performed to achieve a high level of stability of the precursor solutions. The resulting coating materials can be designed for patterning with a selected radiation, such as ultraviolet light, x-ray radiation or electron beam radiation. The radiation patterned coating material can have a high contrast with respect to material properties, such that development of a latent image can be successful to form lines with very low line-width roughness and adjacent structures with a very small pitch.
    Type: Application
    Filed: August 5, 2010
    Publication date: December 1, 2011
    Inventors: Jason K. Stowers, Alan J. Telecky, Douglas A. Keszler, Andrew Grenville
  • Patent number: 8062420
    Abstract: Described are nonlinear optical (NLO) crystals, including aluminum-borate NLO crystals, that have low concentrations of contaminants that adversely affect the NLO crystal's optical properties, such as compounds that contain transition-metal elements and/or lanthanides, other than yttrium, lanthanum, and lutetium. Some NLO crystals with low concentrations of these contaminants are capable of second harmonic generation at very short wavelengths. Also described are embodiments of a method for making these NLO crystals. Some embodiments involve growing a single NLO crystal, such as an aluminum-borate NLO crystal, from a mixture containing a solvent that is substantially free of harmful contaminants. The described NLO crystals can be used, for example, in laser devices.
    Type: Grant
    Filed: June 19, 2007
    Date of Patent: November 22, 2011
    Assignee: State of Oregon acting by and through the State Board of higher Education on behalf of Oregon State University
    Inventors: Douglas A. Keszler, Ning Ye
  • Publication number: 20110206599
    Abstract: Metal chalocogenide precursor solutions are described that comprise an aqueous solvent, dissolved metal formate salts and a chalcogenide source composition. The chalcogenide source compositions can be organic compounds lacking a carbon-carbon bond. The precursors are designed to form a desired metal chalcogenide upon thermal processing into films with very low levels of contamination. Potentially contaminating elements in the precursors form gaseous or vapor by-products that escape from the vicinity of the product metal chalcogenide films.
    Type: Application
    Filed: February 22, 2010
    Publication date: August 25, 2011
    Inventors: Douglas A. Keszler, Benjamin L, Clark
  • Publication number: 20110045406
    Abstract: Devices having a thin film or laminate structure comprising hafnium and/or zirconium oxy hydroxy compounds, and methods for making such devices, are disclosed. The hafnium and zirconium compounds can be doped, typically with other metals, such as lanthanum. Examples of electronic devices or components that can be made include, without limitation, insulators, transistors and capacitors. A method for patterning a device using the materials as positive or negative resists or as functional device components also is described. For example, a master plate for imprint lithography can be made. An embodiment of a method for making a device having a corrosion barrier also is described. Embodiments of an optical device comprising an optical substrate and coating also are described. Embodiments of a physical ruler also are disclosed, such as for accurately measuring dimensions using an electron microscope.
    Type: Application
    Filed: July 14, 2010
    Publication date: February 24, 2011
    Inventors: Douglas A. Keszler, Jeremy Anderson, Peter A. Hersh, Jason K. Stowers, Stephen T. Meyers
  • Publication number: 20100289005
    Abstract: An electronic structure comprising: (a) a first metal layer; (b) a second metal layer; (c) and at least one insulator layer located between the first metal layer and the second metal layer, wherein at least one of the metal layers comprises an amorphous multi-component metallic film. In certain embodiments, the construct is a metal-insulator-metal (MIM) diode.
    Type: Application
    Filed: May 10, 2010
    Publication date: November 18, 2010
    Inventors: E. William Cowell, III, John F. Wager, Brady J. Gibbons, Douglas A. Keszler
  • Patent number: 7773365
    Abstract: One embodiment of a dielectric material may include a metal containing cation and a polyatomic anion.
    Type: Grant
    Filed: April 30, 2004
    Date of Patent: August 10, 2010
    Assignee: Hewlett-Packard Development Company, L.P.
    Inventors: Gregory S. Herman, Peter Mardilovich, Douglas Keszler, Jeremy Anderson