Patents by Inventor F. Daniel Gealy

F. Daniel Gealy has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 9219225
    Abstract: Multi-bit ferroelectric memory devices and methods of forming the same are provided. One example method of forming a multi-bit ferroelectric memory device can include forming a first ferroelectric material on a first side of a via, removing a material to expose a second side of the via, and forming second ferroelectric material on the second side of the via at a different thickness compared to the first side of the via.
    Type: Grant
    Filed: October 31, 2013
    Date of Patent: December 22, 2015
    Assignee: Micron Technology, Inc.
    Inventors: Kamal M Karda, F Daniel Gealy, D. V. Nirmal Ramaswamy, Chandra V Mouli
  • Publication number: 20150349249
    Abstract: Memory cells having a select device material located between a first electrode and a second electrode, a memory element located between the second electrode and a third electrode, and a number of conductive diffusion barrier materials located between a first portion of the memory element and a second portion of the memory element. Memory cells having a select device comprising a select device material located between a first electrode and a second electrode, a memory element located between the second electrode and a third electrode, and a number of conductive diffusion barrier materials located between a first portion of the select device and a second portion of the select device. Manufacturing methods are also described.
    Type: Application
    Filed: August 12, 2015
    Publication date: December 3, 2015
    Inventors: Andrea Gotti, F. Daniel Gealy, Davide Colombo
  • Patent number: 9184377
    Abstract: Resistance variable memory cell structures and methods are described herein. A number of embodiments include a first resistance variable memory cell comprising a number of resistance variable materials in a super-lattice structure and a second resistance variable memory cell comprising the number of resistance variable materials in a homogeneous structure.
    Type: Grant
    Filed: June 11, 2013
    Date of Patent: November 10, 2015
    Assignee: Micron Technology, Inc.
    Inventors: Sachin V. Joshi, F Daniel Gealy
  • Publication number: 20150310905
    Abstract: A field effect transistor construction includes a semiconductive channel core. A source/drain region is at opposite ends of the channel core. A gate is proximate a periphery of the channel core. A gate insulator is between the gate and the channel core. The gate insulator has local regions radially there-through that have different capacitance at different circumferential locations relative to the channel core periphery. Additional constructions, and methods, are disclosed.
    Type: Application
    Filed: April 24, 2014
    Publication date: October 29, 2015
    Applicant: Micron Technology, Inc.
    Inventors: Kamal M. Karda, Chandra Mouli, Durai Vishak Nirmal Ramaswamy, F. Daniel Gealy
  • Patent number: 9147803
    Abstract: Engineered substrates having epitaxial formation structures with enhanced shear strength and associated systems and methods are disclosed herein. In several embodiments, for example, an engineered substrate can be manufactured by forming a shear strength enhancement material at a front surface of a donor substrate and implanting ions a depth into the donor substrate through the shear strength enhancement material. The ion implantation can form a doped portion in the donor substrate that defines an epitaxial formation structure. The method can further include transferring the epitaxial formation structure from the donor substrate to a front surface of a handle substrate. The shear strength enhancement material can be positioned between the epitaxial formation structure and the front surface of the handle substrate and bridge defects in the front surface of the handle substrate.
    Type: Grant
    Filed: January 2, 2013
    Date of Patent: September 29, 2015
    Assignee: Micron Technology, Inc.
    Inventors: Belford T. Coursey, F. Daniel Gealy, George E. Beck
  • Patent number: 9130157
    Abstract: Memory cells having a select device material located between a first electrode and a second electrode, a memory element located between the second electrode and a third electrode, and a number of conductive diffusion barrier materials located between a first portion of the memory element and a second portion of the memory element. Memory cells having a select device comprising a select device material located between a first electrode and a second electrode, a memory element located between the second electrode and a third electrode, and a number of conductive diffusion barrier materials located between a first portion of the select device and a second portion of the select device. Manufacturing methods are also described.
    Type: Grant
    Filed: July 26, 2013
    Date of Patent: September 8, 2015
    Assignee: Micron Technology, Inc.
    Inventors: Andrea Gotti, F. Daniel Gealy, Davide Columbo
  • Publication number: 20150247236
    Abstract: Methods for depositing material onto microfeature workpieces in reaction chambers and systems for depositing materials onto microfeature workpieces are disclosed herein. In one embodiment, a method includes depositing molecules of a gas onto a microfeature workpiece in the reaction chamber and selectively irradiating a first portion of the molecules on the microfeature workpiece in the reaction chamber with a selected radiation without irradiating a second portion of the molecules on the workpiece with the selected radiation. The first portion of the molecules can be irradiated to activate the portion of the molecules or desorb the portion of the molecules from the workpiece. The first portion of the molecules can be selectively irradiated by impinging the first portion of the molecules with a laser beam or other energy source.
    Type: Application
    Filed: April 29, 2015
    Publication date: September 3, 2015
    Inventors: Ross S. Dando, F. Daniel Gealy
  • Publication number: 20150137254
    Abstract: Graded dielectric layers and methods of fabricating such dielectric layers provide dielectrics in a variety of electronic structures for use in a wide range of electronic devices and systems. In an embodiment, a dielectric layer is graded with respect to a doping profile across the dielectric layer. In an embodiment, a dielectric layer is graded with respect to a crystalline structure profile across the dielectric layer. In an embodiment, a dielectric layer is formed by atomic layer deposition incorporating sequencing techniques to generate a doped dielectric material.
    Type: Application
    Filed: January 28, 2015
    Publication date: May 21, 2015
    Inventors: F. Daniel Gealy, Vishwanath Bhat, Cancheepuram V. Srividya, M. Noel Rocklein
  • Publication number: 20150123066
    Abstract: A phase-change memory cell having a reduced electrode-chalcogenide interface resistance and a method for making the phase-change memory cell are disclosed: An interface layer is formed between an electrode layer and a chalcogenide layer that and provides a reduced resistance between the chalcogenide-based phase-change memory layer and the electrode layer. Exemplary embodiments provide that the interface layer comprises a tungsten carbide, a molybdenum carbide, a tungsten boride, or a molybdenum boride, or a combination thereof. In one exemplary embodiment, the interface layer comprises a thickness of between about 1 nm and about 10 nm.
    Type: Application
    Filed: November 7, 2013
    Publication date: May 7, 2015
    Inventors: F. Daniel Gealy, Andrea Gotti, Davide Colombo, Kuo-Wei Chang
  • Publication number: 20150117084
    Abstract: Multi-bit ferroelectric memory devices and methods of forming the same are provided. One example method of forming a multi-bit ferroelectric memory device can include forming a first ferroelectric material on a first side of a via, removing a material to expose a second side of the via, and forming second ferroelectric material on the second side of the via at a different thickness compared to the first side of the via.
    Type: Application
    Filed: October 31, 2013
    Publication date: April 30, 2015
    Applicant: Micron Technology, Inc.
    Inventors: Kamal M. Karda, F. Daniel Gealy, D.V. Nirmal Ramaswamy, Chandra V. Mouli
  • Patent number: 8987863
    Abstract: Electrical components for microelectronic devices and methods for forming electrical components. One particular embodiment of such a method comprises depositing an underlying layer onto a workpiece, and forming a conductive layer on the underlying layer. The method can continue by disposing a dielectric layer on the conductive layer. The underlying layer is a material that causes the dielectric layer to have a higher dielectric constant than without the underlying layer being present under the conductive layer. For example, the underlying layer can impart a structure or another property to the film stack that causes an otherwise amorphous dielectric layer to crystallize without having to undergo a separate high temperature annealing process after disposing the dielectric layer onto the conductive layer. Several examples of this method are expected to be very useful for forming dielectric layers with high dielectric constants because they avoid using a separate high temperature annealing process.
    Type: Grant
    Filed: May 28, 2013
    Date of Patent: March 24, 2015
    Assignee: Micron Technology, Inc.
    Inventors: Rishikesh Krishnan, F. Daniel Gealy, Vidya Srividya, Noel Rocklein
  • Publication number: 20150028284
    Abstract: Memory cells having a select device material located between a first electrode and a second electrode, a memory element located between the second electrode and a third electrode, and a number of conductive diffusion barrier materials located between a first portion of the memory element and a second portion of the memory element. Memory cells having a select device comprising a select device material located between a first electrode and a second electrode, a memory element located between the second electrode and a third electrode, and a number of conductive diffusion barrier materials located between a first portion of the select device and a second portion of the select device. Manufacturing methods are also described.
    Type: Application
    Filed: July 26, 2013
    Publication date: January 29, 2015
    Applicant: Micron Technology, Inc.
    Inventors: Andrea Gotti, F. Daniel Gealy, Davide Columbo
  • Publication number: 20140361238
    Abstract: Resistance variable memory cell structures and methods are described herein. A number of embodiments include a first resistance variable memory cell comprising a number of resistance variable materials in a super-lattice structure and a second resistance variable memory cell comprising the number of resistance variable materials in a homogeneous structure.
    Type: Application
    Filed: June 11, 2013
    Publication date: December 11, 2014
    Applicant: Micron Technology, Inc.
    Inventors: Sachin V. Joshi, F. Daniel Gealy
  • Publication number: 20140183443
    Abstract: Engineered substrates having epitaxial formation structures with enhanced shear strength and associated systems and methods are disclosed herein. In several embodiments, for example, an engineered substrate can be manufactured by forming a shear strength enhancement material at a front surface of a donor substrate and implanting ions a depth into the donor substrate through the shear strength enhancement material. The ion implantation can form a doped portion in the donor substrate that defines an epitaxial formation structure. The method can further include transferring the epitaxial formation structure from the donor substrate to a front surface of a handle substrate. The shear strength enhancement material can be positioned between the epitaxial formation structure and the front surface of the handle substrate and bridge defects in the front surface of the handle substrate.
    Type: Application
    Filed: January 2, 2013
    Publication date: July 3, 2014
    Applicant: MICRON TECHNOLOGY, INC.
    Inventors: Belford T. Coursey, F. Daniel Gealy, George E. Beck
  • Patent number: 8722480
    Abstract: Transistors are provided including first and second source/drain regions, a channel region and a gate stack having a first gate dielectric over a substrate, the first gate dielectric having a dielectric constant higher than a dielectric constant of silicon dioxide, and a metal material in contact with the first gate dielectric, the metal material being doped with an inert element. Integrated circuits including the transistors and methods of forming the transistors are also provided.
    Type: Grant
    Filed: January 28, 2013
    Date of Patent: May 13, 2014
    Assignee: Micron Technology, Inc.
    Inventors: F. Daniel Gealy, Suraj J. Mathew, Cancheepuram V. Srividya
  • Patent number: 8691656
    Abstract: The invention includes methods of electrically interconnecting different elevation conductive structures, methods of forming capacitors, methods of forming an interconnect between a substrate bit line contact and a bit line in DRAM, and methods of forming DRAM memory cells. In one implementation, a method of electrically interconnecting different elevation conductive structures includes forming a first conductive structure comprising a first electrically conductive surface at a first elevation of a substrate. A nanowhisker is grown from the first electrically conductive surface, and is provided to be electrically conductive. Electrically insulative material is provided about the nanowhisker. An electrically conductive material is deposited over the electrically insulative material in electrical contact with the nanowhisker at a second elevation which is elevationally outward of the first elevation, and the electrically conductive material is provided into a second conductive structure.
    Type: Grant
    Filed: September 7, 2011
    Date of Patent: April 8, 2014
    Assignee: Micron Technology, Inc.
    Inventors: Brett W. Busch, David K. Hwang, F. Daniel Gealy
  • Patent number: 8673706
    Abstract: The invention includes methods of forming layers comprising epitaxial silicon. In one implementation, an opening is formed within a first material received over a monocrystalline material. Opposing sidewalls of the opening are lined with a second material, with monocrystalline material being exposed at a base of the second material-lined opening. A silicon-comprising layer is epitaxially grown from the exposed monocrystalline material within the second material-lined opening. At least a portion of the second material lining is in situ removed. Other aspects and implementations are contemplated.
    Type: Grant
    Filed: September 1, 2004
    Date of Patent: March 18, 2014
    Assignee: Micron Technology, Inc.
    Inventors: Nirmal Ramaswamy, Gurtej S. Sandhu, Chris M. Carlson, F. Daniel Gealy
  • Publication number: 20130258550
    Abstract: Electrical components for microelectronic devices and methods for forming electrical components. One particular embodiment of such a method comprises depositing an underlying layer onto a workpiece, and forming a conductive layer on the underlying layer. The method can continue by disposing a dielectric layer on the conductive layer. The underlying layer is a material that causes the dielectric layer to have a higher dielectric constant than without the underlying layer being present under the conductive layer. For example, the underlying layer can impart a structure or another property to the film stack that causes an otherwise amorphous dielectric layer to crystallize without having to undergo a separate high temperature annealing process after disposing the dielectric layer onto the conductive layer. Several examples of this method are expected to be very useful for forming dielectric layers with high dielectric constants because they avoid using a separate high temperature annealing process.
    Type: Application
    Filed: May 28, 2013
    Publication date: October 3, 2013
    Inventors: Rishikesh Krishnan, F. Daniel Gealy, Vidya Srividya, Noel Rocklein
  • Patent number: 8497566
    Abstract: A method of forming a capacitor includes forming a conductive first capacitor electrode material comprising TiN over a substrate. TiN of the TiN-comprising material is oxidized effective to form conductive TiOxNy having resistivity no greater than 1 ohm·cm over the TiN-comprising material where x is greater than 0 and y is from 0 to 1.4. A capacitor dielectric is formed over the conductive TiOxNy. Conductive second capacitor electrode material is formed over the capacitor dielectric. Other aspects and implementations are contemplated, including capacitors independent of method of fabrication.
    Type: Grant
    Filed: December 28, 2011
    Date of Patent: July 30, 2013
    Assignee: Micron Technology, Inc.
    Inventors: Vishwanath Bhat, Noel Rocklein, F. Daniel Gealy
  • Patent number: 8481122
    Abstract: ALD-type methods which include providing two or more different precursors within a chamber at different and substantially non-overlapping times relative to one another to form a material, and thereafter exposing the material to one or more reactants to change a composition of the material. In particular aspects, the precursors utilized to form the material are metal-containing precursors, and the reactant utilized to change the composition of the material comprises oxygen, silicon, and/or nitrogen.
    Type: Grant
    Filed: July 12, 2006
    Date of Patent: July 9, 2013
    Assignee: Micron Technology, Inc.
    Inventors: Chris M. Carlson, Vishwanath Bhat, F. Daniel Gealy