Patents by Inventor Gerben Doornbos
Gerben Doornbos has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Publication number: 20240154002Abstract: A semiconductor device and a manufacturing method thereof are provided. The semiconductor device has a semiconductor layer and a gate structure located on the semiconductor layer. The semiconductor device has source and drain terminals disposed on the semiconductor layer, and a binary oxide layer located between the semiconductor layer and the source and drain terminals.Type: ApplicationFiled: January 15, 2024Publication date: May 9, 2024Applicant: Taiwan Semiconductor Manufacturing Company, Ltd.Inventors: Georgios Vellianitis, Gerben Doornbos, Marcus Johannes Henricus Van Dal
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Patent number: 11967647Abstract: A method of forming a semiconductor device includes forming source/drain contact openings extending through at least one dielectric layer to expose source/drain contact regions of source/drain structures. The method further includes forming conductive plugs in the source/drain contact openings. The method further includes depositing a light blocking layer over the conductive plugs and the at least one dielectric layer. The method further includes etching the light blocking layer to expose the conductive plugs. The method further includes directing a laser irradiation to the conductive plugs and the light blocking layer. The laser irradiation is configured to activate dopants in the source/drain contact regions.Type: GrantFiled: June 28, 2021Date of Patent: April 23, 2024Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.Inventors: Blandine Duriez, Marcus Johannes Henricus Van Dal, Martin Christopher Holland, Gerben Doornbos, Georgios Vellianitis
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Publication number: 20240130099Abstract: A static random access memory and a manufacturing method thereof are provided. The static random access memory includes a first complementary field effect transistor (CFET), a second CFET, a first pass fate transistor and a second pass gate transistor. The first CFET and the second CFET are disposed in a first tier. The first pass gate transistor is connected to the first CFET through a first path. The second pass gate transistor is connected to the second CFET through a second path. The first pass gate transistor and the second pass gate transistor are disposed in a second tier.Type: ApplicationFiled: January 20, 2023Publication date: April 18, 2024Applicant: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.Inventor: Gerben DOORNBOS
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Publication number: 20240121965Abstract: Ferroelectric field effect transistors are in a three-dimensional structure that includes vertical columns. Source/drain electrodes are provided by horizontal conductive layers that are interleaved with dielectric layers. Channels for the FeFETs in each vertical column are provided by a continuous semiconductor layer, e.g., a vertical strip of semiconductor. Another vertical strip may provide the ferroelectric layers for the FeFETs in the vertical column. The gate electrodes are provided by a control gate structure that connects the gate electrodes in parallel. The source/drain electrodes of multiple vertical columns may be connected in parallel. The source/drain electrodes of multiple tiers may also be connected in parallel. This structure provides high area density, adds an extra degree of freedom in circuit design, and lends itself to the use of oxide semiconductor channels.Type: ApplicationFiled: January 4, 2023Publication date: April 11, 2024Inventors: Georgios Vellianitis, Gerben Doornbos
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Patent number: 11955551Abstract: A semiconductor device includes a gate-all-around field effect transistor (GAA FET). The GAA FET includes channel regions made of a first semiconductor material disposed over a bottom fin layer made of a second semiconductor material, and a source/drain region made of a third semiconductor material. The first semiconductor material is Si1-xGex, where 0.9?x?1.0, and the second semiconductor material is Si1-yGey, where y<x and 0.3?y?0.7.Type: GrantFiled: July 1, 2022Date of Patent: April 9, 2024Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.Inventors: Georgios Vellianitis, Gerben Doornbos, Marcus Van Dal
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Patent number: 11956940Abstract: A memory cell comprises a nanowire structure comprising a channel region and source/drain regions of a transistor. The nanowire structure also comprises as first conductor of a capacitive device as a vertical extension of the nanowire structure.Type: GrantFiled: January 29, 2023Date of Patent: April 9, 2024Assignee: Taiwan Semiconductor Manufacturing Company LimitedInventors: Gerben Doornbos, Marcus Johannes Henricus Van Dal
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Patent number: 11949020Abstract: A transistor includes a first gate electrode, a first capping layer, a crystalline semiconductor oxide layer, a second capping layer, a first gate dielectric layer, and source/drain contacts. The first capping layer, the crystalline semiconductor oxide layer, and the second capping layer are sequentially disposed over the first gate electrode. Sidewalls of the second capping layer are aligned with sidewalls of the crystalline semiconductor oxide layer. The first gate dielectric layer is located between the first gate electrode and the first capping layer. The source/drain contacts are disposed on the second capping layer. The crystalline semiconductor oxide layer and the source/drain contacts are located on two opposite sides of the second capping layer.Type: GrantFiled: December 9, 2022Date of Patent: April 2, 2024Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.Inventors: Marcus Johannes Henricus Van Dal, Blandine Duriez, Georgios Vellianitis, Gerben Doornbos, Mauricio Manfrini
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Publication number: 20240105725Abstract: An integrated circuit includes a complimentary field effect transistor (CFET). The CFET includes a first transistor and a second transistor stacked vertically. A conductive via extends vertically from a first source/drain region of the first transistor past the second transistor. The second transistor includes an asymmetric second source/drain region. The asymmetry of the second source/drain region helps ensure that the second source/drain region does not contact the conductive via.Type: ApplicationFiled: March 30, 2023Publication date: March 28, 2024Inventors: Gerben Doornbos, Marcus Johannes Henricus Van Dal, Szuya Liao, Chung-Te Lin
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Patent number: 11942147Abstract: A memory device is provided, which may include a first electrode, a memory layer stack including at least one semiconducting metal oxide layer and at least one hydrogen-containing metal layer, and a second electrode. A semiconductor device is provided, which may include a semiconducting metal oxide layer containing a source region, a drain region, and a channel region, a hydrogen-containing metal layer located on a surface of the channel region, and a gate electrode located on the hydrogen-containing metal layer. Each hydrogen-containing metal layer may include at least one metal selected from platinum, iridium, osmium, and ruthenium at an atomic percentage that is at least 90%, and may include hydrogen atoms at an atomic percentage in a range from 0.001% to 10%. Hydrogen atoms may be reversibly impregnated into a respective semiconducting metal oxide layer to change resistivity and to encode a memory bit.Type: GrantFiled: July 25, 2022Date of Patent: March 26, 2024Assignee: Taiwan Semiconductor Manufacturing Company LimitedInventors: Marcus Johannes Henricus Van Dal, Gerben Doornbos, Georgios Vellianitis, Blandine Duriez, Mauricio Manfrini
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Publication number: 20240090351Abstract: A semiconductor structure includes a substrate; a resistance variable layer disposed over the substrate; a gate structure disposed over the resistance variable layer; a dielectric layer disposed over the resistance variable layer and surrounding the gate structure; a first contact plug disposed over the resistance variable layer and extending through the dielectric layer; and a second contact plug disposed over the resistance variable layer and opposite to the first contact plug and extending through the dielectric layer, wherein the resistance variable layer is semiconductive and ferroelectric. A method of manufacturing a semiconductor structure is also disclosed.Type: ApplicationFiled: November 24, 2023Publication date: March 14, 2024Inventors: GEORGIOS VELLIANITIS, MARCUS JOHANNES HENRICUS VAN DAL, GERBEN DOORNBOS
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Publication number: 20240079495Abstract: A memory device includes a gate structure, a ferroelectric structure over and electrically connected with the gate structure, a channel structure over the ferroelectric structure, and a plurality of contact structures over the channel structure. The gate structure includes a first gate as a back gate, a second gate as a floating gate, and a tunneling layer sandwiched there-between. The plurality of contact structures is laterally spaced apart with each other by a predetermined distance. In some embodiments, the sidewalls of the first gate are aligned with sidewalls of the plurality of contact structures.Type: ApplicationFiled: January 10, 2023Publication date: March 7, 2024Applicant: Taiwan Semiconductor Manufacturing Company, Ltd.Inventors: Marcus Johannes Henricus Van Dal, Georgios Vellianitis, Gerben DOORNBOS, Oreste Madia
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Publication number: 20240072169Abstract: A transistor includes a first gate electrode, a ferroelectric layer, a channel layer, a second gate electrode, and a hole supply layer. The ferroelectric layer is disposed over the first gate electrode. The channel layer is disposed on the ferroelectric layer. The second gate electrode is disposed over the channel layer. The hole supply layer is located between the second gate electrode and the channel layer. An electron trap density of the hole supply layer is higher than an electron trap density of the channel layer.Type: ApplicationFiled: August 26, 2022Publication date: February 29, 2024Applicant: Taiwan Semiconductor Manufacturing Company, Ltd.Inventors: Marcus Johannes Henricus Van Dal, Gerben DOORNBOS
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Publication number: 20240074315Abstract: A semiconductor structure includes a substrate, a device, a conductor, a backside interconnect, and a thermoelectric generator. The substrate has a front surface and a rear surface opposite to the front surface. The device is disposed on the front surface of the substrate. The conductor is disposed at or near the front surface of the substrate and electrically coupled to the device. The backside interconnect is disposed on the rear surface of the substrate and electrically coupled to the device. The thermoelectric generator is disposed in the substrate and electrically coupled to the device, and includes a first-type through via and a second-type through via. The first-type through via penetrates from the rear surface of the substrate to the conductor, and is connected to a first conductive feature of the backside interconnect and the conductor.Type: ApplicationFiled: August 31, 2022Publication date: February 29, 2024Applicant: Taiwan Semiconductor Manufacturing Company, Ltd.Inventors: Oreste Madia, Gerben DOORNBOS
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Patent number: 11916113Abstract: A semiconductor device and a manufacturing method thereof are provided. The semiconductor device has a semiconductor layer and a gate structure located on the semiconductor layer. The semiconductor device has source and drain terminals disposed on the semiconductor layer, and a binary oxide layer located between the semiconductor layer and the source and drain terminals.Type: GrantFiled: July 31, 2022Date of Patent: February 27, 2024Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.Inventors: Georgios Vellianitis, Gerben Doornbos, Marcus Johannes Henricus Van Dal
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Publication number: 20240057341Abstract: A ferroelectric device and a wave computing device are provided. The ferroelectric device includes a first electrode, a second electrode, a ferroelectric layer and a wave guide. The ferroelectric layer is disposed between the first and second electrodes, and configured to transduce an electrical wave signal to a varying mechanical stress by piezoelectricity, or vice versa. A first polarization state or a second polarization state opposite to the first polarization state is programmed in the ferroelectric layer. The wave guide is in contact with the ferroelectric layer, and configured to transmit a wave signal resulted from or resulting the varying mechanical stress. The wave signal is in phase with the electrical wave signal when the ferroelectric layer is programmed with the first polarization state. The wave signal is out of phase with the electrical wave signal when the ferroelectric layer is programmed with the second polarization state.Type: ApplicationFiled: August 15, 2022Publication date: February 15, 2024Applicant: Taiwan Semiconductor Manufacturing Company, Ltd.Inventors: Gerben DOORNBOS, Georgios Vellianitis
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Publication number: 20240038893Abstract: Semiconductor structures and methods for manufacturing the same are provided. The method for manufacturing the semiconductor structure includes forming a bottom electrode layer over a substrate and forming a gate dielectric layer over the bottom electrode layer. The method for manufacturing the semiconductor structure also includes forming an active layer over the gate dielectric layer and forming an indium-containing feature vertically overlapping the bottom electrode layer. The method for manufacturing the semiconductor structure also includes forming a source/drain contact landing on the indium-containing feature.Type: ApplicationFiled: September 28, 2023Publication date: February 1, 2024Applicant: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.Inventors: Marcus Johannes Henricus VAN DAL, Gerben DOORNBOS, Georgios VELLIANITIS, Mauricio MANFRINI
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Publication number: 20240021699Abstract: Semiconductor devices and methods of forming the same are provided. A semiconductor device according to the present disclosure includes a first gate electrode, a ferroelectric insulating layer over the first gate electrode, a semiconductor member over the ferroelectric insulating layer, a gate dielectric layer over the semiconductor member, and a second gate electrode over the gate dielectric layer.Type: ApplicationFiled: July 26, 2023Publication date: January 18, 2024Inventors: Marcus Johannes Henricus Van Dal, Gerben Doornbos, Georgios Vellianitis
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Patent number: 11869975Abstract: A transistor includes a gate electrode, a gate dielectric located over the gate electrode, a channel layer that includes an oxide semiconductor material and that is located over the gate dielectric, a buffer located to cover at least a portion of the channel layer, and source/drain contacts disposed on the buffer. The buffer includes a material that receives hydrogen. A method for manufacturing the transistor is also provided.Type: GrantFiled: April 19, 2021Date of Patent: January 9, 2024Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.Inventors: Georgios Vellianitis, Marcus Johannes Henricus Van Dal, Gerben Doornbos
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Patent number: 11856874Abstract: A semiconductor structure includes a substrate; a resistance variable layer disposed over the substrate; a gate structure disposed over the resistance variable layer; a dielectric layer disposed over the resistance variable layer and surrounding the gate structure; a first contact plug disposed over the resistance variable layer and extending through the dielectric layer; and a second contact plug disposed over the resistance variable layer and opposite to the first contact plug and extending through the dielectric layer, wherein the resistance variable layer is semiconductive and ferroelectric.Type: GrantFiled: July 9, 2020Date of Patent: December 26, 2023Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY LTD.Inventors: Georgios Vellianitis, Marcus Johannes Henricus Van Dal, Gerben Doornbos
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Publication number: 20230411163Abstract: A method includes forming first sacrificial layers and first channel layers alternately stacked over a substrate; forming second channel layers and second sacrificial layers alternately stacked over the first sacrificial layers and the first channel layers, in which the second channel layers are made of a first semiconductive oxide; performing an etching process to remove portions of the first sacrificial layers and the second sacrificial layers; forming a gate structure in contact with the first channel layers and the second channel layers; forming first source/drain contacts on opposite sides of the gate structure and electrically connected to the first channel layers; and forming second source/drain contacts on the opposite sides of the gate structure and electrically connected to the second channel layers.Type: ApplicationFiled: June 16, 2022Publication date: December 21, 2023Applicant: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.Inventors: Georgios VELLIANITIS, Oreste MADIA, Gerben DOORNBOS, Marcus Johannes Henricus VAN DAL