Abstract: The inventive concept provides a substrate treating apparatus. The substrate treating apparatus includes a chamber having a treating space therein; a supply line having a first open/close valve installed thereon and configured to supply a treating fluid to the treating space; a heater installed on the supply line and configured to heat the treating fluid; an exhaust line having a second open/close valve installed thereon and configured to exhaust the treating space; and, a controller configured to control the first open/close value and the second open/close valve such that the treating fluid heated is supplied to and exhausted from the treating space before a treating process is performed on a substrate in the treating space.

Abstract: A battery pack configured to be mounted in a vehicle according to an embodiment of the present disclosure includes a plurality of battery cells; a base plate supporting the plurality of battery cells; and a cross beam unit positioned over a predetermined length along a widthwise direction of the base plate, and interposed between the plurality of battery cells in a lengthwise direction of the base plate to attach and fix the facing battery cells in the lengthwise direction.

Abstract: Discussed is a battery pack, which can include a plurality of battery cells arranged along a longitudinal direction and a width direction of the battery pack, and a bus bar assembly disposed at one side of the plurality of battery cells and configured to electrically connect the plurality of battery cells. The bus bar assembly includes a connection bus bar connected in series and in parallel to adjacent battery cells of the plurality of battery cells in the longitudinal direction and the width direction, and a fusing portion formed in the connection bus bar and configured to block an electrical connection of a battery cell in which an abnormal situation occurs in both serial and parallel connection directions from among the plurality of battery cells.

Abstract: A battery pack according to an embodiment of the present disclosure includes a battery cell assembly including a plurality of battery cells; a busbar assembly on the battery cell assembly; a heat sink spaced a predetermined distance apart from the busbar assembly and supporting a bottom of plurality of battery cells; and a thermally conductive member filled in a space between the plurality of battery cells on the heat sink.

Abstract: Discussed is a battery pack that can include a battery cell assembly including a plurality of battery cells, a busbar assembly on one side of the battery cell assembly, a cooling unit between the plurality of battery cells, and a cell accommodation unit configured to partition the plurality of battery cells together with the cooling unit.

Abstract: A battery pack according to an embodiment of the present disclosure includes at least one battery cell including a vent portion configured to force gas out; and a pack case in which the at least one battery cell is accommodated such that the vent portion faces a lower side of the battery pack. The vent portion is exposed from the battery pack.

Abstract: An apparatus and method for treating a substrate are provided. The apparatus includes at least one first process chamber configured to supply a developer onto the substrate; at least one second process chamber configured to treat the substrate using a supercritical fluid; a transfer chamber configured to transfer the substrate from the at least one first process chamber to the at least one second process chamber, while the developer supplied in the at least one first process chamber remains on the substrate; and a temperature and humidity control system configured to manage temperature and humidity of the transfer chamber by supplying a first gas of constant temperature and humidity into the transfer chamber.

Abstract: A battery pack according to an embodiment of the present disclosure includes a battery cell assembly including a plurality of battery cells; a busbar assembly on the battery cell assembly and electrically connected to the plurality of battery cells; a cooling unit below the busbar assembly and interposed between the plurality of battery cells along a lengthwise direction of the battery cell assembly; and a thermally conductive member disposed in a space between the cooling unit and the plurality of battery cells.

Abstract: A battery module may include a plurality of battery cells; a module case having an inner space therein and accommodating the plurality of battery cells in the inner space; a polymer member filled in at least a part of the inner space of the module case accommodating the plurality of battery cells; and a filler at least partially inside the polymer member and interposed in at least one space of a space between at least one of the plurality of battery cells and the module case and a space between the plurality of battery cells.

Abstract: A battery pack according to an embodiment of the present disclosure includes a plurality of battery cells, and a pack case in which the plurality of battery cells are accommodated, wherein the pack case includes a potting resin which covers all sides of the plurality of battery cells and is filled to a predetermined height between the plurality of battery cells.

Abstract: A method of manufacturing a battery module may prevent chain ignition. The method may include preparing a module case having a plurality of receiving portions formed therein, each of the receiving portions having a space of a predetermined size; disposing a respective battery cell among a plurality battery cells in each of the receiving portions; and heating the module case with the battery cells to a predetermined temperature to fix the battery cells in the respective receiving portions of the module case. The module case comprises a lower plate, a plurality of side plates, and a plurality of partition walls configured to form the receiving portions, and each of the partition walls comprises a lower partition wall extending from the lower plate by a predetermined height and an upper partition wall extending from the lower partition wall by a predetermined height.

Abstract: A substrate processing apparatus and a substrate processing method are provided, in which a flow rate of CO2 injected into a supercritical drying vessel is controlled through multi-level pressure control. The substrate processing method includes disposing a substrate coated with a chemical liquid in a process chamber, that includes a space in which the substrate is processed; drying the substrate by using a supercritical fluid; and taking the substrate out of the process chamber when the substrate is dried.

Abstract: Discussed is a battery pack, including a plurality of battery cells; a bus bar assembly having a first side and a second side, the second side of the bus bar assembly provided to a first side of the plurality of battery cells and electrically connected to the plurality of battery cells; a cooling unit disposed at the second side of the bus bar assembly and arranged between the plurality of battery cells along a longitudinal direction of the battery pack; a side structure unit configured to accommodate the cooling unit and the plurality of battery cells and configured to form a first section of an outer surface of the battery pack; and a filling member configured to form a second section of the outer surface of the battery pack together with the first section of the outer surface of the battery pack formed by the side structure unit, the filling member further being filled in a space between the cooling unit and the plurality of battery cells.

Abstract: The present disclosure relates to a flow resistance generating unit that generates a flow resistance in a pipe to solve a flow imbalance problem due to a bent pipe and stabilizes an internal airflow, and a substrate treating apparatus including the same. The substrate treating apparatus comprises a fluid supply unit for supplying fluid for treating a substrate and including an upper fluid supply module for supplying the fluid to an upper portion of the substrate, a lower fluid supply module for supplying the fluid to a lower portion of the substrate, and a supply pipe connected to at least one of the upper fluid supply module and the lower fluid supply module, and a flow resistance generating unit installed in the supply pipe and for generating a flow resistance with respect to the fluid passing through the supply pipe.

Abstract: Discussed is a battery pack including a plurality of battery cells; a bus bar assembly having a first side and a second side, the second side of the bus bar assembly provided to a first side of the plurality of battery cells and electrically connected to the plurality of battery cells, the bus bar electrode assembly including a single-layered sub bus bar having a positive electrode connection portion and a negative electrode connection portion; a cooling unit disposed at the second side of the bus bar assembly and arranged between the plurality of battery cells along a longitudinal direction of the battery pack; and a side structure unit configured to accommodate the cooling unit and the plurality of battery cells.

Abstract: Disclosed is a battery pack including a plurality of battery cells; a bus bar assembly having a first side and a second side, the second side of the bus bar assembly provided to a first side of the plurality of battery cells and electrically connected to the plurality of battery cells; a cooling unit disposed at the second side of the bus bar assembly and arranged between the plurality of battery cells along a longitudinal direction of the battery pack; and a side structure unit configured to accommodate the cooling unit and the plurality of battery cells, wherein opposite ends of the cooling unit are fixed to the side structure unit.

Abstract: Disclosed is a battery pack including plurality of battery cells; a bus bar assembly having a first side and a second side, the second side of the bus bar assembly provided to a first side of the plurality of battery cells and electrically connected to the plurality of battery cells; a cooling unit disposed at the second side of the bus bar assembly and arranged between the plurality of battery cells along a longitudinal direction of the battery pack; and a side structure unit configured to accommodate the cooling unit and the plurality of battery cells and configured to form a first section of an outer surface of the battery pack.

Abstract: Discussed is a battery pack including a plurality of battery cells; a bus bar assembly having a first side and a second side, the second side of the bus bar assembly provided to a first side of the plurality of battery cells and electrically connected to the plurality of battery cells; a cooling unit disposed at a second side of the bus bar assembly and arranged between the plurality of battery cells along a longitudinal direction of the battery pack; and side structure units configured to accommodate the cooling unit and the plurality of battery cells, wherein one side structure unit, a first set of the plurality of battery cells, the cooling unit, a second set of the plurality of battery cells and another side structure unit are coupled to be sequentially arranged in the named order along a width direction of the battery pack.

Abstract: The present disclosure provides a substrate treating apparatus, in which stability is secured by performing a process under a lower pressure condition, and a substrate treating method using the same. The substrate treating apparatus comprises a chamber including a housing and a treating region, wherein a substrate on which a rinse liquid remains is loaded into the chamber, a supply port installed in the housing and for supplying a first drying gas and a second drying gas to the treating region, a first supply line connected to the supply port, and through which the first drying gas is moved, and a second supply line connected to the supply port, and through which the second drying gas is moved, wherein the first drying gas is a gas below a first temperature, and the second drying gas is a gas equal to or above the first temperature, wherein the second drying gas dries the rinse liquid remaining on the substrate.

Abstract: A substrate processing apparatus includes a chamber including an upper chamber and a lower chamber coupled to each other to provide a space for processing a substrate, a substrate support configured to support the substrate within the chamber, an upper supply port provided in the upper chamber and configured to supply a supercritical fluid on an upper surface of the substrate within the chamber, a recess provided in a lower surface of the upper chamber, the recess including a horizontal extension portion extending in a direction parallel with the upper surface of the substrate in a radial direction from an outlet of the upper supply port and an inclined extension portion extending obliquely at an angle from the horizontal extension portion, and a baffle member disposed within the recess between the upper supply port and the substrate.