Abstract: An electrostatic capacitance sensor 1 includes a semiconductor substrate 4. A first fixing plate 2 is joined to a one-side surface 4a of the semiconductor substrate 4, and a second fixing plate 3 is joined to other-side surface 4b of the semiconductor substrate 4, whereby a space portion S is formed. Then, static electricity suppressing means 70 for suppressing static electricity from being generated in the space portion S is provided in the electrostatic capacitance sensor 1.

Abstract: An acceleration sensor includes a weight portion having a recess section and a solid section, beam portions, a movable electrode provided on the opposite surface of the weight portion from an open surface of the recess section to extend over the recess section and the solid section, a first fixed electrode arranged at the opposite side of the movable electrode from the recess section, and a second fixed electrode arranged at the opposite side of the movable electrode from the solid section. The acceleration sensor detects acceleration using a change in capacitance between the movable electrode and the fixed electrodes caused by rotation of the weight portion. The beam portions are shifted toward the recess section such that an angle between a perpendicular line extending from a gravity center position of the weight portion to the rotation axis and a surface of the movable electrode becomes equal to 45 degrees.

Abstract: An acceleration sensor includes a weight portion having a recess section and a solid section, beam portions, a movable electrode provided on the opposite surface of the weight portion from an open surface of the recess section to extend over the recess section and the solid section, a first fixed electrode arranged at the opposite side of the movable electrode from the recess section, and a second fixed electrode arranged at the opposite side of the movable electrode from the solid section. The acceleration sensor detects acceleration using a change in capacitance between the movable electrode and the fixed electrodes caused by rotation of the weight portion. The beam portions are shifted toward the recess section such that an angle between a perpendicular line extending from a gravity center position of the weight portion to the rotation axis and a surface of the movable electrode becomes equal to 45 degrees.

Abstract: An acceleration sensor includes a weight portion having a recess section and a solid section, beam portions, a movable electrode provided on the opposite surface of the weight portion from an open surface of the recess section to extend over the recess section and the solid section, a first fixed electrode arranged at the opposite side of the movable electrode from the recess section, and a second fixed electrode arranged at the opposite side of the movable electrode from the solid section. The acceleration sensor detects acceleration using a change in capacitance between the movable electrode and the fixed electrodes caused by rotation of the weight portion. The beam portions are shifted toward the recess section such that an angle between a perpendicular line extending from a gravity center position of the weight portion to the rotation axis and a surface of the movable electrode becomes equal to 45 degrees.

Abstract: A MEMS device includes a movable section, a frame, a beam, and an electrode substrate. The frame surrounds a surrounding of the movable section. The beam extends from at least a part of the frame, and is connected to the movable section. The electrode substrate includes a fixed electrode, an extended electrode, and a substrate section. The fixed electrode is formed on the electrode substrate in at least a part of a region facing a swing section. The extended electrode is connected to the fixed electrode, and is formed on the electrode substrate in at least a part of a region facing the shaft.

Abstract: An acceleration sensor includes: an X detection portion that detects acceleration in an X direction by swinging a first movable electrode about a pair of beam portions; a Y detection portion that detects acceleration in a Y direction perpendicular to the X direction by swinging a second movable electrode about a pair of beam portions; and a Z detection portion that detects acceleration in a Z direction by moving a third movable electrode, which is held by two pairs of beam portions in parallel in the vertical direction, characterized in that the X detection portion, the Y detection portion and the Z detection portion are arranged in one chip.

Abstract: An acceleration sensor includes a weight portion having a recess section and a solid section, beam portions, a movable electrode provided on the opposite surface of the weight portion from an open surface of the recess section to extend over the recess section and the solid section, a first fixed electrode arranged at the opposite side of the movable electrode from the recess section, and a second fixed electrode arranged at the opposite side of the movable electrode from the solid section. The acceleration sensor detects acceleration using a change in capacitance between the movable electrode and the fixed electrodes caused by rotation of the weight portion. The beam portions are shifted toward the recess section such that an angle between a perpendicular line extending from a gravity center position of the weight portion to the rotation axis and a surface of the movable electrode becomes equal to 45 degrees.

Abstract: The present invention provides an overlap-welded member in which an overlapped portion including plural steel sheet members is joined at a spot-welded portion, in which at least one of the plural steel sheet members contains martensite, and the spot-welded portion includes: a nugget formed through spot welding; a heat-affected zone formed in the vicinity of the nugget; the softest zone having the lowest Vickers hardness in the heat-affected zone; and a tempered area formed between a central portion of the nugget and the softest zone and made out of tempered martensite having Vickers hardness of not more than 120% in the case where Vickers hardness of the softest zone is 100%.

Abstract: An acceleration sensor includes: a rectangular moving electrode; a pair of beams which connect to centers of two opposite sides of the moving electrode, and support the moving electrode freely swingably; and first and second fixed electrodes which are provided on one side and other side of a boundary line, respectively, and are arranged to be opposed to a front surface of the moving electrode at a predetermined interval. A straight line that connects the pair of beams to each other is taken as the boundary line. Then, on a back surface of the moving electrode, first and second recessed portions are formed on one side of the boundary line and the other side thereof, respectively.

Abstract: In a moving structure, stability of swing motion of a moving plate is increased by enhancing tensional rigidity or flexural rigidity while restraining torsion rigidity of the hinge units. The hinge units of ladder shape with honeycombed portions are formed by twin supporting rods and crosspieces bridged between the twin supporting rods so as to support the moving plate rotatably. The tensional rigidity or the flexural rigidity is increased while restraining the torsion rigidity of the hinge units by the honeycombed portions of the hinge units.

Abstract: An electrostatic capacitance sensor 1 includes a semiconductor substrate 4. A first fixing plate 2 is joined to a one-side surface 4a of the semiconductor substrate 4, and a second fixing plate 3 is joined to other-side surface 4b of the semiconductor substrate 4, whereby a space portion S is formed. Then, static electricity suppressing means 70 for suppressing static electricity from being generated in the space portion S is provided in the electrostatic capacitance sensor 1.

Abstract: An image display apparatus includes an LD for emitting and modulating visible light, an optical scanning device for two-dimensionally scanning the light from the Ld on a screen in synchronism with the LD, an imaging device for picturizing an image of the image displayed on the screen, and an image processor for judging presence or absence of the pointing element such as a finger or fingers which is/are used to point out an optional position on the image based on temporal change of the image picturized by the imaging device. Even when the finger or fingers of a person is/are used as the pointing element, it is possible to judge the presence or absence of the pointing out of the image by the finger or fingers. Thereby, a number of components can be reduced.

Abstract: Provided is an oscillating device, which can adjust the oscillation angle and the phase of a movable plate easily with a simple constitution. A light scanning device acting as the oscillating device comprises a mirror element for oscillating the movable plate having a mirror film, a control circuit having a duty ratio adjusting unit and a function to change the duty ratio of the pulse voltage, so that it applies the pulse voltage thereby to drive a vertical comb of the mirror element, and an oscillation detecting unit for detecting the oscillations of the movable plate. On the bases of the movable plate oscillations detected by the oscillation detecting unit, the control circuit controls the duty ratio adjusting unit thereby to change the duty ratio of the pulse voltage.

Abstract: An acceleration sensor includes a weight portion having a recess section and a solid section, beam portions, a movable electrode provided on the opposite surface of the weight portion from an open surface of the recess section to extend over the recess section and the solid section, a first fixed electrode arranged at the opposite side of the movable electrode from the recess section, and a second fixed electrode arranged at the opposite side of the movable electrode from the solid section. The acceleration sensor detects acceleration using a change in capacitance between the movable electrode and the fixed electrodes caused by rotation of the weight portion. The beam portions are shifted toward the recess section such that an angle between a perpendicular line extending from a gravity center position of the weight portion to the rotation axis and a surface of the movable electrode becomes equal to 45 degrees.

Abstract: Arrangement of an internal component (not shown) arranged in the vicinity of the top side is different from that of the hinge side of an image element protective screen (2). An actuator (5) is fixed to the top side of the image element protective screen (2) and an actuator (4) is fixed to the hinge side of the image element protective screen (2). Since Arrangement of the internal component in the vicinity of the actuator is different, different sound pressure frequency characteristics or the like are experienced when each actuator is driven independently. When the actuators (4, 5) are driven simultaneously, sound pressure frequency characteristics and vibration frequency characteristics can be flattened. Isolation between the vibration speed of a vibrator near one actuator and the vibration speed of a vibrator in the region near the other actuator that are produced by respective actuators is set at 10 dB or above.

Abstract: A biological information detection sensor is provided by which it is possible to integrate multiple detection means, and it is possible to measure the biological information that is necessary in accordance with the usage state of the sensor used by the user while avoiding redundant information.

Abstract: In a semiconductor mechanical structure, hinges may not be broken even when a mechanical shock is applied from outside, and thus, crashworthy is enhanced. A light scanning mirror includes a moving plate, a twin hinges constituting an axis of swing motion of the moving plate wherein an end of each hinge is connected to both ends of the moving plate, a stationary frame which is disposed to surround peripheries of the moving plate and supports another end of each of the twin hinges, and stoppers formed on the stationary frame. When the moving plate displaces in a lateral direction, the stopper contacts a side end portion of a recess of the moving plate, so that the displacement of the moving plate in the lateral direction is restrained. Thereby, the breakage of the hinges is prevented even when the mechanical shock is applied from outside.

Abstract: In a moving structure, stability of swing motion of a moving plate is increased by enhancing tensional rigidity or flexural rigidity while restraining torsion rigidity of the hinge units. The hinge units of ladder shape with honeycombed portions are formed by twin supporting rods and crosspieces bridged between the twin supporting rods so as to support the moving plate rotatably. The tensional rigidity or the flexural rigidity is increased while restraining the torsion rigidity of the hinge units by the honeycombed portions of the hinge units.

Abstract: An acceleration sensor includes: a rectangular moving electrode; a pair of beams which connect to centers of two opposite sides of the moving electrode, and support the moving electrode freely swingably; and first and second fixed electrodes which are provided on one side and other side of a boundary line, respectively, and are arranged to be opposed to a front surface of the moving electrode at a predetermined interval. A straight line that connects the pair of beams to each other is taken as the boundary line. Then, on a back surface of the moving electrode, first and second recessed portions are formed on one side of the boundary line and the other side thereof, respectively.

Abstract: Provided is an oscillating device, which can adjust the oscillation angle and the phase of a movable plate easily with a simple constitution. A light scanning device acting as the oscillating device comprises a mirror element for oscillating the movable plate having a mirror film, a control circuit having a duty ratio adjusting unit and a function to change the duty ratio of the pulse voltage, so that it applies the pulse voltage thereby to drive a vertical comb of the mirror element, and an oscillation detecting unit for detecting the oscillations of the movable plate. On the bases of the movable plate oscillations detected by the oscillation detecting unit, the control circuit controls the duty ratio adjusting unit thereby to change the duty ratio of the pulse voltage.