Patents by Inventor Hisashi Matsumoto

Hisashi Matsumoto has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 8811463
    Abstract: A phase adjuster 2a receives a trigger clock synchronized with a data signal to be measured as input, and controls the phase of the trigger clock such that the trigger period of samples of the data signal to be measured becomes one sample per bit. An adjustable frequency divider 2b has a frequency division ratio which is set such that a trigger pulse is generated at the fixed timing of the waveform pattern of the data signal to be measured. An interleaving unit 4d uses a discrete value which is in prime relation to the measured pattern length of the data signal to be measured, and acquires data for the number of samples corresponding to the measured pattern length from a sampler 3 by the trigger pulse from the adjustable frequency divider 2b.
    Type: Grant
    Filed: January 29, 2013
    Date of Patent: August 19, 2014
    Assignee: Anritsu Corporation
    Inventors: Takashi Murakami, Hisashi Matsumoto
  • Publication number: 20140175067
    Abstract: A method and laser processing system (2) addresses a substrate (102) with three different sets of laser processing parameters to achieve different surface effects in the substrate (102). A first set of laser parameters is employed to form a recess (106) in the substrate. A second set of laser parameters is employed to polish a surface (108) of the recess (106). A third set of laser parameters is employed to modify a polished surface (108) of the recess (106) to have optical characteristics that satisfy conditions for a desirable visual appearance.
    Type: Application
    Filed: December 19, 2013
    Publication date: June 26, 2014
    Applicant: ELECTRO SCIENTIFIC INDUSTRIES, INC.
    Inventors: Robert Reichenbach, Jeffrey Howerton, Hisashi Matsumoto, Fang Shan, Michael Shane Noel
  • Patent number: 8710402
    Abstract: A method of and an apparatus for drilling blind vias with selectable tapers in multilayer electronic circuits permit forming electrical connections between layers while maintaining quality and throughput. The method relies on recognizing that the top diameter of the via and the bottom diameter of the via, which define the taper, are functions of two separate sets of equations. Simultaneous solution of these equations yields a solution space that enables optimization of throughput while maintaining selected taper and quality using temporally unmodified Q-switched CO2 laser pulses with identical pulse parameters. Real time pulse tailoring is not required; therefore, system complexity and cost may be reduced.
    Type: Grant
    Filed: June 1, 2007
    Date of Patent: April 29, 2014
    Assignee: Electro Scientific Industries, Inc.
    Inventors: Weisheng Lei, Hisashi Matsumoto, Gregg Hardy, Yunlong Sun
  • Publication number: 20140110384
    Abstract: The invention is a method and an apparatus for marking an article and the article thus marked. It includes providing the article. Generating a plurality of groups of laser pulses. At least one of the plurality of groups is generated by modulating a beam of laser pulses to form a plurality of beamlets. Each, of the plurality of beamlets, include at least one laser pulse. It also includes directing the plurality of groups of laser pulses onto the article such that laser pulses within the at least one of the plurality of groups impinge upon the article at spot areas that do not overlap one another, wherein laser pulses within the plurality of groups are configured to produce a visible mark on the article.
    Type: Application
    Filed: October 21, 2013
    Publication date: April 24, 2014
    Applicant: ELECTRO SCIENTIFIC INDUSTRIES, INC.
    Inventors: Jan Kleinert, Robert Reichenbach, Mark Unrath, Hisashi Matsumoto, Jefferey Howerton, Mehmet E. Alpay, Andy MOORE
  • Publication number: 20140084040
    Abstract: The invention is an apparatus, for performing the method, and the method including the steps of providing a workpiece, contacting a portion of an exterior surface of the workpiece to an acoustic couplant such that an interface between the acoustic couplant and the portion of the exterior surface is at least substantially continuous across the portion of the exterior surface, and propagating a crack through the workpiece. A portion of the acoustic couplant at the interface has acoustic impedance relative to the acoustic energy that is greater than 400 kg·m?2·s?1.
    Type: Application
    Filed: September 20, 2013
    Publication date: March 27, 2014
    Applicant: ELECTRO SCIENTIFIC INDUSTRIES, INC.
    Inventors: Haibin Zhang, Glenn Simenson, Qian XU, Hisashi Matsumoto
  • Patent number: 8648277
    Abstract: Laser direct ablation (LDA) produces patterns cut into a dielectric layer for the formation of electrically conductive traces with controlled signal propagation characteristics. LDA processing includes selecting a dose fluence for removing a desired depth of material along a scribe line on a surface of a workpiece, selecting a temporal pulsewidth for each laser pulse in a series of laser pulses, and selecting a pulse repetition frequency for the series of laser pulse. The pulse repetition frequency is based at least in part on the selected temporal pulsewidth to maintain the selected dose fluence along the scribe line. The selected pulse repetition frequency provides a predetermined minimum overlap of laser spots along the scribe line. The LDA process further includes generating a laser beam including the series of laser pulses according to the selected dose fluence, temporal pulsewidth, and pulse repetition frequency.
    Type: Grant
    Filed: March 31, 2011
    Date of Patent: February 11, 2014
    Assignee: Electro Scientific Industries, Inc.
    Inventors: Mehmet E. Alpay, Hisashi Matsumoto, Mark A. Unrath, Guangyu Li
  • Publication number: 20130299468
    Abstract: A laser processing system for micromachining a workpiece includes a laser source to generate laser pulses for processing a feature in a workpiece, a galvanometer-driven (galvo) subsystem to impart a first relative movement of a laser beam spot position along a processing trajectory with respect to the surface of the workpiece, and an acousto-optic deflector (AOD) subsystem to effectively widen a laser beam spot along a direction perpendicular to the processing trajectory. The AOD subsystem may include a combination of AODs and electro-optic deflectors. The AOD subsystem may vary an intensity profile of laser pulses as a function of deflection position along a dither direction to selectively shape the feature in the dither direction. The shaping may be used to intersect features on the workpiece. The AOD subsystem may also provide rastering, galvo error position correction, power modulation, and/or through-the-lens viewing of and alignment to the workpiece.
    Type: Application
    Filed: March 25, 2013
    Publication date: November 14, 2013
    Inventors: Mark A. Unrath, William J. Jordens, James Ismail, Hisashi Matsumoto, Brian J. Lineburg
  • Patent number: 8501021
    Abstract: A process for laser forming a blind via in at least one layer of a circuit substrate having a plurality of capture pads of varying geometry can include, for at least one blind via to be formed in at least one layer of a circuit substrate, evaluating a capture pad geometry value (such as area and/or volume) within a predetermined distance from a drilling location with respect to a blind via geometry value (such as area and/or volume) to be formed at the drilling location. The process can include setting at least one laser operating parameter based on the evaluation in order to obtain a desired capture pad appearance after blind via formation. The process can include imaging a capture pad area defined as an area within a predetermined distance from a blind via drilling location in at least one layer of a circuit substrate, quantifying at least one appearance value for the imaged capture pad area, and determining an acceptability of the imaged capture pad areas based on the quantified appearance value.
    Type: Grant
    Filed: March 27, 2009
    Date of Patent: August 6, 2013
    Assignee: Electro Scientific Industries, Inc.
    Inventors: Hisashi Matsumoto, Mark Singer, Leo Baldwin, Jeffrey E. Howerton, David V. Childers
  • Patent number: 8415586
    Abstract: In some embodiments, laser output including at least one laser pulse having a wavelength shorter than 400 microns and having a pulsewidth shorter than 1,000 picoseconds permits the number of pulses used to clean a bottom surface of a via or the surface of a solder pad to increase process throughput. An oscillator module in cooperation with an amplification module may be used to generate the laser output.
    Type: Grant
    Filed: October 16, 2009
    Date of Patent: April 9, 2013
    Assignee: Electro Scientific Industries, Inc.
    Inventors: Weisheng Lei, Glenn Simenson, Hisashi Matsumoto, John Davignon
  • Patent number: 8404998
    Abstract: A laser processing system for micromachining a workpiece includes a laser source to generate laser pulses for processing a feature in a workpiece, a galvanometer-driven (galvo) subsystem to impart a first relative movement of a laser beam spot position along a processing trajectory with respect to the surface of the workpiece, and an acousto-optic deflector (AOD) subsystem to effectively widen a laser beam spot along a direction perpendicular to the processing trajectory. The AOD subsystem may include a combination of AODs and electro-optic deflectors. The AOD subsystem may vary an intensity profile of laser pulses as a function of deflection position along a dither direction to selectively shape the feature in the dither direction. The shaping may be used to intersect features on the workpiece. The AOD subsystem may also provide rastering, galvo error position correction, power modulation, and/or through-the-lens viewing of and alignment to the workpiece.
    Type: Grant
    Filed: May 28, 2010
    Date of Patent: March 26, 2013
    Assignee: Electro Scientific Industries, Inc.
    Inventors: Mark A. Unrath, William J. Jordens, James Ismail, Hisashi Matsumoto, Brian J. Lineburg
  • Publication number: 20120248075
    Abstract: Laser direct ablation (LDA) produces patterns cut into a dielectric layer for the formation of electrically conductive traces with controlled signal propagation characteristics. LDA processing includes selecting a dose fluence for removing a desired depth of material along a scribe line on a surface of a workpiece, selecting a temporal pulsewidth for each laser pulse in a series of laser pulses, and selecting a pulse repetition frequency for the series of laser pulse. The pulse repetition frequency is based at least in part on the selected temporal pulsewidth to maintain the selected dose fluence along the scribe line. The selected pulse repetition frequency provides a predetermined minimum overlap of laser spots along the scribe line. The LDA process further includes generating a laser beam including the series of laser pulses according to the selected dose fluence, temporal pulsewidth, and pulse repetition frequency.
    Type: Application
    Filed: March 31, 2011
    Publication date: October 4, 2012
    Applicant: ELECTRO SCIENTIFIC INDUSTRIES, INC.
    Inventors: Mehmet E. Alpay, Hisashi Matsumoto, Mark A. Unrath, Guangyu Li
  • Patent number: 8208506
    Abstract: Systems and methods generate laser pulse trains for material processing. In one embodiment, stable laser pulse trains at high repetition rates are generated from a continuous wave (CW) or quasi-CW laser beams. One or more laser pulses in the laser pulse train may be shaped to control energy delivered to a target material. In another embodiment, multiple laser beams are distributed to multiple processing heads from a single laser pulse, CW laser beam, or quasi-CW laser beam. In one such embodiment, a single optical deflector distributes multiple laser beams among respective processing heads.
    Type: Grant
    Filed: October 19, 2010
    Date of Patent: June 26, 2012
    Assignee: Electro Scientific Industries, Inc.
    Inventors: Yasu Osako, Hisashi Matsumoto
  • Patent number: 8116341
    Abstract: Dual-beam laser outputs, preferably derived from a single laser beam, improve the quality of the sidewalls of vias drilled in a target material, such as printed circuit board, comprising fiber-reinforced resin. Two embodiments each use two laser output components to remove a portion of target material from a target material location of a workpiece and rapidly clean remnants of the target material bonded to a metal layer underlying the target material location at a material removal rate. A first embodiment entails directing for incidence on a portion of the target material at the target material location a processing laser output having first and second components characterized by respective first and second wavelengths. A second embodiment entails directing for incidence on a portion of the target material at the target material location a processing laser output having first and second components characterized by respective first and pulse widths.
    Type: Grant
    Filed: May 31, 2007
    Date of Patent: February 14, 2012
    Assignee: Electro Scientific Industries, Inc.
    Inventors: Weisheng Lei, Yunlong Sun, Yasu Osako, John Davignon, Glenn Simenson, Hisashi Matsumoto
  • Patent number: 7982161
    Abstract: An improved method and apparatus for drilling vias in electronic substrates with laser pulses is presented which uses one or more tailored pulses to reduce debris remaining in the via while maintaining system throughput and avoiding damage to the substrate. A tailored pulse is a laser pulse that features a power spike having a peak power 10% higher than the average power of the pulse and lasting less than 50% of the duration of the pulse. Methods and apparatuses for creating tailored pulses by slicing longer duration pulses are shown.
    Type: Grant
    Filed: March 24, 2008
    Date of Patent: July 19, 2011
    Assignee: Electro Scientific Industries, Inc.
    Inventors: Yunlong Sun, Weisheng Lei, Hisashi Matsumoto, Brian Johansen, Gregg Hardy, Brian Baird
  • Publication number: 20110085574
    Abstract: Systems and methods generate laser pulse trains for material processing. In one embodiment, stable laser pulse trains at high repetition rates are generated from a continuous wave (CW) or quasi-CW laser beams. One or more laser pulses in the laser pulse train may be shaped to control energy delivered to a target material. In another embodiment, multiple laser beams are distributed to multiple processing heads from a single laser pulse, CW laser beam, or quasi-CW laser beam. In one such embodiment, a single optical deflector distributes multiple laser beams among respective processing heads.
    Type: Application
    Filed: October 19, 2010
    Publication date: April 14, 2011
    Applicant: ELECTRO SCIENTIFIC INDUSTRIES, INC.
    Inventors: Yasu Osako, Hisashi Matsumoto
  • Publication number: 20100301023
    Abstract: A laser processing system for micromachining a workpiece includes a laser source to generate laser pulses for processing a feature in a workpiece, a galvanometer-driven (galvo) subsystem to impart a first relative movement of a laser beam spot position along a processing trajectory with respect to the surface of the workpiece, and an acousto-optic deflector (AOD) subsystem to effectively widen a laser beam spot along a direction perpendicular to the processing trajectory. The AOD subsystem may include a combination of AODs and electro-optic deflectors. The AOD subsystem may vary an intensity profile of laser pulses as a function of deflection position along a dither direction to selectively shape the feature in the dither direction. The shaping may be used to intersect features on the workpiece. The AOD subsystem may also provide rastering, galvo error position correction, power modulation, and/or through-the-lens viewing of and alignment to the workpiece.
    Type: Application
    Filed: May 28, 2010
    Publication date: December 2, 2010
    Applicant: ELECTRO SCIENTIFIC INDUSTRIES, INC.
    Inventors: Mark A. Unrath, William J. Jordens, James Ismail, Hisashi Matsumoto, Brian J. Lineburg
  • Patent number: 7817685
    Abstract: Systems and methods generate laser pulse trains for material processing. In one embodiment, stable laser pulse trains at high repetition rates are generated from a continuous wave (CW) or quasi-CW laser beams. One or more laser pulses in the laser pulse train may be shaped to control energy delivered to a target material. In another embodiment, multiple laser beams are distributed to multiple processing heads from a single laser pulse, CW laser beam, or quasi-CW laser beam. In one such embodiment, a single optical deflector distributes multiple laser beams among respective processing heads.
    Type: Grant
    Filed: December 3, 2007
    Date of Patent: October 19, 2010
    Assignee: Electro Scientific Industries, Inc.
    Inventors: Yasu Osako, Hisashi Matsumoto
  • Publication number: 20100252959
    Abstract: An improved method for laser machining features in brittle materials such as glass is presented, wherein a tool path related to a feature is analyzed to determine how many passes are required to laser machine the feature using non-adjacent laser pulses. Laser pulses applied during subsequent passes are located so as to overlap previous laser spot locations by a predetermined overlap amount. In this way no single spot receives excessive laser radiation caused by immediately subsequent laser pulses being applied adjacent to a previous pulse location.
    Type: Application
    Filed: March 25, 2010
    Publication date: October 7, 2010
    Applicant: Electro Scientific Industries, Inc.
    Inventors: Weisheng Lei, Glenn Simenson, Hisashi Matsumoto, Guangyu Li, Jeffrey Howerton
  • Publication number: 20100252540
    Abstract: An improved method for laser machining features in brittle materials 8 such as glass is presented, wherein a tool path 10 related to a feature is analyzed to determine how many passes are required to laser machine the feature using non-adjacent laser pulses 12. Laser pulses 12 applied during subsequent passes are located so as to overlap previous laser spot locations by a predetermined overlap amount. In this way no single spot receives excessive laser radiation caused by immediately subsequent laser pulses 12 being applied adjacent to a previous pulse location.
    Type: Application
    Filed: April 2, 2010
    Publication date: October 7, 2010
    Applicant: ELECTRO SCIENTIFIC INDUSTRIES, INC.
    Inventors: Weisheng Lei, Hisashi Matsumoto, Glenn Simenson, Guangyu Li, Jeffrey Howerton, David Childers, Edward Johnson, Jeffrey Albelo
  • Publication number: 20100147813
    Abstract: A laser machining process is described for laser machining glass or glass-like materials. This process machines articles or features in articles with chamfered edges in one manufacturing operation. Chamfered edges are desirable in glass and glass-like materials because they resist fracturing or chipping and eliminate sharp edges. Producing articles or features in articles in one manufacturing operation is desirable because it can save time and expense by eliminating the need to transfer the article to a separate machine for chamfering after laser machining. Alternatively, it can permit use of less expensive equipment because the same laser used for machining can be used to form the chamfer instead of having a separate process perform the chamfering. Producing chamfers with laser machining results in high quality chamfers without the need for a separate polishing or finishing step.
    Type: Application
    Filed: December 17, 2008
    Publication date: June 17, 2010
    Applicant: Electro Scientific Industries, Inc.
    Inventors: Weisheng Lei, Glenn Simenson, Hisashi Matsumoto, Guangyu Li, Jeffery Howerton