Patents by Inventor Hung-Yi Huang

Hung-Yi Huang has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20220224369
    Abstract: A screen protection member includes a protection film and a frame. The protection film includes a bonding surface. The frame is fastened to a peripheral region of the bonding surface by surrounding the peripheral region. The frame has at least one notch group. A single notch group includes two notches that are disposed opposite to each other. The at least one notch group divides the frame into at least two frame parts that are spaced apart from each other.
    Type: Application
    Filed: May 19, 2020
    Publication date: July 14, 2022
    Inventors: Jenhui Liao, Hung-Yi Huang
  • Publication number: 20220139707
    Abstract: Generally, the present disclosure provides example embodiments relating to conductive features, such as metal contacts, vias, lines, etc., and methods for forming those conductive features. In a method embodiment, a dielectric layer is formed on a semiconductor substrate. The semiconductor substrate has a source/drain region. An opening is formed through the dielectric layer to the source/drain region. A silicide region is formed on the source/drain region and a barrier layer is formed in the opening along sidewalls of the dielectric layer by a same Plasma-Enhance Chemical Vapor Deposition (PECVD) process.
    Type: Application
    Filed: January 18, 2022
    Publication date: May 5, 2022
    Inventors: Cheng-Wei Chang, Min-Hsiu Hung, Hung-Yi Huang, Chun Chieh Wang, Yu-Ting Lin
  • Publication number: 20220130755
    Abstract: The present disclosure provides an interconnect structure and a method for forming an interconnect structure. The method for forming an interconnect structure includes forming a bottom metal line in a first interlayer dielectric layer, forming a second interlayer dielectric layer over the bottom metal line, exposing a top surface of the bottom metal line, increasing a total surface area of the exposed top surface of the bottom metal line, forming a conductive via over the bottom metal line, and forming a top metal line over the conductive via.
    Type: Application
    Filed: January 3, 2022
    Publication date: April 28, 2022
    Inventors: SHUEN-SHIN LIANG, KEN-YU CHANG, HUNG-YI HUANG, CHIEN CHANG, CHI-HUNG CHUANG, KAI-YI CHU, CHUN-I TSAI, CHUN-HSIEN HUANG, CHIH-WEI CHANG, HSU-KAI CHANG, CHIA-HUNG CHU, KENG-CHU LIN, SUNG-LI WANG
  • Patent number: 11309217
    Abstract: A method of making a semiconductor device that includes forming a dielectric stack over a substrate and patterning a contact region in the dielectric stack, the contact region having side portions and a bottom portion that exposes the substrate. The method also includes forming a dielectric barrier layer in the contact region to cover the side portions and forming a conductive blocking layer to cover the dielectric barrier layer, the dielectric stack, and the bottom portion of the contact region. The method can include forming a conductive layer over the conductive blocking layer and forming a conductive barrier layer over the conductive layer. The method can further include forming a silicide region in the substrate beneath the conductive layer.
    Type: Grant
    Filed: March 1, 2018
    Date of Patent: April 19, 2022
    Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
    Inventors: Ya-Huei Li, Li-Wei Chu, Yu-Hsiang Liao, Hung-Yi Huang, Chih-Wei Chang, Ching-Hwanq Su
  • Patent number: 11309213
    Abstract: A method for manufacturing a semiconductor structure includes following operations. A sacrificial layer is formed over the conductive layer, wherein the sacrificial layer includes a first sacrificial portion over the first conductive portion, and a second sacrificial portion over the second conductive portion, and a first thickness of the first sacrificial portion is larger than a second thickness of the second sacrificial portion. The first sacrificial portion and the second sacrificial portion of the sacrificial layer, and the second conductive portion of the conductive layer are removed.
    Type: Grant
    Filed: July 27, 2020
    Date of Patent: April 19, 2022
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY LTD.
    Inventors: Yu-Hsiang Liao, Ya-Huei Li, Li-Wei Chu, Chun-Wen Nieh, Hung-Yi Huang, Chih-Wei Chang, Ching-Hwanq Su
  • Publication number: 20220108919
    Abstract: A method includes receiving a structure having a dielectric layer over a conductive feature, wherein the conductive feature includes a second metal. The method further includes etching a hole through the dielectric layer and exposing the conductive feature and depositing a first metal into the hole and in direct contact with the dielectric layer and the conductive feature, wherein the first metal entirely fills the hole. The method further includes annealing the structure such that atoms of the second metal are diffused into grain boundaries of the first metal and into interfaces between the first metal and the dielectric layer. After the annealing, the method further includes performing a chemical mechanical planarization (CMP) process to remove at least a portion of the first metal.
    Type: Application
    Filed: October 25, 2021
    Publication date: April 7, 2022
    Inventors: Sung-Li Wang, Hung-Yi Huang, Yu-Yun Peng, Mrunal A. Khaderbad, Chia-Hung Chu, Shuen-Shin Liang, Keng-Chu Lin
  • Patent number: 11232945
    Abstract: Generally, the present disclosure provides example embodiments relating to conductive features, such as metal contacts, vias, lines, etc., and methods for forming those conductive features. In a method embodiment, a dielectric layer is formed on a semiconductor substrate. The semiconductor substrate has a source/drain region. An opening is formed through the dielectric layer to the source/drain region. A silicide region is formed on the source/drain region and a barrier layer is formed in the opening along sidewalls of the dielectric layer by a same Plasma-Enhance Chemical Vapor Deposition (PECVD) process.
    Type: Grant
    Filed: September 29, 2020
    Date of Patent: January 25, 2022
    Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
    Inventors: Cheng-Wei Chang, Min-Hsiu Hung, Hung-Yi Huang, Chun Chieh Wang, Yu-Ting Lin
  • Patent number: 11222818
    Abstract: A method for forming a semiconductor device structure is provided. The method includes forming a fin structure over a semiconductor substrate and forming a gate stack over the fin structure. The method also includes forming an epitaxial structure over the fin structure, and the epitaxial structure is adjacent to the gate stack. The method further includes forming a dielectric layer over the epitaxial structure and forming an opening in the dielectric layer to expose the epitaxial structure. In addition, the method includes applying a metal-containing material on the epitaxial structure while the epitaxial structure is heated so that a portion of the epitaxial structure is transformed to form a metal-semiconductor compound region.
    Type: Grant
    Filed: July 13, 2018
    Date of Patent: January 11, 2022
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
    Inventors: Yi-Hsiang Chao, Min-Hsiu Hung, Chun-Wen Nieh, Ya-Huei Li, Yu-Hsiang Liao, Li-Wei Chu, Kan-Ju Lin, Kuan-Yu Yeh, Chi-Hung Chuang, Chih-Wei Chang, Ching-Hwanq Su, Hung-Yi Huang, Ming-Hsing Tsai
  • Patent number: 11217524
    Abstract: The present disclosure provides an interconnect structure, including a first interlayer dielectric layer, a bottom metal line including a first metal in the first interlayer dielectric layer, a conductive via including a second metal over the bottom metal line, wherein the second metal is different from the first metal, and the first metal has a first type of primary crystalline structure, and the second metal has the first type of primary crystalline structure, a total area of a bottom surface of the conductive via is greater than a total cross sectional area of the conductive via, and a top metal line over the conductive via, wherein the top metal line comprises a third metal different from the second metal.
    Type: Grant
    Filed: June 12, 2020
    Date of Patent: January 4, 2022
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY LTD.
    Inventors: Shuen-Shin Liang, Ken-Yu Chang, Hung-Yi Huang, Chien Chang, Chi-Hung Chuang, Kai-Yi Chu, Chun-I Tsai, Chun-Hsien Huang, Chih-Wei Chang, Hsu-Kai Chang, Chia-Hung Chu, Keng-Chu Lin, Sung-Li Wang
  • Publication number: 20210391252
    Abstract: The present disclosure provides an interconnect structure, including a first interlayer dielectric layer, a bottom metal line including a first metal in the first interlayer dielectric layer, a conductive via including a second metal over the bottom metal line, wherein the second metal is different from the first metal, and the first metal has a first type of primary crystalline structure, and the second metal has the first type of primary crystalline structure, a total area of a bottom surface of the conductive via is greater than a total cross sectional area of the conductive via, and a top metal line over the conductive via, wherein the top metal line comprises a third metal different from the second metal.
    Type: Application
    Filed: June 12, 2020
    Publication date: December 16, 2021
    Inventors: SHUEN-SHIN LIANG, KEN-YU CHANG, HUNG-YI HUANG, CHIEN CHANG, CHI-HUNG CHUANG, KAI-YI CHU, CHUN-I TSAI, CHUN-HSIEN HUANG, CHIH-WEI CHANG, HSU-KAI CHANG, CHIA-HUNG CHU, KENG-CHU LIN, SUNG-LI WANG
  • Publication number: 20210376103
    Abstract: The present disclosure describes a method for forming liner-free or barrier-free conductive structures. The method includes forming a liner-free conductive structure on a cobalt conductive structure disposed on a substrate, depositing a cobalt layer on the liner-free conductive structure and exposing the liner-free conductive structure to a heat treatment. The method further includes removing the cobalt layer from the liner-free conductive structure.
    Type: Application
    Filed: May 29, 2020
    Publication date: December 2, 2021
    Applicant: Taiwan Semiconductor Manufacturing, Co., Ltd.
    Inventors: Shuen-Shin LIANG, Chun-I TSAI, Chih-Wei CHANG, Chun-Hsien HUANG, Hung-Yi HUANG, Keng-Chu LIN, Ken-Yu CHANG, Sung-Li WANG, Chia-Hung CHU, Hsu-Kai CHANG
  • Publication number: 20210375630
    Abstract: A method of forming a semiconductor device includes forming source/drain regions on opposing sides of a gate structure, where the gate structure is over a fin and surrounded by a first dielectric layer; forming openings in the first dielectric layer to expose the source/drain regions; selectively forming silicide regions in the openings on the source/drain regions using a plasma-enhanced chemical vapor deposition (PECVD) process; and filling the openings with an electrically conductive material.
    Type: Application
    Filed: August 9, 2021
    Publication date: December 2, 2021
    Inventors: Min-Hsiu Hung, Chien Chang, Yi-Hsiang Chao, Hung-Yi Huang, Chih-Wei Chang
  • Publication number: 20210335720
    Abstract: The present disclosure describes a method for forming capping layers configured to prevent the migration of out-diffused cobalt atoms into upper metallization layers In some embodiments, the method includes depositing a cobalt diffusion barrier layer on a liner-free conductive structure that includes ruthenium, where depositing the cobalt diffusion barrier layer includes forming the cobalt diffusion barrier layer self-aligned to the liner-free conductive structure. The method also includes depositing, on the cobalt diffusion barrier layer, a stack with an etch stop layer and dielectric layer, and forming an opening in the stack to expose the cobalt diffusion barrier layer. Finally, the method includes forming a conductive structure on the cobalt diffusion barrier layer.
    Type: Application
    Filed: January 5, 2021
    Publication date: October 28, 2021
    Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.
    Inventors: Shuen-Shin LIANG, Chun-I TSAI, Chih-Wei CHANG, Chun-Hsien HUANG, Hung-Yi HUANG, Keng-Chu LIN, Ken-Yu CHANG, Sung-Li WANG, Chia-Hung CHU, Hsu-Kai CHANG
  • Patent number: 11158539
    Abstract: A method includes receiving a structure having a dielectric layer over a conductive feature; etching a hole through the dielectric layer and exposing the conductive feature; depositing a first metal into the hole and in direct contact with the dielectric layer and the conductive feature; depositing a second metal over the first metal; and annealing the structure including the first and the second metals.
    Type: Grant
    Filed: October 1, 2019
    Date of Patent: October 26, 2021
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
    Inventors: Sung-Li Wang, Hung-Yi Huang, Yu-Yun Peng, Mrunal A. Khaderbad, Chia-Hung Chu, Shuen-Shin Liang, Keng-Chu Lin
  • Publication number: 20210311683
    Abstract: An electronic device with a foldable screen. At least two display areas are formed after the foldable screen is folded. The method includes: detecting a folding angle between a first display area and a second display area; when the folding angle is greater than a preset threshold, determining a first target application based on content displayed in the first display area; and displaying the first target application in the second display area. According to the display method and the apparatus provided in this application, the first target application can be determined based on the content displayed in the first display area, when the screen of the electronic device with the foldable screen is unfolded; and the first target application is displayed in the second display area or a third display area obtained after unfolding.
    Type: Application
    Filed: August 15, 2018
    Publication date: October 7, 2021
    Inventors: Qinghao JIN, Hung-yi HUANG
  • Patent number: 11107690
    Abstract: A method of forming a semiconductor device includes forming source/drain regions on opposing sides of a gate structure, where the gate structure is over a fin and surrounded by a first dielectric layer; forming openings in the first dielectric layer to expose the source/drain regions; selectively forming silicide regions in the openings on the source/drain regions using a plasma-enhanced chemical vapor deposition (PECVD) process; and filling the openings with an electrically conductive material.
    Type: Grant
    Filed: February 1, 2019
    Date of Patent: August 31, 2021
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Min-Hsiu Hung, Chien Chang, Yi-Hsiang Chao, Hung-Yi Huang, Chih-Wei Chang
  • Publication number: 20210098295
    Abstract: A method includes receiving a structure having a dielectric layer over a conductive feature; etching a hole through the dielectric layer and exposing the conductive feature; depositing a first metal into the hole and in direct contact with the dielectric layer and the conductive feature; depositing a second metal over the first metal; and annealing the structure including the first and the second metals.
    Type: Application
    Filed: October 1, 2019
    Publication date: April 1, 2021
    Inventors: Sung-Li Wang, Hung-Yi Huang, Yu-Yun Peng, Mrunal A. Khaderbad, Chia-Hung Chu, Shuen-Shin Liang, Keng-Chu Lin
  • Publication number: 20210058502
    Abstract: An electronic device is disclosed. The electronic device includes a foldable display including a first display portion and a second display portion, a shaft disposed between the first display portion and the second display portion, and at least one camera disposed in a sub-area of the first display portion. The first display portion and the second display portion are configured to rotate about the shaft with respect to each other to fold or unfold the foldable display. The sub-area of the first display portion has a thickness greater a thickness of the electronic device when the foldable display is folded.
    Type: Application
    Filed: February 23, 2019
    Publication date: February 25, 2021
    Inventors: Yuelong LIAO, HUNG-YI HUANG, Qinghao JIN, Lupeng YAO
  • Publication number: 20210028159
    Abstract: A symmetrical layout structure of a semiconductor device is formed on a chip. The symmetrical layout structure is performed in a (2M+1)×(2M+1) array and comprises 2M?r working units and r dummy unit(s). Each working unit has 22+M sub-working units continuously connected by a closed trace and arranged along the closed trace in the array, wherein M is a positive integer, and r is zero or a positive integer. Each closed trace forms a parallelogram that is symmetrical to a diagonal path of the array. The working unit can be a current cell. According to the layout structure, all parallelograms have the same centroid, the perimeters of all parallelograms are the same, the lengths of the closed traces are the same, and the distances between all of the sub-current cells are the same. The present invention thus improves the performance of the digital-to-analog converter.
    Type: Application
    Filed: July 25, 2019
    Publication date: January 28, 2021
    Inventors: Hung-Yi Huang, Tai-Haur Kuo
  • Publication number: 20210013033
    Abstract: Generally, the present disclosure provides example embodiments relating to conductive features, such as metal contacts, vias, lines, etc., and methods for forming those conductive features. In a method embodiment, a dielectric layer is formed on a semiconductor substrate. The semiconductor substrate has a source/drain region. An opening is formed through the dielectric layer to the source/drain region. A silicide region is formed on the source/drain region and a barrier layer is formed in the opening along sidewalls of the dielectric layer by a same Plasma-Enhance Chemical Vapor Deposition (PECVD) process.
    Type: Application
    Filed: September 29, 2020
    Publication date: January 14, 2021
    Inventors: Cheng-Wei Chang, Min-Hsiu Hung, Hung-Yi Huang, Chun Chieh Wang, Yu-Ting Lin