Abstract: Techniques regarding qubit structures comprising ion implanted Josephson junctions are provided. For example, one or more embodiments described herein can comprise an apparatus that can include a strip of superconducting material coupling a first superconducting electrode and a second superconducting electrode. The strip of superconducting material can have a first region comprising an ion implant and a second region that is free from the ion implant.

Abstract: Techniques regarding qubit structures comprising ion implanted Josephson junctions are provided. For example, one or more embodiments described herein can comprise an apparatus that can include a strip of superconducting material coupling a first superconducting electrode and a second superconducting electrode. The strip of superconducting material can have a first region comprising an ion implant and a second region that is free from the ion implant.

Abstract: In one aspect, a method of forming a local interconnect structure includes the steps of: forming a BOX SOI wafer having a fully depleted seed layer between a first BOX layer and a second BOX layer, and an active layer over the second BOX layer; forming at least one STI region in the active layer having an STI oxide; forming at least one trench that extends through the STI oxide and the second BOX layer down to the seed layer, wherein the trench has a footprint and a location such that a portion of the STI oxide remains lining sidewalls of the trench; and growing an epitaxial material in the trench using the seed layer as a template for the growth, wherein the epitaxial material is doped and serves as the local interconnect structure which is buried in the double BOX SOI wafer.

Abstract: At least one semiconductor nanowire laterally abutted by a pair of semiconductor pad portions is formed over an insulator layer. Portions of the insulator layer are etched from underneath the at least one semiconductor nanowire such that the at least one semiconductor nanowire is suspended. A temporary fill material is deposited over the at least one semiconductor nanowire, and is planarized to physically expose top surfaces of the pair of semiconductor pad portions. Trenches are formed within the pair of semiconductor pad portions, and are filled with stress-generating materials. The temporary fill material is subsequently removed. The at least one semiconductor nanowire is strained along the lengthwise direction with a tensile strain or a compressive strain.

Abstract: A silicon-on-insulator substrate which includes a semiconductor substrate, a buried oxide layer, and a semiconductor layer is provided. A hard mask layer is formed over a first region of the silicon-on-insulator substrate. A first silicon-germanium layer is epitaxially grown on the semiconductor layer within a second region of the silicon-on-insulator substrate. The second region is at least a portion of the semiconductor layer not covered by the hard mask layer. A thermal annealing process is performed, such that germanium atoms from the first silicon-germanium layer are migrated to the portion of the semiconductor layer to form a second silicon-germanium layer. The hard mask layer is removed. A layer of semiconductor material is epitaxially grown on top of the semiconductor layer and the second silicon-germanium layer, where the layer of semiconductor material composed of the same material as semiconductor layer.

Abstract: Techniques for forming dual III-V semiconductor channel materials to enable fabrication of different device types on the same chip/wafer are provided. In one aspect, a method of forming dual III-V semiconductor channel materials on a wafer includes the steps of: providing a wafer having a first III-V semiconductor layer on an oxide; forming a second III-V semiconductor layer on top of the first III-V semiconductor layer, wherein the second III-V semiconductor layer comprises a different material with an electron affinity that is less than an electron affinity of the first III-V semiconductor layer; converting the first III-V semiconductor layer in at least one second active area to an insulator using ion implantation; and removing the second III-V semiconductor layer from at least one first active area selective to the first III-V semiconductor layer.

Abstract: A silicon-on-insulator substrate which includes a semiconductor substrate, a buried oxide layer, and a semiconductor layer is provided. A hard mask layer is formed over a first region of the silicon-on-insulator substrate. A first silicon-germanium layer is epitaxially grown on the semiconductor layer within a second region of the silicon-on-insulator substrate. The second region is at least a portion of the semiconductor layer not covered by the hard mask layer. A thermal annealing process is performed, such that germanium atoms from the first silicon-germanium layer are migrated to the portion of the semiconductor layer to form a second silicon-germanium layer. The hard mask layer is removed. A layer of semiconductor material is epitaxially grown on top of the semiconductor layer and the second silicon-germanium layer, where the layer of semiconductor material composed of the same material as semiconductor layer.

Abstract: A nanowire device includes a first component formed on a substrate and a second component disposed apart from the first component on the substrate. A nanowire is configured to connect the first component to the second component. An anchor pad is formed along a span of the nanowire and configured to support the nanowire along the span to prevent sagging.

Abstract: Various embodiments are directed toward a circuit configured to act as a Josephson junction. The circuit includes: a junction stack on a substrate, the junction stack including a portion of a first superconductor electrode, with an interface layer on a top side of the first superconductor electrode and configured to act as a tunneling barrier for the junction stack. The circuit may also comprise a first portion of a second superconductor electrode on top of the interface layer. A spacer may separate the portion of the first superconductor electrode in the junction stack from a second portion of the second superconductor electrode outside the junction stack where the second superconductor electrode overlays the first superconductor electrode, the second portion of the second superconductor electrode contacting the substrate on at least one side of the spacer.

Abstract: A nanowire field effect transistor (FET) device includes a first source/drain region and a second source/drain region. Each of the first and second source/drain regions are formed on an upper surface of a bulk semiconductor substrate. A gate region is interposed between the first and second source/drain regions, and directly on the upper surface of the bulk semiconductor substrate. A plurality of nanowires are formed only in the gate region. The nanowires are suspended above the semiconductor substrate and define gate channels of the nanowire FET device. A gate structure includes a gate electrode formed in the gate region such that the gate electrode contacts an entire surface of each nanowire.

Abstract: In one aspect, a method of forming a local interconnect structure includes the steps of: forming a BOX SOI wafer having a fully depleted seed layer between a first BOX layer and a second BOX layer, and an active layer over the second BOX layer; forming at least one STI region in the active layer having an STI oxide; forming at least one trench that extends through the STI oxide and the second BOX layer down to the seed layer, wherein the trench has a footprint and a location such that a portion of the STI oxide remains lining sidewalls of the trench; and growing an epitaxial material in the trench using the seed layer as a template for the growth, wherein the epitaxial material is doped and serves as the local interconnect structure which is buried in the double BOX SOI wafer.

Abstract: At least one semiconductor nanowire laterally abutted by a pair of semiconductor pad portions is formed over an insulator layer. Portions of the insulator layer are etched from underneath the at least one semiconductor nanowire such that the at least one semiconductor nanowire is suspended. A temporary fill material is deposited over the at least one semiconductor nanowire, and is planarized to physically expose top surfaces of the pair of semiconductor pad portions. Trenches are formed within the pair of semiconductor pad portions, and are filled with stress-generating materials. The temporary fill material is subsequently removed. The at least one semiconductor nanowire is strained along the lengthwise direction with a tensile strain or a compressive strain.

Abstract: In one aspect, a method of forming a local interconnect structure includes the steps of: forming a BOX SOI wafer having a fully depleted seed layer between a first BOX layer and a second BOX layer, and an active layer over the second BOX layer; forming at least one STI region in the active layer having an STI oxide; forming at least one trench that extends through the STI oxide and the second BOX layer down to the seed layer, wherein the trench has a footprint and a location such that a portion of the STI oxide remains lining sidewalls of the trench; and growing an epitaxial material in the trench using the seed layer as a template for the growth, wherein the epitaxial material is doped and serves as the local interconnect structure which is buried in the double BOX SOI wafer.

Abstract: At least one semiconductor nanowire laterally abutted by a pair of semiconductor pad portions is formed over an insulator layer. Portions of the insulator layer are etched from underneath the at least one semiconductor nanowire such that the at least one semiconductor nanowire is suspended. A temporary fill material is deposited over the at least one semiconductor nanowire, and is planarized to physically expose top surfaces of the pair of semiconductor pad portions. Trenches are formed within the pair of semiconductor pad portions, and are filled with stress-generating materials. The temporary fill material is subsequently removed. The at least one semiconductor nanowire is strained along the lengthwise direction with a tensile strain or a compressive strain.

Abstract: Techniques for forming dual III-V semiconductor channel materials to enable fabrication of different device types on the same chip/wafer are provided. In one aspect, a method of forming dual III-V semiconductor channel materials on a wafer includes the steps of: providing a wafer having a first III-V semiconductor layer on an oxide; forming a second III-V semiconductor layer on top of the first III-V semiconductor layer, wherein the second III-V semiconductor layer comprises a different material with an electron affinity that is less than an electron affinity of the first III-V semiconductor layer; converting the first III-V semiconductor layer in at least one second active area to an insulator using ion implantation; and removing the second III-V semiconductor layer from at least one first active area selective to the first III-V semiconductor layer.

Abstract: A nanowire device includes a first component formed on a substrate and a second component disposed apart from the first component on the substrate. A nanowire is configured to connect the first component to the second component. An anchor pad is formed along a span of the nanowire and configured to support the nanowire along the span to prevent sagging.

Abstract: After forming a buried nanowire segment surrounded by a gate structure located on a substrate, an epitaxial source region is grown on a first end of the buried nanowire segment while covering a second end of the buried nanowire segment and the gate structure followed by growing an epitaxial drain region on the second end of the buried nanowire segment while covering the epitaxial source region and the gate structure. The epitaxial source region includes a first semiconductor material and dopants of a first conductivity type, while the epitaxial drain region includes a first semiconductor material different from the first semiconductor material and dopants of a second conductivity type opposite the first conductivity type.

Abstract: A method of making a field-effect transistor device includes providing a substrate with a fin stack having: a first sacrificial material layer on the substrate, a first semiconductive material layer on the first sacrificial material layer, and a second sacrificial material layer on the first semiconductive material layer. The method includes inserting a dummy gate having a second thickness, a dummy void, and an outer end that is coplanar to the second face. The method includes inserting a first spacer having a first thickness and a first void, and having an outer end that is coplanar to the first face. The method includes etching the first sacrificial material layer in the second plane and the second sacrificial material layer in the fourth plane. The method includes removing, at least partially, the first spacer. The method also includes inserting a second spacer having the first thickness.

Abstract: A method of making a field-effect transistor device includes providing a substrate with a fin stack having: a first sacrificial material layer on the substrate, a first semiconductive material layer on the first sacrificial material layer, and a second sacrificial material layer on the first semiconductive material layer. The method includes inserting a dummy gate having a second thickness, a dummy void, and an outer end that is coplanar to the second face. The method includes inserting a first spacer having a first thickness and a first void, and having an outer end that is coplanar to the first face. The method includes etching the first sacrificial material layer in the second plane and the second sacrificial material layer in the fourth plane. The method includes removing, at least partially, the first spacer. The method also includes inserting a second spacer having the first thickness.

Abstract: Various embodiments are directed toward a circuit configured to act as a Josephson junction. The circuit includes: a junction stack on a substrate, the junction stack including a portion of a first superconductor electrode, with an interface layer on a top side of the first superconductor electrode and configured to act as a tunneling barrier for the junction stack. The circuit may also comprise a first portion of a second superconductor electrode on top of the interface layer. A spacer may separate the portion of the first superconductor electrode in the junction stack from a second portion of the second superconductor electrode outside the junction stack where the second superconductor electrode overlays the first superconductor electrode.