Abstract: The exposure apparatus is provided in its main body portion with laser diodes each having different wavelengths, for illuminating light for alignment onto a mark of a grating form arranged on each of a reticle and a wafer. The main body portion of the exposure apparatus has photomultipliers for receiving the diffraction light returned from each of the reticle mark and the wafer mark. The alignment of the reticle mark with the wafer mark is implemented by comparing phase differences of optical beat signals converted photoelectrically by the photomultipliers and by means of a phase detection comparison system. The light fluxes are transmitted between photomultipliers the laser diodes and the alignment optical system disposed in the main body portion thereof through optical fibers. This arrangement enables the position transducer to reduce an influence of generated heat upon the position detection of the wafer as well as the exposure apparatus, even if a photodetector having a large calorific power is employed.

Abstract: The exposure apparatus is provided in its main body portion with laser diodes each having different wavelengths, for illuminating light for alignment onto a mark of a grating form arranged on each of a reticle and a wafer. The main body portion of the exposure apparatus has photomultipliers for receiving the diffraction light returned from each of the reticle mark and the wafer mark. The alignment of the reticle mark with the wafer mark is implemented by comparing phase differences of optical beat signals converted photoelectrically by the photomultipliers and by means of a phase detection comparison system. The light fluxes are transmitted between photomultipliers the laser diodes and the alignment optical system disposed in the main body portion thereof through optical fibers. This arrangement enables the position transducer to reduce an influence of generated heat upon the position detection of the wafer as well as the exposure apparatus, even if a photodetector having a large calorific power is employed.

Abstract: The production efficiency of silicon single crystal produced by additional charge or recharge method is improved by avoiding loss due to undissolved portion of poly-silicon rod supplied in the additional charge or recharge. A poly-silicon rod 20 as an additional charge is brought down in a silicon melt 11 in a crucible 10, while being directly supported by a seed crystal 40. The poly-silicon rod 20 is brought down to be totally supplied to the silicon melt 11, and then silicon single crystal 44 is pulled using the seed crystal 40.

Abstract: A vehicle door latch device comprises a one-motion door opening mechanism transmitting an opening movement of an inside open handle both to a lock lever and to a ratchet, an free-play type antitheft member, and a clutch mechanism provided between the one-motion mechanism and the inside open handle. The clutch mechanism is so connected to the antitheft member that the clutch mechanism is displaced to an uncoupling state where it does not transmit the opening movement to the one-motion mechanism when the antitheft member is changed over to a antitheft position, and that the clutch mechanism is displaced to a coupling state where it transmits the opening movement to the one-motion mechanism when the antitheft member is changed over to an antitheft cancelled position.

Abstract: A method of making an acceleration detecting element includes preparing two green sheets having a rectangular plate shape and being made of piezoelectric ceramic; applying a conductive paste on a center location and locations along the longitudinal direction of the first face of the first one of the green sheets thereby forming respective inner electrode patterns; laminating the first face of the second of the green sheets on the first face of the first one of the green sheets on which the inner electrode patterns have been formed; baking to simultaneously form inner electrodes and piezoelectric ceramic bodies; forming signal output electrodes by a baking treatment after applying the conductive paste on the main second surfaces of the piezoelectric ceramic bodies; and polarizing center portions and end portions of the piezoelectric ceramic bodies by using the respective signal output electrodes and the respective inner electrodes.

Abstract: An energy-trap thickness extensional vibration mode piezoelectric resonator uses a harmonic of a thickness extensional vibration mode and effectively suppresses generation of unwanted spurious vibrations. The energy-trap thickness extensional vibration mode piezoelectric resonator includes a piezoelectric strip, first and second excitation electrodes located on opposite surfaces of the piezoelectric strip, and an internal electrode disposed inside the piezoelectric strip. The first and second excitation electrodes are located on opposite ends of the piezoelectric strip in an overlapping arrangement. The internal electrode is located opposite to the first and second excitation electrodes. The first and second excitation electrodes overlap each other over a length of l such that l/d is not greater than about 6, where d=t/n.

Abstract: A piezoelectric resonator has a base member including laminated piezoelectric layers and internal electrodes. The base member is polarized in different directions at both sides of each internal electrode. The internal electrodes are alternately covered by insulating film on opposing side surfaces of the base member. External electrodes are formed on the opposing side surfaces of the base member and the internal electrodes are connected thereto, respectively.

Abstract: A thickness extensional piezoelectric resonator includes a substantially rectangular piezoelectric strip, first and second excitation electrodes disposed on both surfaces of the piezoelectric strip, and an internal electrode disposed inside the piezoelectric strip. The first and second excitation electrodes are located on opposite sides of the piezoelectric strip. The internal electrode is located opposite to the first and second excitation electrodes. Assuming that the piezoelectric plate has a width W and a thickness t, the piezoelectric plate is constructed such that W/d is less than about 6.1 if d=t/n.

Abstract: A piezoelectric resonator having a small spurious resonance and a large difference .DELTA.F between the resonant frequency and the antiresonant frequency has a compact size and an external electrode has a structure which prevents damage or breaking of the external electrode. The piezoelectric resonator has a substantially rectangular-parallelepiped base member which includes a plurality of laminated piezoelectric layers. A middle portion of the piezoelectric layers is polarized in opposite directions relative to each other. On main surfaces of the middle part of the piezoelectric layers, first and second groups of inner electrodes and are exposed alternately at both side surfaces of the base member. On both side surfaces of the base member, first and second external electrodes are arranged so as to alternately connect to the first and second groups of inner electrodes.

Abstract: An energy-trapping piezoelectric resonator vibrates in a third-order wave of a thickness-extension vibration mode. The piezoelectric resonator includes a piezoelectric substrate polarized along its thickness. A ratio of the width W to the thickness T of the substrate is determined to be about 0.88.+-.5%, 1.06.+-.4%, 1.32.+-.5%, 1.80.+-.3%, 2.30.+-.3%, 2.69.+-.3%, 3.16.+-.2%, or 3.64.+-.2%. First and second electrodes are respectively disposed on the obverse and reverse surfaces of the substrate to cover the entire width and opposedly face each other at the central portion of the substrate in the longitudinal direction so as to form a resonance portion between the first and second electrodes.

Abstract: A thickness extensional piezoelectric resonator utilizes harmonics of a thickness extensional vibration mode and has a significantly reduced size and significantly increased capacitance while not being susceptible to the effects of the stray capacitance of a circuit board upon which the resonator is mounted. The resonator includes a piezoelectric strip, first and second excitation electrodes located on one of two respective major surfaces of the piezoelectric strip, and internal electrodes disposed inside the piezoelectric strip. The first and second excitation electrodes are located on opposite sides of the piezoelectric strip. The internal electrodes are located opposite to the first and second excitation electrodes to thereby define a vibrating portion. Vibration-attenuating portions are located on opposite sides of the vibrating portion only along the longitudinal direction of the piezoelectric strip. No vibration-attenuating portions are located in the lateral direction of the piezoelectric strip.

Abstract: A piezoelectric resonator includes a piezoelectric resonator element vibrating in a longitudinal vibration mode and having a mounting surface, wherein a resin material is provided on the mounting surface of the piezoelectric resonator element, and the resin material has a hardness of about 0 to about 50 in units defined in the JIS-A standards and/or an elastic modulus of about 0.1 to 10 MPa.

Abstract: A vibration gyro which is equipped with an oscillator in which slits are made in a flat-plate piezoelectric board to form a tuning fork section. For construction of the oscillator, driving electrodes for vibrating the tuning fork section are formed in the vicinity of end portions of the slit, while detection electrodes for detecting an rotational angular velocity in a longitudinal direction of the tuning fork section are formed on the arm portions of the tuning fork section.

Abstract: A piezoelectric component achieves a desired Qm by using a presently available piezoelectric material. The piezoelectric component includes a supporting substrate on which pattern electrodes are provided. Electroconductive supporting members are disposed on the pattern electrodes, and a piezoelectric resonator is mounted on the supporting members. External electrodes of the piezoelectric resonator and the pattern electrodes are electrically connected to each other by the supporting members. Gaps between the piezoelectric resonator and the supporting substrate are filled with a first elastic material element. A second material element may be provided on the surface of the piezoelectric resonator disposed opposite to the surface of the resonator facing the supporting substrate. Only one of these elastic material elements or both these elastic material elements may be used.

Abstract: In a piezoelectric element (21), an internal electrode (31) is embedded in a piezoelectric ceramic body (22) to extend in its longitudinal direction, first to third surface electrodes (23 to 25, 27 to 29) are formed on upper and lower surfaces of the piezoelectric ceramic body (22) in first to third portions along the longitudinal direction, connecting electrodes (26, 30) are formed to connect the first to third surface electrodes (23 to 25, 27 to 29) with each other, the first to third portions are so polarized that the second portion is oppositely polarized to the first to third portions, and regions located above and under the internal electrode are polarized in opposite directions in the respective ones of the first to third portions.

Abstract: An energy-trapping thickness-shear resonator includes a piezoelectric substrate, a first electrode extending from a first end to a central portion of a first surface of the piezoelectric substrate and a second electrode extending from a second end to the central portion of a second surface of the substrate. Thus, the resonator utilizes thickness shear vibrations generated in a portion of the piezoelectric substrate located between the first and second electrodes at the central portion of the substrate. The width W of the la substrate is set to be equal to or less than about 0.7 mm and also to satisfy both of the following expressions (1) and (3) or to satisfy both of the expressions (2) and (3):(1) 0<W<k T/(1-a)(2) k(2n-1)T/(1-a)<W<k(2n+1)T/(1-a)(3) 0 21 .alpha.<(fa-fr)/fawhere T indicates the thickness of the piezoelectric substrate; k is 1/2; f.sub.OSC equals fa (1-.alpha.); f.sub.

Abstract: A ladder filter has a piezoelectric resonator having reduced spurious vibrations and having a wider range of selection of the difference .DELTA.F between the resonant frequency and the antiresonant frequency, and has a substantially reduced size. The ladder filter includes an insulating substrate on which four pattern electrodes are provided. Four lands are respectively formed as portions of the four pattern electrodes. Another land is formed as a portion of the second pattern electrode. External electrodes of four piezoelectric resonators adapted to vibrate in a longitudinal vibration mode and capable of being mounted in a surface mount manner are connected to the land of the pattern electrodes by supporting members made of an electroconductive material. The four piezoelectric resonators are arranged in a row in the order of a first series resonator, a first parallel resonator, a second parallel resonator and a second series resonator.

Abstract: A piezoelectric resonator has a base member including laminated piezoelectric layers and internal electrodes. The base member is polarized in different directions at both sides of each internal electrode. The internal electrodes are alternately covered by insulating film on opposing side surfaces of the base member. External electrodes are formed on the opposing side surfaces of the base member and the internal electrodes are connected thereto, respectively. At both ends of the base member, inactive sections are formed such that an electric field is not applied to the base member by covering consecutive plural electrodes with the insulating film. The center of the base member serves as an active section since an electric field is applied.

Abstract: A piezoelectric element includes an internal electrode embedded in a piezoelectric ceramic body so as to extend in a longitudinal direction of the body. First to third surface electrodes are formed on upper and lower surfaces of the piezoelectric ceramic body in respective first to third portions along the longitudinal direction. Connecting electrodes are formed to connect the first to third surface electrodes with each other. The first to third portions are polarized so that the second portion is polarized opposite to the polarization of the first and third portions, and regions located above and below the internal electrode are polarized in opposite directions in the respective ones of the first to third portions.

Abstract: A piezoelectric resonator has a substantially rectangular-parallelpiped-shaped base member. The base member includes a plurality of laminated piezoelectric layers. The piezoelectric layers are polarized in the longitudinal direction of the base member such that the direction of polarization differs at adjacent piezoelectric layers. At opposite major surfaces of the plurality of piezoelectric layers, internal electrodes are disposed. The internal electrodes have surface areas with different sizes and therefore, areas of pairs of opposing electrodes have different sizes. The internal electrodes are alternately covered by at least two insulating films provided on opposing side surfaces of the base member. The at least two insulating films cover different internal electrodes. External electrodes are disposed on the same or the opposing side surfaces of the base member and the external electrodes are connected to the internal electrodes.