Abstract: Optical devices that have at least one optical element and a plurality of kinematic components are disclosed. The number m of the kinematic components of one type exceed the number n of degrees of freedom in which the optical element can be manipulated. At least one of the n degrees of freedom can be x-displacement, y-displacement, z-displacement or tilt.

Abstract: A microlithographic projection exposure apparatus comprises a projection objective which images an object onto an image plane and has a lens with a curved surface. In the projection objective there is a liquid or solid medium which directly adjoins the curved surface over a region which is usable for imaging the object. The projection exposure apparatus also has an adjustable manipulator for reducing an image field curvature which is caused by heating of the medium during the projection operation.

Abstract: An imaging device in a projection exposure machine for microlithography has at least one optical element and at least one manipulator, having a linear drive, for manipulating the position of the optical element. The linear drive has a driven subregion and a nondriven subregion, which are movable relative to one another in the direction of a movement axis. The subregions are interconnected at least temporarily via functional elements with an active axis and via functional elements with an active direction at least approximately parallel to the movement axis.

Abstract: A chill casting and foam casting method together with a casting mold that is closable in a pressure-tight manner for producing molded articles. To improve the chill casting method and the foam casting method so that the quality of the products produced is greatly increased and particularly homogeneous material properties are achieved, a gas is supplied to a melt which only partially fills a closed mold cavity until the inside pressure within the mold cavity exceeds the melting point pressure curve such that the melt suddenly solidifies. The solidification process takes place largely independently of location and is thus sudden, so that the instantaneous state of the melt is reflected in the resulting solidified article with virtually no change. This makes it possible to produce molded articles which have a uniform core distribution and meet high quality demands in a reliable and reproducible manner.

Abstract: A method and apparatus for monitoring an electronic control system such that provision is made for the complete data of at least one memory to be read sequentially into an ECC unit, which can be filled very rapidly from the memory, and automatically checked there, with no need to transfer the complete data in time-consuming fashion to a processor; the ECC check width encompassing the data of a plurality of memory cells of the memory and being able to be a multiple of the read word width of the processor; an additional datum being created in each case for the data of a ECC check width and being storable in the memory, and the entire code/data region of the at least one memory therefore being able to be checked, outside the ongoing instruction accesses, by the fact that for each request by the processor for the contents of a single memory cell, the ECC unit is filled from the memory to the entire ECC check width including the additional datum; a check datum being created from the data of the complete ECC check

Abstract: A microprocessor system includes a plurality of modules, among them a microprocessor and at least one storage module for storing the code and/or data for the microprocessor. Stored, in a non-changeable manner, in at least one of the modules, referred to as exchange-protected module, is a serial number of this module. A control module is configured to receive a data value specified by the at least one serial number and to block, at least partially, the function of the microprocessor system if the received data value does not match an expected data value encoded in the control module.

Abstract: An imaging device in a projection exposure machine for microlithography comprises at least one optical element and at least one manipulator, a linear drive for manipulating the position of the optical element. Said linear drive has at least one moving element, said moving element having a shearing part and a lifting part. Said shearing part is arranged to move the optical element and said lifting part is arranged to move said shearing part. Said linear drive has a supporting element which is in contact with and prevents movement of the optical element while the shearing part is moved by the lifting part.

Abstract: A chill casting and foam casting method together with a casting mold that is closable in a pressure-tight manner for producing molded articles. To improve the chill casting method and the foam casting method so that the quality of the products produced is greatly increased and particularly homogeneous material properties are achieved, a gas is supplied to a melt which only partially fills a closed mold cavity until the inside pressure within the mold cavity exceeds the melting point pressure curve such that the melt suddenly solidifies. The solidification process takes place largely independently of location and is thus sudden, so that the instantaneous state of the melt is reflected in the resulting solidified article with virtually no change. This makes it possible to produce molded articles which have a uniform core distribution and meet high quality demands in a reliable and reproducible manner.

Abstract: An imaging device (7) in a projection exposure machine (1) for microlithography has at least one optical element (10, 33, 34) and at least one manipulator (9, 36, 41), having a linear drive (11), for manipulating the position of the optical element (10, 33, 34). The linear drive (11) has a driven subregion (14) and a nondriven subregion (15), which are movable relative to one another in the direction of a movement axis (17). The subregions (14, 15) are interconnected at least temporarily via functional elements (18) with an active axis (17) [sic] and via functional elements (19) with an active direction at least approximately parallel to the movement axis (17).

Abstract: In order to detect the exchange of a module, identified by a serial number, in a microprocessor system,

Abstract: A microprocessor system includes a plurality of modules, among them a microprocessor and at least one storage module for storing the code and/or data for the microprocessor. Stored, in a non-changeable manner, in at least one of the modules, referred to as exchange-protected module, is a serial number of this module. A control module is configured to receive a data value specified by the at least one serial number and to block, at least partially, the function of the microprocessor system if the received data value does not match an expected data value encoded in the control module.

Abstract: Process for the production of tantalum-niobium concentrates from low-tantalum, high-niobium raw materials with an Nb.sub.2 O.sub.5 /Ta.sub.2 O.sub.5 ratio of 5 to 15 in a pyrometallurgical concentration process by smelting with carbon-containing reducing agents, reductions and resmelting.

Abstract: The leads to sensor elements of a radiation receiver are embodied as conductor tracks which are produced by deflecting a laser beam and thus sectioning a large-surface metallic layer into a desired pattern of the tracks.

Abstract: A radiation receiver comprises an inner cylindrical part of insulating material having a closed end and an opposite end with a radially extending annular flange. At least one sensor is mounted on the inner part preferably on the closed end thereof and on its exterior. At least one conductor track lead provided on the inner part extending from the sensor on the exterior wall of the inner part and along the exterior of the flange. An outer cylindrical part having a closed end and an opposite open end has a rim surrounding the end which is engaged on the flange over the track at a location to leave an outer extending portion of the track extending outwardly from the exterior of said outer cylindrical part and along said flange. A glass solder seam seals the outer cylindrical part to the flange of the inner cylindrical part around the rim.