Abstract: A medicament delivery device, which comprises a driving mechanism and a housing (1) having a reservoir (2), which is at least partly filled with a substance and which is sealed at least on one side with a flexible wall (21). The driving mechanism is adapted to press a piston (23) against the flexible wall (21) thereby releasing the substance from the reservoir (2) through an opening (25) in the reservoir (2). This provides for a safe and reliable medicament delivery device.

Abstract: An imprint lithography apparatus is disclosed that includes a support structure configured to hold an imprint template. The apparatus further includes an actuator located between the support structure and a side of the imprint template, when the imprint template is held by the support structure, configured to apply a force to the imprint template and a force sensor between the support structure and a side of the imprint template, when the imprint template is held by the support structure.

Abstract: An imprint lithography apparatus having a first frame to be mounted on a floor, a second frame mounted on the first frame via a kinematic coupling, an alignment sensor mounted on the second frame, to align an imprint lithography template arrangement with a target portion of a substrate, and a position sensor to measure a position of the imprint lithography template arrangement and/or a substrate stage relative to the second frame.

Abstract: An imprint lithography apparatus is disclosed that includes a support structure configured to hold an imprint template. The apparatus further includes an actuator located between the support structure and a side of the imprint template, when the imprint template is held by the support structure, configured to apply a force to the imprint template and a force sensor between the support structure and a side of the imprint template, when the imprint template is held by the support structure.

Abstract: A medicament delivery device, which comprises a driving mechanism and a housing (1) having a reservoir (2), which is at least partly filled with a substance and which is sealed at least on one side with a flexible wall (21). The driving mechanism is adapted to press a piston (23) against the flexible wall (21) thereby releasing the substance from the reservoir (2) through an opening (25) in the reservoir (2). This provides for a safe and reliable medicament delivery device.

Abstract: An imprint lithography apparatus having a first frame to be mounted on a floor, a second frame mounted on the first frame via a kinematic coupling, an alignment sensor mounted on the second frame, to align an imprint lithography template arrangement with a target portion of a substrate, and a position sensor to measure a position of the imprint lithography template arrangement and/or a substrate stage relative to the second frame.

Abstract: An ingestible capsule (10) is provided for delivery of a drug, the capsule (10) comprises a first module (11) and a second module (12). The first module (11) has at least one drug compartment (13) for comprising an amount of the drug. The drug compartment (13) is sealed by a foil (14) with an embedded conducting heating wire (15). The second (12) module comprises electronics (18) for providing an electrical pulse to the heating wire (15) in order to open the drug compartment (13) by melting the foil (14). The first module (11) and second module (12) comprise interoperable connection means (19) for securing the first module (11) to the second module (12) such that the heating wire (15) is electronically coupled to the electronics (18).

Abstract: A droplet generator, for an EUV radiation source, comprises: a capillary in which, in use, molten material flows; an actuator configured to modulate a pressure inside the capillary; and a controller configured to drive the actuator at a driving frequency; wherein the droplet generator is arranged such that, in use, the driving frequency is equal or about equal to a main resonance frequency of the molten material in the capillary.

Abstract: A method of depositing an imprintable medium onto a target area of a substrate for imprint lithography is disclosed. The method includes moving the substrate, a print head comprising a nozzle to eject an imprintable medium onto the substrate, or both, relative to the other in a first direction across the target area while ejecting a first series of droplets of imprintable medium onto the substrate and moving the substrate, the print head, or both, relative to the other in a second opposing direction across the target area while ejecting a second series of droplets of imprintable medium onto the substrate on or adjacent to droplets from the first series of droplets.

Abstract: An inkjet device for controlled positioning of a droplet of a substance onto a substrate includes a print head having a nozzle configured to eject the droplet. A camera is configured to detect and generate images of the droplet after ejection of the droplet from the nozzle. If the droplet volume, velocity, flight path, viscosity or surface tension start to deviate from preset values, a computer is configured to correct for this in a closed loop manner. If the droplet fails to eject, the computer is configured to stop the inkjet device and an operator can maintain the print head. The computer is configured to determine viscosity and surface tension of the droplet from characteristics of the droplet identified from the droplet images, and the computer is configured to control the positioning of the droplet onto the substrate during the printing process based on the determined viscosity and surface tension.

Abstract: An imprint lithography apparatus is disclosed that has a first array of template holders, a second array of template holders, and a substrate table arranged to support a substrate to be imprinted, wherein the first array of template holders is arranged to hold an array of imprint templates that can be used to imprint a first array of patterns onto the substrate, and the second array of template holders is arranged hold an array of imprint templates that can be used to imprint a second array of patterns onto the substrate, the patterns imprinted by the second array being interspersed between the patterns imprinted by the first array.

Abstract: An electronic capsule (100) is provided. The capsule (100) has a discrete drive element (300) comprising: a housing (109), electronics for making the electronic capsule (100) operable, a pumping mechanism (115) for dosing and displacing a substance, a power source (105) for powering the electronic capsule (100) and enabling the electronics and the pumping mechanism (115) to operate, and a locking mechanism (130); and a discrete payload element (200) comprising: a housing (109), a reservoir (210) for storing the substance, one or more openings (250) in the housing (109) for releasing the substance from the reservoir (210) and a locking mechanism (230) for engaging the drive element locking mechanism (130). Engagement of the drive element locking mechanism (130) with the payload element locking mechanism (230) secures the drive element (300) to the payload element (200), thereby making the electronic capsule (100) operable and specific.

Abstract: The present invention provides a method of monitoring the operation of a radiation source fuel droplet stream generator comprising a fuel-containing capillary and a piezo-electric actuator (500). The method comprises analyzing the resonance frequency spectrum of a system comprising the fuel-containing capillary and the piezo-electric actuator in particular to look for changes in the resonance frequencies of the acoustic system which may be indicative of a change in the properties of the system requiring investigation.

Abstract: The present invention provides methods and apparatus for facilitating the start up of a fuel droplet stream generator. During a start-up phase the fuel droplet stream generator is positioned so that the fuel droplets re emitted downwardly whereby gravity assists in the establishment of the stream. The droplets are monitored using a visualization system and once the stream is determined to have the desired characteristics the stream generator is moved to a second position of steady state use in which the droplet stream is emitted in a horizontal direction.

Abstract: A radiation source (e.g., LPP—laser produced plasma source) for generation of extreme UV (EUV) radiation has at least two fuel particle streams having different trajectories. Each stream is directed to cross the path of an excitation (laser) beam focused at a plasma formation region, but the trajectories are spaced apart at the plasma formation region, and the streams phased, so that only one stream has a fuel particle in the plasma formation region at any time, and so that when a fuel particle from one stream is generating plasma and EUV radiation at the plasma generation region, other fuel particles are sufficiently spaced so as to be substantially unaffected by the plasma. The arrangement permits potential doubling of the radiation intensity achievable for a particular fuel particle size.

Abstract: An imprint lithography apparatus is disclosed that includes an imprint template holder arranged to hold an imprint template, and a plurality of position sensors configured to measure change of the size and/or shape of the imprint template, wherein the position sensors are mechanically isolated from the imprint template. Also disclosed is a lithography method that includes using an imprint template to imprint a pattern onto a substrate, and measuring changes of the size and/or shape of the imprint template while imprinting the pattern onto the substrate.

Abstract: An imprint lithography method is disclosed for reducing a difference between an intended topography and an actual topography arising from a part of a patterned layer of fixed imprintable medium. The method involves imprinting an imprint lithography template into a layer of flowable imprintable medium to form a patterned layer in the imprintable medium, and fixing the imprintable medium to form a patterned layer of fixed imprintable medium. Local excitation is applied to the part of the patterned layer to adjust a chemical reaction in the part of the patterned layer to reduce the difference between the intended topography and the actual topography arising from the part of the fixed patterned layer of imprintable medium when this is subsequently used as a resist for patterning the substrate. An imprint medium suitable for imprint lithography with the method is also disclosed.

Abstract: Methods and apparatus are provided for promoting the coalescence of fuel droplets in a stream generated by a radiation source droplet stream generator for use in lithographic apparatus. Various examples are described in which a modulating voltage source is applied to the emitter so that the electrical characteristics of the droplets may be controlled. This results in acceleration and deceleration of droplets in the stream which causes them to merge and promotes coalescence.

Abstract: In an embodiment, there is provided an imprint lithography method that includes providing a first amount of imprintable medium on a first area of a substrate, the first amount of imprintable medium, when fixed, having a first etch rate; and providing a second amount of imprintable medium on a second, different area of the substrate, the second amount of imprintable medium, when fixed, having a second, different etch rate.

Abstract: A sensor comprising a plurality of electrodes having a miniature size and a lower power consumption and a coating exterior to the electrodes, wherein the coating interacts with a target condition thereby producing a change in an electrical property of the electrodes, wherein the change is transduced into an electrical signal by the electrodes. Further a system for medication delivery comprising such sensor and a pill.