Patents by Inventor Joung-Wei Liou
Joung-Wei Liou has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Patent number: 11043251Abstract: A semiconductor device and a method of forming the same are provided. The method includes forming a bottom electrode layer over a substrate. A magnetic tunnel junction (MTJ) layers are formed over the bottom electrode layer. A top electrode layer is formed over the MTJ layers. The top electrode layer is patterned. After patterning the top electrode layer, one or more process cycles are performed on the MTJ layers and the bottom electrode layer. A patterned top electrode layer, patterned MTJ layers and a patterned bottom electrode layer form MTJ structures. Each of the one or more process cycles includes performing an etching process on the MTJ layers and the bottom electrode layer for a first duration and performing a magnetic treatment on the MTJ layers and the bottom electrode layer for a second duration.Type: GrantFiled: September 10, 2019Date of Patent: June 22, 2021Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.Inventors: Bo-Jhih Shen, Kuang-I Liu, Joung-Wei Liou, Jinn-Kwei Liang, Yi-Wei Chiu, Chin-Hsing Lin, Li-Te Hsu, Han-Ting Tsai, Cheng-Yi Wu, Shih-Ho Lin
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Patent number: 11043373Abstract: Methods to form low-k dielectric materials for use as intermetal dielectrics in multilevel interconnect systems, along with their chemical and physical properties, are provided. The deposition techniques described include PECVD, PEALD, and ALD processes where the precursors such as TEOS and MDEOS may provide the requisite O-atoms and O2 gas may not be used as one of the reactants. The deposition techniques described further include PECVD, PEALD, and ALD processes where O2 gas may be used and, along with the O2 gas, precursors containing embedded Si—O—Si bonds, such as (CH3O)3—Si—O—Si—(CH3O)3) and (CH3)3—Si—O—Si—(CH3)3 may be used.Type: GrantFiled: June 21, 2019Date of Patent: June 22, 2021Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.Inventors: Joung-Wei Liou, Yu Lun Ke, Yi-Wei Chiu
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Publication number: 20210119116Abstract: The present disclosure describes an exemplary method that forms spacer stacks with metallic compound layers. The method includes forming magnetic tunnel junction (MTJ) structures on an interconnect layer and depositing a first spacer layer over the MTJ structures and the interconnect layer. The method also includes disposing a second spacer layer—which includes a metallic compound—over the first spacer material, the MTJ structures, and the interconnect layer so that the second spacer layer is thinner than the first spacer layer. The method further includes depositing a third spacer layer over the second spacer layer and between the MTJ structures. The third spacer is thicker than the second spacer.Type: ApplicationFiled: December 28, 2020Publication date: April 22, 2021Inventors: Joung-Wei LIOU, Chin Kun LAN
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Publication number: 20210098685Abstract: An MRAM cell has a bottom electrode, a metal tunneling junction, and a top electrode. The metal tunneling junction has a side surface between the bottom electrode and the top electrode. A thin layer on the side surface includes one or more compounds of a metal found in one of the electrodes. The thin layer has a lower conductance than the MTJ. The electrode metal may have been deposited on the side during MTJ patterning and subsequently been reacted to form a compound having a lower conductance than a nitride of the electrode metal. The thin layer may include an oxide deposited over the redeposited electrode metal. The thin layer may include a compound of the electrode metal deposited over the redeposited electrode metal. A silicon nitride spacer may be formed over the thin layer without forming nitrides of the electrode metal.Type: ApplicationFiled: March 26, 2020Publication date: April 1, 2021Inventors: Joung-Wei Liou, Chin Kun Lan
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Patent number: 10879456Abstract: An exemplary method for forming spacer stacks with metallic compound layers is provided. The method includes forming magnetic tunnel junction (MTJ) structures on an interconnect layer and depositing a first spacer layer over the MTJ structures and the interconnect layer. The method also includes disposing a second spacer layer—which includes a metallic compound—over the first spacer material, the MTJ structures, and the interconnect layer so that the second spacer layer is thinner than the first spacer layer. The method further includes depositing a third spacer layer over the second spacer layer and between the MTJ structures. The third spacer is thicker than the second spacer.Type: GrantFiled: September 12, 2018Date of Patent: December 29, 2020Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.Inventors: Joung-Wei Liou, Chin Kun Lan
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Publication number: 20200393763Abstract: A system and method for depositing a photoresist and utilizing the photoresist are provided. In an embodiment a deposition chamber is utilized along with a first precursor material comprising carbon-carbon double bonds and a second precursor material comprising repeating units to deposit the photoresist onto a substrate. The first precursor material is turned into a plasma in a remote plasma chamber prior to being introduced into the deposition chamber. The resulting photoresist comprises a carbon backbone with carbon-carbon double bonds.Type: ApplicationFiled: August 31, 2020Publication date: December 17, 2020Inventors: Keng-Chu Lin, Joung-Wei Liou, Cheng-Han Wu, Ya Hui Chang
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Publication number: 20200381252Abstract: A method includes forming a multi-layer mask over a dielectric layer. Forming the multi-layer mask includes forming a bottom layer over the dielectric layer. A first middle layer is formed over the bottom layer. The first middle layer includes a first silicon-containing material. The first silicon-containing material has a first content of Si—CH3 bonds. A second middle layer is formed over the first middle layer. The second middle layer includes a second silicon-containing material. The second silicon-containing material has a second content of Si—CH3 bonds less than the first content of Si—CH3 bonds.Type: ApplicationFiled: August 17, 2020Publication date: December 3, 2020Inventors: Joung-Wei Liou, Chin Kun Lan
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Publication number: 20200357612Abstract: A method of wafer processing includes supporting a wafer in a process chamber. The method further includes introducing a flow of a gaseous material through an inlet of the process chamber to process the wafer. The method further includes generating, between the inlet and the wafer, controllable forces acting in various directions on the gaseous material to spread the gaseous material inside the process chamber.Type: ApplicationFiled: July 24, 2020Publication date: November 12, 2020Inventors: Chien Kuo HUANG, Shih-Wen HUANG, Joung-Wei LIOU, Chia-I SHEN, Fei-Fan CHEN
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Patent number: 10761427Abstract: A system and method for depositing a photoresist and utilizing the photoresist are provided. In an embodiment a deposition chamber is utilized along with a first precursor material comprising carbon-carbon double bonds and a second precursor material comprising repeating units to deposit the photoresist onto a substrate. The first precursor material is turned into a plasma in a remote plasma chamber prior to being introduced into the deposition chamber. The resulting photoresist comprises a carbon backbone with carbon-carbon double bonds.Type: GrantFiled: May 16, 2016Date of Patent: September 1, 2020Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.Inventors: Keng-Chu Lin, Joung-Wei Liou, Cheng-Han Wu, Ya Hui Chang
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Patent number: 10748765Abstract: A method includes forming a multi-layer mask over a dielectric layer. Forming the multi-layer mask includes forming a bottom layer over the dielectric layer. A first middle layer is formed over the bottom layer. The first middle layer includes a first silicon-containing material. The first silicon-containing material has a first content of Si—CH3 bonds. A second middle layer is formed over the first middle layer. The second middle layer includes a second silicon-containing material. The second silicon-containing material has a second content of Si—CH3 bonds less than the first content of Si—CH3 bonds.Type: GrantFiled: October 25, 2019Date of Patent: August 18, 2020Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.Inventors: Joung-Wei Liou, Chin Kun Lan
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Patent number: 10741366Abstract: A wafer process chamber includes a wafer support in the wafer process chamber, the wafer support configured to support a wafer. The process chamber includes a gas diffuser unit within the wafer process chamber. The gas diffuser unit includes at least one controllable diffuser configured to generate one or more controllable forces acting in various directions on a gaseous material in a flow of the gaseous material introduced into the process chamber, to spread the gaseous material inside the process chamber. The gas diffuser unit includes a power source coupled to the at least one controllable diffuser, the power source configured to supply power to the at least one controllable diffuser to generate the one or more controllable forces. The gas diffuser unit includes a controller coupled to the power source, the controller configured to control the power supplied by the power source to the at least one controllable diffuser.Type: GrantFiled: June 25, 2018Date of Patent: August 11, 2020Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.Inventors: Chien Kuo Huang, Shih-Wen Huang, Joung-Wei Liou, Chia-I Shen, Fei-Fan Chen
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Publication number: 20200176041Abstract: A semiconductor device and a method of forming the same are provided. The method includes forming a bottom electrode layer over a substrate. A magnetic tunnel junction (MTJ) layers are formed over the bottom electrode layer. A top electrode layer is formed over the MTJ layers. The top electrode layer is patterned. After patterning the top electrode layer, one or more process cycles are performed on the MTJ layers and the bottom electrode layer. A patterned top electrode layer, patterned MTJ layers and a patterned bottom electrode layer form MTJ structures. Each of the one or more process cycles includes performing an etching process on the MTJ layers and the bottom electrode layer for a first duration and performing a magnetic treatment on the MTJ layers and the bottom electrode layer for a second duration.Type: ApplicationFiled: September 10, 2019Publication date: June 4, 2020Inventors: Bo-Jhih Shen, Kuang-I Liu, Joung-Wei Liou, Jinn-Kwei Liang, Yi-Wei Chiu, Chin-Hsing Lin, Li-Te Hsu, Han-Ting Tsai, Cheng-Yi Wu, Shih-Ho Lin
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Publication number: 20200176253Abstract: A method includes forming a multi-layer mask over a dielectric layer. Forming the multi-layer mask includes forming a bottom layer over the dielectric layer. A first middle layer is formed over the bottom layer. The first middle layer includes a first silicon-containing material. The first silicon-containing material has a first content of Si—CH3 bonds. A second middle layer is formed over the first middle layer. The second middle layer includes a second silicon-containing material. The second silicon-containing material has a second content of Si—CH3 bonds less than the first content of Si—CH3 bonds.Type: ApplicationFiled: October 25, 2019Publication date: June 4, 2020Inventors: Joung-Wei Liou, Chin Kun Lan
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Publication number: 20200135552Abstract: The present disclosure relates to a method of forming a semiconductor structure. The method includes depositing an etch-stop layer (ESL) over a first dielectric layer. The ESL layer deposition can include: flowing a first precursor over the first dielectric layer; purging at least a portion of the first precursor; flowing a second precursor over the first dielectric layer to form a sublayer of the ESL layer; and purging at least a portion of the second precursor. The method can further include depositing a second dielectric layer on the ESL layer and forming a via in the second dielectric layer and through the ESL layer.Type: ApplicationFiled: June 5, 2019Publication date: April 30, 2020Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.Inventors: Joung-Wei Liou, Chin Kun Lan
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Publication number: 20200111703Abstract: An embodiment is a method of fabricating a semiconductor structure. The method includes depositing a hard mask. A multi-layer structure is deposited over the hard mark. The multi-layer structure includes a bottom layer, a first middle layer over the bottom layer, a second middle layer over the first middle layer, and a top layer over the second middle layer. The first middle layer comprises a SiCxHyOz material in which the SiCxHyOz material has a silicon-to-silicon bond content in a range from about 0.5% to about 5%. The multi-layer structure is patterned to form a patterned first middle layer having openings. The hard mask is etched through the openings in the patterned first middle layer.Type: ApplicationFiled: December 5, 2019Publication date: April 9, 2020Inventors: Joung-Wei Liou, Chin Kun Lan
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Publication number: 20200043721Abstract: Methods to form low-k dielectric materials for use as intermetal dielectrics in multilevel interconnect systems, along with their chemical and physical properties, are provided. The deposition techniques described include PECVD, PEALD, and ALD processes where the precursors such as TEOS and MDEOS may provide the requisite O-atoms and O2 gas may not be used as one of the reactants. The deposition techniques described further include PECVD, PEALD, and ALD processes where O2 gas may be used and, along with the O2 gas, precursors containing embedded Si—O—Si bonds, such as (CH3O)3—Si—O—Si—(CH3O)3) and (CH3)3—Si—O—Si—(CH3)3 may be used.Type: ApplicationFiled: June 21, 2019Publication date: February 6, 2020Inventors: Joung-Wei Liou, Yu Lun Ke, Yi-Wei Chiu
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Publication number: 20200006641Abstract: The present disclosure describes an exemplary method that forms spacer stacks with metallic compound layers. The method includes forming magnetic tunnel junction (MTJ) structures on an interconnect layer and depositing a first spacer layer over the MTJ structures and the interconnect layer. The method also includes disposing a second spacer layer—which includes a metallic compound—over the first spacer material, the MTJ structures, and the interconnect layer so that the second spacer layer is thinner than the first spacer layer. The method further includes depositing a third spacer layer over the second spacer layer and between the MTJ structures. The third spacer is thicker than the second spacer.Type: ApplicationFiled: September 12, 2018Publication date: January 2, 2020Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.Inventors: Joung-Wei Liou, Chin Kun Lan
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Publication number: 20200006126Abstract: The present disclosure describes a method for forming a silicon-based, carbon-rich, low-k ILD layer with a carbon concentration between about 15 atomic % and about 20 atomic %. For example, the method includes depositing a dielectric layer, over a substrate, with a dielectric material having a dielectric constant below 3.9 and a carbon atomic concentration between about 15% and about 20%; exposing the dielectric layer to a thermal process configured to outgas the dielectric material; etching the dielectric layer to form openings; and filling the openings with a conductive material to form conductive structures.Type: ApplicationFiled: September 21, 2018Publication date: January 2, 2020Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.Inventors: Joung-Wei Liou, Yi-Wei Chiu, Bo-Jhih Shen
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Patent number: 10510586Abstract: An embodiment is a method of fabricating a semiconductor structure. The method includes depositing a hard mask. A multi-layer structure is deposited over the hard mark. The multi-layer structure includes a bottom layer, a first middle layer over the bottom layer, a second middle layer over the first middle layer, and a top layer over the second middle layer. The first middle layer comprises a SiCxHyOz material in which the SiCxHyOz material has a silicon-to-silicon bond content in a range from about 0.5% to about 5%. The multi-layer structure is patterned to form a patterned first middle layer having openings. The hard mask is etched through the openings in the patterned first middle layer.Type: GrantFiled: September 7, 2018Date of Patent: December 17, 2019Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.Inventors: Joung-Wei Liou, Chin Kun Lan
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Publication number: 20190096820Abstract: The present disclosure relates to a semiconductor device and a manufacturing method thereof, and more particularly to an interlayer dielectric (ILD) layer in a semiconductor device. In one example, the ILD layer is over a substrate and includes a dielectric with a dielectric constant of less than about 3.3 and a hardness of at least about 3 GPa. The semiconductor device also includes an interconnect formed in the ILD layer.Type: ApplicationFiled: March 29, 2018Publication date: March 28, 2019Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.Inventors: Joung-Wei LIOU, Greg Huang