Abstract: A temperature control system includes: a circulation channel which includes a temperature adjustment target and through which a circulation fluid that adjusts a temperature of the temperature adjustment target flows; a temperature adjuster that is arranged in the circulation channel and that adjusts a temperature of the circulation fluid supplied to the temperature adjustment target; a first temperature adjustment unit that is connected to the circulation channel via a first supply channel and that delivers a first fluid having a first temperature; a second temperature adjustment unit that is connected to the circulation channel via a second supply channel and that delivers a second fluid having a second temperature higher than the first temperature; a first valve arranged in the first supply channel; and a second valve arranged in the second supply channel.

Abstract: To control the temperature of a fluid with high accuracy, a temperature control system is equipped with: a circulation channel including a temperature control target and a tank containing a fluid adjusted to a specified temperature range including a target temperature of the temperature control target; and a first temperature controller that is arranged between the tank and the temperature control target in the circulation channel and that adjusts the temperature of the fluid to be supplied to the temperature control target.

Abstract: A temperature control device includes a smoother including a smoothing channel through which fluid from a first inlet flows, and a first outlet from which the fluid flowed through the smoothing channel flows out, the smoother making a temperature fluctuation amount of the fluid in the first outlet smaller than that in the first inlet, a thermoregulator including a second inlet into which the fluid from the first outlet flows, a thermoregulating channel through which the fluid from the second inlet flows, a thermoregulating unit regulating a temperature of the fluid flowing through the thermoregulating channel, and a second outlet from which the fluid flowed through the thermoregulating channel flows out, calculating a temperature regulation amount of the thermoregulating unit, based on temperature of the fluid in the smoothing channel, and calculating the temperature regulation amount, based on temperature of the fluid at a position downstream of the second outlet.

Abstract: A temperature control system includes: first adjusting the temperature of fluid in a first portion the fluid having a first temperature determined based on a second temperature higher than the first temperature or the second temperature; second adjusting the temperature of the fluid supplied to a target at a second portion between the first portion and the target; first detecting the temperature of first fluid supplied from the first to second portion; second detecting the temperature of the fluid or the target at a predetermined position between an outlet of the second portion and an inlet of the first portion; controlling the first adjusting based on the first detected value such that the temperature of the first fluid becomes a first temperature; and controlling the second adjusting based on a the second detected such that the temperature of the fluid becomes a second temperature at the predetermined position.

Abstract: A temperature control system includes a circulation channel including a temperature control target to be temperature-controlled via a fluid, a heater capable of heating the fluid, and a cooler capable of cooling the fluid, a bypass channel connected to each of a first portion of the circulation channel located upstream of the cooler and a second portion of the circulation channel located downstream of the cooler to bypass the cooler, a valve device capable of controlling a flow rate of the fluid flowing through the cooler and a flow rate of the fluid flowing through the bypass channel individually, and a control device. The control device includes a valve controller configured to control the valve device to make a temperature of the fluid at the second portion equal to a predetermined temperature.

Abstract: A fluid heating device includes: a tank to store a fluid; a pump to deliver the fluid stored in the tank; a heater to heat the delivered fluid to a predetermined temperature; a return pipe to return the heated fluid to the tank; a fluid supply valve to supply an unheated fluid into the tank; a fluid discharge valve to discharge the heated fluid from the tank; a temperature sensor to detect a temperature of the heated fluid; and a temperature controller to control an opening degree of each of the fluid supply valve and the fluid discharge valve to control the temperature of the fluid stored in the tank. The temperature controller includes: a discharge opening-degree controller-to control the opening degree of the fluid discharge valve; and a supply opening-degree controller to control the opening degree of the fluid supply valve.

Abstract: A temperature control device includes a smoother including a smoothing channel through which fluid from a first inlet flows, and a first outlet from which the fluid flowed through the smoothing channel flows out, the smoother making a temperature fluctuation amount of the fluid in the first outlet smaller than that in the first inlet, a thermoregulator including a second inlet into which the fluid from the first outlet flows, a thermoregulating channel through which the fluid from the second inlet flows, a thermoregulating unit regulating a temperature of the fluid flowing through the thermoregulating channel, and a second outlet from which the fluid flowed through the thermoregulating channel flows out, calculating a temperature regulation amount of the thermoregulating unit, based on temperature of the fluid in the smoothing channel, and calculating the temperature regulation amount, based on temperature of the fluid at a position downstream of the second outlet.

Abstract: To control the temperature of a fluid with high accuracy, a temperature control system is equipped with: a circulation channel including a temperature control target and a tank containing a fluid adjusted to a specified temperature range including a target temperature of the temperature control target; and a first temperature controller that is arranged between the tank and the temperature control target in the circulation channel and that adjusts the temperature of the fluid to be supplied to the temperature control target.

Abstract: A quartz crystal resonator that includes a substrate including a vibration portion, a frame portion that surrounds the vibration portion, and first to fourth coupling portions that couple the vibration portion and the frame portion to each other; and first and second excitation electrodes. An intersecting point of diagonal lines of a quadrangle formed by first to fourth connection portions is located on the positive side of the z axis relative to the x axis.

Abstract: A liquid heating device includes a circulation flow path that is connected to a branch flow path through which a first liquid supplied to an object flows, a heating device that is disposed in the circulation flow path and heats the first liquid flowing through the circulation flow path, and a cooling device that cools the first liquid flowing through the circulation flow path in a state where supply of the first liquid to the object is stopped.

Abstract: A fluid heating device includes: a tank to store a fluid; a pump to deliver the fluid stored in the tank; a heater to heat the delivered fluid to a predetermined temperature; a return pipe to return the heated fluid to the tank; a fluid supply valve to supply an unheated fluid into the tank; a fluid discharge valve to discharge the heated fluid from the tank; a temperature sensor to detect a temperature of the heated fluid; and a temperature controller to control an opening degree of each of the fluid supply valve and the fluid discharge valve to control the temperature of the fluid stored in the tank. The temperature controller includes: a discharge opening-degree controller-to control the opening degree of the fluid discharge valve; and a supply opening-degree controller to control the opening degree of the fluid supply valve.

Abstract: A manipulated variable calculator having a plurality of control loops and configured to calculate manipulated variables to be respectively given to a plurality of temperature adjusters includes: a reference model output generator configured to generate a reference model that is a response output until reaching a temperature setpoint when, in the plurality of control loops, a manipulated variable of a control loop having the slowest response speed is defined as 100%; a simulator configured to sequentially search for a switching time to determine a manipulated variable pattern; a reference model configured to generate a reference model output based on the searched switching time; and a control switching unit configured to switch to a feed-back control using an error between the reference model outlet and the temperature setpoint when the reference model outlet reaches a predetermined time or a predetermined temperature after the reference model outlet starts.

Abstract: A plurality of temperature adjusters each independently include a control loop. A manipulated variable calculator is configured to give manipulated variables to the respective temperature adjusters and includes a reference model output generator configured to provide a reference model as a response output for reaching a temperature setpoint when a first control loop having a slowest response speed among the control loops is defined to have a 100% manipulated variable. The reference model output generator includes: a simulator configured to determine a manipulated variable pattern by conducting successive search of a switching time; and a reference model obtained from a response in which, among the plurality of control loops, the first control loop having the slowest response speed is defined to have the 100% manipulated variable, and the rest of the plurality of control loops are controlled to follow the first control loop.

Abstract: A manipulated variable calculator having a plurality of control loops and configured to calculate manipulated variables to be respectively given to a plurality of temperature adjusters includes: a reference model output generator configured to generate a reference model that generates a response output until reaching a temperature setpoint when, in the plurality of control loops, a manipulated variable of a control loop having the slowest response speed is defined as 100%; a simulator configured to sequentially search for a switching time to determine a manipulated variable pattern; a reference model configured to generate a reference model output based on the searched switching time; and a reference model selecting unit configured to select the reference model depending on a heating responsiveness and a cooling responsiveness of the temperature adjusters.

Abstract: A quartz crystal resonator that includes a substrate including a vibration portion, a frame portion that surrounds the vibration portion, and first to fourth coupling portions that couple the vibration portion and the frame portion to each other; and first and second excitation electrodes. An intersecting point of diagonal lines of a quadrangle formed by first to fourth connection portions is located on the positive side of the z axis relative to the x axis.

Abstract: A temperature controller for a semiconductor wafer is configured to perform a temperature control on a plurality of temperature adjusters including a reference temperature adjuster to perform a temperature adjustment of the semiconductor wafer, in which a manipulated variable calculator to give a manipulated variable to a master loop and a slave loop includes a master-slave switching unit configured to switch between the master loop and the slave loop and a master-slave cancellation unit configured to cancel a setting of the master loop and the slave loop when a temperature setpoint of the slave loop is set to have a temperature gradient against a temperature setpoint of the master loop.

Abstract: A method capable of manufacturing a quartz vibrator by disposing a metallic bonding material on one main surface of a ceramic plate having a quartz vibrating element mounted thereon. Thereafter, the bonding of a cap having a recess to the ceramic plate by disposing the cap on the one main surface of the ceramic plate so that an open side of the recess faces the ceramic plate, melting the bonding material, and then allowing the bonding material to set, is carried out.

Abstract: A temperature controller for a semiconductor wafer is configured to perform a temperature control on a plurality of temperature adjusters including a reference temperature adjuster to perform a temperature adjustment of the semiconductor wafer, in which a manipulated variable calculator to give a manipulated variable to a master loop and a slave loop includes a master-slave switching unit configured to switch between the master loop and the slave loop and a master-slave cancellation unit configured to cancel a setting of the master loop and the slave loop when a temperature setpoint of the slave loop is set to have a temperature gradient against a temperature setpoint of the master loop.

Abstract: A plurality of temperature adjusters each independently include a control loop. A manipulated variable calculator is configured to give manipulated variables to the respective temperature adjusters and includes a reference model output generator configured to provide a reference model as a response output for reaching a temperature setpoint when a first control loop having a slowest response speed among the control loops is defined to have a 100% manipulated variable. The reference model output generator includes: a simulator configured to determine a manipulated variable pattern by conducting successive search of a switching time; and a reference model obtained from a response in which, among the plurality of control loops, the first control loop having the slowest response speed is defined to have the 100% manipulated variable, and the rest of the plurality of control loops are controlled to follow the first control loop.

Abstract: A temperature controller that performs a temperature control on a plurality of temperature adjusters including a reference temperature adjuster to adjust a temperature of a semiconductor wafer includes a setpoint setting section that: sets a temperature detected by a master temperature detector as a control setpoint for a reference one of the temperature adjusters of a master loop, until a temporary setpoint below an actual control setpoint preset as a desired temperature of the semiconductor wafer is reached; and sets the actual control setpoint as the control setpoint for the master loop after the temporary setpoint is reached.