Abstract: A manipulated variable calculator having a plurality of control loops and configured to calculate manipulated variables to be respectively given to a plurality of temperature adjusters includes: a reference model output generator configured to generate a reference model that generates a response output until reaching a temperature setpoint when, in the plurality of control loops, a manipulated variable of a control loop having the slowest response speed is defined as 100%; a simulator configured to sequentially search for a switching time to determine a manipulated variable pattern; a reference model configured to generate a reference model output based on the searched switching time; and a reference model selecting unit configured to select the reference model depending on a heating responsiveness and a cooling responsiveness of the temperature adjusters.

Abstract: A manipulated variable calculator having a plurality of control loops and configured to calculate manipulated variables to be respectively given to a plurality of temperature adjusters includes: a reference model output generator configured to generate a reference model that is a response output until reaching a temperature setpoint when, in the plurality of control loops, a manipulated variable of a control loop having the slowest response speed is defined as 100%; a simulator configured to sequentially search for a switching time to determine a manipulated variable pattern; a reference model configured to generate a reference model output based on the searched switching time; and a control switching unit configured to switch to a feed-back control using an error between the reference model outlet and the temperature setpoint when the reference model outlet reaches a predetermined time or a predetermined temperature after the reference model outlet starts.

Abstract: A quartz vibrator that includes a substrate, a quartz vibrating element, and a dome-shaped cap. The quartz vibrating element is mounted on the substrate. The cap is bonded to the substrate. The cap defines and forms a sealed space that seals the quartz vibrating element along with the substrate. The cap has a side wall portion, a ceiling portion, and a connecting portion. The side wall portion encloses the quartz vibrating element. The ceiling portion is positioned above the quartz vibrating element. The connecting portion connects the side wall portion and the ceiling portion. The connecting portion is thinner than the side wall portion and the ceiling portion.

Abstract: A temperature adjustment system configured to adjust the temperature of a fluid used in a semiconductor manufacturing apparatus includes: a heat exchanger including therein a temperature adjuster for heating and cooling the fluid, the heat exchanger being configured to perform heat exchange between the fluid therein and the temperature adjuster; a temperature sensor configured to measure the temperature of the fluid; a PID-constant calculator configured to calculate PID constants for PID control based on the physical properties of the fluid and a time constant of the temperature sensor; and a PID-control calculator configured to perform the PID control on the temperature adjuster with the PID constants calculated by the PID-constant calculator.

Abstract: A temperature controller that performs a temperature control on a plurality of temperature adjusters including a reference temperature adjuster to adjust a temperature of a semiconductor wafer includes a setpoint setting section that: sets a temperature detected by a master temperature detector as a control setpoint for a reference one of the temperature adjusters of a master loop, until a temporary setpoint below an actual control setpoint preset as a desired temperature of the semiconductor wafer is reached; and sets the actual control setpoint as the control setpoint for the master loop after the temporary setpoint is reached.

Abstract: A temperature adjustment system configured to adjust the temperature of a fluid used in a semiconductor manufacturing apparatus includes: a heat exchanger including therein a temperature adjuster for heating and cooling the fluid, the heat exchanger being configured to perform heat exchange between the fluid therein and the temperature adjuster; a temperature sensor configured to measure the temperature of the fluid; a PID-constant calculator configured to calculate PID constants for PID control based on the physical properties of the fluid and a time constant of the temperature sensor; and a PID-control calculator configured to perform the PID control on the temperature adjuster with the PID constants calculated by the PID-constant calculator.

Abstract: A quartz vibrator that includes a substrate, a quartz vibrating element, and a dome-shaped cap. The quartz vibrating element is mounted on the substrate. The cap is bonded to the substrate. The cap defines and forms a sealed space that seals the quartz vibrating element along with the substrate. The cap has a side wall portion, a ceiling portion, and a connecting portion. The side wall portion encloses the quartz vibrating element. The ceiling portion is positioned above the quartz vibrating element. The connecting portion connects the side wall portion and the ceiling portion. The connecting portion is thinner than the side wall portion and the ceiling portion.

Abstract: A method of manufacturing an electronic component includes bonding a dome-shaped cap having a recess to a substrate on which are disposed a vibrator and a bonding material projecting in a rounded shape and surrounding the vibrator while the cap is disposed so that an open side of the recess faces the substrate and is relatively pressed to the substrate side. The bonding material is disposed so that, relative to the vibrator, an outer side end portion of the cap is located on the inner side of the bonding material or an inner side end portion of the cap is located on the outer side of the bonding material.

Abstract: A method capable of manufacturing a quartz vibrator by disposing a metallic bonding material on one main surface of a ceramic plate having a quartz vibrating element mounted thereon. Thereafter, the bonding of a cap having a recess to the ceramic plate by disposing the cap on the one main surface of the ceramic plate so that an open side of the recess faces the ceramic plate, melting the bonding material, and then allowing the bonding material to set, is carried out.

Abstract: A temperature control device includes an estimator that estimates the outlet temperature of fluid at an outlet of heating tanks to which no outlet temperature sensor is provided. The temperature control device includes a control unit. For a heating tank to which an outlet temperature sensor is provided, the control unit determines a manipulated variable on the basis of the outlet temperature which has been measured and an individual target temperature. For a heating tank to which no outlet temperature sensor is provided, the control unit determines a manipulated variable on the basis of the estimated temperature estimated by the estimator and an individual target temperature. The control unit controls the outlet temperature of the heating tanks on the basis of the manipulated variables.

Abstract: A 3-D shape measurement apparatus for grasping the state of an object with ease and accuracy is provided.

Abstract: An estimator estimates the outlet temperature of fluid at an outlet of heating tanks to which no outlet temperature sensor is provided. For a heating tank to which an outlet temperature sensor is provided, a control unit determines an manipulated variable on the basis of the outlet temperature which has been measured and a target temperature, while it determines an manipulated variable for a heating tank to which no outlet temperature sensor is provided, on the basis of the estimated temperature estimated by the estimator and a target temperature.

Abstract: A condition analysis apparatus capable of grasping the condition of an object easily and accurately is provided. The condition analysis apparatus 1 includes a three-dimensional sensor 10 for measuring sampling-point-moves in the height direction of an object 2 existing in a target area at a plurality of sampling points, and area definition means 22 for defining an area where a plurality of the sampling-point-moves are in the generally same phase. The thus constructed condition analysis apparatus 1 can grasp the condition of the object 2 easily and accurately. Preferably, the condition analysis apparatus 1 includes information output means 40 for outputting information of an area including the area defined by the area definition means 22.

Abstract: A monitor which can detect respiration of a sleeping person without being affected by the attitude of the sleeping person or the indoor illumination light and can easily evaluate detected respiration quantitatively through image measurement. The monitor comprises means (1) for projecting a specified illumination pattern, means (5) for picking up the image of projected light continuously, means (7) for calculating inter-frame moving amount of the illumination pattern from the image of two frames acquired by the image pickup means at different times, means (8) for generating a moving amount waveform data comprising inter-frame moving amounts arranged in time series, and means (9) for detecting the movement of an object from the moving amount waveform data.

Abstract: To provide a monitoring device which can detect conditions of a sleeping person reliably and which is simple. A monitoring device comprising: multiple independent distance sensors 11 installed facing different positions in a monitored target area 50 to be monitored for measuring a distance to a monitored target 2, a calculating unit 22 for calculating changes over time in the outputs of the distance sensors 11, and a detection processor 23 for detecting changes in shape of the monitored target 2 based on the calculated changes over time in one or multiple distance sensor 11 among the multiple distance sensors 11.

Abstract: A condition analysis apparatus capable of grasping the condition of an object easily and accurately is provided. The condition analysis apparatus 1 includes a three-dimensional sensor 10 for measuring sampling-point-moves in the height direction of an object 2 existing in a target area at a plurality of sampling points, and area definition means 22 for defining an area where a plurality of the sampling-point-moves are in the generally same phase. The thus constructed condition analysis apparatus 1 can grasp the condition of the object 2 easily and accurately. Preferably, the condition analysis apparatus 1 includes information output means 40 for outputting information of an area including the area defined by the area definition means 22.

Abstract: A 3-D shape measurement apparatus for grasping the state of an object with ease and accuracy is provided.

Abstract: To provide a monitoring device which can detect conditions of a sleeping person reliably and which is simple. A monitoring device comprising: multiple independent distance sensors 11 installed facing different positions in a monitored target area 50 to be monitored for measuring a distance to a monitored target 2, a calculating unit 22 for calculating changes over time in the outputs of the distance sensors 11, and a detection processor 23 for detecting changes in shape of the monitored target 2 based on the calculated changes over time in one or multiple distance sensor 11 among the multiple distance sensors 11.

Abstract: A monitor which can detect respiration of a sleeping person without being affected by the attitude of the sleeping person or the indoor illumination light and can easily evaluate detected respiration quantitatively through image measurement. The monitor comprises means (1) for projecting a specified illumination pattern, means (5) for picking up the image of projected light continuously, means (7) for calculating inter-frame moving amount of the illumination pattern from the image of two frames acquired by he image pickup means at different times, means (8) for generating a moving amount waveform data comprising inter-frame moving amounts arranged in time series, and means (9) for detecting the movement of an object from the moving amount waveform data.

Abstract: A melt level detector is provided for detecting the melt level of a CZ furnace by triangulation. The laser beam (2) from a laser source (1) is moved in radial directions of a crucible (14) in the CZ furnace to find a location where a photodetector system (5, 7) can receive the reflection (4) from the melt level (3), and the laser beam (2) is fixed at the location. Since the measurements thus take place within an extremely small angular range of the laser beam, the melt level (3) can be detected with little effect of noise on the melt level (3) while eliminating complexity of the device.