Abstract: A vibration power generator comprises: a fixed substrate; a vibrating body having a surface opposed to the fixed substrate, the vibrating body being vibratable to the fixed substrate; electret electrodes aligned in a vibration direction on one of the surface of the fixed substrate and the surface of the vibrating body; and first fixed electrodes and second fixed electrodes alternately aligned in the vibration direction on the other thereof, wherein when the vibrating body is at a resting position, each of the electret electrodes overlaps with both electrodes of a corresponding fixed electrode pair, the corresponding fixed electrode pair being one of the first fixed electrodes and one of the second fixed electrodes that are opposed to the electret electrode, and when the vibrating body is not at a resting position, each of the electret electrodes always overlaps with at least one electrode of the corresponding fixed electrode pair.

Abstract: Provided is a tire sensing system that reduces the power consumption, size, weight, and cost, while suppressing an increase in fuel consumption of moving means. The tire sensing system is adapted to monitor state of a tire or a road surface from vibration information to perform safety control of the moving means having the tire. The tire sensing system includes a sensor disposed in a position of an inner surface of the tire where the sensor can sense the vibration, a receiver for receiving the information sent from the sensor, and a control means for controlling the moving means on the basis of the information from the receiver. The state is estimated from first vibration applied to the sensor upon contact with the road surface via the tire, second vibration applied to the sensor upon departure from the road surface, and a contact time from the contact to the departure.

Abstract: A reactor of the present disclosure includes a solid electrolyte having a first surface and a second surface; a plurality of first electrodes arranged on the first surface; a plurality of second electrodes arranged on the second surface; a first substrate having a plurality of first recesses on one main surface thereof; and a second substrate having a plurality of second recesses on one main surface thereof. The first substrate is arranged on the solid electrolyte in such a manner that each of the first recesses faces one of the first electrodes. The second substrate is arranged on the solid electrolyte in such a manner that each of the second recesses faces one of the second electrodes. A plurality of first chambers and a plurality of second chambers are formed in the reactor. At least one of the plurality of first chambers is arranged so as to overlap two or more of the plurality of second chambers when the reactor is viewed from a direction perpendicular to the one main surface of the first substrate.

Abstract: A power-generating vibration sensor according to the present disclosure includes a power generation device that converts vibration into power and outputs vibration information, a first power system that extracts the output vibration information, and a second power system that is connected to the power generation device and supplies the power to a transmitter for transmitting the vibration information extracted by the first power system.

Abstract: Electricity generated by a vibration power generator 200 can be extracted efficiently by providing the vibration power generator 200, a rectifier circuit bridge 205, an output controlling circuit 201, a load detecting circuit 202 and a frequency detecting circuit 204 and detecting a frequency of the vibration power generator 200 and then controlling an impedance of an output controlling circuit 101 depending on the frequency.

Abstract: Provided is a tire sensing system that reduces the power consumption, size, weight, and cost, while suppressing an increase in fuel consumption of moving means. The tire sensing system is adapted to monitor state of a tire or a road surface from vibration information to perform safety control of the moving means having the tire. The tire sensing system includes a sensor disposed in a position of an inner surface of the tire where the sensor can sense the vibration, a receiver for receiving the information sent from the sensor, and a control means for controlling the moving means on the basis of the information from the receiver. The state is estimated from first vibration applied to the sensor upon contact with the road surface via the tire, second vibration applied to the sensor upon departure from the road surface, and a contact time from the contact to the departure.

Abstract: A vibration power generator includes: a fixed substrate; a first fixed electrode piece disposed on the fixed substrate, the first fixed electrode piece having a first width of 2w; a second fixed electrode piece disposed on the fixed substrate, the second fixed electrode piece having a second width of 2w; a cover substrate disposed with a space g from the fixed substrate, the cover substrate being opposed to the fixed substrate; a vibrating body disposed between the fixed substrate and the cover substrate; and an electret electrode piece disposed on a side opposed to the first fixed electrode piece and the second fixed electrode piece of the vibrating body, the electret electrode piece having a width that is greater than 2w and less than or equal to 2w+s.

Abstract: A vibration power generator includes a first substrate, a first electrode on the first substrate, a second substrate spaced from and opposite the first substrate, and a second electrode on the second substrate. The first electrode vibrates with respect to the second substrate, and the first electrode and the second electrode include a film retaining electric charges. The vibration generator includes a third electrode with a film retaining electric charges on the first substrate, and a fourth electrode with a film retaining electric charges on the second substrate. The third electrode and the fourth electrode are arranged so that the first substrate is retained in a predetermined position when an external force does not act on the first substrate, while an electrostatic force for returning the first substrate to a predetermined position acts on the first substrate and the first substrate moves with respect to the second substrate.

Abstract: In a MEMS device having a substrate 1, a sealing membrane 7, and a movable portion 3 of beam and an electrode 5 which have a region wherein they overlap with a gap in perpendicular to a substrate 1 surface, a first cavity 9 is on the side of the movable portion 3 in the direction perpendicular to the surface of the substrate, and a second cavity is the other cavity, and an inner surface a of a side wall A in contact with the electrode 5, of the first cavity 9, is positioned more inside than an inner surface b of a side wall B in contact with the electrode 5, of the second cavity 10, in the direction parallel to the substrate surface, such that the movable portion 3 does not collide with the electrode 5 when mechanical stress is applied from outside to the sealing membrane 7.

Abstract: A vibration power generator including a first substrate; first electrodes disposed over one surface of the first substrate; a second substrate spaced from the first substrate and opposed to the one surface of the first substrate; and second electrodes disposed over one surface of the second substrate so as to be opposed to the first electrodes, wherein one of the first and second electrodes includes a film holding a charge; one of the first and second substrates is a vibratory substrate; and an overlapped area between the first and second electrodes becomes minimum and then maximum, or becomes maximum and minimum, and an electrostatic capacity Cp formed between the first and second electrodes when the overlapped area becomes maximum changes, and the change of Cp comprises an increase of Cp, while the vibratory substrate is displaced from the vibration center to the vibration end.

Abstract: A vibration power generator is provided that increases output power by improving the electrostatic capacitance when the area of the overlap between electret electrodes and counter electrodes is maximum while having the function of limiting the spread of the electric field from the electret electrodes.

Abstract: A vibration power generator comprises: a fixed substrate; a vibrating body having a surface opposed to the fixed substrate, the vibrating body being vibratable to the fixed substrate; electret electrodes aligned in a vibration direction on one of the surface of the fixed substrate and the surface of the vibrating body; and first fixed electrodes and second fixed electrodes alternately aligned in the vibration direction on the other thereof, wherein when the vibrating body is at a resting position, each of the electret electrodes overlaps with both electrodes of a corresponding fixed electrode pair, the corresponding fixed electrode pair being one of the first fixed electrodes and one of the second fixed electrodes that are opposed to the electret electrode, and when the vibrating body is not at a resting position, each of the electret electrodes always overlaps with at least one electrode of the corresponding fixed electrode pair.

Abstract: A resonator using the MEMS technology is provided which improves the accuracy of a shape of electrodes so as avoid a short circuit that would otherwise be caused between input and output electrodes to thereby increase the reliability thereof. A resonator includes a substrate 101, an insulation layer 102 formed selectively on the substrate 101 as a sacrificial surface, a beam 103 formed on the substrate 101 via a space, a first support portion 104A formed on the insulation layer 102 of the same material as that of the beam 103, and electrodes formed with a space defined between the beam 103 and themselves for signals to be inputted thereinto and outputted therefrom. A sectional area of the beam 103 and a sectional area of the first support portion 104A are substantially equal in a section which is perpendicular to a longitudinal direction of the beam 103.

Abstract: A vibration power generator is provided that increases output power by improving the electrostatic capacitance when the area of the overlap between electret electrodes and counter electrodes is maximum while having the function of limiting the spread of the electric field from the electret electrodes.

Abstract: A vibration power generating device includes a first substrate and a second substrate, a first electrode formed on the first substrate, a fixed structural body, elastic structural bodies which connect the first substrate and the fixed structural body with each other, and a second electrode formed on the second substrate. Since the overlapping area of the electrodes is increased by arranging rectangular or square conductor parts of the first electrode and rectangular or square conductor parts of the second electrode in a checkerboard pattern, a generation region where power is generated by vibration is increased.

Abstract: There is provided a vibration power generator for converting vibration energy into electric power. The vibration power generator includes a fixed substrate, and a vibrator capable of vibrating with respect to the fixed substrate. Fixed electrode pieces are disposed on the fixed substrate, and electret electrode pieces opposed to the fixed electrode pieces are disposed on the vibrator. The vibration power generator is adapted to generate electricity, through changes in capacitances between the fixed electrode pieces and the electret electrode pieces, due to the vibration of the vibrator. The electret electrode pieces have opposite end portions in the vibration direction which have a higher average electric-charge density per unit area than that of middle portions, in the vibration direction, of the electret electrode pieces.

Abstract: A power generator includes a power generating device that generates a power by receiving vibration, and a power converter that converts the output of the power generating device. The power generating device outputs powers through a first system and a second system. The power converter is driven by receiving the output of the second system from the power generating device, and converts the output of the first system from the power generating device into another power.

Abstract: A vibration power generator 110 including a first fixed substrate 111L, a second fixed substrate 111U, a movable substrate 112 which is vibratory relative to the first and second fixed substrates, a plurality of first electrodes 119a formed over the second fixed substrate, a plurality of second electrodes 119b formed on the movable substrate and opposed to the first electrodes, wherein one of the first electrode 119a and the second electrode 119b includes a film holding a charge, is fixed to a rotating body such that the first fixed substrate 111L, the second fixed substrate 111U and the movable substrate 112 are perpendicular to a radial direction of the rotating body and the first fixed substrate is disposed nearer to a rotational axis side of the rotating body.

Abstract: A vibration power generator includes a first substrate, a first electrode disposed on a lower surface of the first substrate and including a film retaining electric charges, a second substrate opposing the lower surface of the first substrate, a second electrode disposed on an upper surface of the second substrate, a third electrode disposed on the upper surface of the first substrate and including a film retaining the electric charges, a third substrate opposing the upper surface of the first substrate, and a fourth electrode disposed on a lower surface of the third substrate and opposing the third electrode. The film of the first electrode has a polarity different from a polarity of the film of the third electrode, and the vibration power generator includes a restoring force generation member giving a restoring force when an external force is not exerted to the first substrate.

Abstract: A MEMS oscillator having a feedback-type oscillation circuit including a MEMS resonator and an amplifier, a voltage control unit operable to control a bias voltage applied to an oscillating member of the MEMS resonator, and an auto gain control unit which receives an output from the amplifier and, based on a level of the output, to output an amplitude control signal for controlling a gain of the amplifier to the amplifier such that the level of the output from the amplifier comes to be a predetermined level, wherein the voltage control unit controls the bias voltage applied to the oscillating member based on an operating temperature of the MEMS resonator such that a peak gain of the MEMS resonator comes to have a predetermined value regardless of the operating temperature, and the voltage control unit derives the operating temperature of the MEMS resonator by monitoring the amplitude control signal.