Patents by Inventor Mantu K. Hudait

Mantu K. Hudait has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20090057648
    Abstract: The present disclosure provides an apparatus and method for implementing a high hole mobility p-channel Germanium (“Ge”) transistor structure on a Silicon (“Si”) substrate. One exemplary apparatus may include a buffer layer including a GaAs nucleation layer, a first GaAs buffer layer, and a second GaAs buffer layer. The exemplary apparatus may further include a bottom barrier on the second GaAs buffer layer and having a band gap greater than 1.1 eV, a Ge active channel layer on the bottom barrier and having a valence band offset relative to the bottom barrier that is greater than 0.3 eV, and an AlAs top barrier on the Ge active channel layer wherein the AlAs top barrier has a band gap greater than 1.1 eV. Of course, many alternatives, variations and modifications are possible without departing from this embodiment.
    Type: Application
    Filed: August 30, 2007
    Publication date: March 5, 2009
    Applicant: INTEL CORPORATION
    Inventors: Mantu K. Hudait, Suman Datta, Jack T. Kavalieros, Peter G. Tolchinsky
  • Patent number: 7494911
    Abstract: Various embodiments proved a buffer layer that is grown over a silicon substrate that provides desirable isolation for devices formed relative to III-V material device layers, such as InSb-based devices, as well as bulk thin film grown on a silicon substrate. In addition, the buffer layer can mitigate parallel conduction issues between transistor devices and the silicon substrate. In addition, the buffer layer addresses and mitigates lattice mismatches between the film relative to which the transistor is formed and the silicon substrate.
    Type: Grant
    Filed: September 27, 2006
    Date of Patent: February 24, 2009
    Assignee: Intel Corporation
    Inventors: Mantu K. Hudait, Mohamad A. Shaheen, Loren A. Chow, Peter G. Tolchinsky, Joel M. Fastenau, Dmitri Loubychev, Amy W. K. Liu
  • Publication number: 20090001350
    Abstract: One embodiment of the invention includes a high hole mobility p-channel GaAsySb1-y quantum well with a silicon substrate and an InxAl1-xAs barrier layer.
    Type: Application
    Filed: June 28, 2007
    Publication date: January 1, 2009
    Inventors: Mantu K. Hudait, Suman Datta, Robert S. Chau, Marko Radosavljevic
  • Patent number: 7429747
    Abstract: A group III-V material CMOS device may have NMOS and PMOS portions that are substantially the same through several of their layers. This may make the CMOS device easy to make and prevent coefficient of thermal expansion mismatches between the NMOS and PMOS portions.
    Type: Grant
    Filed: November 16, 2006
    Date of Patent: September 30, 2008
    Assignee: Intel Corporation
    Inventors: Mantu K. Hudait, Suman Datta, Jack T. Kavalieros, Mark L. Doczy, Robert S. Chau
  • Publication number: 20080210927
    Abstract: In one embodiment, the present invention includes an apparatus for forming a transistor that includes a silicon (Si) substrate, a dislocation filtering buffer formed over the Si substrate having a first buffer layer including gallium arsenide (GaAs) nucleation and buffer layers and a second buffer layer including a graded indium aluminium arsenide (InAlAs) buffer layer, a lower barrier layer formed on the second buffer layer formed of InAlAs, and a strained quantum well (QW) layer formed on the lower barrier layer of indium gallium arsenide (InGaAs). Other embodiments are described and claimed.
    Type: Application
    Filed: March 1, 2007
    Publication date: September 4, 2008
    Inventors: Mantu K. Hudait, Dmitri Loubychev, Suman Datta, Robert Chau, Joel M. Fastenau, Amy W. K. Liu
  • Publication number: 20080203381
    Abstract: In one embodiment, the present invention includes a method for forming a logic device, including forming an n-type semiconductor device over a silicon (Si) substrate that includes an indium gallium arsenide (InGaAs)-based stack including a first buffer layer, a second buffer layer formed over the first buffer layer, a first device layer formed over the second buffer layer. Further, the method may include forming a p-type semiconductor device over the Si substrate from the InGaAs-based stack and forming an isolation between the n-type semiconductor device and the p-type semiconductor device. Other embodiments are described and claimed.
    Type: Application
    Filed: February 28, 2007
    Publication date: August 28, 2008
    Inventors: Mantu K. Hudait, Jack T. Kavalieros, Suman Datta, Marko Radosavljevic
  • Publication number: 20080157058
    Abstract: A device grade III-V quantum well structure and method of manufacture is described. Embodiments of the present invention enable III-V InSb quantum well device layers with defect densities below 1×108 cm?2 to be formed. In an embodiment of the present invention, a delta doped layer is disposed on a dopant segregation barrier in order to confine delta dopant within the delta doped layer and suppress delta dopant surface segregation.
    Type: Application
    Filed: December 29, 2006
    Publication date: July 3, 2008
    Inventors: Mantu K. Hudait, Aaron A. Budrevich, Dmitri Loubychev, Jack T. Kavalieros, Suman Datta, Joel M. Fastenau, Amy W. K. Liu
  • Publication number: 20080132081
    Abstract: A method of forming a thin III-V semiconductor film on a semiconductor substrate, where the lattice structure of the III-V film is different than the lattice structure of the substrate. The method includes epitaxially growing the III-V film on the substrate until the III-V film is greater than 3.0 ?m thick and then removing a portion of the III-V film until it is less than 3.0 ?m thick. In one implementation, the III-V film is grown until it is around 8.0 ?m to 10.0 ?m thick, and then it is etched or polished until its thickness is reduced to 0.1 ?m to 3.0 ?m thick. By over-growing the III-V film, effects such as dislocation gliding and annihilation reduce the dislocation density of the film, thereby improving its electric mobility.
    Type: Application
    Filed: December 4, 2006
    Publication date: June 5, 2008
    Inventors: Mohamad A. Shaheen, Mantu K. Hudait, Willy Rachmady, Jack T. Kavalieros, Chris E. Barns
  • Publication number: 20080116485
    Abstract: A group III-V material CMOS device may have NMOS and PMOS portions that are substantially the same through several of their layers. This may make the CMOS device easy to make and prevent coefficient of thermal expansion mismatches between the NMOS and PMOS portions.
    Type: Application
    Filed: November 16, 2006
    Publication date: May 22, 2008
    Inventors: Mantu K. Hudait, Suman Datta, Jack T. Kavalieros, Mark L. Doczy, Robert S. Chau
  • Publication number: 20080073639
    Abstract: A device grade III-V quantum well structure formed on a silicon substrate using a composite buffer architechture and the method of manufacture is described. Embodiments of the present invention enable III-V InSb quantum well device layers with defect densities below 1×108 cm?2 to be formed on silicon substrates. In an embodiment of the present invention, an InSb quantum well layer is sandwiched between two larger band gap barrier layers. In an embodiment of the present invention, InSb quantum well layer is strained. In a specific embodiment, the two larger band gap barrier layers are graded.
    Type: Application
    Filed: August 2, 2006
    Publication date: March 27, 2008
    Inventors: Mantu K. Hudait, Mohamad A. Shaheen, Loren A. Chow, Peter G. Tolchinsky, Dmitri Loubychev, Joel M. Fastenau, Amy W.K. Liu
  • Publication number: 20080076235
    Abstract: Various embodiments proved a buffer layer that is grown over a silicon substrate that provides desirable isolation for devices formed relative to III-V material device layers, such as InSb-based devices, as well as bulk thin film grown on a silicon substrate. In addition, the buffer layer can mitigate parallel conduction issues between transistor devices and the silicon substrate. In addition, the buffer layer addresses and mitigates lattice mismatches between the film relative to which the transistor is formed and the silicon substrate.
    Type: Application
    Filed: September 27, 2006
    Publication date: March 27, 2008
    Inventors: Mantu K. Hudait, Mohamad A. Shaheen, Loren A. Chow, Peter G. Tolchinsky, Joel M. Fastenau, Dmitri Loubychev, Amy W. K. Liu
  • Publication number: 20080029756
    Abstract: A composite buffer architecture for forming a III-V device layer on a silicon substrate and the method of manufacture is described. Embodiments of the present invention enable III-V InSb device layers with defect densities below 1×108 cm?2 to be formed on silicon substrates. In an embodiment of the present invention, a dual buffer layer is positioned between a III-V device layer and a silicon substrate to glide dislocations and provide electrical isolation. In an embodiment of the present invention, the material of each buffer layer is selected on the basis of lattice constant, band gap, and melting point to prevent many lattice defects from propagating out of the buffer into the III-V device layer. In a specific embodiment, a GaSb/AlSb buffer is utilized to form an InSb-based quantum well transistor on a silicon substrate.
    Type: Application
    Filed: August 2, 2006
    Publication date: February 7, 2008
    Inventors: Mantu K. Hudait, Mohamad A. Shaheen, Dmitri Loubychev, Amy W.K. Liu, Joel M. Fastenau
  • Publication number: 20080032478
    Abstract: A stacking fault and twin blocking barrier for forming a III-V device layer on a silicon substrate and the method of manufacture is described. Embodiments of the present invention enable III-V InSb device layers with defect densities below 1×108 cm?2 to be formed on silicon substrates. In an embodiment of the present invention, a buffer layer is positioned between a III-V device layer and a silicon substrate to glide dislocations. In an embodiment of the present invention, GaSb buffer layer is selected on the basis of lattice constant, band gap, and melting point to prevent many lattice defects from propagating out of the buffer into the III-V device layer. In a specific embodiment, a III-V InSb device layer is formed directly on the GaSb buffer.
    Type: Application
    Filed: August 2, 2006
    Publication date: February 7, 2008
    Inventors: Mantu K. Hudait, Mohamad A. Shaheen, Loren A. Chow, Peter G. Tolchinsky, Joel M. Fastenau, Dmitri Loubychev, Amy W.K. Liu