Patents by Inventor Mark S. Rodder

Mark S. Rodder has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 11983622
    Abstract: A neuromorphic device for the analog computation of a linear combination of input signals, for use, for example, in an artificial neuron. The neuromorphic device provides non-volatile programming of the weights, and fast evaluation and programming, and is suitable for fabrication at high density as part of a plurality of neuromorphic devices. The neuromorphic device is implemented as a vertical stack of flash-like cells with a common control gate contact and individually contacted source-drain (SD) regions. The vertical stacking of the cells enables efficient use of layout resources.
    Type: Grant
    Filed: February 17, 2023
    Date of Patent: May 14, 2024
    Assignee: Samsung Electronics Co., Ltd.
    Inventors: Borna J. Obradovic, Titash Rakshit, Mark S. Rodder
  • Publication number: 20230361194
    Abstract: A field-effect transistor (FET) device having a modulated threshold voltage (Vt) includes a source electrode, a drain electrode, a channel region extending between the source electrode and the drain electrode, and a gate stack on the channel region. The gate stack includes an ultrathin dielectric dipole layer configured to shift the modulated Vt in a first direction, a high-k (HK) insulating layer on the ultrathin dielectric dipole layer, and a gate metal layer on the HK insulating layer configured to shift the modulated Vt in a second direction.
    Type: Application
    Filed: July 21, 2023
    Publication date: November 9, 2023
    Inventors: Wei-E Wang, Mark S. Rodder
  • Patent number: 11749739
    Abstract: A field-effect transistor (FET) device having a modulated threshold voltage (Vt) includes a source electrode, a drain electrode, a channel region extending between the source electrode and the drain electrode, and a gate stack on the channel region. The gate stack includes an ultrathin dielectric dipole layer on the channel region configured to shift the modulated Vt in a first direction, a high-k (HK) insulating layer on the ultrathin dielectric dipole layer, and a doped gate metal layer on the HK insulating layer configured to shift the modulated Vt in a second direction.
    Type: Grant
    Filed: August 6, 2021
    Date of Patent: September 5, 2023
    Assignee: Samsung Electronics Co., Ltd.
    Inventors: Wei-E Wang, Mark S. Rodder
  • Patent number: 11727258
    Abstract: A neuromorphic multi-bit digital weight cell configured to store a series of potential weights for a neuron in an artificial neural network. The neuromorphic multi-bit digital weight cell includes a parallel cell including a series of passive resistors in parallel and a series of gating transistors. Each gating transistor of the series of gating transistors is in series with one passive resistor of the series of passive resistors. The neuromorphic cell also includes a series of programming input lines connected to the series of gating transistors, an input terminal connected to the parallel cell, and an output terminal connected to the parallel cell.
    Type: Grant
    Filed: September 7, 2022
    Date of Patent: August 15, 2023
    Assignee: Samsung Electronics Co., Ltd.
    Inventors: Borna J. Obradovic, Titash Rakshit, Rwik Sengupta, Joon Goo Hong, Ryan M. Hatcher, Jorge A. Kittl, Mark S. Rodder
  • Publication number: 20230206053
    Abstract: A neuromorphic device for the analog computation of a linear combination of input signals, for use, for example, in an artificial neuron. The neuromorphic device provides non-volatile programming of the weights, and fast evaluation and programming, and is suitable for fabrication at high density as part of a plurality of neuromorphic devices. The neuromorphic device is implemented as a vertical stack of flash-like cells with a common control gate contact and individually contacted source-drain (SD) regions. The vertical stacking of the cells enables efficient use of layout resources.
    Type: Application
    Filed: February 17, 2023
    Publication date: June 29, 2023
    Inventors: Borna J. Obradovic, Titash Rakshit, Mark S. Rodder
  • Publication number: 20230104185
    Abstract: A semiconductor cell block includes a series of layers arranged in a stack. The layers include one or more first layers each having a first height and one or more second layers each having a second height. The second height is larger than the first height, and the second height is a non-integer multiple of the first height. The semiconductor cell block also includes a first semiconductor logic cell having a first cell height in one of the series of layers, and a second semiconductor logic cell having a second cell height in one of the series of layers. The second cell height is larger than the first cell height, and the second cell height is a non-integer value multiple of the first cell height.
    Type: Application
    Filed: October 20, 2022
    Publication date: April 6, 2023
    Inventors: Vassilios Gerousis, Rwik Sengupta, Joon Goo Hong, Kevin Traynor, Tanya Abaya, Dharmendar Palle, Mark S. Rodder
  • Patent number: 11605574
    Abstract: A monolithic three-dimensional integrated circuit including a first device, a second device on the first device, and a thermal shield stack between the first device and the second device. The thermal shield stack includes a thermal retarder portion having a low thermal conductivity in a vertical direction, and a thermal spreader portion having a high thermal conductivity in a horizontal direction. The thermal shield stack of the monolithic three-dimensional integrated circuit includes only dielectric materials.
    Type: Grant
    Filed: March 2, 2021
    Date of Patent: March 14, 2023
    Assignee: Samsung Electronics Co., Ltd.
    Inventors: Wei-E Wang, Mark S. Rodder, Vassilios Gerousis
  • Patent number: 11586901
    Abstract: A neuromorphic device for the analog computation of a linear combination of input signals, for use, for example, in an artificial neuron. The neuromorphic device provides non-volatile programming of the weights, and fast evaluation and programming, and is suitable for fabrication at high density as part of a plurality of neuromorphic devices. The neuromorphic device is implemented as a vertical stack of flash-like cells with a common control gate contact and individually contacted source-drain (SD) regions. The vertical stacking of the cells enables efficient use of layout resources.
    Type: Grant
    Filed: November 10, 2020
    Date of Patent: February 21, 2023
    Assignee: Samsung Electronics Co., Ltd.
    Inventors: Borna J. Obradovic, Titash Rakshit, Mark S. Rodder
  • Patent number: 11552067
    Abstract: A semiconductor cell block includes a series of layers arranged in a stack. The layers include one or more first layers each having a first height and one or more second layers each having a second height. The second height is larger than the first height, and the second height is a non-integer multiple of the first height. The semiconductor cell block also includes a first semiconductor logic cell having a first cell height in one of the series of layers, and a second semiconductor logic cell having a second cell height in one of the series of layers. The second cell height is larger than the first cell height, and the second cell height is a non-integer value multiple of the first cell height.
    Type: Grant
    Filed: April 20, 2020
    Date of Patent: January 10, 2023
    Assignee: Samsung Electronics Co., Ltd.
    Inventors: Vassilios Gerousis, Rwik Sengupta, Joon Goo Hong, Kevin Traynor, Tanya Abaya, Dharmendar Palle, Mark S. Rodder
  • Publication number: 20230004789
    Abstract: A neuromorphic multi-bit digital weight cell configured to store a series of potential weights for a neuron in an artificial neural network. The neuromorphic multi-bit digital weight cell includes a parallel cell including a series of passive resistors in parallel and a series of gating transistors. Each gating transistor of the series of gating transistors is in series with one passive resistor of the series of passive resistors. The neuromorphic cell also includes a series of programming input lines connected to the series of gating transistors, an input terminal connected to the parallel cell, and an output terminal connected to the parallel cell.
    Type: Application
    Filed: September 7, 2022
    Publication date: January 5, 2023
    Inventors: Borna J. Obradovic, Titash Rakshit, Rwik Sengupta, Joon Goo Hong, Ryan M. Hatcher, Jorge A. Kittl, Mark S. Rodder
  • Patent number: 11476121
    Abstract: A method provides a gate structure for a plurality of components of a semiconductor device. A silicate layer is provided. In one aspect, the silicate layer is provided on a channel of a CMOS device. A high dielectric constant layer is provided on the silicate layer. The method also includes providing a work function metal layer on the high dielectric constant layer. A low temperature anneal is performed after the high dielectric constant layer is provided. A contact metal layer is provided on the work function metal layer.
    Type: Grant
    Filed: August 26, 2019
    Date of Patent: October 18, 2022
    Assignee: Samsung Electronics Co., Ltd.
    Inventors: Wei-E Wang, Mark S. Rodder, Borna J. Obradovic
  • Patent number: 11461620
    Abstract: A neuromorphic multi-bit digital weight cell configured to store a series of potential weights for a neuron in an artificial neural network. The neuromorphic multi-bit digital weight cell includes a parallel cell including a series of passive resistors in parallel and a series of gating transistors. Each gating transistor of the series of gating transistors is in series with one passive resistor of the series of passive resistors. The neuromorphic cell also includes a series of programming input lines connected to the series of gating transistors, an input terminal connected to the parallel cell, and an output terminal connected to the parallel cell.
    Type: Grant
    Filed: November 7, 2017
    Date of Patent: October 4, 2022
    Assignee: Samsung Electronics Co., Ltd.
    Inventors: Borna J. Obradovic, Titash Rakshit, Rwik Sengupta, Joon Goo Hong, Ryan M. Hatcher, Jorge A. Kittl, Mark S. Rodder
  • Patent number: 11404405
    Abstract: A semiconductor device includes a series of metal routing layers and a complementary pair of planar field-effect transistors (FETs) on an upper metal routing layer of the metal routing layers. The upper metal routing layer is M3 or higher. Each of the FETs includes a channel region of a crystalline material. The crystalline material may include polycrystalline silicon. The upper metal routing layer M3 or higher may include cobalt.
    Type: Grant
    Filed: August 19, 2020
    Date of Patent: August 2, 2022
    Assignee: Samsung Electronics Co., Ltd.
    Inventors: Wei-E Wang, Titash Rakshit, Borna J. Obradovic, Chris Bowen, Mark S. Rodder
  • Publication number: 20220139835
    Abstract: A method of manufacturing an integrated circuit having buried power rails includes forming a first dielectric layer on an upper surface of a first semiconductor substrate, forming a series of power rail trenches in an upper surface of the first dielectric layer, forming the buried power rails in the series of power rail trenches, forming a second dielectric layer on the upper surface of the first dielectric layer and upper surfaces of the buried power rails, forming a third dielectric layer on a donor wafer, bonding the third dielectric layer to the second dielectric layer, and forming a series of semiconductor devices, vias, and metal interconnects on or in the donor wafer. The buried power rails are encapsulated by the first dielectric layer and the second dielectric layer, and the buried power rails are below the plurality of semiconductor devices.
    Type: Application
    Filed: January 12, 2022
    Publication date: May 5, 2022
    Inventors: Joon Goo Hong, Kang-ill Seo, Mark S. Rodder
  • Patent number: 11290110
    Abstract: A hardware cell and method for performing a digital XNOR of an input signal and weights are described. The hardware cell includes input lines, a plurality of pairs of magnetic junctions, output transistors and at least one selection transistor coupled with the output transistors. The input lines receive the input signal and its complement. The magnetic junctions store the weight. Each magnetic junction includes a reference layer, a free layer and a nonmagnetic spacer layer between the reference layer and the free layer. The free layer has stable magnetic states and is programmable using spin-transfer torque and/or spin-orbit interaction torque. The first magnetic junction of a pair receives the input signal. The second magnetic junction of the pair receives the input signal complement. The output transistors are coupled with the magnetic junctions such that each pair of magnetic junctions forms a voltage divider. The output transistors form a sense amplifier.
    Type: Grant
    Filed: February 1, 2018
    Date of Patent: March 29, 2022
    Assignee: Samsung Electronics Co., Ltd.
    Inventors: Borna J. Obradovic, Titash Rakshit, Ryan M. Hatcher, Jorge A. Kittl, Mark S. Rodder
  • Patent number: 11233008
    Abstract: A method of manufacturing an integrated circuit having buried power rails includes forming a first dielectric layer on an upper surface of a first semiconductor substrate, forming a series of power rail trenches in an upper surface of the first dielectric layer, forming the buried power rails in the series of power rail trenches, forming a second dielectric layer on the upper surface of the first dielectric layer and upper surfaces of the buried power rails, forming a third dielectric layer on a donor wafer, bonding the third dielectric layer to the second dielectric layer, and forming a series of semiconductor devices, vias, and metal interconnects on or in the donor wafer. The buried power rails are encapsulated by the first dielectric layer and the second dielectric layer, and the buried power rails are below the plurality of semiconductor devices.
    Type: Grant
    Filed: September 5, 2019
    Date of Patent: January 25, 2022
    Assignee: Samsung Electronics Co., Ltd.
    Inventors: Joon Goo Hong, Kang-ill Seo, Mark S. Rodder
  • Publication number: 20210376109
    Abstract: A field-effect transistor (FET) device having a modulated threshold voltage (Vt) includes a source electrode, a drain electrode, a channel region extending between the source electrode and the drain electrode, and a gate stack on the channel region. The gate stack includes an ultrathin dielectric dipole layer on the channel region configured to shift the modulated Vt in a first direction, a high-k (HK) insulating layer on the ultrathin dielectric dipole layer, and a doped gate metal layer on the HK insulating layer configured to shift the modulated Vt in a second direction.
    Type: Application
    Filed: August 6, 2021
    Publication date: December 2, 2021
    Inventors: Wei-E Wang, Mark S. Rodder
  • Patent number: 11189600
    Abstract: A method of manufacturing a three-dimensional semiconductor device includes forming a bi-layer sacrificial stack on a top wafer and a bottom wafer each including a series of interconnects in a dielectric substrate. The bi-layer sacrificial stack includes a second sacrificial layer on a first sacrificial layer. The method also includes selectively etching the second sacrificial layers to form a first pattern of projections on the top wafer and a second pattern of projections on the bottom wafer. The first pattern of projections is configured to mesh with the second pattern of projections. The method also includes positioning the top wafer on the bottom wafer and releasing the top wafer such that engagement between the first pattern of projections and the second pattern of projections self-aligns the plurality of interconnects of the top wafer with the plurality of interconnects of the bottom wafer within a misalignment error.
    Type: Grant
    Filed: April 28, 2020
    Date of Patent: November 30, 2021
    Assignee: Samsung Electronics Co., Ltd.
    Inventors: Wei-E Wang, Mark S. Rodder, Vassilios Gerousis
  • Publication number: 20210265334
    Abstract: A semiconductor cell block includes a series of layers arranged in a stack. The layers include one or more first layers each having a first height and one or more second layers each having a second height. The second height is larger than the first height, and the second height is a non-integer multiple of the first height. The semiconductor cell block also includes a first semiconductor logic cell having a first cell height in one of the series of layers, and a second semiconductor logic cell having a second cell height in one of the series of layers. The second cell height is larger than the first cell height, and the second cell height is a non-integer value multiple of the first cell height.
    Type: Application
    Filed: April 20, 2020
    Publication date: August 26, 2021
    Inventors: Vassilios Gerousis, Rwik Sengupta, Joon Goo Hong, Kevin Traynor, Tanya Abaya, Dharmendar Palle, Mark S. Rodder
  • Patent number: 11088258
    Abstract: A field-effect transistor (FET) device having a modulated threshold voltage (Vt) includes a source electrode, a drain electrode, a channel region extending between the source electrode and the drain electrode, and a gate stack on the channel region. The gate stack includes an ultrathin dielectric dipole layer on the channel region configured to shift the modulated Vt in a first direction, a high-k (HK) insulating layer on the ultrathin dielectric dipole layer, and a doped gate metal layer on the HK insulating layer configured to shift the modulated Vt in a second direction.
    Type: Grant
    Filed: February 26, 2020
    Date of Patent: August 10, 2021
    Assignee: Samsung Electronics Co., Ltd.
    Inventors: Wei-E Wang, Mark S. Rodder