Abstract: A plasma system which eliminates damage derived from charged particles in the plasma and which is able to perform uniform plasma CVD and plasma etching on a large area substrate, wherein a mesh plate having a plurality of holes is placed at the interface of a plasma generation chamber and a substrate treatment chamber which holds a substrate, a high frequency electrical field being applied between an upper electrode in the plasma generation chamber and the mesh plate so as to disassociate the plasma forming gas by electrodischarge so as to cause the generation of plasma. By this, the plasma is isolated from the substrate. On the other hand, source gas supply ports are opened near the holes of the mesh plate, the source gas being introduced from there being brought into contact with the plasma through the holes, whereby the reaction product can be uniformly produced in a broad area.

Abstract: A method of crystallizing a semiconductor thin film moves a laser beam emitted by a pulse laser in a first direction to irradiate the semiconductor tin film with the laser beam for scanning. The laser beam is split into a plurality of secondary laser beams of a width smaller than the pitch of step feed, respectively having different energy densities forming a stepped energy density distribution decreasing from the middle toward the opposite ends thereof with respect to the direction of step feed. The energy density of the first secondary laser beam corresponding to the middle of the energy distribution is higher than a threshold energy density, i.e., the minimum energy density that will melt the semiconductor thin film to make the same amorphous, and lower than a roughening energy density, i.e.

Abstract: Disclosed is a communication system which accommodates at least one central office network line and a plurality of extensions, and which is adapted to control line connection between the central office network line and the plurality of extensions. When a call from the central office network line is detected, it is determined in response to the call whether a control signal characteristic of data communication, such as a CST signal, is being sent by the other party's device. If such a control signal is being sent, a line to which a data processor is connected is selected and connected to the calling line. This makes it possible to connect an information processor and a telephone to a common central office network line, and to connect a call answered by another telephone to a desired information processor rapidly through a simple operation. Accordingly, it is unnecessary to assign a special-purpose central office network line to an information processor.